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不同金属基材上类金刚石薄膜的摩擦特性 总被引:2,自引:1,他引:1
针对类金刚石(DLC)薄膜在精密机械零件中的应用,研究了在常温条件下沉积高界面强度的DLC薄膜的技术,以提高DLC薄膜与金属基材之间的结合强度.通过在基材与薄膜之间沉积加入a-Si:H中间过渡层,研究了在不同金属基材上DLC薄膜的结合强度.采用Ball-on-Disk方法评价了薄膜的摩擦特性并测定其摩擦系数、疲劳破坏寿命和磨耗.实验结果表明:在薄膜与金属基材之间加入a-Si:H过渡层后,界面的结合(键合)强度得到了明显的改善,在金属基材上沉积的DLC薄膜在磨耗过程中被完全磨穿而没有发生剥离.实验显示,在自制的化学气相沉积RF-DCCVD装置上沉积的DLC薄膜的最大沉积厚度是3.3μm;在1μm厚度的薄膜上施加2.94 N的负荷(点载荷),其疲劳破坏寿命达到了70万循环;DLC薄膜与SiC,Si3N4,SUS304和SUJ2材料之间的摩擦系数为0.1~0.15.得到的结果验证了薄膜与金属间的结合强度和摩擦特性能够满足精密机械零件的使用要求. 相似文献
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利用摩擦力显微镜(FFM),对由等离子体增强化学气相法沉积的类金刚石(DLC)薄膜的纳米摩擦性能进行了试验研究。用原子力显微镜(AFM)观察了DLC薄膜样品的表面形貌,同时测定了其粘附力值。从外加载荷、扫描速度和湿度的角度分析了薄膜的摩擦特性。 相似文献
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利用脉冲真空弧源沉积技术在Cr17Ni14Cu4不锈钢和Si(100)基体上制备了类金刚石(DLC)薄膜,研究了基体沉积温度对DLC薄膜的性能和结构的影响。研究表明,随着沉积温度由100 ℃提高到400 ℃,DLC薄膜中sp3 键质量分数减少,sp2键质量分数增多,薄膜复合硬度逐渐降低。当DLC薄膜沉积温度达到400 ℃时,薄膜中C原子主要以sp2键形式存在,与沉积温度为100 ℃时制备的DLC薄膜相比,薄膜复合硬度降低50%。DLC薄膜具有优异的耐磨性,摩擦因数低,随着沉积温度由100 ℃提高到400 ℃,Cr17Ni14Cu4不锈钢表面沉积的DLC薄膜耐磨性降低。沉积温度为100 ℃时,Cr17Ni14Cu4不锈钢表面沉积的DLC薄膜后,耐磨性大幅度提高。DLC薄膜与不锈钢基体结合牢固。 相似文献
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脉冲偏压对PECVD制备DLC薄膜的结构及性能的影响 总被引:1,自引:0,他引:1
在不锈钢基材表面利用等离子体增强化学气相沉积技术(PECVD)改变脉冲偏压制备不同结构类金刚石薄膜(DLC)。分别采用表面轮廓仪、扫描电镜、拉曼光谱及电子探针分析薄膜的表面粗糙度、断面形貌、薄膜结构及成分,采用纳米压痕仪及划痕仪测试薄膜的纳米硬度、弹性模量和膜基结合力,采用球盘摩擦试验机测试薄膜在大气环境中的摩擦学性能。结果表明:脉冲偏压显著影响PECVD制备的DLC薄膜的表面粗糙度、微观形貌、膜基结合力、纳米硬度及摩擦学性能;随偏压的增大,DLC薄膜的表面粗糙度,摩擦因数及磨损量都先减小后增大,而膜基结合力则先增大后减小。其中2.0 k V偏压制备的DLC薄膜具有最强的膜基结合力,而1.6 k V偏压制备的DLC薄膜具有最低的表面粗糙度、最高的硬度和最优的减摩耐磨性能。 相似文献
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采用液相电化学沉积方法,以乙醇为碳源,并加入含有KCl的去离子水溶液,在较低电压下(60V以下),在铜基底上沉积出类金刚石(DLC)薄膜.用SEM表征薄膜表面形貌,用Raman光谱表征薄膜成份结构.结盟表明,少量KCI的加入,能够大幅降低沉积电压并提高DLC的沉积速率;沉积出的类金刚石膜均为连续,有较低的表面粗糙度;SP3碳键含量较高(约为30%). 相似文献
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Cr-doped and non-doped diamond-like carbon (DLC) films were deposited on a Ti–6Al–4V alloy substrate using an unbalanced magnetron sputtering (UBMS). Fretting wear behavior of the specimens was investigated using a ball-on-disk fretting tester. The fracture phenomenon of the DLC films was determined as the number of fretting cycles to reach a high value of the friction coefficient. The results showed that the Cr-doped and non-doped DLC films exhibited a lower friction coefficient and wear rate compared to that of the uncoated specimen. However, the Cr-doped DLC film fractured only in a few cycles, while the non-doped DLC film fractured after fretting cycles of about 200,000. A fracture mechanism of the Cr-doped and non-doped DLC films was reported in this study. 相似文献
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类金刚石薄膜微观摩擦性能的FFM评价——针尖尺度效应 总被引:2,自引:0,他引:2
采用等离子体增强气相沉积制备了类金刚石薄膜,利用原子力显微镜的轻敲模式观察了它们的形貌,并在考虑外加载荷和扫描速度的基础上,用摩擦力显微镜(FFM)对比考察了尖端探针和平头探针对类金刚石薄膜摩擦性能评价的影响。结果表明:类金刚石薄膜的表面粗糙度随基底负偏压的增加而减小;存在于探针和类金刚石薄膜之间的水膜对尖端探针的剪切阻力贡献较大,且尖端探针测得的摩擦力变化趋势受扫描速度影响显著;水膜对平头探针起着不同形式的润滑作用,从而导致平头探针和类金刚石薄膜之间摩擦性能的速度效应存在差异;利用摩擦力显微镜考察类金刚石薄膜的摩擦性能时,存在着明显的针尖尺寸效应。 相似文献
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Motoo Fukuda Hedong Zhang Takahiro Ishiguro Kenji Fukuzawa Shintaro Itoh 《Tribology Letters》2013,51(3):479-487
Lubrication with thin liquid films is essential to ensure the tribological reliability of technologically advanced devices, such as micro-electro-mechanical systems and hard disk drives. However, the adhesion and friction properties of thin films and the underlying mechanism remain elusive due to our limited understanding of film structures and motions at the molecular scale. Here, we investigate the adhesion behavior of nanometer-thick perfluoropolyether (PFPE) films confined between two solid surfaces as a function of film thickness using coarse-grained molecular dynamics simulations. Consistent with typical experimental results, our simulations show that the adhesive force exerted by the PFPE films reaches a maximum and then decreases with increasing solid–solid spacing. The maximum adhesive force increases sharply for PFPE films thinner than 4 nm. When exhibiting the maximum adhesive force, PFPE films are slightly stretched within a solid–solid spacing a little larger than the initial film thickness and thereby show lower density than the original equilibrium density. Conventional theories of adhesion, which assume equilibrium density for liquid films, are not applicable in such case. Therefore, we construct a theoretical model that takes decreasing liquid density into account to discuss the underlying mechanism of the adhesive force exerted by nanometer-thick PFPE films on solid surfaces. We infer from the theoretical analyses that the maximum adhesive force originates mainly from solid–liquid interaction for thin films and liquid–liquid interaction for thick films. 相似文献
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This article presents the results of nanoscale friction and adhesion of nanoparticle-textured surfaces (NPTS) using atomic
force microscope (AFM). The effects of coverage ratio, texture height, and packing density on the adhesion and friction of
the NPTS were investigated. The nano-textured surfaces were produced by self-assembling Au nanoparticles (NPs) with diameters
of 20 nm and 50 nm on the silicon (100) surfaces, respectively. Surface morphology of the NPTS was characterized by field
emission scanning electron microscopy and AFM. The results show that the NPTS significantly reduced the adhesive force compared
to the smooth surface. The adhesion of NPTS is mainly dependent on the coverage ratio of NPs rather than the texture height
and higher coverage ratio resulted in smaller adhesive force. The reduced adhesion of textured surfaces was attributed to
the reduced real area of contact. The friction of NPTS is mainly dependent on the spacing between asperities. The lowered
frictional force was obtained when the spacing between asperities is less than the size of AFM tip, because of the effectively
reduced real area of contact between the AFM tip and the NPTS surface. 相似文献
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TiNi表面磁控溅射DLC薄膜的纳米压痕与摩擦性能 总被引:1,自引:0,他引:1
采用室温磁控溅射技术在TiNi合金表面制备出DLC/SiC(类金刚石/碳化硅)双层薄膜(SiC为中间层),采用拉曼光谱仪、纳米压痕仪和球-盘式摩擦磨损仪研究DLC薄膜的结构、纳米压痕和摩擦性能.结果表明:制备的DLC/SiC薄膜石墨含量高、纳米硬度(5.493 GPa)低、弹性模量(62.2447 GPa)低.在以氮化硅球(半径为2mm)为对摩件,4.9N载荷、室温、Kokubo人体模拟体液润滑下,该DLC/SiC薄膜具有低且稳定的摩擦因数,其平均值约为0.094. 相似文献
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Effect of Water Adsorption on Microtribological Properties of Hydrogenated Diamond-Like Carbon Films 总被引:1,自引:0,他引:1
Tagawa Masahito Ikemura Masashi Nakayama Yoshihito Ohmae Nobuo 《Tribology Letters》2004,17(3):575-580
Microtribological properties of diamond-like carbon (DLC) films in the presence of water molecule have been studied. The amount of water adsorbed on DLC films was measured by the quartz crystal microbalance (QCM), while microtribological properties of the film were evaluated by an environment-controlled microtribometer. The hydrogenated-DLC showed an advancing water contact angle of 97°, indicating a relatively hydrophobic surface. No hysteresis in adsorption and desorption isotherms were observed. This suggests an absence of micropores at the DLC surface. The greatest adhesion and friction forces between a W-tip and DLC films deposited onto QCM were observed at a water coverage of 2-3 monolayers, which corresponds to a relative humidity of 70-80%. This abrupt increase in adhesion was explained by the generation of a meniscus from the condensed water between tip and DLC surface. The atomically flat DLC surface showed maximum adhesion and friction forces at lower humidity than those of DLC on OCM, implying the importance of surface texturing, which reduces the effect of water condensation. 相似文献