A new type of demountable optical device for coupling single-mode planar waveguides to a multifiber array using passive alignment

A novel demountable optical device is developed for coupling single-mode waveguides to a multifiber array using passive alignment. This device is fabricated by forming V-grooves on a waveguide chip and precisely molding both end portions of the chip. The 1/spl times/8 coupling device exhibits a low insertion loss of 10.7 dB and a small loss change of /spl plusmn/0.2 dB for 100 reconnections.     

ARROW-B type polarization splitter with asymmetric Y-branchfabricated by a self-alignment process

We have proposed and demonstrated a polarization splitter based on an ARROW-B type waveguide. This device has an asymmetric Y-branch configuration, connecting a waveguide with a large modal birefringence to a low-birefringent waveguide which is channeled by a stripe lateral confinement structure. The device can achieve a high extinction ratio without precise mask alignment, since these two waveguides are connected by a self-alignment process. In addition, a low insertion loss is achieved because of adiabatic Y-branching. We designed this device at the wavelength of 1.55 μm and fabricated it using RF sputtering. As a result, high extinction ratios of -19.4 dB for TE mode and -19.0 dB for TM mode were achieved     

Compact Design of an Electrically Tunable and Rotatable Polarizer Based on a Liquid Crystal Photonic Bandgap Fiber

In this letter, a compact electrically controlled broadband liquid crystal (LC) photonic bandgap fiber polarizer is designed and fabricated. A good fiber coupling quality between two single-mode fibers and one 10-mm-long LC-filled photonic crystal fiber is obtained and protected by using SU-8 fiber fixing structures during the device assembly. The total insertion loss of this all-in-fiber device is 2.7 dB. An electrically tunable polarization extinction ratio of 21.3 dB is achieved with 45deg rotatable transmission axis as well as switched on and off in the wavelength range of 1300-1600 nm.     

An all-optical switch employing the cascaded second-order nonlineareffect

A new, ultrafast, low loss, all-optical switch based on the cascaded second-order nonlinearity is proposed. The device is based on an integrated Mach-Zehnder interferometer where quasi-phase matching produces a nonlinear phase shift with a different sign in each arm of the interferometer. A full treatment of the nonlinear phase shift indicates that the proposed device, if fabricated in AlGaAs, could switch with powers around 1.3 W in a length of approximately 1 cm     

脉冲激光测距机靶标调向光轴平行性检测方法研究

提出一种基于靶标调向装置的脉冲激光测距机光轴平行性检测方法。靶标十字分划中心分别与脉冲激光测距机白光瞄准光轴十字分划中心和激光发射光轴光斑中心对准,通过读取码盘数据计算光轴平行性误差。该方法操作简单,能够实时定量地检测光轴平行性误差,有效地提升了检测精度,实现了光轴平行性检测的数字化、自动化。     

Narrow-channel-spacing 32-channel AWG multiplexer with an innovative alignment method

A 32-channel 50 GHz spaced arrayed-waveguide grating（AWG） with our innovative configuration has been designed and fabricated. The performance of the device has been fully tested by using a system that consists of a tunable laser light source （TLS）, an optical power meter and a polarization controller. The insertion loss （IS） of the device is 4.2-7.4 dB. The crosstalk is about - 28 dB. The IS uniformity is less than 3.3 dB. With our configuration,the performance of the device has been enhanced effectively and the difficulty in alignment process has been decreased obviously.     

Loss factors analysis for single-mode fiber splicing without careaxis alignment

Splice loss factors of single-mode fiber splicing lacking core axis alignment were analyzed quantitatively. The optimum splice conditions were also investigated in detail. It was seen that the dominant splice signal-loss factors are core deformation caused by fiber axis discrepancy and core axis misalignment caused by core eccentricity. To suppress average splice loss to less than 0.1 dB, average core eccentricity suppression to less than 0.35 μm is necessary. A novel method for setting fiber endface gaps accurately and quickly is proposed that helps to realize the optimum condition. This method is based on fiber endface image detection using photodiodes, and it has a quick setting time of 5 s and a high accuracy with a setting error of 0.5 μm. A fusion splice machine manufactured based on the present endface setting method was developed and evaluated. As a result, an average splice loss of 0.012 dB was successfully achieved     

On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays

A novel technique for aligning a microlens array to an electrically packaged optoelectronic device array is presented: reflective Fresnel zone plates (FZP's) are fabricated on the device die to provide registration spots during alignment. A proof-of-concept experiment in which an MSM array was aligned to a microlens array with an accuracy of better than 9 microns is described.     

双面PSD器件的工艺研究

双面PSD器件具有很高的灵敏度、良好的瞬态响应特性、紧密的结构以及简单的处理电路等优点。介绍了PSD器件的制作技术。重点介绍了利用微细加工技术进行双面两侧分流电极型PSD的制作,解决了双面对准光刻技术的工艺难题,为双面高精度PSD器件的制作提供了一条工艺技术途径。     

1.55-μm InGaAsP-InP spot-size-converted (SSC) laser with simpletechnological process

In this letter, we report the realization of a 1.55-μm spot-size-converted (SSC) laser using conventional SCH-MQW active layers and conventional photolithography. The laser consists of a 300-μm-long rectangular gain section, with compensated multiple-quantum-well (MQW) structure, and a 300-μm-long tapered passive waveguide, fabricated on lower SCH layer. The device exhibits a beam divergence of 13°×18° and 3.5-dB coupling loss with a cleaved single-mode fiber (SMF). The 1-dB alignment tolerance is ±2.3 μm in the vertical direction and ±1.9 μm in the lateral direction, respectively     

Dynamic alignment of small optical components

A new technique for automatic alignment of Small optical components is presented. It involves vibrating one of the components, and analyzing the resulting fluctuations in the coupled light to steer the components into alignment using a negative feedback network. A feedback approach enables the use of compact, inexpensive transducers, and electronics. Automatic aligners fabricated in the lab have demonstrated simultaneous dual axis alignment, have achieved optimum alignment in times as short as 2 ms, and have been able to operate on as little as -80 dBm of peak coupled power.     

A Two-Wafer Approach for Integration of Optical MEMS and Photonics on Silicon Substrate

This letter reports a novel two-wafer approach which demonstrates an integration of optical microelectromechanical system (MEMS) devices and photonics on a silicon substrate. The great advantage of this novel wafer bonding scheme is the ability to maintain the optical axis of the optical MEMS device at the same axis as the optical components. The bonded two wafers which are partially processed, which allows for further processing on the wafer after bonding. Thus, the critical alignment issue is resolved for devices requiring precise alignment in x-/y-/z-axis. Individual functionalities of optical MEMS device and optical coupling between silicon waveguide, fibers and ball lens are demonstrated. This technology shows the potential for integrating silicon photonics integrated circuit and MEMS components with reconfiguration functions on a single silicon substrate.      

Passive mode converter with a periodically tilted InP/GaInAsP ribwaveguide

TE to TM converters with constant 45° operation are a key component in OEICs for coherent optical system applications. A passive TE/TM-mode converter with a laterally tilted rib waveguide fabricated on a stepped substrate is proposed and investigated. The conversion effect has been simulated using scalar and vectorial two-dimensional finite difference methods. The device fabricated on (001)-InP/GaInAsP yields 45° conversion with two subsequent elements of half the TE/TM-beatlength at an excess loss of 3 dB     

A novel optical accelerometer

A novel accelerometer based on a PIN photo-detector and a micro-machined cantilever-beam-supported optical shutter with seismic mass has been designed, fabricated, and tested. Anisotropic wet etching of 〈110〉 orientation silicon in KOH is used to fabricate an optical shutter consisting of evenly spaced vertically etched slots. The shutter, which also constitutes the seismic mass of the accelerometer, is suspended by two cantilever beams. The special structure of the device and the high aspect ratio of the cantilever beams (7.5) permit freedom of the movement for the proof mass (the shutter) on the ±X axis only. The actual size of the device is 3×4 mm and its amplified output varies linearly from -3.6 V to +3.6 V for accelerations from -84 g to +84 g. The measured resonant frequency of the device is 3.2 KHz. A dual diode structure is chosen for the photo-detector to compensate for temperature drift and the amplified output voltage changes by less than 40 mV for a temperature variation from 25°C to 50°C     

液相检测的Love波传感器的制作与研究

在分析Love波传感器液相质量检测机理的基础上,设计并制作了以36°YXLiTaO3为基底,交联处理的聚甲基丙烯酸甲酯(PMMA)为波导层的Love波器件。器件的中心频率为118 MHz,插损为-16 dB。通过建立电镀实验模型,实时的检测了在液相中吸附于阴极薄膜上铜的质量,并测试到传感器的灵敏度为-0.387 cm2/g。分析了灵敏度实验值与理论值的差别,进一步提出了改进方案与措施。     

2-Step algorithm for automatic alignment in wafer dicing process

In this study, automatic alignment algorithm was developed for wafer dicing. Dual inspection method was applied for wafer alignment. The algorithm was derived from inspection data and geometric relations on machine coordinate. The algorithm calculated compensation value which minimized x, y, θ errors. Control strategy was designed according to characteristics of each axis. In experiment, standard position was defined with golden device. When working device was put on stable, it was aligned and moved by compensation value. Alignment error were inspected to check accuracy and precision of the algorithm. Average error was sub-pixel level for y axis on vision coordinate.     

Fabrication of single-polarisation single-mode-fibre couplers

Fused biconical taper fibre couplers have been fabricated from single-polarisation single-mode fibres. A CVD technique is applied to permit maintenance of parallel alignment of the fibres in the coupler fabrication process. The couplers can hold linear polarisation along the principal axis of the fibre branches, showing an extinction ratio of about ?15dB.     

16×16光开关微镜阵列

设计、制造和测试了一种实现16×16 MEMS光开关的高反射率、大角度静电扭转制动型微镜阵列.该阵列的微镜可进行90扭转并保持稳定的扭转状态以对入射光进行导向.针对微镜的扭转驱动特性,提出了相应的机电模型.通过单片集成光纤槽,实现了光纤.微镜.光纤的无源对准.测试结果表明,微镜反射率为93.1%～96.3%,最低插入损耗为2.1dB,另外,在经过15min的5～90Hz,3mm振幅的振动测试后,光开关的插入损耗的改变值仅为±0.01dB.     

Very small single-mode ten-fiber connector

A small plastic molded single-mode ten-fiber connector has been developed for high-count optical subscriber cables. The connector ferrule alignment mechanism is designed with a sufficient factor of safety to allow rough handling during connection. The ferrules are precisely aligned by alignment pins and guide sleeve. The fabricated connector, which has a cross section of just 4 mm × 6 mm, exhibited an average loss of 0.4 dB and reconnection time of less than 0.5 min. Connection loss does not change after over 1000 reconnections     

采用多模输入/输出波导的多模干涉型SOI分束器

一个适用于光纤通信系统中的1×8多模干涉功率分束器被设计并通过ICP刻蚀方法成功研制.这种基于SOI材料的功率分束器是采用多模波导作为输入/输出波导;经过光束传播方法模拟,该器件显示出了优良的性能.测试结果表明,在1550nm波长处器件的传波损耗低于0.80dB,损耗均匀性为0.45dB,而且偏振相关损耗低于0.70dB.器件的尺寸只有2mm×10mm.