基于QCM的不同形貌ZnO的湿敏性能研究

通过水热法制备了粒状和片状两种不同形貌的ZnO,以这两种形貌的ZnO修饰QCM作为湿度传感器,结合饱和盐溶液法(相对湿度:11％～95％RH)和H2O分子在ZnO上的吸/脱附机制对此新型压电传感器的湿敏性能(线性度、响应时间和回复时间)进行评价和研究.实验结果表明:粒状ZnO修饰的QCM传感器相较于片状ZnO修饰的QCM传感器线性度更好,响应时间和恢复时间更短,且该型传感器在低湿条件(33％,55％ RH)恢复时间大于响应时间而在高湿条件(75％,85％,95％ RH)恢复时间小于响应时间.实验和理论研究说明:ZnO微观形貌对该型传感器湿敏性能至关重要,而H2O分子在ZnO上的吸/脱附机制决定了其恢复/响应时间随湿度变化的技术特点.     

氧化锌纳米棒/单晶硅的酒精传感器研究

首先采用射频溅射在单晶硅(Si)上制备氧化锌(ZnO)薄膜,作为生长ZnO纳米棒的晶种层,再在水热条件下生长ZnO纳米棒.X射线衍射、X射线能量色散谱,扫描电镜及室温光致发光谱对样品的物相结构、成分、表面微观形貌和晶体缺陷进行了表征.结果表明合成的ZnO纳米棒是六方纤锌矿结构,长径比较高,结晶良好.研究了ZnO纳米棒/单晶Si传感器在空气和酒精气体中的电压-电流(Ⅰ-Ⅴ)特性,阻抗谱及响应-恢复时间.该传感器在+6 V的偏置电压下,其电阻在0.08 g/L酒精气体中下降71%,响应时间小于1 min,可以作为一种新型的酒精气体传感器.     

山东大学研制出ZnO气敏传感器

由山东大学蒋民华院士等承担的山东省科技攻关项目——纳米材料和器件的制备、表征及其应用，日前通过了山东省科技厅组织的技术鉴定。该课题首次利用多孔纳米固体研制出ZnO气敏传感器，成功解决了困扰传感器生产厂家多年的ZnO气敏传感器本征电阻过高和工作稳定性较差的问题。该项目研制的Ⅲ—Ⅴ族半导体纳米复合发光材料和氧化锌多孔纳米固体气敏传感器为国内外首创。     

氧等离子体处理ZnO纳米纤维材料的制备及其对丙酮气敏性能的研究

采用静电纺丝法制备了ZnO纳米纤维材料并使用氧等离子体对其进行表面处理.通过X射线衍射(XRD),扫描电子显微镜(SEM),BET比表面积测试以及X射线光电子能谱分析(XPS)等手段对样品的结构与形貌进行了表征分析.将氧等离子体处理前后的ZnO纳米纤维分别制成气体传感器,对浓度为1×10-6~100×10-6(体积分数)丙酮气体的敏感特性进行了测试分析.测试结果表明,氧等离子体处理后的ZnO纳米纤维响应值较未处理的ZnO纳米纤维有大幅度的提升,最佳工作温度也有所降低,且对甲醛、苯、甲苯、二甲苯等几种干扰气体表现出更好的选择性.从晶粒间势垒和耗尽层厚度等角度初步分析了氧等离子体处理改善ZnO气敏特性的机理.     

氧化锌基乙醇气体传感器研制及特性研究

利用水热法合成了不同形貌的ZnO基纳米结构气敏材料,利用X射线衍射仪(XRD)和扫描电子显微镜 (SEM)对其进行了结构表征和分析。制备成旁热式气体传感器,测试了其对乙醇(C2H5OH)的气敏特性。实验结果表明：基于ZnO纳米花制作出的传感器比纳米球状传感器对C2H5OH具有更高的灵敏度,在200oC下对50ppm的C2H5OH灵敏度为34.7,是球状ZnO基传感器的1.7倍;两种ZnO基传感器对C2H5OH均表现出较好的重复性,在最佳工作温度下对C2H5OH的响应恢复时间均在15秒以内;最后对ZnO基C2H5OH气体传感器的气敏机理进行了讨论。     

曲边ZnO微米线酒精气敏传感器件的研究

通过改变生长源中氧化锌与碳粉的比例,利用化学气相沉积的方法生长出曲边ZnO微米线,并通过扫描电子显微镜对曲边ZnO微米线进行形貌表征.表征结果显示曲边ZnO微米线的横截面每一条边均向内弯曲,这主要是由于生长过程中ZnO晶体快速形核,从而导致微米线非线性生长.利用单根曲边ZnO微米线制备酒精气敏传感器,研究其气敏性能.由于曲边ZnO微米线比表面积较大,同时特殊的形貌使其表面更具活性,从而使曲边ZnO微米线酒精气敏器件气敏性能更好,恢复时间更快,这也使得曲边ZnO微米线在酒精测试方面更具推广性.     

ZnO薄膜在传感器方面的最新应用进展

ZnO薄膜是一种新型的、性能优良的半导体材料.本文详细介绍了ZnO薄膜在声光器件、压电器件、气敏元件、声表面波器件、压力元件、湿敏元件和紫外探测器等方面的最新应用进展,并对该材料的发展趋势进行了展望.     

类积木状ZnO气体传感器的制备及其气敏特性研究

采用水热法合成了类积木状ZnO纳米结构,利用X射线衍射仪(XRD)、X射线能谱分析仪(EDS)和扫描电子显微镜(SEM)对制备的ZnO纳米结构的物相、化学组分及微观形貌进行了表征与分析。对基于ZnO纳米结构的气体传感器进行甲烷气敏特性测试,测试结果表明:该传感器的最佳工作电压为5 V,在该电压下对体积分数为200×10-6甲烷气体的灵敏度可高达55.4%,最低检测限为1×10-6。     

片上加热电容式湿度传感器研究

提出了一种集成加热结构的电容式湿度传感器结构。对传感器的稳态加热特性进行了分析,并利用红外线热成像技术对传感器加热过程以及稳态温度响应进行了研究。在5 V电压信号的加热下,传感器温度上升约30℃,且温度分布均匀,传感器敏感区域温差<4℃。在加热与不加热条件下,分别对传感器的湿度敏感特性与响应时间特性进行了测试。不加热时,传感器的灵敏度为0.00913 pF/%rH,回滞≈0.12 pF,响应时间约120.8 s;以5 V脉冲信号加热后,传感器灵敏度为0.00903 pF/%rH,最大回滞≈0.025 pF,响应时间约75.2 s。加热后传感器性能有了显著提高。     

基于ZnO传感器的高流速气体压力测试

针对机械系统中气体轴承间气膜压力的分布检测,提出并研发了一种基于ZnO传感器的检测方法。ZnO纳米颗粒敏感材料采用化学沉淀法制备;用X射线衍射和扫描电镜对其进行了表征。利用ZnO传感器的响应电压与动态气体压力的关系,成功测试出高压动态气体的压力。分析了氧气吸附、压电效应和热传导对响应电压的影响,拟合出对应的气体压力-响应电压关系曲线,本研究为高流速气体压力的测试提供了一种新途径。     

A high-sensitivity polyimide capacitive relative humidity sensorfor monitoring anodically bonded hermetic micropackages

This paper presents the design, fabrication and complete characterization of a high-sensitivity polyimide-based humidity sensor for monitoring internal humidity level in anodically bonded hermetic micropackages. This capacitive sensor is 1 mm on a side and utilizes CU1512 polyimide film with a thickness in the range from 300 Å to 1200 Å sandwiched between two metal electrodes to sense moisture. The measured sensitivity for a sensor with a 1200-Å-thick film is 0.86 pF/%RH, and for a 300-Å-thick sensor is 3.4 pF/%RH. The sensor has been exposed to and survived a one-hour test at 400°C, which is the temperature typically used to perform anodic bonding. Measurements show a drift of less than 1% RH at 50% RH and 37°C for 48 h, and a hysteresis of <2% RH over a range from 30 to 70% RH for a 1200-Å-thick polyimide film sensor. The measured breakdown voltage of the sensor (1200 Å thick) exceeds 20 V and agrees well with other results     

ZnO系薄膜对NOx气体的气敏光透射特性

用射频磁控溅射方法制备了纯氧化锌（ＺｎＯ）薄膜和掺Ａｇ、掺Ｐｔ与掺Ｐｄ的ＺｎＯ三种气敏光学薄膜。测量了这些薄膜在ＮＯｘ气体中的透射光谱,然后由透射光谱获得了灵敏度的变化规律,并用吸附平衡关系式解释了气敏光透射特性,最终优化得到一种对ＮＯｘ气体灵敏度高的掺Ａｇ氧化锌薄膜。     

Synthesis of ZnO thin films and their application as humidity sensors

Humidity sensors were fabricated using ZnO thin films synthesized on a Si wafer substrate. The ZnO thin films were grown via a vapor solid (VS) approach at temperatures ranging from 400 to 700 °C. Experiments were executed to observe the relationships between the relative humidity (RH) and resistance of these devices fabricated under various VS temperatures. Experimental results show that the ZnO thin films grown at a temperature of 700 °C using the VS approach exhibits an optimum sensitivity to humidity. The measured sensor resistance ranges from 495 × 10⁶ to 46 × 10³ Ω for RH ranging from 11 to 95 % at room temperature. The variance of sensor resistance exceeds 10⁴ times, indicating that the proposed method can produce a highly sensitive humidity sensor.     

LPG sensing properties of ZnO films prepared by spray pyrolysis method: Effect of molarity of precursor solution

Nanocrystalline ZnO films were deposited onto glass substrates by spray pyrolysis of zinc nitrate solutions and used as a liquid petroleum gas (LPG) sensor. The dependence of the LPG sensing properties on the molar concentration of zinc nitrate solutions was investigated. The ZnO films were oriented along (0 0 2) with the hexagonal crystal structure. The grain size and grain density increased with an increase in molar concentration of zinc nitrate solutions. The gas sensing properties for LPG of the ZnO films for LPG with different grain sizes were measured at different temperatures. The maximum sensitivity of 43% at the operation temperature of 673 K was found for the ZnO film prepared by spraying a 0.1 M solution. The ZnO thin films exhibited good sensitivity and rapid response–recovery characteristics to LPG. Further, it has been shown the gas sensitivity of the ZnO gas sensor depends upon its grain size.     

Improving the ethanol sensing of ZnO nano-particle thin films—The correlation between the grain size and the sensing mechanism

ZnO and Sn doped ZnO (ZnO:Sn) thin films at various doping concentrations from 1 to 10 at.% were prepared by the sol-gel method for an ethanol sensing application. The Sn doping significantly influenced the film growth, grain size and response of the films. The XRD patterns showed that the hexagonal wurtzite structure of the ZnO film was retained even after the Sn doping. The crystallite grain sizes of the ZnO:Sn thin films at 0, 2 and 4 at.% were estimated by using the typical Scherrer's equation. The crystalline quality of the films at 6, 8 and 10 at.% of Sn was degenerated. Typical FESEM images demonstrated the different morphologies for the ZnO:Sn thin films at various Sn concentrations; many pores of various dimensions were observed depending on the doping level. A TEM analysis of the ZnO:Sn thin films at 0, 2 and 4 at.% was performed to verify the grain size. The optimum Sn doping level of ZnO:Sn thin film for ethanol sensing was estimated to be 4 at.%. The 4 at.% sample obtained the highest response to ethanol vapor in the 10-400 ppm level range at a low operating temperature of 250 °C. The sensing mechanism was explained by a variation in the sensitivity model from a neck-grain-boundary controlled sensitivity to a neck-controlled sensitivity. Our work demonstrates the ability to reduce the working temperature as well as to increase the response of ZnO thin film based gas sensors to detect ethanol, which would be of great merit for commercialized applications.     

A parallel hybrid numerical algorithm for simulating gas flow and gas discharge of an atmospheric-pressure plasma jet

Development of a hybrid numerical algorithm which couples weakly with the gas flow model (GFM) and the plasma fluid model (PFM) for simulating an atmospheric-pressure plasma jet (APPJ) and its acceleration by two approaches is presented. The weak coupling between gas flow and discharge is introduced by transferring between the results obtained from the steady-state solution of the GFM and cycle-averaged solution of the PFM respectively. Approaches of reducing the overall runtime include parallel computing of the GFM and the PFM solvers, and employing a temporal multi-scale method (TMSM) for PFM. Parallel computing of both solvers is realized using the domain decomposition method with the message passing interface (MPI) on distributed-memory machines. The TMSM considers only chemical reactions by ignoring the transport terms when integrating temporally the continuity equations of heavy species at each time step, and then the transport terms are restored only at an interval of time marching steps. The total reduction of runtime is 47% by applying the TMSM to the APPJ example presented in this study. Application of the proposed hybrid algorithm is demonstrated by simulating a parallel-plate helium APPJ impinging onto a substrate, which the cycle-averaged properties of the 200th cycle are presented. The distribution patterns of species densities are strongly correlated by the background gas flow pattern, which shows that consideration of gas flow in APPJ simulations is critical.     

La掺杂ZnO和SnO2薄膜的气敏特性

真空蒸发沉积薄膜再经热氧化获得n型掺La的ZnO和SnO2薄膜(玻璃衬底)研究掺La含量与热氧化工艺对薄膜的物相结构、表面形貌和气敏特性的影响.实验给出:掺La使薄膜表面颗粒细化,随La含量增加,ZnO,SnO2薄膜平均晶粒尺寸均增大.掺La可明显降低2种薄膜的气敏工作温度相比之下,掺La对ZnO薄膜的灵敏度改善明显优...     

稀土Nd掺杂纳米ZnO薄膜气敏特性

研究了用真空气相沉积法在玻璃衬底上制备掺稀土Nd的ZnO薄膜的气敏特性,实验给出,经温度为500℃,时间为45min的氧化、热处理的掺Nd的ZnO薄膜的晶粒尺寸、结构特性均发生变化。随掺Nd质量分数的增大,薄膜的晶粒尺寸从53nm减小至20nm。经掺Nd(质量分数为4.96×10-2)后纳米ZnO薄膜对乙醇气体的选择性和灵敏性均得到明显的改善。在1.5×10-3体积分数的乙醇气体中最高灵敏度为34,相应的薄膜工作温度为200℃。     

TiO_2/V_2O_5双层薄膜的TMA气敏特性研究

报道了以TiCl4 和V2 O5为源 ,采用等离子增强化学气相沉积 (PECVD)和溶胶 -凝胶 (sol-gel)技术制备了TiO2 /V2 O5双层薄膜 ,将该薄膜沉积在带有金梳状电极的陶瓷管和硅片上 ,进行了X射线衍射(XRD)分析 ,并且测量其对三甲基胺 (TMA)的气敏特性。结果发现该双层薄膜对TMA具有高灵敏度、良好的选择特性和快速的响应恢复特性。