水平集演化中的奇点与改进的窄带算法

对保持距离函数约束的水平集演化过程作了系统的分析,提出了奇点的概念,并给出了奇点的重要性质及其证明,详细分析了奇点在水平集演化过程中的数值影响.在此基础上对窄带算法作了改进,以避免奇点的不良影响,同时窄带宽度具有自适应性.实验结果表明,改进的窄带算法具有较好的鲁棒性.     

窄带水平集方法

为了提高水平集方法的实用性,降低其计算量,提出了一种新的窄带水平集方法.该方法设计了一种特殊的窄带结构,改进了传统的快速扫描法,并将其用于窄带水平集函数的重新初始化.引入了自适应性到测地线活动轮廓模型,使得演化过程中既能保持稳定性,又能加快演化速度.实验结果表明,该方法降低了用传统窄带水平集方法求解测地线活动轮廓模型的计算复杂度,比传统的窄带水平集方法具有更高的稳定性与求解效率.     

基于水平集方法的软组织图像序列分割

医学图像分割是医学图像处理中的关键问题之一.图像序列的分割操作是医学图像三维重建的必要准备,而软组织图像分割则是医学图像分割中的一大难点.基于曲线演化理论的,借助偏微分方程等数学工具的水平集方法已经被广泛应用于医学图像分割领域.介绍了水平集方法的数学模型,并设计了一种基于窄带水平集方法的,专门针对软组织图像分割的算法.用边界追踪等方法提取第一层图片中的软组织相关轮廓;将它们作为初始水平集曲线,再利用窄带水平集方法进行演化;经过两个阶段的迭代处理,最终自动分割出整个软组织图像序列.实验表明该算法具有较高效率、分割结果精确,所产生的分割结果可以作为三维重建的合适的数据集.     

MEMS降阶宏模型仿真平台研究

随着MEMS系统级设计成为研究的热点,MEMS系统级CAD的开发日益重要.论文介绍了一种基于降阶宏模型MEMS系统级仿真平台,通过有限元方法提取MEMS器件几何物理数据.建立MEMS器件有限元模型.利用Krylov子空间算法缩聚自由度建立宏模型,通过系统级仿真平台对此进行系统级仿真. 整个流程通过VC++编译器调用ANSYS、嵌入封装的算法动态链接库、集成SIMULINK系统仿真器完成.并用双端固支梁实例对所有模块加以验证,仿真结果准确,计算效率较高.     

MEMS工艺中反应离子深刻蚀硅片的数值模型研究

反应离子深刻蚀(DRIE)是目前MEMS加工中便捷有效的主流加工工艺之一.开发较为快捷有效的工艺仿真模型与工具,对于工艺的数值预报,有着重要的作用.通过对现有表面演化算法的比较,建立了一种基于单一表面演化算法的反应离子深刻蚀模型,有效地解决了运算效率、材料区分等问题及对原表面演化算法稳定性的改善,并对深刻蚀中的淀积模型进行了改进.与实验结果较为一致的模拟结果验证了本文模型的有效性.     

LATE水平集图像分割模型的矩形窄带法

窄带法是水平集图像分割的一种常见的加速方法.传统窄带仍然存在冗余的计算区域;传统窄带法与LATE （Local Approximation of Taylor Expansion）水平集模型结合时,图像分割效率反而可能下降.针对这些问题,本文提出了一种基于LATE水平集图像分割模型的矩形窄带法.在每次LATE水平集迭代之前,对水平集做如下窄带处理.首先找出水平集的所有过零点;然后对过零点做活动约束,剔除不活动的过零点,有效缩小窄带范围;再对活动约束的过零点生成矩形窄带;对重叠的矩形窄带进行合并优化,使得矩形窄带总面积尽可能小.最后,在矩形窄带范围内求解水平集微分方程,更新水平集,完成本次迭代.在水平集演化的不同阶段,对传统窄带法的窄带面积与本文矩形窄带面积进行了比较.随着迭代次数增加,矩形窄带面积与传统窄带法的窄带面积之比逐渐减小到0,说明矩形窄带法有效地减少了冗余计算量.针对不同程度的灰度不均匀图像,本文方法与LATE方法、结合LATE模型的直接窄带法、以及结合LATE模型的DTM窄带法进行了比较.直接窄带法和DTM窄带法的分割速度反而慢于LATE方法.对灰度严重不均匀的图像,直接窄带法和DTM窄带法的分割质量受到了较大影响.本文方法在保持较好分割效果的条件下,分割速度快于LATE方法.本文的矩形窄带方法有效地降低了算法复杂度,提高了图像分割效率.     

基于小波包变换的DS/FH系统抗窄带干扰研究

为了进一步提高直接序列/跳频(DS/FH)扩频系统的抗干扰能力,基于小波包变换结合递归最小二乘算法设计了一种变换域自适应干扰抑制算法,该算法采用小波包分解定位窄带干扰,递归最小二乘算法抑制窄带干扰.通过蒙特卡罗仿真分析在增加抗干扰模块后,DS/FH系统工作在准静态时,在不同信噪比条件下抗窄带干扰性能.仿真结果表明:该算法具有较强的自适应性以及抗窄带干扰能力,其性能优于传统的直接置零法,适用于多音干扰下的恶劣通信环境.     

基于改进稀疏场算法的水平集形状过渡

水平集进化是基于体模型进行三维形状过渡的常用方法,窄带算法和稀疏场算法能高效实现水平集进化,窄带算法的结果较为平滑,稀疏场算法速度更快.一方面通过改进稀疏场算法应用于欧氏距离模型提高速度,另一方面运用窄带算法弥补稀疏场算法的误差.提出用拓扑关系代替距离值范围定义各层体素集,并通过单侧活动集定义使算法更为高效和鲁棒.稀疏场算法因为欧氏距离的近似计算引起误差,在过渡的中后期走样明显,为此,提出了均值平移和窄带回退两种反走样方法对过渡模型进行平滑,前者简单、快速,后者失真度低.     

低轨卫星扩频通信中干扰信号的优化控制

在低轨卫星扩频通信系统的研究中,存在人为的或者随机的窄带干扰信号.针对窄带干扰会严重影响卫星扩频系统的正常通信,为保证在一定功率干扰下通信系统的正常工作,采用准确干扰识别技术和干扰消除技术对抗窄带干扰,采用无失真的变换算法是研究了窄带干扰抑制技术的主要手段,包括时域和变换域算法.提出了一种基于快速 ELT 变换的稳健窄带干扰抑制技术,在变换域实现对干扰信号的识别与滤除,并进行了仿真.仿真结果表明快速 ELT 算法的抗窄带干扰技术可有效地识别并滤除窄带十扰,明显降低系统的误码率.     

基于MEMS CAD加工工艺仿真研究

在MEMS设计中需要解决工艺设计的问题,基于MEMS CAD软件对MEMS关键加工工艺进行仿真研究,对于MEMS工艺水平的提高有着重要的意义.本文首先探讨了MEMS加工工艺种类和工艺建模,然后以单晶硅各向异性腐蚀为例,借助MEMS CAD软件ACES对硅的湿法腐蚀工艺情况进行了仿真,其仿真结果对于基于MEMS CAD加工工艺进一步研究有一定的参考价值.     

Free-Form Simulation of Sequential Etching and Surface Characterization for 3-D MEMS Fabrication

A new diffusion-based simulation model of isotropic wet etching and free-form surface characterization method for 3-D free-form microelectromechanical systems (MEMS) fabrication is presented in this paper. To simulate the etching process, a diffusion-based model solved by the finite-element method (FEM) has been developed, allowing extraction of more accurate etch-front data at discrete time steps. In the developed method, free-form MEMS objects are modeled as B-spline functions with material concentration. Finite elements are generated by discretization in the parametric domain of the free-form object and mapping back to the Euclidean space. Points on the etch front are extracted using a Z-map method. The extracted point data are characterized to obtain a B-spline representation of the etch-front surface. Examples from the isotropic etching simulation of 2-D and 3-D objects with both regular and free-form geometry are presented. The developed method allows the simulation of 3-D objects with free-form input and free-form mask opening and facilitates the simulation of sequential etching of free-form objects with irregular mask openings. This paper also discusses applications of the developed method in MEMS process planning that can be realized by taking advantage of the better control of geometry that it provides in MEMS fabrication.     

元胞自动机方法在MEMS工艺模拟中的应用

随着计算机技术的发展和MEMS(micro-electro-mechanical system)自身发展的需要,应用元胞自动机方法模拟MEMS加工工艺的研究发展迅速.首先,简要介绍了元胞自动机原理,然后,综述了元胞自动机方法在MEMS工艺模拟中的应用现状,分析了应用元胞自动机方法模拟MEMS加工工艺的前景和方向.     

Uncertainty quantification of MEMS devices with correlated random parameters

The concern about process deviations rises because that the performance uncertainty they cause are strengthened with the miniaturization and complication of Microelectromechanical System (MEMS) devices. To predict the statistic behavior of devices, Monte Carlo method is widely used, but it is limited by the low efficiency. The recently emerged generalized polynomial chaos expansion method, though highly efficient, cannot solve uncertainty quantification problems with correlated deviations, which is common in MEMS applications. In this paper, a Gaussian mixture model (GMM) and Nataf transformation based polynomial chaos method is proposed. The distribution of correlated process deviations is estimated using GMM, and modified Nataf transformation is applied to convert the correlated random vectors of GMM into mutually independent ones. Then polynomial chaos expansion and stochastic collection can be implemented. The effectiveness of our proposed method is demonstrated by the simulation results of V-beam thermal actuator, and its computation speed is faster compared with the Monte Carlo technique without loss of accuracy. This method can be served as an efficient analysis technique for MEMS devices which are sensitive to correlated process deviations.

     

MEMS的协同仿真

仿真是微机电系统(MEMS) 设计的重要手段.目前MEMS中的集成仿真方法对设计人员要求太高从而限制了其使用范围.为了充分发挥仿真在MEMS设计中的作用,把协同设计的思想引入MEMS仿真中,提出了协同仿真的设计方式.构建了MEMES的协同仿真框架,分析了其仿真流程和数据文件的构成,并阐述了节点载荷映射的混合法.最后对一个MEMS器件进行协同仿真并与集成仿真的结果进行了比较,证明了方法的可行性.     

Adaptive tracking control of an MEMS gyroscope with H-infinity performance

Microelectromechanical systems (MEMSs) pose unique measurement and control problems compared with conventional ones because of their small size,low cost,and low power consumption.The vibrating gyroscope is one of those MEMS devices that have significant potential in many industry applications.When the MEMS gyroscope system is considered simultaneously with the coupling terms,the exogenous disturbances and the parameter variations,the controller design of this system becomes very challenging.This paper investigates the primary control problem of a perturbed vibrating MEMS gyroscope.A nonlinear robust adaptive control scheme is proposed for the drive axis of a vibrating MEMS gyroscope.By combining the dynamic surface control (DSC) method with the H-infinity disturbance attenuation technique,a simpler systematic design procedure is developed.The derived H-infinity controller has a simplified structure,and it can drive the drive axis to resonance,regulate the output amplitude of the drive axis to a desired value,and attenuate the generalized disturbances.The features of the derived controller are discussed and illustrated by the simulation of a closed-loop system.The analysis and simulation show that the obtained controller possesses good adaptability and robustness to system uncertainties.     

Solid-based CAPP for surface micromachined MEMS devices

Process planning for a MEMS device is almost always conducted manually by the designer to date. As the structures of MEMS devices become more and more complicated, in order to release the designers from the hard and tedious work and speed up the development of MEMS products, such a situation should be changed. In this study, a solid based CAPP method for surface micromachined MEMS device is presented. With this method, a MEMS device is designed with a traditional CAD system, and its process planning is conducted automatically based on the solid model created. The process features with engineering semantics are extracted first. Then, the process layer model is constructed with each process layer of the model being coincident with the fabrication layer of surface micromachining. Finally, the masks are synthesized and the fabrication process is generated. Furthermore, to guarantee the manufacturability of the designed MEMS device, a systematic evaluation method is proposed. The proposed design and CAPP methods enable designers to concentrate on functional and shape design of MEMS devices.     

叉指式加速度计的一种仿真法分析

微电子机械系统的快速发展对其建模仿真也提出了较高要求。首先介绍了一种微电子机械系统原理级描述仿真方法,它基于成熟的微机械元件库,提供微器件的原理级描述,使得仿真更简单、更高效,但目前其适用范围有限。然后介绍了用这种方法分析叉指式微电容加速度计的结果。     

一种高精度MEMS 梳齿驱动器有限元仿真方法及实验

为解决目前MEMS 梳齿电容驱动器由于边缘效应导致的理想计算模型计 算误差较大问题,利用有限单元法中的能量法,提出了一种对梳齿驱动器电容量进行精确仿 真计算的方法并以实际制作的微机械陀螺质量块上的90 对梳齿驱动器为对象,分别利用该 方法及常用的CMATRIX 仿真方法对其电容值进行了仿真计算。两种方法得到的电容量的计 算结果分别为1.5283pF 和1.5793pF。二者与利用高精度LCR 测试仪得到的结果1.5172pF 的相对误差分别为0.73%和4.09%。实验结果表明,该方法对考虑边缘效应的MEMS 梳齿 电容驱动器具有较高的计算精度。