采用蠕动式微进给机构的微细电火花加工装置

介绍一种采用蠕动工微进给机体铁微细电火花加工装置，尝试微细电火花加工的产用化和装置本身的微小型化，内容包括装置机构的设计制作及初步的加工实验结果，特别是蠕动式微进给机构提高输出推力，适用于微细电火花加工的设计实现。     

微细电加工应用技术研究

微细电加工要达到工业应用的目的,需兼顾加工效率和加工精度两方面的要求.以微细孔、微细三维结构的加工为目标,进行了微细孔电火花加工、三维微细结构电火花伺服扫描加工及微细电化学加工技术的研究开发.设计出微细电极的损耗补偿进给和导向机构,开发出三维微细结构的电火花伺服扫描加工工艺,研究了采用阵列微细电极的微细电化学加工方法.微细孔电火花加工可连续加工直径小至100 μm的孔.伺服扫描电火花加工可便捷地在小于1 mm2区域内加工出三维微细结构.提出的微细电化学加工技术路线拟将微细电解加工应用于阵列微细孔和三维微细结构的加工.     

微细电火花加工实现条件的研究

介绍了微细电火花加工的原理和特点,从加工表面质量、脉冲电源、微细工具电极的制造和安装、放电面积效应的影响、伺服控制系统等方面对微细电火花加工的实现条件进行了研究,并给出了微细轴的电火花加工等具体加工实例.研究结果对微细电火花加工技术的具体应用具有重要的参考价值和指导意义.     

基于RTLinux的微细电火花加工软数控系统设计

以三维微细电火花加工为目标，开发基于工控机和RTLinux平台的微细电火花加工软件数控系统。在前期设计的系统平台基础上，利用模块化方法设计了RTLinux内核下的Soft-CNC模块，实现了微细电火花加工数字控制系统由软件完成，并提出了基于双缓冲机制的大数据量传输方法。三维微细电火花加工实验证明了系统的可靠性与实用性。     

微细电火花加工技术及其应用

介绍了微细电火花加工技术的原理、特点及最新研究成果，简述了微细电火花加工技术的应用及发展趋势。     

微细阵列型孔的冲压与电火花复合加工技术研究

提出一种微细冲压加工和微细电火花加工交叉结合的微细阵列型孔复合加工方法。尺寸较大的过渡型腔采用微细冲压加工，以提高加工效率和保证加工尺寸的一致性；型孔喷口的最小特征尺寸采用微细电火花逐层扫描加工得到。设计制作了专用的微小型腔冲压实验装置，从机构设计上保证加工工艺对微小型腔冲压深度的精确控制。进行了非圆截面阵列微细型孔的加工实验，验证了所提出的工艺方法的可行性和合理性。     

应用线电极磨削法的电火花微孔加工

在微细电火花微孔加工中，微细工具电极的制作精度是决定微孔加工质量的关键。本文介绍了作者研制的微细电火花加工样机。该机床应用了线电极电火花磨削法制作微细轴，并在同一台机床上用制作的微细轴作为工具电极加工微孔；同时为提高微孔的加工质量，采用了主轴横轴布局结构。该机床还采用了微能放电电源、去离子水工作液等加工工艺。经过实验加工，获得了高质量的微细轴以及微孔。     

微细电火花加工及表面重铸层电解去除装置的设计

微细电火花加工工件表面的重铸层影响加工精度和使用性能,为此设计了具有微细电火花加工及电解去除表面重铸层功能的集成装置。该装置由运动平台、伺服控制、脉冲电源等关键部分组成,集成了微细电火花和微细电解加工功能。针对不同加工方法采用不同的控制策略,解决了微细电火花加工与电解加工在同一设备上的集成问题。通过实验验证,该装置可以很好地实现微细电火花加工表面重铸层的在线去除,且去除厚度可通过改变加工参数的形式来控制。     

基于LIGA技术的微细电火花加工优化研究

比较了活动掩膜法与固定掩膜法得到的PMMA胶结构,实验表明固定掩膜法更适合于多次曝光.结合LIGA技术和微细电火花加工的优点,用LIGA技术制备出具有复杂形状的铜微细工具电极,再用该工具电极进行微细电火花加工,在不锈钢上加工出异形微细孔.并通过进一步调整电火花加工工艺参数,优化了加工尺寸精度和表面粗糙度.     

基于可重构方法设计的多功能微细电加工系统

简要介绍了可重构制造系统的概念和可重构机床的特点。基于可重构机床模块化的设计方法,设计了一套可进行微细电火花加工和微细电解加工的多功能微细电加工系统。在多功能系统中利用在线电解的方法制备微细钨电极,并用此电极进行电火花微细孔加工试验。     

A review on the conventional and micro-electrodischarge machining of tungsten carbide

The capability of machining intricate features with high dimensional accuracy in hard and difficult-to-cut material has made electrodischarge machining (EDM) process as an inevitable and one of the most popular non-conventional machining processes. In recent years, both EDM and micro-EDM processes are being used extensively in the field of mould making, production of dies, cavities and complex 3D structures using difficult-to-cut tungsten carbide and its composites. The objective of this paper is to provide a state of the art in the field of EDM and micro-EDM of tungsten carbide and its composites. The review begins with a brief introduction on the EDM and micro-EDM processes. The research and developments in electrodischarge machining of tungsten carbide are grouped broadly into conventional EDM of tungsten carbide, micro-EDM of tungsten carbide and current research trends in EDM and micro-EDM of tungsten carbide. The problems and challenges in the area of conventional and micro-EDM of tungsten carbide and the importance of compound and hybrid machining processes are discussed. A summary of the future research directions based on the review is presented at the final section.     

A study on the machining of high-aspect ratio micro-structures using micro-EDM

Micro-electro-discharge machining (micro-EDM or μ-EDM) has been gaining popularity as a new alternative method to fabricate micro-structures. The main advantages of the micro-EDM method are its low set-up cost, high accuracy and large design freedom. Compared to etching or deposition techniques, micro-EDM has the advantage of being able to fabricate complex three-dimensional shapes with high-aspect ratio. However, there are many operating parameters that affect the micro-EDM process. The fabrication of micro-electrodes on the machine is also an important process to remove the clamping error to maintain high accuracy in the machined micro-structures.

In this paper, the machining of micro-structures is divided into two basic processes. One is the on-machine fabrication of the micro-electrodes with high-aspect ratio, and the other is the EDM of the workpiece in micrometer range. An optical sensor has been developed to measure and control the dimension of the thin electrode during the tool fabrication process. Different methods have been investigated to fabricate a thin electrode into the desired dimension without deflection. The performance of the micro-EDM process is evaluated in terms of the material removal rate (MRR), tool wear ratio (TWR), and the stability of the machining. Influences of the various operating parameters of the micro-EDM process, such as the operating voltage, gap control algorithm, and resistance and capacitance values in the R–C spark control circuit, are discussed.     

Virtual EDM simulator: Three-dimensional geometric simulation of micro-EDM milling processes

In this paper a three-dimensional geometric simulation method of micro-EDM milling processes is proposed, which introduces a Z-map algorithm to precisely represent the geometries of a machined workpiece and the evolution of the tool shape caused by tool wear during the machining. The micro-EDM milling process is mathematically and geometrically modeled. In order to verify the performance of the developed simulator, an actual square cavity is machined and compared to the simulation result. The developed EDM simulator can be used for tool path generation for tool wear compensation as well as for prediction of tool wear.     

油泵油嘴复杂微结构微细电火花铣削加工试验

为解决油泵油嘴复杂微结构加工难题,开展了微细电火花铣削加工试验研究。在改进微细电火花加工机床系统的基础上,介绍了微细电火花铣削加工试验过程,并着重分析电极损耗补偿问题、加工效率问题的解决方法,进而完成油泵油嘴复杂微结构的精密微细电火花加工,总结出保证微细电火花铣削加工质量和加工效率的工艺规律。     

微细轴放电反拷成形方式的比较研究

阐述了放电反拷加工在微细轴、微细孔加工中的重要作用，介绍了4种常见的放电反拷加工方式。分析了不同进给方式对放电反拷加工结果的影响，给出了选择其中一种进给方式加工的微细轴实例。     

Deburring microfeatures using micro-EDM

Demands for miniature components are rapidly increased in the field of optics, electronics, and medicine. Various machining methods have been introduced for the fabrication of complex three-dimensional microfeatures. However, burrs, which are an undesired but unavoidable by-product of most machining processes, cause many problems in assembly, inspection, process automation, and precision component operation. Moreover, as feature sizes decrease, burr problems become more difficult to resolve. To address this problem, several deburring methods for microfeatures have been introduced, including ultrasonic, magnetic abrasive, and electrochemical machining methods. However, these methods all have some shortcomings, such as mechanical damage, over-machining, changes in the material properties of the finished surface, sharp edge blunting, and the requirement for subsequent processing to remove chemical residues. In this study, microelectrical discharge machining (micro-EDM) using low discharge energy and a small-diameter cylindrical tool is introduced for deburring microfeatures. This method allows the machining of very small amounts of conductive materials regardless of the material hardness, and provides easy access to small microscale features for selective deburring. The burr geometry generated by the micromilling process was investigated to establish a deburring strategy using micro-EDM. The proposed method was verified by experimental results using aluminum, copper, and stainless steel workpieces.     

微细电火花伺服扫描加工实验研究

进行微细电火花三维扫描加工时,由于电极损耗相对严重,导致形位公差难以保证和加工效率较低。该研究分析了电火花加工常规的电极损耗补偿方法,提出了基于放电间隙伺服控制进行电极损耗实时补偿的微细电火花三维扫描加工方法。辅助以电极电接触感知工件平面和加工原点,三维结构加工实验显示,采用间隙伺服控制进行电极损耗实时补偿有利于提高扫描加工微三维结构的形位精度和加工效率。     

Study on vibration-EDM and mass punching of micro-holes

In this research vibration-EDM is realized by the vibrating worktable designed, which is employed in the micro-punching machine we had already developed. It is found that larger feed and better surface finish can be achieved in micro-EDM with vibration machining. Circular and noncircular micro-electrodes of diameter below 200 μm were fabricated with vibration-EDM and the setup of u-axis. Experiments to punch micro-holes of diameter 200 μm on SUS304 stainless steel and brass strips were carried out. Mass punching of micro-holes on brass strip was performed successfully, using the automatic feeding system developed. The capability of micro-punching and effects of parameters on the quality of punched micro-hole are studied.