超精密平面磨床关键技术的发展

随着硬脆材料应用领域的扩大以及砂轮电解在线修整技术的发展,超精密磨削技术在近年来得到了飞速发展,其中超精密平面磨削技术的应用最为广泛。本文介绍了国内外超精密平面磨床的关键技术,包括总体结构、砂轮主轴及驱动系统、导轨及驱动系统、温度及热变形控制等。     

在线电解修整（electrolytic in-process dressing，EIPD）

金属基超硬磨料砂轮在线电解修整(EIPD)超精密镜面磨削技术是日本理化学研究所大森整博士等于1987年开发的超精密加工新技术，是对超精密磨削加工技术的重大改进。此技术可用于加工各种金属和非金属硬脆(如陶瓷、玻璃等)材料，适用性广泛，加工后的表面粗糙度Ra值可达到纳米级。     

聚晶金刚石的精密镜面磨削

聚晶金刚石是一种应用广泛的超硬材料,精密加工极其困难。本文引入在线电解修整(ELID)精密镜面磨削技术,对聚晶金刚石复合片进行了精密磨削实验,并对磨削过程和去除机理进行了分析。     

硬质合金超精密镜面磨削的实验研究

采用金属结合剂超硬磨料砂轮在线电解修整 (ELID)精密镜面磨削技术 ,对几类常用的硬质合金分别进行了精密镜面磨削实验 ,获得Ra6～ 17nm的高质量表面。     

微晶玻璃塑性超精密磨削加工的研究

本文对微晶玻璃脆性材料的超精密磨削加工作了大量的实验研究。研究结果表明，对于微晶玻璃等脆性材料，其表面粗糙度主要与砂轮的平均磨粒尺寸、砂轮速度、进给量及磨削深度等因素有关。当采用超精密磨床并在vs=1200m/min、f=0～200um/rev、ap=0.1～10um条件下磨削时，只有当金刚石砂轮的平均磨粒尺寸低于20um，才能在塑性磨削模式下加工出高质量的光滑表面，其磨削后的表现粗糙度为rms;8.021nm、Ra:6.200nm。     

ELID超精密镜面磨削中光磨对磨削效果的影响分析

ELID（在线电解修整）超精密镜面磨削机理具有许多特殊性。本文研究了光磨方式和光磨次数对磨削效果的影响规律，并分析了这种规律的形成原因。     

硅片的在线电解修整超精密磨削

用铸铁短纤维结合剂金刚石砂轮与脉冲电解修整相配合,对硅片进行了在线电解修整（ＥＬＩＤ）超精密磨削。研究了磨削工艺参数对硅片的加工质量及磨削效率的影响,采用原子力显微镜（ＡＦＭ）与扫描电子隧道显微镜（ＳＴＭ）对硅片磨削表面进行了形貌分析,探讨其微观磨削机理。     

ELID超精密磨削钢结硬质合金及其表面质量分析

运用铁基结合剂金刚石砂轮与专用高频脉冲电源相配合,对钢结硬质合金（ＧＴ３５）进行在线电解修整（ＥＬＩＤ）精密磨削。分析了ＥＬＩＤ超精密镜面磨削异相非均质材料钢结硬质合金表面的磨削机理,并通过原子力显微镜对其表面进行了微观表面形貌的分析。     

一种光学材料高效超精密加工方法

提出了结合磁流变光整加工(MRF)与在线电解修整(ELID)磨削对各种光学材料进行超精密加工的方法,即采用ELID磨削进行预抛光以获得高质量表面,然后采用MRF进行精密抛光以进一步减小表面粗糙度和形状误差.利用该组合工艺对BK7玻璃、硅晶玻璃、碳化硅等光学材料进行了超精密加工实验,可以在短时间内使光学材料工件表面得到亚纳米级的表面粗糙度和峰谷值为λ/20(λ为单位波长,λ=632.8nm)的形状精度.     

滚动轴承工作表面超精密加工技术研究现状

滚动轴承的工作表面包括套圈滚道表面和滚动体表面，其表面质量直接影响轴承的精度和性能。对滚动轴承工作表面超精密加工技术的发展概况和最新研究进展进行了介绍和分析，为进一步探索在线电解磨削、电化学磨削、双电解磨削和力流变抛光等技术在轴承加工中的重点应用提供参考。     

The Effect of Optimum In-Process Electrolytic Dressing in the Ultraprecision Grinding of Die Steel by a Superabrasive Wheel

In recent years, grinding techniques for precision machining of brittle materials used in dies, moulds and optical parts have been improved by using superabrasive wheels and precision grinding machines. Optimum dressing using a superabrasive wheel makes possible the effective ultraprecision grinding of die steel (STD-11). In this study, a new system and the grinding mechanism for optimum in-process electrolytic dressing are proposed. This method can carry out optimum in-process electrolytic dressing of a superabrasive wheel. Optimum in-process electrolytic dressing is a good method for obtaining efficiency and ultraprecision grinding of STD-11.     

A Study of the Development of an Ultraprecision Grinding System for Mirror-Like Grinding

In this study, a new system of optimum in-process electrolytic dressing and a microposition system are developed. This system can carry out optimum in-process dressing of superabrasive wheels, and gives effective control of the unstable dressing current and insulating layer. Therefore, ultraprecision grinding when using an optimum in-process electrolytic dressing system and microposition system is a good method for efficient mirror-like grinding of brittle materials.     

A Study of the Mirror-Like Grinding of Sintered Carbide with Optimum In-Process Electrolytic Dressing

Sintered carbide is widely used as the material for tools and die moulds, but it is difficult to grind because of its brittleness and hardness. A superabrasive diamond wheel is required for mirror-like grinding of this material. The completion of in-process dressing of a superabrasive wheel makes possible effective precision grinding of sintered carbide. This study proposes a new in-process electrolytic dressing system for this purpose. Using optimum in-process electrolytic dressing, the surface roughness is improved and the grinding force is very low. Optimum in-process electrolytic dressing has proved to be a good method for obtaining efficiency and mirror-like grinding of sintered carbide.     

Development and Analysis of Foil Electrodes for High Speed Electrolytic In-Process Wheel Dressing

This paper discusses the development of an effective electrolytic in-process dressing technique for high speed grinding. An innovative foil electrode has been designed and tested. The performance of a hydrodynamic foil electrode is discussed. Experimental investigations confirm that foil electrodes show significant improvement on electrolytic in-process dressing even when the electrolyte supply rate is low.     

硬质合金ELID镜面磨削的试验研究

硬质合金具有硬度高、强度好、耐腐蚀和耐磨损的特点,采用传统方法难以满足精密及超精密加工的技术要求,而且工序多、效率低、成本高。本文采用在线电解修整（ELID）技术对硬质合金进行精密镜面加工。通过试验,分析了磨削深度、电极间隙、占空比、电解电压对硬质合金表面粗糙度的影响规律,并得到了优化的EI。ID磨削工艺参数。使用优化后的ELID磨削工艺参数加工硬质合金材料可获得较低的表面粗糙度。     

A study of mirror-like grinding of fine ceramics with in-process electrolytic dressing

Fine ceramics have the properties of high hardness, chemical inertness, high thermal resistance and low electrical conductivity, but, because of high hardness and brittleness, they are very difficult to machine. Therefore, a superabrasive diamond wheel is used for mirror-like grinding of this material. In this study, an in-process electrolytic dressing system for carrying out mirror-like surface grinding was constructed. Using this system the grinding force for fine ceramics was reduced. This work shows that the application of electrolytic dressing is beneficial in obtaining a mirror-like surface when grinding fine ceramics.     

钢结硬质合金的精密镜面磨削技术的研究

入引了一种在线电解修整金属基超硬磨料砂办密镜面磨削新地钢结硬质合金进行了精密面磨削,得到了粗糙度为０．００３μｍ～０．０１１μｍ的镜面,一次磨削成形。效率高,可取代目前的多级研磨工艺。     

A study on wear mechanism and wear reduction strategies in grinding wheels used for ELID grinding

Metal-bonded superabrasive diamond grinding wheels have superior qualities such as high bond strength, high stability and high grindability. The major problems encountered are wheel loading and glazing, which impedes the effectiveness of the grinding wheel. Electrolytic in-process dressing (ELID) is an effective method to dress the grinding wheel during grinding. The wear mechanism of metal-bonded grinding wheels dressed using ELID is different form the conventional grinding methods because the bond strength of the wheel-working surface is reduced by electrolysis. The reduction of bond strength reduces the grit-depth-of-cut and hence the surface finish is improved. The oxide layer formed on the surface of the grinding wheel experiences macrofracture at the end of wheel life while machining hard and brittle workpieces. When the wheel wear is dominated by macrofracture, the wheel-working surface is free from loaded chips and worn diamond grits. When the oxide layer is removed from the wheel surface, the electrical conductivity of the grinding wheel increases, and that stimulates electrolytic dressing. The conditions applied to the pulse current influence the amount of layer oxidizing from the grinding wheel surface. Longer pulse ‘on’ time increases the wheel wear. Shorter pulse ‘on’ time can be selected for a courser grit size wheel since that type of wheel needs high grinding efficiency. Equal pulse ‘on’ and ‘off’ time is desired for finer grit size wheels to obtain stable and ultraprecision surface finish.     

ELID磨削工艺参数对磨削力的影响

小口径非球面玻璃透镜因具有极高的成像质量和成像分辨率而被广泛应用于中高档镜头中。在线电解修整(Electrolytic In-Process Dressing,ELID)磨削作为高效的镜面磨削方法被广泛应用于硬、脆等加工材料的镜面磨削。在精密平面磨床上安装喷嘴电解ELID磨削系统对硬质合金材料进行了喷嘴电解方式ELID磨削试验研究。实验分析了磨削力随着砂轮转速、工作台进给速度、磨削深度三个磨削工艺参数变化的规律。同时,相同的磨削参数下,比较喷嘴电解方式ELID磨削和普通磨削的磨削力研究。试验结果表明,喷嘴电解方式ELID磨削能明显降低磨削力,与普通磨削相比较,能更好的实现硬质合金材料的超精密磨削加工。