Low temperature annealing of ion-implanted KNbO3 channelwaveguides

Ion implanted KNbO₃ channel waveguides were annealed at 150°C for several hours. The waveguide losses were considerably reduced at visible and near-infrared wavelengths showing a minimum loss coefficient of 1.7 dB cm^-1 at 633 nm. No significant change of the refractive index profile was observed     

Influence of iron concentration on its structural position in KNbO3 lattice

In this paper variations of structural positions of Fe³⁺ ions in KNbO₃ crystals depending on iron content in growth components have been studied by the ESR method. Crystals of KNbO₃ have been grown by the Czochralski method. In addition to finding two EPR spectra published by Siegel we have found two novel types of paramagnetic centers (I, IV) caused by incorporation of iron impurity. One of them is observed at the low concentration of iron impurity. This center (I) has C_3V symmetry, S=5/2 and is due to incorporation of Fe³⁺ ions into the potassium positions of regular lattice. Increasing iron content in growth mixture up to 200 ppm resulted in disappearance of this center and two ESR spectra (II, III) described by Siegel arose. Limited content of (II) and (III) iron-containing defects is due to a restricted solubility of iron in KNbO₃ crystal. An increase of iron content in growth mixture over 400 ppm produces new a type of defect—(IV). This center has C_3V symmetry, electronic spin S=1/2 and is due to 3d⁵ electronic state of Fe³⁺ ion in strong crystalline field. The structural models of observed centers are discussed.     

声表面波在空心圆柱体中的传播特性分析

空心圆柱体管道类的声表面波检测是目前工程检测领域常见的问题.通过势函数和位移假设,建立了声表面波在空心圆柱体内传播的频散方程.数值计算结果表明在空心圆柱体内传播的声表面波与平板中传播的兰姆波存在类似,位移表现为对称和反对称模态.随着频率的增加,低阶模态的相速度逐渐趋于声表面波波速,同时空心圆柱体的壁厚对声表面波相速度的...     

声表面波在空心圆柱体中的传播特性分析

空心圆柱体管道类的声表面波检测是目前工程检测领域常见的问题.通过势函数和位移假设,建立了声表面波在空心圆柱体内传播的频散方程.数值计算结果表明在空心圆柱体内传播的声表面波与平板中传播的兰姆波存在类似,位移表现为对称和反对称模态.随着频率的增加,低阶模态的相速度逐渐趋于声表面波波速,同时空心圆柱体的壁厚对声表面波相速度的...     

Cerenkov-type second-harmonic generation in KNbO3channel waveguides

Cerenkov-type second-harmonic generation using KNbO₃ channel waveguides produced by MeV He⁺-ion implantation is presented from the viewpoint of device design. We derive the Cerenkov phase-matching condition for multimode waveguides and utilize Cerenkov-angle analysis as a tool for contact-free measurement of the effective indexes of guided modes of ion-implanted KNbO₃ channel waveguides at a wavelength of 860 nm. The measured mode indexes are in full agreement with calculations based on the effective-index method and the refractive index-depth profiles of ion-implanted KNbO₃ waveguides. The efficiency of Cerenkov-type second-harmonic generation is modeled using analytical approximations of the field distributions of the fundamental and the Cerenkov-radiation modes in embedded-channel waveguides. The acceptance width for Cerenkov-type frequency doubling in these ion-implanted waveguides is about one order of magnitude wider than for noncritical phase-matched second-harmonic generation in bulk KNbO₃ crystals. Based on the theoretical simulations, guidelines for optimum device design are given, and the possibility to increase the ultimate conversion efficiency to about 30% W^-1 cm^-1 through lateral-resonance enhancement of the second-harmonic field in KNbO₃ channel waveguides is demonstrated     

Theoretical study of mechanical properties of multi-layer ULSI interconnect dielectrics by surface acoustic wave method

The surface acoustic waves (SAWs) technique is becoming an attractive tool for accurately and nondestructively characterizing the mechanical property of the fragile low dielectric constant (low-k) thin film used in the advanced ULSI multi-layer interconnects. The dispersion features of SAWs propagating on the layered structure of low-k/SiO₂/Si substrate and low-k/Cu/Si substrate are investigated in detail. The influence of the film thickness on the dispersion curvature is provided as an instruction for an accurate and facile fitting process. Numerical results indicate that the mechanical property of low-k films is expected to determine effectively when the broadband frequency is up to 300 MHz.     

Theoretical and experimental investigations of a diode-pumpedquasi-three-level laser: the Yb3+-doped Ca4GdO(BO3)3 (Yb:GdCOB) laser

We present a theoretical and experimental analysis of a diode-pumped Yb³⁺-doped Ca₄GdO(BO₃)₃ (Yb:GdCOB) laser. A new model for a diode-pumped quasi-three-level laser is described. The effects of absorption saturation, temperature profile, and the beam quality M² factor of the pump diode have been taken into account, for the first time to our knowledge. We have obtained a good agreement between experimental measurements and theoretical calculations with two different pump wavelengths, 902 and 976 nm. Our model has given good predictions of the laser performances for different crystal temperatures and different M² factors of the pump beam. As much as 440 mW of output power (at 1082 nm) have been achieved for 640 mW of absorbed pump power at 976 nm, corresponding to one of the highest slope efficiencies (81%) ever obtained with Yb-doped lasers     

Magnetic properties of Co- and Mn-implanted BaTiO3, SrTiO3 and KTaO3

Implantation of Co or Mn into single-crystal BaTiO₃(K), SrTiO₃ or KTaO₃(Ca), followed by annealing at 700 °C, produced ferromagnetic behavior over a broad range of transition metal concentrations. For BaTiO₃, both Co and Mn implantation produced magnetic ordering temperatures near 300 K with coercivities 70 Oe. The M–T plots showed either a near-linear decrease of magnetization with increasing temperature for Co and a non-Brillouin shaped curve for Mn. No secondary phases were detected by high-resolution X-ray diffraction. The same basic trends were observed for both SrTiO₃ and KTaO₃, with the exception that at high Mn concentrations (5 at.%) the SrTiO₃ was no longer ferromagnetic. Our results are consistent with recent reports of room temperature ferromagnetism in other perovskite systems (e.g. LaBaMnO₃) and theoretical predictions for transition metal doping of BaTiO₃ [Nakayama et al., Jap. J. Appl. Phys. 40 (2001) L1355].     

碳酸锰和纳米钛酸钡的添加对钛酸钡陶瓷的影响

以钛酸丁酯和乙酸钡为起始原料,采用液相法制备了纳米钛酸钡。研究了纳米钛酸钡和碳酸锰的掺杂对普通亚微米级钛酸钡的形貌及介电性能的影响。结果表明,在普通钛酸钡中加入一定量的纳米钛酸钡可以促进晶粒的生长,同时提高陶瓷的介电常数。而在普通钛酸钡中加入一定量的碳酸锰则可以抑制晶粒的生长。但同时添加碳酸锰和纳米钛酸钡,碳酸锰对晶粒生长的抑制作用将居于主导地位,并且此时钛酸钡陶瓷的介电常数温度特性曲线与单独添加锰离子时的走势基本相同,室温附近的介电常数峰将由于钛酸钡陶瓷的细晶效应而弥散。     

Photoconductivity study of semiconductors using the surface acoustic wave convolver

Photoconductivity study of a semiconductor using the SAW convolver is presented. The semiconductor is placed either on or a small distance above the SAW delay line. A fast rise time pulse of light is applied to the semiconductor surface through the piezoelectric substrate, and the resulting change in the semiconductor conductance is observed by the relaxation of the SAW propagation loss. This technique has the important advantage that no ohmic contact to the semiconductor is needed.     

Low-frequency noise in Si0.7Ge0.3 surface channel pMOSFETs with ALD HfO2/Al2O3 gate dielectrics

Low-frequency noise was characterized in Si_0.7Ge_0.3 surface channel pMOSFETs with ALD Al₂O₃/HfO₂/Al₂O₃ stacks as gate dielectrics. The influences of surface treatment prior to ALD processing and thickness of the Al₂O₃ layer at the channel interface were investigated. The noise was of the 1/f type and could be modeled as a sum of a Hooge mobility fluctuation noise component and a number fluctuation noise component. Mobility fluctuation noise dominated the 1/f noise in strong inversion, but the number fluctuation noise component, mainly originating from traps in HfO₂, also contributed closer to threshold and in weak inversion. The number fluctuation noise component was negligibly small in a device with a 2 nm thick Al₂O₃ layer at the SiGe channel interface, which reduced the average 1/f noise by a factor of two and decreased the device-to-device variations.     

Dielectric properties of single crystals of Al2O3, LaAlO3, NdGaO3, SrTiO3, and MgOat cryogenic temperatures

A dielectric resonator technique has been used for measurements of the permittivity and dielectric loss tangent of single-crystal dielectric substrates in the temperature range 20-300 K at microwave frequencies. Application of superconducting films made it possible to determine dielectric loss tangents of about 5×10^-7 at 20 K. Two permittivity tensor components for uniaxially anisotropic samples were measured. Generally, single-crystal samples made of the same material by different manufacturers or by different processes save significantly different losses, although they have essentially the same permittivities. The permittivity of one crystalline ferroelectric substrate, SrTiO₃, strongly depends on temperature. This temperature dependence can affect the performance of ferroelectric thin-film microwave devices, such as electronically tunable phase shifters, mixers, delay lines and filters     

Electrooptic coefficient measurements in LiTaO3 andLiNbO3 waveguides

The magnitudes of linear electrooptic coefficients r₁₃ and r₃₃ in Zn:LiTaO₃ repoled channel waveguides are reported. The measurements were made at 0.633-μm wavelength using a Fabry-Perot interferometer. The waveguides were produced by diffusion from the vapor phase at a temperature above the Curie temperature. For full recovery of the Pockels effect, an electric field of 200 V/cm is needed during repoling. The measured values of r₁₃ and r₃₃ at 32-MHz modulation frequency are 7.2 and 30.3 pm/V, respectively. The difference between unclamped and clamped coefficients is comparable to that from bulk crystals. Measurements were also made on Ti:LiNbO₃ waveguides that did not require repoling, and good agreement with bulk crystal values was obtained     

Sensor effect in YBa2 Cu3 Oy

The high-T_c superconducting material YBa₂ Cu₃ O_y, well known as a 1–2–3 compound, shows other very interesting properties. One of them is very strong conductivity-oxygen content dependence. On the basis of our previous measurements, an investigation of dilatation synthesis, X-ray diffraction (XRD) analysis and conductivity measurements were performed. The results on quenched and slowly cooled samples show a phase transition region and an obvious interdependence between conductivity, unit cell volume and oxygen content.     

Towards metal electrode interface scavenging of rare-earth scandates: A Sc2O3 and Gd2O3 study

Amorphous Gd₂O₃ and Sc₂O₃ thin films were deposited on Si by high-pressure sputtering (HPS). In order to reduce the uncontrolled interfacial SiO_x growth, firstly a metallic film of Gd or Sc was sputtered in pure Ar plasma. Subsequently, they were in situ plasma oxidized in an Ar/O₂ atmosphere. For post-processing interfacial SiO_x thickness reduction, three different top metal electrodes were studied: platinum, aluminum and titanium. For both dielectrics, it was found that Pt did not react with the films, while Al reacted with them forming an aluminate-like interface and, finally, Ti was effective in scavenging the SiO₂ interface thickness without severely compromising gate dielectric leakage.     

Microstructure and dielectric response of SrTiO3/NdGaO3 interdigitated capacitors

Epitaxial strontium titanate (SrTiO₃ or STO) thin films were prepared by an off-axis pulsed laser deposition technique on neodymium gallate (NdGaO₃ or NGO) substrates held at temperature of 820 °C. This technique allows different film growth rates in a deposition. Coplanar capacitors were fabricated and dielectric responses were measured at 1 MHz and at 2 GHz, and from 300 K to 4 K. The electric field tunability of the dielectric constant and loss tangent were taken with a range of electric field. The structure and morphology of the films were analyzed using high-resolution X-ray diffractometry and atomic force microscopy, respectively. The results showed that the films are crystalline with (1 0 0) orientation and the grains are columnar. Increased in-plane grain size and reduced surface to volume ratio were found to play a major role in improved performance of the film coplanar capacitors. The film with the growth rate of approximate 40 Å/min showed the highest change in the dielectric constant with an electric field of 4 V/μm. The film also showed the largest in-plane grain size of about 3000 Å.     

Electro-optic effect in proton exchanged LiNbO3 andLiTaO3 waveguides

Electro-optic properties of proton-exchanged (PE) waveguide layers in LiTaO₃ and LiNbO₃ are studied and related to their optical characteristics. The proton-exchange process induces a degradation of the electro-optic activity in both types of waveguides, PE LiNbO₃ and PE LiTaO₃. The measured electro-optic effect is close to the detection sensitivity even when the exchange regime is performed at low temperatures for short periods of time. The PE samples have been annealed (APE waveguides) and the changes of their r₃₃ electro-optic coefficient has been followed at successively higher temperatures and periods of time. Subjected to annealing at temperatures between 265-420°C, the LiTaO₃ layers show a partially recovered r₃₃ coefficient, the recovering being different for quick and slow cooling of the samples. In thin APE LiNbO₃ waveguiding layers a restoration of r₃₃ up to 75% of the bulk value is observed due to the annealing at temperatures between 200-340°C     

Effects of surface pretreatment of polysilicon electrode prior toSi3N4 deposition on the electrical characteristicsof Si3N4 dielectric films

Effects of various surface pretreatments of polysilicon electrode prior to Si₃N₄ deposition on leakage current, time-dependent dielectric breakdown (TDDB) and charge trapping characteristics of thin Si₃N₄ films deposited on rugged and smooth poly-Si are investigated. Surface pretreatments consist of different combinations of HF clean, rapid thermal H₂ -Ar clean, and rapid thermal NH₃-nitridation (RTN) and are intended to modify the surface of bottom poly-Si electrode. Results show that RTN treatments lead to lower leakage current, reduced charge trapping, and superior TDDB characteristics as compared to rapid thermal H₂-Ar clean     

Characterization of the annealing impact on La2O3/HfO2 and HfO2/La2O3 stacks for MOS applications

The impact of various rapid thermal annealing used during the integration on the La₂O₃/HfO₂ and HfO₂/La₂O₃ stacks deposited by Atomic Layer deposition was analyzed. The consequences of lanthanum localization in such stacks on the evolution of the films during the rapid thermal annealing are investigated in term of morphology, crystalline structure, silicate formation and film homogeneity as a function of the depth. It appeared that the La₂O₃ location has an impact on the temperature of the quadratic phase formation which could be linked to the formation of SiOHfLa silicate and the resistance of the films to dissolution in HF 0.05 wt%.     

Theoretical modeling of optical amplification in Er-doped Ti:LiNbO3 waveguides

An accurate theoretical analysis is presented describing optical amplification in Er-diffused Ti:LiNbO₃ channel waveguides. It follows as far as possible the theory already developed for Er-doped fibers. As optical pumping around λ_p≈1.48 μm is considered, a quasi-two-level model for the Er³⁺ ions is used with wavelength-dependent cross sections. The optical gain in the 1.53 μm<λ<1.64-μm wavelength range is evaluated. The characteristic parameters, as Er concentration profile, cross sections, pump, and signal mode distributions and waveguide (scattering) losses are taken from experiments. Examples of numerically calculated pump-, small-signal-gain-, and ASE-evolutions are presented. The model has been tested by comparing computed and experimentally observed gain characteristics for Xˆ- and Yˆ-cut LiNbO₃; an almost quantitative agreement has been obtained