相移掩模和离轴照明在ArF浸没式光刻中对工艺窗口的影响

研究了交替型相移掩模及离轴照明对65nm分辨率ArF浸没式光刻的影响,在3／4环形照明和3／4四极照明方式下,分别选用传统掩模和交替型相移掩模,研究65nm线宽的密集线条、半密集线条、孤立线条在较大的曝光系统参数范围内,对光刻工艺窗口的改善。并对在不同的照明方式、掩模结构下获得的工艺窗口进行了比较,结果表明：①在较大焦深(DOF)范围内,满足光刻性能要求可以有较大范围的曝光系统参数配置;②相时于传统照明和传统掩模,采用交替型相移掩模或者离轴照明,焦深均可提高100％-150％。     

极紫外投影光刻两镜微缩投影系统的光学设计

极紫外投影光刻（EUVL）两镜微缩投影物镜通常采用Schwarzschild结构和平场结构。本文分析了这两种结构在EUVL不同发展阶段的设计特点，并依据有限距反射系统像差理论，从解析解出发，设计了两套平场两镜系统，分别用于对分辨力为70nm、无遮拦、环形视场扫描曝光系统及目前研制的EUVL 32nm技术节点小视场曝光系统的研究。系统设计指标满足极紫外投影光刻要求。     

45 nm分辨率增强技术优化

针对45nm节点的需求,系统分析和研究了该节点不同周期图形的成像规律,并采用了不同的分辨率增强技术进行对比研究,从中分析出最适合45nm不同周期图形的光刻方案.采用了传统的离轴照明技术及新照明方式进行对比,并结合交替式相移掩模、衰减式相移掩模及传统二元掩模进行分析,探讨了45nm节点不同周期图形的可实现性.通过优化光源参数,采用Y偏振,对比不同分辨率增强技术的组合,得出结论,采用双弧带照明,对于Y向Line/Speae图形,其焦深,对比度等参数均可满足45 nm节点需要.最后通过双底层抗反射层(DBARC)优化,减小了底层反射率,有效地降低了摇摆效应,提高了z向图形保真度.     

掩模投影成像干涉光刻研究

掩模投影成像干涉光刻技术以在很小或几乎不增加光刻系统成本的基础上来提高光刻分辨率为目的,充分利用系统的有限孔径,将掩模图形不同的空间频率分别进行传递,最终以高分辨率对掩模成像。本文阐述了IIL的基本原理,介绍了一种实验系统,并给出了部分模拟和实验结果。研究结果表明,掩模投影成像干涉光刻技术比传统投影光刻能够得到更高的光刻分辨率。     

用于100nm节点ArF准分子激光光刻的相移掩模技术

用于100nm节点ArF准分子激光光刻的相移掩模(PSM)技术主要有无铬相移掩模(CPM),交替相移掩模(APSM)、衰减相移掩模(AttPSM)和混合相移掩模技术。对这些掩模的基本原理、制作方法及性能比较进行了分析研究。研究表明,无铬相位光刻(CPL)PSM和高透AttPSM 相结合构成的混合掩模最适合用于193nmArF光刻,以产生100nm节点抗蚀剂图形。     

三原色反光镜的制备和性能研究

本文叙述了我们制的绿色反光镜,其性能指标为:在中心波长540nm处R_(max)≥95%,反射带宽约为60nm,短波范围内平均透射率达78%,长波范围内平均透射率达82%。符合装饰照明使用要求。     

接近式光刻图形失真的部分相干光理论分析

光刻过程中由于光的衍射效应产生的非线性畸变对光刻面形质量具有严重影响,是造成光刻微结构图形失真的主要原因之一,为此,研究了接近式紫外光刻中部分相干光的传播过程,建立了相应的光刻理论模型,对光刻成像中的误差产生机理进行分析．该模型综合考虑光源和照明系统对掩模微结构附近光场相干性的影响,将光刻模拟分为3部分．首先根据VanCittert-Zernike定理确定了光源经扩束准直系统传播到蝇眼透镜入射面时光场上任2点的互强度．然后应用部分相干光的传播理论,由Hopkins公式得到部分相干光经蝇眼透镜传播到掩模平面后其上任一点对的复相干度的分布规律．最后根据互强度传播定律,分析从掩模面到光刻胶表面的衍射效应,得到光刻胶表面的光强分布及变化规律,并且通过误差的仿真分析模拟得到光刻胶图形轮廓．结果表明,理论模拟结果与实验较为吻合．该方法能准确地得到衍射光场的分布,进行光刻误差分析,从而能较好地发现曝光图形缺陷．     

电子束散射角限制投影光刻掩模研制

掩模制作是电子束散射角限制投影光刻(SCALPEL)的关键技术。通过优化工艺,制作出具有“纳米硅镶嵌结构”的低应力SiNx薄膜作为支撑;开发了电子束直写胶图形的加法工艺,在支撑薄膜上得到清晰的钨 / 铬散射体图形。研制出的SCALPEL掩模,其晶片尺寸为80mm,图形线宽达到0.1m,经缩小投影曝光得到78nm的图形分辨力。     

1064nm导模共振滤光片的设计与分析

为了获得峰值波长为1 064 nm的反射型窄带滤光片,采用导模共振原理进行设计,并利用严格耦合波法对滤光片的光谱特性进行了理论分析。首先设计了峰值波长1 064 nm单层反射型导模共振滤光片,由于覆盖层和基底层的折射率不匹配,使得远离峰值波长处的反射率偏高,引入减反射层后,峰值波长两侧的反射率明显降低;其次分析了光栅层厚度、光栅周期对滤光片光谱性能的影响。结果表明设计的滤光片具有反射率高、带宽窄及旁带反射率低等优良的光学性能。     

光瞳滤波提高投影光刻成像分辨力研究

针对投影光刻成像系统在数值孔径足够大时所产生的分辨力和焦深的矛盾,详细研究了光瞳滤波对投影成像对比度的改善情况,根据不同掩模图形设计对应的最优滤波器。研究结果表明,光瞳滤波能大幅度提高投影光刻成像分辨力并增大焦深,是一种比较有效的提高光刻成像分辨力的方法。     

Insertion of triangulated surfaces into a meccano tetrahedral discretization by means of mesh refinement and optimization procedures

In this paper, we present a new method for inserting several triangulated surfaces into an existing tetrahedral mesh generated by the meccano method. The result is a conformal mesh where each inserted surface is approximated by a set of faces of the final tetrahedral mesh. First, the tetrahedral mesh is refined around the inserted surfaces to capture their geometric features. Second, each immersed surface is approximated by a set of faces from the tetrahedral mesh. Third, following a novel approach, the nodes of the approximated surfaces are mapped to the corresponding immersed surface. Fourth, we untangle and smooth the mesh by optimizing a regularized shape distortion measure for tetrahedral elements in which we move all the nodes of the mesh, restricting the movement of the edge and surface nodes along the corresponding entity they belong to. The refining process allows approximating the immersed surface for any initial meccano tetrahedral mesh. Moreover, the proposed projection method avoids computational expensive geometric projections. Finally, the applied simultaneous untangling and smoothing process delivers a high‐quality mesh and ensures that the immersed surfaces are interpolated. Several examples are presented to assess the properties of the proposed method.     

Certification Institutions Expected to Update and Transfer Information on Present Standards

Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.……     

Flow calorimeter for enthalpy increment measurements on condensed gases

A flow calorimeter for enthalpy increment measurements on condensed gases is presented. A better knowledge of the properties of the liquefied natural gas is needed, and therefore a liquid loop has been designed for our flow calorimeter. The fluid loop in the calorimeter is designed in order to avoid the two-phase region, since two phases would give compositional disturbances in the measurements. The avoidance of the two-phase region is made possible by increasing the pressure of the test fluid after the measurement section, then heating the fluid at super-critical pressure past the critical point. Finally, the fluid is throttled to the low-pressure gas state at the inlet condition of the compressor that circulates the fluid. To perform the pressure increase, a new cryogenic pump has been designed. To evaluate the new equipment, measurements were taken on liquid ethane over the temperature range 146–256 K at pressure between 0.9 and 5.1 MPa.     

Refrigerators Enter a New Era of Health Preservation Frestech initiates the establishment of China's first standard for household sterilization refrigerators

On November 30, 2007, the China Association for Standardization (CAS) held a press conference at Beijing Diaoyutai State Guest House. Leaders from the China Household Electric Appliance Research Institute, the China Household Electric Appliance Association, and the China Consumers' Association attended and made speeches.……     

Optimum-Simulation von Ernteprozessen

Zusammenfassung Bei der Gestaltung von Ernteprozessen — beispielsweise des Prozesses Mähdrusch, Körnertransport und -abnahme — als transportverbundene Fließarbeitsverfahren mit mindestens zwei verschiedenen Arbeitsmitteln gibt es einen großen Optimierungsspielraum. Solche Prozesse sind mehrstufige Bedienungsprozesse mit gemischter Anordnung der Bedienungseinrichtungen. Außerdem besitzen sie stark ausgeprägte räumliche Aspekte. Es wird vor allem gezeigt, welche Merkmale solcher Prozesse in Simulationsmodellen abgebildet sein müssen, welche Zielgrößen in Abhängigkeit von welchen Einflußgrößen unter Berücksichtigung welcher Prozeßbedingungen ermittelt werden sollten und wie der Bewertungsprozeß zur Ermittlung der gewünschten Informationen gestaltet werden muß.     

A study of centrifugal cast high boron high speed steel

In the present study a high‐boron high speed steel (HSS) roll material was designed. Many expensive alloy elements have been substituted by cheap boron alloy, and high‐boron high speed steel roll has been manufactured by centrifugal casting method. The microstructures, mechanical properties and wear resistance of centrifugal casting high‐boron high speed steel roll have been investigated by optical microscopy (OM), scanning electron microscopy (SEM), and X‐ray diffraction (XRD) analysis, hardness test, impact test and wear test. The results indicated that the solidification microstructures of high‐boron high speed steel roll consisted of M₂(B,C), (W,Mo)₂(B,C), M₃(B,C), M₂₃(B,C)₆ type borocarbides and martensite, a small amount of retained austenite. Borocarbides were continuously distributed over the grain boundary. After quenching from 1050 °C, local broken network appeared in partial borocarbides, and fine secondary borocarbide precipitated from the matrix. After tempering from 525 °C, the amount of precipitated borocarbide increased significantly. After heat treatment, the hardness of high‐boron high speed steel roll excelled 60 HRC, and its impact toughness excelled 8.0 J/cm². The single groove steel rolling amount of high‐boron high speed steel rolls increases by 500% than that of bainite cast iron roll, when the rolls are used in K₁ mill housing of bar mill.     

Brainstorming for ISO Strategy 2016-2020

正Responding to ISO’s appeal for survey for the to-be-developed ISO Strategy Plan for 2016-2020,SAC hosted a special workshop over the needs and comments of various fi elds on June 8 in Beijing.The workshop was attended by ISO President-elect and Ansteel General Manager Zhang Xiaogang,SAC Vice-Administrator Yu Xinli,and 30 experts from     

CNAS Passes APLAC's PTP Review

正The review group of Asia Pacific Laboratory Accreditation Cooperation(APLAC)carried out a 4-day peer review of the proficiency testing provider(PTP)for China National Accreditation Service for Conformity Assessment(CNAS)from July 28 to 31,2014.CNAS passed the PTP review with excellent performance.Two senior peer reviewers of APLAC made a comprehensive,rigorous and detailed review of CNAS’s PTP accreditation activities,and made the on-spot inspection of the review groups in Shanghai and Shenzhen respectively.     

新闻(英文)

正China and Greece Sign the Standardization Cooperation Agreement Witnessed by Chinese Premier Li Keqiang and Greek Prime Minister Antonis Samaras,AQSIQ Minister Zhi Shuping and ELOT Chairman and Executive Director Angelos Tolkas signed the SAC-ELOT Standardization Cooperation Agreement.The Agreement is one of the critical cooperation documents signed during Li Keqiang’s visit in Greece,encouraging China and Greece to