高精度零件直线度采取误差分离技术的测量

高精度零件的直线度测量（例如理石平尺、精密导轨等）,其测量误差可通过两次测量,利用误差分离的方法消除测量基准的误差影响,本文通过直线度检查仪对理石平尺的测量实例来探讨一下如何进行误差分离法检测直线度,以及平尺两平面的平行度。本文将以平尺的测量为例介绍如何利用误差分离技术测量高精度零件的直线度方法探讨。     

3D激光球杆仪伸缩导轨运动误差调整与测量

伸缩装置作为3D激光球杆仪的主要部件,其运动精度影响3D激光球杆仪俯仰角和偏摆角的测量值,为克服精密伸缩装置加工困难且成本较高的缺点,获得满足3D激光球杆仪测量精度的伸缩装置,提出以导轨为组件的伸缩导轨运动误差的调整和测量方法。该方法以直线度误差作为伸缩导轨运动精度的测量指标,采用自制准直仪进行伸缩导轨运动误差测量与调整。首先,通过标定实验和稳定性实验验证准直仪的测量可靠性。然后,以准直仪为测量基准进行导轨直线度误差测量,以导轨直线度调整方法为依据进行导轨直线度调整。最后,组装伸缩导轨,逐一运动各层导轨完成伸缩导轨运动误差测量;采用最小二乘法拟合得到上、下导轨与光轴在XR和YR平面的平行度误差,并计算上导轨和下导轨在XR和YR平面的平行度误差;调整上导轨角度,使上、下导轨平行,完成伸缩导轨运动误差调整。实验结果表明:上导轨X向和Y向直线度误差分别由44μm和439μm降到20μm和14μm,下导轨X向和Y向直线度误差分别由45μm和158μm降到25μm和37μm,伸缩导轨X向和Y向直线度误差分别由105μm和281μm降到47μm和48μm,达到提高精度的目的。     

一种圆柱度测量基准的误差分离方法

通过对主轴回转误差运动的分析，结合三点法圆度误差分离技术，提出了一种完全分离圆柱度测量基准误差的分离方法，即利用主轴回转轴线平均线、测量传感器及直行导轨之间的空间位置关系，建立相应的坐标系，在分离出被测截面圆度误差、最小二乘圆心初始坐标的基础上，完整地分离出影响圆柱度精密测量的径向回转运动误差和导轨的直行运动误差。该技术不仅可以消除测量基准误差对圆柱度测量精度的影响，还可以实现主轴回转误差、导轨直线度以及导轨对主轴平行度误差的精密测量，对高精度误差补偿加工和机床的精度检验也具有重要意义。     

超精密机床热形变及其对运动精度的影响研究

超大口径超精密机床研制是大口径光学元件加工的必要基础,超大口径超精密机床在大行程、长工作周期的加工过程中,由于导轨发热引起的机床热形变将严重影响运动部件的直线度与光学元件的加工精度。利用ANSYS Workbench软件进行热-结构耦合仿真,对所设计的龙门式大口径磨削机床、5轴柔性气囊抛光机床进行了热形变分析,得到了导轨生热对机床整体热形变的影响规律。针对现有的磨削、抛光机床进行温度-直线度监测实验,探究了热形变对磨削机床所用液体静压导轨与抛光机床所用直线导轨运动直线度的影响规律,实际测量结果表明机床液体静压导轨的油膜生热对导轨运动直线度有较大影响。     

基于电涡流位移传感器的嵌入式滚转角测量方法

导轨运动副在运动过程中会产生6个自由度误差,滚转角误差一直是测量的难点。提出一种基于电涡流位移传感器的滚转角在线测量方法和装置。该方法将导轨固定于基准平面,电涡流位移传感器探头通过连接板安装在运动平台上,其中两个探头相距L,并且连线垂直导轨运动轴线,平台运动过程中,两个探头通过测得的导轨直线度误差间接得到导轨滚转角误差;考虑到基准平面平面度误差影响,建立了误差补偿模型,对基准平面平面度误差对滚转角误差测量引起的角度变化量进行补偿,从而计算出导轨精确滚转角误差。静态和动态加载对比试验结果表明:在导轨运动距离为100 mm,导轨滚转角误差变化范围为-32.5″至8.6″时,本方法与标准中的水平仪法比对残差在±1.5″左右,验证了该测量系统的可行性和所提出的补偿方法的有效性。提出的导轨滚转角测量方法充分考虑和减少了基准平面平面度误差的影响。此外,所提方法可以实现在线测量,可以与其他电涡流位移传感器相结合,组成结构简单、测量精度高、抗干扰能力强的多自由度在线测量系统。     

电梯导轨直线度测量系统的研究与设计

研制了一种基于位移传感器的电梯导轨直线度测量系统,用于测量电梯导轨顶面直线度,为电梯导轨出厂提供更为精确有效的数据。介绍了该系统的组成、硬件原理以及机械装置;该系统由电阻式位移传感器对导轨的顶面直线度进行采样,经信号整形后,送给STC系列单片机12C5410AD进行处理、分析以及显示;并用最小二乘法与最小区域法对实际测量数据进行了误差判定。结果证明:该系统的测量误差满足要求,具有较高的推广与应用价值。     

导轨直线度检具

我厂在导轨磨床安装调试中,由于安装精度比较高,在检验导轨直线度时采用了如图1所示的直线度检具,效果较好。工作原理:利用拉紧后的钢丝作为理想的直线,直接测量导轨上各段组成面的直线度误差数值。     

基于频域分析的长管型零件参数测量数据处理

为满足长管型零件的校直工艺要求 ,提出以工件旋转轴线作为基准测量工件直线度和内径的单测头或多测头测量方案以及基于频域分析的数据处理方法。该测量方法仅对工件旋转精度提出一定要求 ,可避免其它常用测量方法对长导轨的运动精度要求。     

超精密平面度在线检测方法研究

磨削问题过实验,效性。介绍了一种用最小二乘逐次两点法对超精密平面度进行在线检测与误差分离的方法;针对平面光学玻璃设计了一套在线测量系统,所提出的方法可以精确而快速地分离出被测平面移动的导轨运动误差,通验证了该测量方法能在机床上直接测量工件的平面度误差,消除基准误差,从而保证实现在线测量的有     

一种导轨直线度与平行度测量系统的研究与应用

导轨直线度与平行度的测量通常采用接触式扫描法和光学测量法,这些方法通常需要高精度的直线度物理基准和激光干涉仪等昂贵仪器使得测量成本大大提高。为克服上述缺点,提出了一套基于四象限光电探测器(简称四象限)结合双轴水平仪实现导轨直线度与平行度测量的测量系统。通过标定实验,比对实验和稳定性实验证明了该测量系统的准确性和稳定性。利用该测量系统对导轨进行测量调整后,基准轨水平与竖直两个方向的直线度误差分别从150μm和120μm降低至42μm和36μm,测量轨与基准轨在水平与竖直两个方向的平行度误差也分别从327μm和524μm降低至45μm和51μm。     

Precision measurement of cylinder straightness using a scanning multi-probe system

This paper describes a scanning multi-probe system for measuring straightness profiles of cylinder workpieces. The system consists of two probe-units, each having three displacement probes. The two probe-units, which are placed on the two sides of the test cylinder, are moved by a scanning stage to scan the two opposed straightness profiles of the cylinder simultaneously. A differential output calculated from the probe outputs in each probe-unit cancels the influence of error motions of the scanning stage, and a double integration of the differential output gives the straightness profile. It is verified that the difference between the unknown zero-values of the probes in each probe-unit (zero-difference) will introduce a parabolic error term in the profile evaluation result, which is the largest error source for straightness measurement of long cylinders. To make zero-adjustment accurately, the cylinder is rotated 180° and scanned by the probe-units again after the first scanning. The zero-differences of the probe-units, as well as the straightness profiles of the cylinder, can be accurately evaluated from the output data of the two measurements. The effectiveness of this method is confirmed by theoretical analysis and experimental results. An improved method, which can measure the variation of the zero-difference during the scanning, is also presented.     

Inverse determination of Johnson–Cook model constants of ultra-fine-grained titanium based on chip formation model and iterative gradient search

In this paper, a systematic approach on how to predict kinematic errors based on tolerance of machine tools’ guideways is introduced. Firstly, the truncated Fourier series function is applied to fit curve of guideways surface. Since geometric profile errors are regarded as a bridge between tolerance and kinematic errors of machine tools’ guideways, the mapping relationship between tolerance and geometric profile errors of machine tools’ guideways is formulated, and the mapping relationship between geometric profile errors and kinematic errors of guideways is established. Then, kinematic errors prediction model based on tolerance of guideways is subsequently proposed. Finally, simulation verification is conducted with this method. Simulation results show the range of the predicted kinematic errors (positioning error, y direction and z direction straightness error, roll error, pitch error, and yaw error) is 17.12 μm, 56.57 μm, 70.71 μm, 28.28 μrad, 141.42 μrad, and 113.14 μrad, respectively. In order to verify the feasibility and effectiveness of the presented method, a measuring experiment is carried out on guideways of a gantry-type five-axis milling machine tools by using a dual-frequency laser interferometer. The measured and identified discrete data can be fitted precisely by Fourier curve fitting method. The fitting results show the range of the measured kinematic errors is 16.96 μm, 59.43 μm, 68.63 μm, 28.65 μrad, 135.40 μrad, and 111.58 μrad, respectively. The maximum residual errors between the predicted and measured values of kinematic errors are 1.67 μm, 5.19 μm, 5.50 μm, 1.87 μrad, 9.81 μrad, and 7.07μrad, respectively. Comparing with the measured results of kinematic errors, residual errors are considerably small and can be neglected. Therefore, there is no doubt that this method is effective enough for predicting kinematic errors and can be used to replace the measurement of kinematic errors. In the design stage of machine tools, this approach is convenient for engineers to derive the distribution of kinematic errors. And its basic idea can be applied to other type of machine tools’ guideways.     

高陡度保形光学镜面的坐标测量

针对高陡度保形光学镜面的检测,提出了基于多段拼接的光学镜面坐标测量方法。该方法将保形光学镜面轮廓的测量分割为具有一定重叠区域的数段较短的面形轮廓的测量,通过测量系统与被测工件之间的相对旋转与平移运动调整被测工件的姿态实现分段轮廓的测量。然后使用拼接算法将各段面形轮廓拼接起来,重构出被测工件的面形误差。建立了该坐标测量法的数学模型,提出了基于最小二乘的迭代拼接算法,并在Matlab下对测量算法进行了仿真。开发了高精度的测量试验系统并分别在VC与Matlab下编写了测控软件与数据分析软件。对一口径为120mm,长径比为1.2的椭球形保形头罩进行了实测试验。仿真与测量试验表明,上述方法能够高精度地重构出面形轮廓,方法简单,实用。     

Research on error averaging effect of hydrostatic guideways

Hydrostatic guideways can obtain high motion accuracy due to their error averaging ability. In order to optimize the structural and accuracy design of hydrostatic guideways, the mechanism and affecting factors of the error averaging effect are investigated in detail in this paper. A new method is proposed to quantitatively analyze the motion errors of a typical closed hydrostatic guideway with four pads, and the restrictor is also taken into consideration. A hydrostatic guideway in an ultra-precision grinding machine LGF750 is analyzed with the method. The results show that the wavelength of each profile error component is a main affecting factor on the error averaging effect. Fluid films usually show obvious error averaging effect on each profile error component when the wavelength λ is shorter than twice of the pad length 2l_u. However, for each component with the wavelength λ over 2l_u, the error averaging effect becomes obvious only when the ratio of the pad length to the evaluation length of motion straightness l_u/l_e is greater than 0.5. Furthermore, the instability of the oil supply system is taken into consideration, and possible influences on the error averaging effect due to the supply pressure fluctuation are investigated preliminarily.     

Exact straightness reconstruction for on-machine measuring precision workpiece

A new frequency-domain method, which can reconstruct straightness profile of workpiece exactly for on-machine measurement, has successfully been developed. The proposed method is based on difference measurement and can use two or three displacement probes. It possesses following characteristics: (i) adapting to long or short workpiece, (ii) assuming no prior knowledge, (iii) employing large shears and (iv) reconstructing any surface including smooth, non-smooth, periodic and non-periodic profile with no theoretical error. The theoretical analysis and simulation justify the effectiveness of this method. Finally, the measurement system consisting of two non-contact capacitive probes is built and evaluated experimentally on a diamond turning machine.     

Effect of working position on vertical motion straightness of open hydrostatic guideways in grinding machine

Hydrostatic guideways have various applications in precision machine tools due to their high motion accuracy. The analysis of motion straightness in hydrostatic guideways is generally ignoring the external load on the slider. A variation force also exists, caused by the different working positions, together with the dead load of the slider and that of other auxiliary devices. The effect of working position on vertical motion straightness is investigated based on the equivalent static model, considering the error averaging effort of pressured oil film in open hydrostatic guideways. Open hydrostatic guideways in LGF1000 are analyzed with this approach. The theoretical results show that the slider has maximum vertical motion straightness when the working position is closer the guiderail of Y axis. The vertical motion straightness reaches a minimum value as the working position is located at the center of the two guiderails on the Y axis. The difference between the maximum and minimum vertical motion straightness is 34.7%. The smaller vertical motion straightness is attributed to the smaller spacing of the two pads centers, along the Y direction. The experimental results show that the vertical motion straightness is 4.15 μm/1200 mm, when the working position is located in the middle of the X beam, and 5.08 μm/1200 mm, when the working position is approaching the Y guiderails, denoting an increase of 18.3%. The changing trends of the measured results validate the correctness of the theoretical model. The research work can be used to reveal the variation law of accuracy of the open hydrostatic guideways, under different working positions, to predict the machining precision, and provides the basis for an error compensation strategy for gantry type grinding machines.     

High accuracy error separation technique for on-machine measuring straightness

A novel time-domain method, which can reconstruct straightness profile of workpiece exactly for on-machine measurement, has successfully been developed. The proposed method is based on difference measurement and can use two or three displacement probes. It possesses the following characteristics: (i) adapting to long or short workpiece, (ii) assuming no prior knowledge, (iii) employing large shears, (iv) needing no accurate zero-adjustment of probes, and (v) reconstructing various surfaces including smooth, non-smooth, periodic, and non-periodic profile with no theoretical error. The theoretical analysis and simulation justify the effectiveness of this method. Finally, the measurement system consisting of an autocollimator and two non-contact capacitive probes is built and evaluated experimentally on a diamond turning machine. This system can remove both pitching and translational error motion of the scanning stage.     

双PSD实现长直导轨四自由度测量的新方法

介绍基于双PSD实现大长度宽范围直线导轨俯仰角、偏摆角以及空间二维直线度等四个自由度在线测量的新型方法,对其测量原理进行了分析和验证,并建立求取长直导轨俯仰角、偏摆角的数学模型和基于激光空间偏角修正基础上的二维直线度的数学模型;讨论影响测量过程的各种因素,提出消除其影响所应采取的措施。     

双PSD实现长直导轨四自由度测量的新方法

介绍一种基于双二维PSD实现大长度宽范围直线导轨俯仰角、偏摆角以及空间二维直线度等四个自由度在线测量的新型方法,对其测量原理进行了分析和论证,并建立了求取长直导轨俯仰角、偏摆角的数学模型和基于激光空间偏角修正基础上的二维直线度的数学模型;讨论了影响测量过程的各种因素,提出了消除其影响所应采取的措施。该测量方法提高了长直导轨直线度的测量精度和效率。     

基于遗传算法和分割逼近法精确计算复杂曲面轮廓度误差

在超精密复杂零件加工与检测技术中,高精度轮廓度误差的评估方法一直是一个研究重点。在分析研究现状基础上,阐明精确计算复杂曲面轮廓度误差需要解决的关键问题,阐述复杂曲面轮廓度误差定义,建立复杂曲面轮廓度误差的数学模型。在分析基于NURBS描述复杂曲面特点基础上,提出分割逼近法计算测点到曲面的最小距离快速简便算法。分析传统遗传算法存在计算精度与编码长度、计算工作量之间的矛盾,提出改进型归一化实数编码的遗传算法,建立相应的交叉算子和变异算子,确立分割逼近法和归一化实数值编码遗传算法相结合计算复杂曲面轮廓度误差的具体步骤。该算法易于计算机实现,且计算精确度高,可以达到任意给定的精度,非常适用于三坐标测量机。