利用DEP和流体驱动的碳纳米管组装研究

碳纳米管在微结构上的组装是实现纳器件的关键.本论文分别采用电泳和流体驱动方法对两种不同的多壁碳纳米管进行了排布组装研究.电泳过程中频率一定时,增加电压或电泳时间,碳管沉积的密度增加;流体排布组装过程中,适当的流体速度得到较好的排布效果;较直的碳管取得更好的排布组装效果.同时根据实验结果对电泳和流体驱动两种组装方法的优势和问题进行了比较,结果表明,介电电泳组装能实现在电极间的定位组装,流体排布组装可实现较大面积的均匀排布.     

基于石英和载玻片的微电极制备工艺研究

研究以石英片和载玻片为基底的微电极制备工艺,以较常见的叉指型电极为例,基于光刻工艺中各工艺参数要求,重点研究曝光和显影时间对微电极的影响。制得的2种不同基底的电极,采用对比度、精度等关键参数进行分析,最终确定选用载玻片作为芯片基底并获得其最佳工艺参数;制作带电极的PDMS—玻璃微流控芯片,通过实验,成功观察到酵母菌细胞的正、负介电泳现象。     

绝缘体介电电泳细胞分离器件数值分析和优化

绝缘体介电电泳(iDEP)利用微流体管道中均匀绝缘柱阵列产生介电电泳(DEP)所需要的非均匀电场,实现微全分析系统(μTAS)和芯片实验室(LOC)中细胞等生物粒子的分离.对这种新型的iDEP器件进行理论分析,建立了数值计算方法.基于有限元数值计算理论,利用Ansys软件,计算了细胞的介电电泳力,验证了iDEP的富集原理,对iDEP器件的介质形状、尺寸、间距和微管道长度等参数进行了优化,提出了设计准则.选用间距10 μm,圆形,微管道长度3550 μm的5×5绝缘柱阵列,器件性能最优.     

基于柔性微电极的高灵敏度MEMS电化学地震检波器

为了进一步降低微机电系统(MEMS)电化学地震检波器敏感电极的加工成本,提升传感器的灵敏度,推动其在地球物理勘探等领域的发展,提出了一种基于柔性微电极结构的新型MEMS电化学地震检波器.与基于硅衬底制作敏感电极相比,敏感电极的制作方法可以通过有效减小电极间距,大幅度提升传感器的灵敏度,大幅降低工艺成本.介绍了柔性微电极的加工工艺流程,并对传感器的性能进行了测试.结果表明:提出的地震检波器较基于硅衬底微电极器件灵敏度提高了一个数量级.     

新型电化学CO气体传感器的研制

研制了一种用于测定CO的新型电化学式气体传感器,即把多壁碳纳米管自组装到铂微电极上,制备多壁碳纳米管粉末微电极,其电极在氧化过电位为+700mV时,对CO具有显著的电化学催化效应。以其电极为工作电极,Ag/AgCl为参比电极,Pt丝为对比电极,多孔聚四氟乙烯膜作为透气膜制成传感器。其传感器响应时间短、重复性好,能用于环境监测和控制。     

基于微环形阵列电极的细胞分离富集芯片的设计与实验研究

根据介电泳操作原理,设计了微环形阵列电极结构,建立了细胞分离富集芯片模型,采用COMSOL软件分析微环形阵列电极的电场分布和介电泳力方向并确定了最大和最小电场强度的位置,利用ITO玻璃和PDMS制备了细胞分离富集芯片.通过酵母菌细胞的介电泳富集实验和酵母菌细胞与聚苯乙烯小球的分离富集实验,明确了酵母菌细胞的临界频率,实现了酵母菌细胞和聚苯乙烯小球的分离富集.结果显示,在溶液电导率为60μs/cm,交流信号电压为8Vp-p时,酵母菌细胞在1kHz~45kHz频率范围内做负介电泳运动并富集在环形内部,45kHz为酵母菌细胞的临界频率,在45kHz~10MHz频率范围内做正介电泳运动并富集在环形边缘;1.5MHz时聚苯乙烯小球做负介电泳运动并富集在环形内部,富集倍数达到11.66.     

基于单壁碳纳米管的压阻式柔性传感器

一维纳米材料与微结构结合的纳器件制造过程,实现了微纳加工工艺上的创新升级,有可能突破微米级器件的性能极限。首先利用传统的硅微加工技术,在综合性能优异的聚酰亚胺PI(Polyimide)薄膜上制作金(Au)微电极,形成排列有序的平行电极对;然后通过交流介电电泳的方法在微电极对间实现单壁碳纳米管SWNTs(Single-Walled Carbon Nanotubes)一维定向排布;接着采用区域选择性电沉积技术定域沉积Au压覆SWNTs,改善SWNTs与电极的接触特性。最后,针对基于SWNTs的柔性微纳传感器进行了力电特性测试。结果表明:在环境温度为(23±5)℃,湿度为65±15%RH,0.1 V工作电压下,压阻因子约为443,精度约为5.16%。上述研究结果在柔性微纳器件的制作方面显示了一定的应用前景,为实现超微型化和高功能密度化的柔性器件铺平道路。     

MEMS结构中碳纳米管的电泳沉积及其场发射特性研究

利用电泳沉积的方法在MEMS结构特定位置上组装碳纳米管薄膜,以此作为发射体研制基于碳纳米管场发射的传感器,并对其场发射进行了测试和分析.电镜观测与场发射实验结果表明,利用电泳沉积方法可以只在MEMS结构的特定位置沉积碳纳米管薄膜,对于4μm的发射间隙、该薄膜的场发射开启电压约为3.6V～4V,发射电压20V时的发射电流可至28μA.这种“post-MEMS“的碳纳米管薄膜组装方法具有工艺简单的特点,同时避免了碳纳米管生长对MEMS工艺环境以及器件的污染、破坏,实现了纳米材料组装与MEMS工艺的兼容.     

电极形状对无创血糖检测精度影响的研究

在低频段时,为了提高基于射频信号的无创血糖检测的精度,本文探讨了圆形、方形、螺旋形电极分别在模拟的三种不同浓度血糖溶液中对S11参数的影响,从而分析电极形状对血糖检测精度的影响.研究表明:电极形状与血糖检测精度存在一定关系,在谐振点时,相较于方形电极和圆形电极,螺旋形电极所测得的S11参数幅值最小,其血糖检测精度最高,因此,该形状电极更适用于无创血糖检测.     

基于柔性衬底的三维生物刺激微电极阵列研究

设计了一种基于聚酰亚胺薄膜的三维生物刺激微电极阵列,用于植入式人造视网膜应用.采用非硅MEMS技术,在柔性衬底上制备出具有生物相容性和化学稳定性,电极高度为80 μm的生物刺激电极阵列,通过PDMS牺牲层实现器件从基底的完整释放.实验中器件以聚酰亚胺和PDMS封装,电极柱和焊盘均镀金,从而提高电极的生物相容性.采用三电极法对微电极进行了电化学性能测试,在10-1～105Hz频率范围内,其阻抗为1.5～0.3 kΩ.制造出的器件尺寸小,质量轻,可靠性高,机械柔性好,符合生物电刺激要求.     

Continuous size-based focusing and bifurcating microparticle streams using a negative dielectrophoretic system

Dielectrophoresis (DEP) is an electrokinetic phenomenon which is used for manipulating micro- and nanoparticles in micron-sized devices with high sensitivity. In recent years, electrode-based DEP by patterning narrow oblique electrodes in microchannels has been used for particle manipulation. In this theoretic study, a microchannel with triangular electrodes is presented and a detailed comparison with oblique electrodes is made. For each shape, the behavior of particles is compared for three different configurations of applied voltages. Electric field, resultant DEP force, and particle trajectories for configurations are computed by means of Rayan native code. The separation efficiency of the two systems is assessed and compared afterward. The results demonstrate higher lateral DEP force, responsible for particle separation, distributed wider across the channel width for triangular shape electrodes in comparison with the oblique ones. The proposed electrode shape also shows the ability of particle separation by attracting negative DEP particles to or propelling them from the flow centerline, according to the configuration of applied voltages. A major deficiency of the oblique electrodes, which is the streamwise variation of the lateral DEP force direction near the electrodes, is also eliminated in the proposed electrode shape. In addition, with a proper voltages configuration, the triangular electrodes require lower voltages for particle focusing in comparison with the oblique ones.     

Fabrication of bio/nano interfaces between biological cells and carbon nanotubes using dielectrophoresis

The authors have previously demonstrated the manipulation of bacteria and carbon nanotubes (CNTs) using dielectrophoresis (DEP) and its application for various types of biological and chemical sensors. This paper demonstrates simultaneous DEP handling of bacteria and CNTs, which are mixed and suspended in water. The CNTs were solubilized in water using microplasma-based treatment. When a microelectrode was energized with an ac voltage in the suspension of Escherichia coli (E. coli) cells and multi-walled CNTs (MWCNTs), both of them were simultaneously trapped in the microelectrode gap. Scanning electron microscopy (SEM) images revealed that E. coli cells were trapped on the surface or the tip of MWCNTs, where the electric field strength was intensified due to high aspect ratio of MWCNTs. As a result, bio/nano interfaces between bacteria and MWCNTs were automatically formed in a self-assembly manner. A potential application of the DEP-fabricated bio/nano interfaces is a drug delivery system (DDS), which is realized by transporting drug molecules from CNTs to cells across the cell membrane, which can be electroporated by the local high electric field formed on the CNT surface.     

二氧化碳薄膜微电极器件的制作 及其特性研究

提出一种用微细加工技术构制的二氧化碳薄膜微电极器件。这类器件具有常规微电极所特有的全部优点，而且结构紧凑，便于集成化。用作电流型二氧化碳气敏器件，在室温下有良好的工作特性：响应电流在整个ＣＯ２浓度范围内呈线性，并通过原点；９０％响应时间约３０ｓ；连续工作６ｈ性能稳定，重现性好。     

牵引电机主极裂纹涡流检测原理与设计

本文针对电力机车牵引电机主极断路故障，阐述了检测电机主极裂纹的原理及具体电路设计方案，提出了主极裂纹检测过程中克服提离效应的方法和提高测量精度的措施。当主极有裂纹缺陷时，通过探测线圈的磁通量就会发生变化，根据涡流大小及分布情况可检测出影响线圈电特性的参数．从而发现牵引电机主极裂纹故障。由本方案设计的牵引电机主极裂纹涡流检测装置具有频率可调，测量结果稳定且精度高等优点。     

Development of a μ-concentrator Using Dielectrophoretic Forces

We present the simulation, development and experimental validation of a μ-concentrator based on dielectrophoresis, DEP.In a first step dielectrophoretic force fields of various electrodes are computed and compared. The simulation results for various electrode dimensions may serve as a general design rule for DEP devices. Favorable electrode designs were realized in gold on glass substrates. The performance of the DEP chips is validated by concentration of E.-Coli bacteria, a separation efficiency of 99.93% was achieved. Furthermore, we outline how the combination of forced convection and DEP allows for bacteria separation at increased flow rates.     

A novel technique for fabrication of micro- and nanofluidic device with embedded single carbon nanotube

This paper describes a novel technique for fabrication of micro- and nanofluidic device that consists of a carbon nanotube (CNT) and a polydimethylsiloxane (PDMS) microchannel. Single CNT was placed at desired locations using dielectrophoresis (DEP) and PDMS microchannel was constructed on the aligned CNT via photolithography and soft lithography techniques. This technique enables a CNT to be seamlessly embedded in a PDMS microchannel. Moreover, controlling the PDMS curing condition enables the construction of the device with or without a CNT (the device without CNT has a trace nanochannel in PDMS). Preliminary flow tests such as capillary effect and pressure-driven flow were performed with the fabricated devices. In the capillary effect tests, the flow stopped at the nanochannel in both devices. In the pressure-driven flow lower flow resistance was observed in the device with a CNT.     

非满管电磁流量计液位测量方法研究

在研究非满管电磁流量计液位测量所要解决的技术问题基础上,提出了一种长弧形电极液位测量方法。该方法是在测量管壁上设置一对长弧形电极作为流速和液位信号的测量电极,在管壁底部设置一对激励电极。通过在激励电极上施加电压幅值恒定的交流信号,在测量电极上得到反映液位高度变化的电压信号。理论分析和实验结果表明传感器对液位测量具有较高的灵敏度且不受被测导电液体电导率变动的影响,适用于对污水排放等场合的非满管流的测量。     

电导法原油含水率测量传感器的模型优化与仿真

电导法原油含水率测量是基于阵列电极传感器的一种测量方法,电极系的结构与参数对传感器性能有着重要影响.拟研究电极系传感器结构的优化设计方法,在建立传感器电场分布理论模型的基础上,利用ANSYS有限元软件仿真电极系传感器不同参数下的电场分布,分析电极环宽度、激励电极对间距、测量电极间距等参数对传感器性能的影响.依据仿真结果,确定传感器的优化参数,并对传感器进行了灵敏度的模拟测试,测试结果显示:传感器灵敏度仿真结果与实际测试结果一致性较好;在高含水(大于85%)的油水两相流含水率测试精度可达3%.测试结果验证了传感器理论和仿真分析方法的有效性,为优化设计传感器提供一种有效的方法.