共查询到18条相似文献,搜索用时 187 毫秒
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为了制备结晶质量好的Cu掺杂ZnO薄膜,研究其结构和光学性质,采用脉冲激光沉积方法,在Si衬底上选择不同的衬底温度来制备薄膜.实验成功制得了结晶质量较好的Cu掺杂ZnO薄膜.利用X射线衍射仪、扫描电子显微镜和荧光分光光度计对样品进行了测量和分析.所制备的样品均表现出高度的c轴择优取向,衬底温度为300℃时,薄膜表面形貌均匀致密;在样品的光致发光谱中,发现样品除了在380nm附近出现紫外发光峰外,在460nm附近出现了蓝光发光峰,真正意义上实现了ZnO薄膜的蓝光发射.结果表明,衬底温度对其晶体质量有较大影响. 相似文献
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采用直流磁控溅射法制备了ZnO薄膜,研究了沉积过程中变换氧分压对薄膜光电性能的影响.采用XRD、紫外可见光分光光度计及AFM等方法对薄膜的结构和光电性质进行了表征.结果表明,ZnO薄膜在可见光范围内的透过率可达88%,并且随着氧分压的增大,薄膜的透过率也增大;制备出的ZnO薄膜表面粗糙度为0.41 nm.在glass/ITO/CdS/CdTe结构的太阳电池中,将本征ZnO薄膜作为高阻层加入到ITO与CdS之间,电池的开路电压和填充因子有明显的提高,加入高阻层之后,电池的转换效率最高可达13.6%. 相似文献
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为了制备结晶质量好的Cu掺杂ZnO薄膜,研究其结构和光学性质,采用脉冲激光沉积方法,在Si衬底上选择不同的衬底温度来制备薄膜。实验成功制得了结晶质量较好的Cu掺杂ZnO薄膜。利用X射线衍射仪、扫描电子显微镜和荧光分光光度计对样品进行了测量和分析。所制备的样品均表现出高度的c轴择优取向,衬底温度为300℃时,薄膜表面形貌均匀致密;在样品的光致发光谱中,发现样品除了在380nm附近出现紫外发光峰外,在460nm附近出现了蓝光发光峰,真正意义上实现了ZnO薄膜的蓝光发射。结果表明,衬底温度对其晶体质量有较大影响。 相似文献
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衬底温度对ZnO:N薄膜结构和光学性能的影响 总被引:1,自引:1,他引:0
利用超声喷雾热解方法,以不同的沉积温度(450~510℃)在石英衬底上制备出具备较高光学质量的氮掺氧化锌(ZnO:N)薄膜。通过X射线衍射(XRD)谱研究了薄膜的结构,用扫描电子显微镜(SEM)研究了薄膜的表面形貌,用紫外可见(UV)分光光度计、光致发光(PL)谱对薄膜的光学特性进行了测试分析。结果表明,所制备薄膜在可见波段具有较高透过率,并且沉积温度对ZnO:N薄膜的透过性能有很大影响。在衬底温度为500℃时得到的ZnO:N薄膜为六角纤锌矿结构,结晶质量最好、光透过率最高。PL谱的测试结果显示,在该条件制备的ZnO:N薄膜只在389.4nm处有一个较强的近带边紫外发光峰。 相似文献
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在不同氧分压下用脉冲激光沉积(PLD)法在n型硅(111)衬底上生长ZnO薄膜。通过对其进行XRD、傅里叶红外吸收(FTIR)和光致发光谱(PL)的测量,研究了氧分压对PLD法制备的ZnO薄膜的结晶质量和发光性质的影响。XRD显示,氧分压为6.50Pa时可以得到结晶质量最佳的ZnO薄膜。PL谱显示,当氧分压由0.13Pa上升至6.50Pa时,位于380nm附近的主发光峰的强度最大。当氧分压进一步上升至13.00Pa时,主发光峰减弱,与氧空位有关的发光峰消失,显示出ZnO薄膜的PL谱和氧分压的大小密切相关。 相似文献
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Al掺杂ZnO薄膜的表面形貌和光学性质 总被引:3,自引:0,他引:3
用原子力显微镜、紫外-可见分光光度计和荧光光谱仪观察采用溶胶-凝胶法制备的Al掺杂ZnO薄膜的表面形貌、透射光谱和光致发光谱.结果表明,Al掺杂量为0.5at 9/6的ZnO薄膜经550℃退火处理后,粗糙度为1.817,Al掺杂量为1.0at%的ZnO薄膜经600℃退火处理后,粗糙度增大到4.625.样品在可见光范围内的平均透过率均大于80%.当激发波长为325 nm时,在397 nm(3.13 eV)附近出现紫外发光峰;当激发波长为360 nm时,在443 nm(2.80 eV)附近出现蓝色发光峰.探讨了样品的蓝光发光机制. 相似文献
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利用NiOx薄膜具有优良的电致变色性能,制备了透过率可实时调整的PDP屏滤光膜以提高PDP屏的出光效率,在不同环境照度下获得更好的图像质量。采用扫描电镜(SEM)、X射线衍射仪(XRD)、分光光度计研究了采用磁控溅射法制备的NiOx薄膜中镍的含量对薄膜光电特性的影响。分析测试结果表明:溅射时随着氧分压的提高,氧化镍薄膜的镍含量明显降低;NiOx薄膜中镍原子含量为45%左右时,NiOx薄膜对可见光透过率的调节能力最强,其最高透过率与最低透过率差值达70%。 相似文献
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《Applied Superconductivity》1997,5(1-6):79-86
In order to determine an accurate tetragonal–orthorhombic structural transition temperature for NdBa2Cu3O7−δ (Nd123) single crystal easily, in-situ observation of twin formation during annealing of the Nd123 single crystal was performed by using high temperature polarized optical microscopy. The Nd123 single crystal was grown under 21% oxygen partial pressure atmosphere by a top-seeded solution-growth (TSSG) method. The cut sample was heated to 700°C in a pure argon gas flow, followed by a step-wise cooling treatment every 10°C from 700°C, in a 100 and a 21% oxygen partial pressure gas flow until the twin was formed. The twin formation, which takes place with a tetragonal–orthorhombic structural phase transition, was observed at 660 and 620°C in a 100 and a 21% oxygen partial pressure gas flow, respectively. Furthermore, the oxygen contents (7−δ) in the Nd123 single crystal, which are changed by oxygen absorption and desorption in the crystal, were examined with a thermogravimetry (TG) on powder samples and an iodometric titration technique. The relations between the annealing temperatures and the oxygen contents (7−δ) were determined under 100 and 21% oxygen partial pressure atmospheres. These relations suggested that the critical oxygen content with which the tetragonal–orthorhombic structural phase transition took place was around 6.80 for the Nd123 single crystal. 相似文献
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采用反应热蒸发法制备ITO薄膜,详细研究了氧分压对薄膜的晶体结构及光电性能的影响。当氧分压较小时,在XRD谱中发现了对应于SnO(112)晶向的衍射峰,随着氧分压的增大,薄膜的晶体结构变得完整,性能得到了改善,在较低的衬底温度下(TS=160℃)获得最小的电阻率为5.3×10-4Ωcm,但是,当更多的氧进入薄膜后一方面填充了氧空位,另一方面与Sn4+相结合形成复合中性粒子(Sn+In)2O"i,使得锡的掺杂作用减弱,薄膜的电阻率增大,同时在近红外区域的透过率增大。 相似文献
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采用直流磁控溅射的方法,在玻璃衬底上沉积了Zn0.93Mn0.07O薄膜,研究了氧分压对薄膜结构及吸收性能的影响.X射线光电子能谱(XPS)测试结果表明,Mn2 取代了ZnO中的大部分Zn2 ,但还掺杂有少量的MnO2分子.X射线衍射测试(XRD)结果显示,Zn0.93Mn0.07O薄膜都具有高度的C轴择优取向,在氧分压为0.4时,薄膜具有最小的半高宽及最大的晶粒尺寸.由于伯斯坦-莫斯效应,Zn0.93Mn0.07O薄膜光吸收跃迁过程只能在价带态和费米能级附近及以上的导带空态之间发生,与纯ZnO薄膜吸收谱线相比,吸收边产生了蓝移,同时还伴随有导带尾跃迁的发生.研究表明,这是由3d5多重能级的d-d跃迁而引起的.经过计算,氧分压为0.4时,Zn0.93Mn0.07O薄膜的禁带宽度是最大的,这可能是由交换作用的减弱而引起的. 相似文献
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High-quality radio frequency–sputtered ZnO were grown on Si substrates at 400 °C at various partial gas pressures (Ar/Ar+O2). Subsequently, to remove as-grown defects, high temperature annealing from 700 to 900 °C on as-grown samples in constant oxygen flow for 10 s was performed. X-ray diffraction study confirmed the formation of highly crystalline films with a dominant peak at (002). The sample grown in 50% Ar and 50% O2 ambient exhibited the lowest linewidth (2θ=~0.2728°) and highest stoichiometry. Grain size of the as grown samples decreased with increase in the partial pressure of oxygen till a certain ratio (1:1), and photoluminescence (PL) improved with increase in annealing temperature. Low-temperature (18 K) PL measurements showed a near-band-edge emission peak at 3.37 eV, and the highest peak intensity (more than six orders compared to others with narrow linewidth of ~0.01272 eV) was exhibited by the sample annealed at 900 °C and was six orders higher than that of the as-grown sample. All as-grown samples exhibited dominant visible-range peaks due to emission from defect states. 相似文献