Preparation and characterization of La-doped Ba(1 − x)SrxTiO3 powders and thin films

Ba_(1 − x)Sr_xTiO₃ powders with different Ba/Sr ratios (x = 0.10, 0.25, 0.40, 0.55, 0.70) and La-doped Ba_0.9Sr_0.1TiO₃·yLa powders (y = 0.002, 0.004, 0.006, 0.008, 0.010) have been prepared by sol-gel technology using dehydrated barium-acetate, strontium-carbonate, lanthanum-nitrate, and titanium-isopropoxide as raw materials. The experimental results show that the dielectric properties of Ba_(1 − x)Sr_xTiO₃ powders depend on the Ba/Sr ratios. When the Sr fraction is 0.10, the dielectric constant is relatively higher and the dielectric loss is relatively lower, which are more than 2000 and less than 2.0 × 10^− 2 at 1000 Hz, respectively, the most important is that this kind of powder has better frequency stability. La-doping can increase the dielectric constant distinctly, but the dielectric loss can also be increased. Their dielectric properties at 1.0 × 10³ Hz are better than those at 1.0 × 10⁵ Hz. At 1.0 × 10³ Hz the dielectric constant is much higher, while the dielectric loss is much lower. The dielectric constant of different La-doping contents is nearly 3.5 × 10⁴ and the dielectric loss is less than 0.20 when La fraction is 0.008. The La-doped BST sample also has better frequency stability, especially at high frequency. La-doped BST thin films are successfully deposited on mild steel substrates by using plasma spray system with suspension precursors of Ba_0.90Sr_0.10TiO₃·0.8La powders. The XRD patterns of Ba_0.90Sr_0.10TiO₃ and Ba_0.90Sr_0.10TiO₃·0.8La powders are almost the same. No new peaks appear after La-doping, but the peaks move slightly to a larger degree, which indicates that the element La has entered the lattice of the Ba_0.90Sr_0.10TiO₃ and has made the constant of the crystal cell reduce. The XRD pattern of the thin films is just like that of the Ba_0.90Sr_0.10TiO₃·0.8La powders except a peak corresponding to Fe substrate. The SEM results show that the thin films have a uniform and smooth surface. The morphology of cross-section shows a columnar grain structure indicating smooth surface and uniform thickness of the film. The thickness of the film is about 15 um. The thin films obtained are expected to be prospective material for applications in tunable microwave devices.     

Calcium-doping for enhanced temperature stability of (Ba0.6Sr0.4)1−xCaxTiO3 thin film dielectric properties

Ternary (Ba_0.6Sr_0.4)_1−xCa_xTiO₃ (BSCT) (x = 0, 0.1, 0.2, 0.3 and 0.4) thin films with thickness of around 500 nm were prepared on Pt(111)/TiO₂/SiO₂/Si substrates by sol-gel methods. BSCT forms the complete solid solutions in a single cubic perovskite structure. The lattice constant, dielectric constant, tanδ and tunability of BSCT decrease, whereas the temperature stability of dielectric properties increases with increasing the Ca concentration. From 25 to 100 °C, the decrease of tunability is about 11% for BSCT with 40 at.% of Ca. BSCT thin films exhibit the comparable tunability, low loss and enhanced temperature stability.     

Nanograins dependent dielectric constant, tunability, phase transition, impedance spectroscopy and leakage current of (Pb1 − xSrx)TiO3 thin films

Nanostructured (Pb_1 − xSr_x)TiO₃ (PST) (x = 0.1, 0.2 and 0.3) thin films have been prepared by chemical solution deposition process using spin coating technique. The solution as such was deposited on Pt/Ti/SiO₂/Si substrates and annealed at 650 °C/3h. Nanograins dependent dielectric properties of PST films show dielectric constant up to the higher frequency region, low losses, large tunability and phase transition at small temperature. The impedance data has been fitted by Cole-Cole model to study the effect of grain boundaries on the dielectric properties. The current-voltage characteristics have been measured to study leakage current in PST films and described by Poole-Frenkel emission model. It is suggested that the key carrier transport process in PST films is emission of electrons from a trap state near the metal-film interface into a continuum of states associated with each conductive dislocation. The activation energy value for carrier transport in PST films is obtained from temperature-dependent current-voltage characteristics.     

Ferroelectric and dielectric properties of sol-gel derived BaxSr1−xTiO3 thin films

Ferroelectric thin films of Ba_0.7Sr_0.3TiO₃, Ba_0.8Sr_0.2TiO₃, Ba_0.9Sr_0.1TiO₃ and BaTiO₃ were fabricated by a modified sol-gel technique on Pt/Ti/SiO₂/Si substrates. All the compositions crystallized in perovskite structure and consist of well-defined grains. As the value of x increases grain size of the Ba_xSr_1−xTiO₃ thin films increases while the dielectric permittivity decreases. Ba_0.7Sr_0.3TiO₃ composition possesses the highest dielectric permittivity of 748 (at 100 kHz). Hysteresis loops measured at room temperature for all compositions showed that BaTiO₃ has the largest remnant polarization of 4.8 μC/cm². The dielectric and ferroelectric properties of the sol-gel derived Ba_xSr_1−xTiO₃ thin films are strongly dependent on the Sr content and the grain size.     

Enhanced dielectric and tunable properties of barium strontium titanate thin films through introducing Nd(Zn1/2Ti1/2)O3 and adjusting Ba/Sr

Ba_0.6Sr_0.4TiO₃ (BST) and 0.06Nd(Zn_1/2Ti_1/2)O₃–0.94Ba _x Sr_1?x TiO₃ (NZT–BST) thin films with x = 0.6, 0.7, 0.75, and 0.8 were fabricated on Pt/Ti/SiO₂/Si substrates by sol–gel method. The structures, surface morphology, dielectric, and ferroelectric properties, and thermal stability of BST and NZT–BST thin films were investigated as a function of NZT and Ba content. It was found that introducing NZT into BST decreased significantly dielectric loss, however, along with the tunability. On this basis, increasing Ba/Sr in NZT–BST thin films led to the simultaneous increase of dielectric constant and tunability of thin films. As a result, optimized dielectric and tunable properties were obtained for 0.06Nd(Zn_1/2Ti_1/2)O₃–0.94Ba_0.7Sr_0.3TiO₃ thin film with the highest FOM value of 43.22. It awakens us that, for reducing dielectric loss, introducing a certain amount of low permittivity oxides or non-ferroelectrics like NZT into weak ferroelectric perovskite tunable materials, not into paraelectric perovskite tunable materials, may obtain more excellent dielectric and tunable performances.     

Bottom electrodes dependence of microstructures and dielectric properties of compositionally graded (Ba1−xSrx)TiO3 thin films

Compositionally graded (Ba_1−xSr_x)TiO₃ (BST) thin films, with x decreasing from 0.3 to 0, were deposited on Pt/Ti/SiO₂/Si and Ru/SiO₂/Si substrates by radio frequency magnetron sputtering technology. The microstructure and dielectric properties of the graded BST thin films were investigated. It was found that the films on Ru electrode have better crystallization, and that RuO₂ is present between the Ru bottom electrode and the graded BST thin films by X-ray diffraction and SEM analysis. Dielectric measurement reveals that the graded BST thin films deposited on Ru bottom electrode have higher dielectric constant and tunability. The enhanced dielectric behavior is attributed to better crystallization as well as smaller space charge capacitance width and the formation of RuO₂ that is more compatible with the BST films. The graded BST films on Ru electrode show higher leakage current due to lower barrier height and rougher surface of bottom electrode.     

High dielectric tunability of Ba0.6Sr0.4TiO3 thin film deposited by radio-frequency magnetron sputtering

In microwave tunable devices, one of the major challenges encountered is the simultaneous minimization of the material's dielectric loss and maximization of dielectric tunability. In this work, Ba_0.6Sr_0.4TiO₃ thin film with the thickness of 300 nm was deposited on Pt/SiO₂/Si substrates using radio-frequency magnetron sputtering technique, and its dielectric properties were investigated. Due to the high temperature annealing process at substrate temperature of 600 °C, well-crystallized Ba_0.6Sr_0.4TiO₃ film was deposited. The dielectric constant and dielectric loss of the film at 100 kHz are 300 and 0.033, respectively. Due to the good crystallinity of the Ba_0.6Sr_0.4TiO₃ films deposited by radio-frequency magnetron sputtering, high dielectric tunability up to 38.3% is achieved at a low voltage of 4.5 V.     

Microstructure and electrical properties of Ba0.7Sr0.3(Ti1 − xZrx)O3 thin films prepared on copper foils with sol-gel method

Ba_0.7Sr_0.3(Ti_1 − xZr_x)O₃ (x = 0, 0.1, 0.2) (BSZT) thin films have been prepared on copper foils using sol-gel method. The films were annealed in an atmosphere with low oxygen pressure so that the substrate oxidation was avoided and the formation of the perovskite phase was allowed. The X-ray diffraction results show a stable polycrystalline perovskite phase, with the diffraction peaks of the BSZT films shifting toward the smaller 2θ with increasing Zr content. Scanning electron microscopy images show that the grain size of the BSZT thin films decreases with increasing Zr content. High resolution transmission electron microscopy shows the clear lattice and domain structure in the film. The dielectric peaks of the BSZT thin films broaden with increasing Zr content. Leakage current density of Ba_0.7Sr_0.3(Ti_1 − xZr_x)O₃ (x = 0.1) thin film is the lowest over the whole applied voltage.     

Self-buffered BaxSr1−xTiO3 films by sol-gel and RF magnetron sputtering method

Ba_xSr_1−xTiO₃ (BST) films are fabricated by sol-gel and RF (radio frequency) magnetron sputtering method. A buffer layer with columnar grains by sol-gel method is introduced to improve the dielectric anomaly in BST films. We find that the presence of buffer layer can increase the differential dielectric constant against temperature in sol-gel derived BST films while not so with sputtered films. We explain this by an ‘expanded layer thickness model’ and an unstable crystallized surface, respectively. The obtained (dε/ε) dT is up to 6% around 11 °C by the sol-gel method.     

Preparation and characterization of Ba1 − xSrxTiO3 thin films deposited on Pt/SiO2/Si by sol-gel method

BST thin films have been investigated as potential candidates for use in frequency agile microwave circuit devices. Stoichiometric (Ba_1 − xSr_x)TiO₃ (BST) thin films have been prepared on Pt/SiO₂/Si substrates using sol-gel method. The BST films were characterized by X-ray fluorescence (XRF) spectroscopy analysis, X-ray diffraction (XRD), scanning electron microscope (SEM) and electrical measurements. The relationships of processing parameters, microstructures, and dielectric properties are discussed. The results show that the films exhibit pure perovskite phase through rapid thermal anneal at 700 °C and their grain sizes are about 20-40 nm. The dielectric constants of BST5, BST10, BST15 and BST20 are 323, 355, 382 and 405, respectively, at 80 kHz.     

Large area Ba1 − xSrxTiO3 thin films for microwave applications deposited by pulsed laser ablation

Large area Ba_1 − xSr_xTiO₃ (BST) thin films with x = 0.4 or x = 0.5 were deposited on 75 mm diameter Si wafers in a pulsed laser deposition (PLD) chamber enabling full-wafer device fabrication using standard lithography. The deposition conditions were re-optimized for large PLD chambers to obtain uniform film thickness, grain size, crystal structure, orientation, and dielectric properties of BST films. X-ray diffraction and microstructural analyses on the BST films grown on Pt/Au/Ti electrodes deposited on SiO₂/Si wafers revealed films with (110) preferred orientation with a grain size < 100 nm. An area map of the thickness and crystal orientation of a BST film deposited on SiO₂/Si wafer also showed (110) preferred orientation with a film thickness variation < 6%. Large area BST films were found to have a high dielectric tunability of 76% at an electric field of 400 kV/cm and dielectric loss tangent below 0.03 at microwave frequencies up to 20 GHz and a commutation quality factor of ~ 4200.     

Structure, dielectric, ferroelectric, and optical properties of (1 − x)Ba(Zr0.2Ti0.8)O3 − x(Ba0.7Ca0.3)TiO3 thin films prepared by sol-gel method

We report high dielectric tunabilities of (1 − x)Ba(Zr_0.2Ti_0.8)O₃ − x(Ba_0.7Ca_0.3)TiO₃ (BZT-xBCT) (x = 0.15, 0.30, 0.40, 0.45, 0.50, and 0.55) thin films prepared by a sol-gel method. The films show a pure perovskite structure with random orientation. They have moderate dielectric constant ranging from 350 to 500 and low dielectric loss near 3.0% at 1 kHz with 0 V bias at room temperature. The dielectric tunability of the BZT-0.55BCT thin films is up to 65% at 400 kV/cm and 100 kHz. The films exhibit a high optical transmission in the range of 420 nm-1500 nm. Their optical band gap energies are about 3.90 eV.     

The roles of B-site ions in lead strontium zirconate titanate thin films for electrically tunable device applications

B-site modification lead strontium zirconate titanate Pb_0.4Sr_0.6Zr_xTi_1 − xO₃ (PSZT, x = 0-0.7) thin films were prepared on Pt/TiO₂/SiO₂/Si substrates by a sol-gel method. The XRD results indicate that paraelectric PSZT thin films at room temperature are obtained as x approaches 0.2. The temperature-dependent dielectric and hysteresis loop measurements reveal that the thin films have diffuse phase transition characteristics and relaxor-like behavior with nano-polar regions in the paraelectric films at room temperature. The Curie temperature of the PSZT thin films varies with the Zr contents, exhibiting a complex trend. This can be attributed to two competitive factors: higher mobility of Ti⁴⁺ than Zr⁴⁺ and smaller open space left for the displacement of Ti ions with the increase of Zr content. The further increase of the Zr contents leads to the simultaneous decrease of dielectric constant, dielectric loss and tunability. PSZT (x = 0.4) thin film shows the largest figure of merit of 24.3 with a moderate tunability of 55.8% and a dielectric loss of 0.023. This suggests that B-site ions have different roles in modifying the electrically tunable performance of PSZT thin films for tunable microwave device applications.     

Effect of lead on formation and dielectric tunability of (Pbx,Sr1? x )0.85Bi0.1TiO3 thin films

(Pb_x,Sr_1−x )_0.85Bi_0.1TiO₃ thin films with the perovskite phase structure were prepared on an ITO glass substrate by sol-gel method. X-ray diffraction (XRD), scanning electron microscopy (SEM) and an impedance analyzer were respectively used in order to characterize the phase status, morphology and dielectric properties of the thin films. The results show that during the formation process of (Pb_x,Sr_1−x )_0.85Bi_0.1TiO₃ thin films, the nucleus of the perovskite phase are initially formed and then congregated. These aggregated nucleus are then transformed as the perovskite-phase crystalline in the thin film. Finally, the crystalline phase grows and separates gradually to form the perfect crystalline-phase structure. The content of the perovskite phase formed in the thin film under rapid thermal process (RTP) is more than that formed under traditional heat treatment with kinetic equilibrium. This is due to the high active decomposed ions that form the perovskite phase directly when heat-treated by RTP. The formation of the perovskite phase therefore overcomes a much lower barrier under RTP than that under traditional calcinations. The structure of the perovskite phase has a close relation to the ratio of Pb/Sr in the system because of the radius difference between Pb²⁺ and Sr²⁺. The transformation temperature between the cubic and the tetragonal structures of the perovskite phase increases with increasing Pb²⁺ content because the radius of Pb²⁺ is larger than that of Sr²⁺. It appears at room temperature when the content of Pb²⁺/Sr²⁺ is about 40/60 in the thin film. Meanwhile, the tetragonality of the perovskite phase is increased when Pb²⁺ ions increase due to its high polarization. The higher tunability of the (Pb_x,Sr_1−x )_0.85Bi_0.1TiO₃ thin film is exhibited when the film composition is close to the transformation point between the paraelectric and ferroelectric phases. Pb²⁺ ions show a dominant factor to affect the Curie point of the system and then changing tunability. Translated from Journal of Inorganic Materials, 2006, 21(2): 466–472 [译自: 无机材料学报]     

Different microstructure and dielectric properties of Ba1−xCaxTiO3 ceramics and pulsed-laser-ablated films

A comparative study of the microstructure and dielectric properties between Ba_1−xCa_xTiO₃ (BCT) ceramics and films were performed in the whole Ca concentration range of x = 0-1. The ceramics were prepared by conventional solid-state reaction technique and the films by the method of pulsed-laser deposition. X-ray diffraction (XRD) study of the BCT ceramics exhibited a pure tetragonal phase for x = 0-0.25, a tetragonal-orthorhombic diphase for x = 0.25-0.85 and a pure orthorhombic phase for x = 0.90-1.00. And the dielectric phase transition temperature from tetragonal to cubic was marginally affected by the Ca doping into BaTiO₃. However, BCT films deposited on Pt/Si/SiO₂/Si substrates showed a different microstructure and dielectric properties. Tetragonal-orthorhombic diphase was not found in the BCT films for x = 0.25-0.85, and a large decrease of the Curie point and diffuse phase transition were observed in the BCT films. Based on the compositional analysis, such phenomena were ascribed to the occupancy of some Ca²⁺ to the Ti⁴⁺ sites in the BCT films.     

Morphologies and crystal structures of nano-sized Ba1−xSrxTiO3 primary particles prepared by flame spray pyrolysis

Nano-sized Ba_1−xSr_xTiO₃ (BST) powder was prepared by flame spray pyrolysis using “CA-assisted” spray solution. The effects of the mole ratios of Ba to Sr components on the mean sizes, morphologies, and crystal structures of the BST powder prepared by flame spray pyrolysis were investigated. The precursor powders obtained by flame spray pyrolysis had large size, fractured and hollow structures irrespective of the mole ratios of Ba to Sr components. The post-treated BST powders had slightly aggregated morphology of the primary particles with nanometer sizes. The slightly aggregated BST powders turned to nano-sized primary particles by a simple milling process. The milled BaTiO₃ particles post-treated at temperature of 1000 °C had spherical-like shape. On the other hand, the milled Ba_0.5Sr_0.5TiO₃ and SrTiO₃ particles had square shape. The mean sizes of the milled BaTiO₃, Ba_0.5Sr_0.5TiO₃ and SrTiO₃ particles were each 110, 32, and 48 nm. Phase pure BST powder was obtained at a post-treatment temperature of 1000 °C irrespective of the mole ratios of Ba to Sr components. The BaTiO₃ powder had tetragonal crystal structure. On the other hand, the BST except for the BaTiO₃ composition had cubic crystal structures at post-treatment temperature of 1000 °C. The mean crystallite sizes of the milled Ba_1−xSr_xTiO₃ primary particles were changed from 29 to 37 nm according to the mole ratios of Ba to Sr components.     

Dielectric properties of barium strontium titanate thick films prepared by electrophoretic deposition

Ba_xSr_1−xTiO₃ (x = 0.5, 0.6, 0.7) thick films were prepared by electrophoretic deposition (EPD) technique on platinum metallic foils using BaTiO₃ and SrTiO₃ nanoparticles with different molar proportion of 1:1, 3:2 and 7:3, respectively. An isostatic pressure method was used to increase density of the thick films before high temperature sintering. Microstructures of the deposited films were examined with XRD and SEM techniques. Porosity of the thick films decreased after the isostatic pressure process. The Ba_0.5Sr_0.5TiO₃ thick films of 10 μm, 15 μm and 20 μm showed a tunability of 28.8%, 33.3% and 33.9%, respectively, at room temperature and at a biasing field of 2 kV/mm. The dielectric constant was from 2138 to 3446 and dielectric loss was from 0.016 to 0.011 at zero bias field at 10 kHz. The temperature dependence of dielectric constant was also measured and the effect of porosity and thickness on the electrical performance of the thick films was discussed.     

Enhanced tunable dielectric properties of Ba0.5Sr0.5TiO3/Bi1.5Zn1.0Nb1.5O7 multilayer thin films by a sol-gel process

Ba_0.5Sr_0.5TiO₃(BST)/Bi_1.5Zn_1.0Nb_1.5O₇(BZN) multilayer thin films were prepared on Pt/Ti/SiO₂/Si substrates by a sol-gel method. The structures and morphologies of BST/BZN multilayer thin films were analyzed by X-ray diffraction (XRD) and field-emission scanning electron microscope. The XRD results showed that the perovskite BST and the cubic pyrochlore BZN phases can be observed in the multilayer thin films annealed at 700 °C and 750 °C. The surface of the multilayer thin films annealed at 750 °C was smooth and crack-free. The BST/BZN multilayer thin films annealed at 750 °C exhibited a medium dielectric constant of around 147, a low loss tangent of 0.0034, and a relative tunability of 12% measured with dc bias field of 580 kV/cm at 10 kHz.     

The effect of Bi1.5Zn0.5Nb0.5Ti1.5O7 cover layer on the dielectric and tunable properties of Ba0.6Sr0.4TiO3/Bi1.5Zn0.5Nb0.5Ti1.5O7 bilayered thin films

Bi_1.5Zn_0.5Nb_0.5Ti_1.5O₇ (BZNT) thin films with different thicknesses as cover layers were deposited on the Ba_0.6Sr_0.4TiO₃ (BST) thin films on the Pt/Ti/SiO₂/Si substrates by radio frequency magnetron sputtering method. The microstructure, surface morphology, dielectric and tunable properties of BST/BZNT heterogeneous bilayered films were investigated as a function of the thickness of BZNT films and the effect of BZNT films on the asymmetric electrical properties of BST/BZNT bilayered films was discussed. It was found that BZNT cover layer significantly improved the leakage current and the dielectric loss, and the dielectric constant and tunability of BST/BZNT bilayered thin films simultaneously decreased with the increasing thickness of BZNT films. The BST/BZNT bilayered thin film with a 50 nm BZNT cover layer gave the largest figure of merit (FOM) of 33.48 with the upper tunability of 55.38%. The asymmetric electrical behavior of BST/BZNT bilayered films is probably related to an internal electric field caused by built-in voltages at Pt/BST and BZNT/Au interfaces.     

Effects of Mn doping on structural and dielectric properties of sol-gel-derived (Ba0.835Ca0.165)(Zr0.09Ti0.91)O3 thin films

We reported the effects of Mn doping on the structure and dielectric properties of (Ba_0.835Ca_0.165)(Zr_0.09Ti_0.91)O₃ (BCZT) thin films prepared by sol-gel method. The (Ba_0.835Ca_0.165)Mn_x(Zr_0.09Ti_0.91)_1 − xO₃ (x = 0, 0.002, 0.005, and 0.01) thin films exhibited a pure pseudo-cubic perovskite structure with random orientation. Scanning electron microscopy and atomic force microscopy observation showed that increasing Mn-doping amount caused a decrease in particle size and a cluster of the particles, while the film surface remained smooth and crack-free. Compared with the undoped film, Mn doped BCZT thin films exhibited smaller dielectric constant and lower dielectric loss. The figure of merit reached the maximum value of 16.7 with a tunability of 53.6% for the film with 0.5 mol % Mn doping, when a bias electric field of 400 kV/cm was applied at 100 kHz. The results indicated that the Mn doped BCZT thin films are suitable for tunable microwave device applications.