光学三维测量中结构光栅投影系统的开发

为解决结构光三维测量系统中的光栅投影质量问题,提出并实现了以物理光栅为核心的结构光栅投影系统。该系统以现代光栅制造技术制造的精密光栅元件为核心,基于幻灯投影原理实现高质量的光栅条纹投影,利用步进电机带动高精密滚轴丝杆进行平移实现投影光栅的切换。实验结果表明,基于该系统实现的光学三维测量系统的可以达到1：100以上的对比度,具有较大的光强和良好的景深,同时能获得连续的强度分布及较好的正弦性,测量误差小于0．04mm,测量精度约为0．03mm,满足工业应用的要求。     

Multiperiod fringe projection interferometry using a backpropagation method for surface profile measurement

Interference fringes with different periods are projected on an object surface. There is a constant phase point where the phase of the fringe is kept at a constant value while the period is scanning. Multiple optical fields with different periods on the object surface are made from detected phases of the fringes. The multiple optical fields are backpropagated to the constant phase point of the phase where all of the phases of the multiple backpropagated fields become the same value and the amplitude of the sum of the multiple backpropagated fields becomes maximum. The distance of the backpropagation provides the position of the object surface. Some experiments show that this method can measure an object surface with discontinuities of several millimeters with high accuracy of several micrometers.     

Data compression for speckle correlation interferometry temporal fringe pattern analysis

Temporal fringe pattern analysis is gaining prominence in speckle correlation interferometry, in particular for transient phenomena studies. This form of analysis, nevertheless, necessitates large data storage. Current compression schemes do not facilitate efficient data retrieval and may even result in important data loss. We describe a novel compression scheme that does not result in crucial data loss and allows for the efficient retrieval of data for temporal fringe analysis. In sample tests with digital speckle interferometry on fringe patterns of a plate and of a cantilever beam subjected to temporal phase and load evolution, respectively, we achieved a compression ratio of 1.6 without filtering out any data from discontinuous and low fringe modulation spatial points. By eliminating 38% of the data from discontinuous and low fringe modulation spatial points, we attained a significant compression ratio of 2.4.     

Method for fringe enhancement in holographic interferometry for measurement of in-plane displacements

Theoretical background along with experimental results are given for a simple method for in-plane fringe enhancement in dual-beam illumination holographic interferometry. In this method, the fringes representing in-plane displacements arise as a moirépattern between two interferograms. To distinguish the in-plane displacement, a sequence of images is recorded while the reference mirror is continuously tilted at random. The in-plane fringes arethen found as the maximum contrast of the out-of-plane fringes in the image sequence. The resulting fringe quality is close to the quality of the out-of-plane fringes.     

Complete fringe order determination in scanning white-light interferometry using a Fourier-based technique

White-light interferometry uses a white-light source with a short coherent length that provides a narrowly localized interferogram that is used to measure three-dimensional surface profiles with possible large step heights without 2π-ambiguity. Combining coherence and phase information improves the vertical resolution. But, inconsistencies between phase and coherence occur at highly curved surfaces such as spherical and tilted surfaces, and these inconsistencies often cause what are termed ghost steps in the measurement result. In this paper, we describe a modified version of white-light interferometry for eliminating these ghost steps and improving the accuracy of white-light interferometry. Our proposed technique is verified by measuring several test samples.     

Additive-subtractive phase-modulated electronic speckle interferometry: analysis of fringe visibility

Fringe-visibility issues of additive-subtractive phase-modulated (ASPM) electronic speckle pattern interferometry (ESPI) are explored. ASPM ESPI is a three-step method in which additive-speckle images are acquired rapidly in an analog fashion in every frame of a video sequence, a speckle phase modulation is intentionally introduced between frames, and a digital subtraction of consecutive pairs of additive-speckle images is performed. We show that this scheme has the good high-frequency noise immunity associated with additive-ESPI techniques as well as the good fringe visibility associated with subtractive-ESPI techniques. The method has better fringe visibility than can be obtained with purely additive ESPI and also does not suffer from the fringe distortions that can occur with subtractive ESPI in the presence of high-frequency noise. We show that even if full speckle decorrelation were to occur between the two additive speckle images that are to be subtracted, the visibility of ASPM ESPI fringes can be made to approach unity by suitable adjustment of the reference-to-object beam-intensity ratio.     

Development of a phase-displacement equation for panoramic interferometry

We developed the parametric equations that are needed to quantify the modulations in the sensitivity vector that occur when the phase-displacement equation is applied to make panoramic interferometric measurements. The measurement system relies on two collinear panoramic annular lenses, one to illuminate and the other to image their surroundings. When a coherent light source is used and a reference beam is added, interference occurs over the region of interest defined by the illuminating and viewing lenses. A holographic system is used to demonstrate the approach and quantify the analysis. We obtained interference fringes in real time by comparing holograms recorded before and after a section of cylindrical pipe is displaced relative to the measurement system. The annular images and the holographic fringes are acquired and stored digitally in a computer system, and image transformation algorithms are applied to remove optical distortions in the holographic patterns. Excellent agreement is obtained when the fringe loci are compared with those predicted on the basis of theory.     

Adaptive optics performance model for optical interferometry

The optical interferometry community has discussed the possibility of using adaptive optics (AO) on apertures much larger than the atmospheric coherence length in order to increase the sensitivity of an interferometer, although few quantitative models have been investigated. The aim of this paper is to develop an analytic model of an AO-equipped interferometer and to use it to quantify, in relative terms, the gains that may be achieved over an interferometer equipped only with tip-tilt correction. Functional forms are derived for wavefront errors as a function of spatial and temporal coherence scales and flux and applied to the AO and tip-tilt cases. In both cases, the AO and fringe detection systems operate in the same spectral region, with the sharing ratio and subaperture size as adjustable parameters, and with the interferometer beams assumed to be spatially filtered after wavefront correction. It is concluded that the use of AO improves the performance of the interferometer in three ways. First, at the optimal aperture size for a tip-tilt system, the AO system is as much as ~50% more sensitive. Second, the sensitivity of the AO system continues to improve with increasing aperture size. And third, the signal-to-noise ratio of low-visibility fringes in the bright-star limit is significantly improved over the tip-tilt case.     

Multiple-beam lateral shear interferometry for optical testing

Lateral shear interferometry is used to obtain the lateral aberrations of a lens. The zeroth-order fringe in an interferogram obtained from a wedge-plate lateral shear interferometer, however, directly displays the lateral aberration curve of a test lens. Nevertheless, the intensity distribution, is cosinusoidal. Multiple-beam interferometry results in sharpened fringes; hence the multiple-beam wedge-plate shear interferometer displays the lateral aberration curve of a lens sharply, provided the shear is small. For large shear, some new artifacts appear in the interferogram, which are also explained.     

Tangent least-squares fitting filtering method for electrical speckle pattern interferometry phase fringe patterns

An efficient method is proposed to reduce the noise from electrical speckle pattern interferometry (ESPI) phase fringe patterns obtained by any technique. We establish the filtering windows along the tangent direction of phase fringe patterns. The x and y coordinates of each point in the established filtering windows are defined as the sine and cosine of the half-wrapped phase multiplied by a random quantity, then phase value is calculated using these points' coordinates based on a least-squares fitting algorithm. We tested the proposed methods on the computer-simulated speckle phase fringe patterns and the experimentally obtained phase fringe pattern, respectively, and compared them with the improved sine/cosine average filtering method [Opt. Commun. 162, 205 (1999)] and the least-squares phase-fitting method [Opt. Lett. 20, 931 (1995)], which may be the most efficient methods. In all cases, our results are even better than the ones obtained with the two methods. Our method can overcome the main disadvantages encountered by the two methods.     

Control of phase of fringes in speckle interferometry for application of fringe scanning method

The speckle interferometry is an effective technique in the displacement measurement of a structure with a rough surface. However, when the fringe scanning technique is introduced to speckle interferometry for improving the measurement resolution, generally two speckle patterns before and after the deformation of the measurement object and another speckle pattern obtained under different conditions from these two speckle patterns are required at least. So, three speckle patterns are generally required for precise fringe analysis as a minimum condition. In this paper, a method for introducing the fringe scanning method is proposed by controlling the phase of the specklegram as a fringe image using filtering techniques. Then, the temporal fringe analysis method that uses only two speckle patterns are proposed for speckle interferometry. As the result of experiments, it is shown that high precise fringe analysis can be realized by the fringe scanning methods using only two speckle patterns for the displacement measurement with a large deformation.     

Optimization of fringe pattern calculation with direct correlations in speckle interferometry

A direct correlation technique is used to calculate correlation fringe patterns from consecutive speckle patterns acquired with a dual-beam electronic speckle interferometer. Although more calculations are required than in standard image differencing routines, an advantage of the method is that the illumination over the surface of the object need not be uniform. In the method, Pearson's coefficient of correlation between the intensities within a set of adjacent pixels is calculated. This has the added advantage of being directly related to the theoretical phase-dependent correlation. A mapping of this measure of correlation results in the correlation fringe pattern. Laboratory tests were carried out with in-plane translations ranging from 5 to 45 mum. The correlation calculations were carried out by using cells (square sets of pixels) in the raw speckle images with dimensions ranging from 2 pixels x 2 pixels to 19 pixels x 19 pixels. Both cell dimension and translation magnitude dependent decorrelation effects influence the quality of the correlation fringe patterns.     

Determination of the zero-order fringe position in digital speckle pattern interferometry

A method for determining the position of the zero-order fringe in a metrological experiment with digital speckle pattern interferometry is proposed. It is based on an averaging procedure with shifted images obtained before and after a load is applied. This technique is a complement to the phase-shifting methods. Experimental examples are shown.     

Orthographic double-beam holographic interferometry for limited-view optical tomography

A simultaneous algebraic reconstruction technique (SART) that was first applied to limited-view optical tomography reconstruction of a three-dimensional asymmetric refractive-index field or a temperature distribution is presented and numerically simulated. Within two orthographic-view directions and limited view ranges, the reconstruction speed and accuracy of the SART are adequate. A new orthographic double-beam holographic-interferometric system from which multidirectional interferometric data can be obtained is first built. An asymmetric heat air-flow field is experimentally investigated by the use of orthographic double-beam holographic interferometry with double exposures. The temperatures reconstructed with the SART are consistent with those measured with a thermocouple.     

Simulation method for interference fringe patterns in measuring gear tooth flanks by laser interferometry

We present a ray-tracing-based method for simulation of interference fringe patterns (IFPs) for measuring gear tooth flanks with a two-path interferometer. This simulation method involves two steps. In the first step, the profile of an IFP is achieved by means of ray tracing within the object path of the interferometer. In the second step, the profile of an IFP is filled with interference fringes, according to a set of functions from an optical path length to a fringe gray level. To examine the correctness of this simulation method, simulations are performed for two spur involute gears, and the simulated IFPs are verified by experiments using the actual two-path interferometer built on an optical platform.     

Digital speckle-pattern interferometry: fringe retrieval for large in-plane deformations with digital speckle photography

The compensation of large in-plane motions in digital speckle-pattern interferometry (DSPI) with the use of digital speckle photography (DSP) is demonstrated. Ordinary recordings of DSPI are recombined and analyzed with DSP. The DSP result is used to compensate for the bulk speckle motion prior to calculation of the phase map. This results in a high fringe contrast even for deformations of several speckle diameters. In addition, for the case of an in-plane deformation, it is shown that the absolute phase change in each pixel may be unwrapped by use of the DSP result as an initial guess. The principles of this method and experiments showing the in-plane rotation of a plate and the encounter of two rounded plates are presented.     

轮胎激光散斑干涉相位条纹图局域多方向频域滤波方法

为解决激光数字剪切散斑干涉技术应用于轮胎缺陷检测中,轮胎缺陷相位条纹图中噪声对包裹相位图解包和轮胎缺陷尺寸测量产生严重影响的问题,该文通过对散斑干涉相位图的条纹特征分析,研究一种根据条纹密度将相位图划分成不同滤波区域进行多方向频域滤波的方法。实验结果表明:在两组模拟的相位图滤波实验中,局域多方向滤波方法的相位误差均值P_(mean)和相位均方根误差RMS都比正余弦滤波方法、多方向频域滤波方法要小,滤波结果更接近真值;在第3组滤波实验中,局域多方向频域滤波方法的残差点数分别是正余弦滤波方法、多方向频域滤波方法的11.39%、56.25%,体现出较好的滤波特性。     

White-light interferometry using a channeled spectrum. I. General models and fringe estimation algorithms

Astrometric measurements using stellar interferometry rely on the precise measurement of the central white-light fringe to accurately obtain the optical path-length difference of incoming starlight to the two arms of the interferometer. Because of dispersion in the optical system the optical path-length difference is a function of the wavelength of the light and extracting the proper astrometric signatures requires accommodating these effects. One standard approach to stellar interferometry uses a channeled spectrum to determine phases at a number of different wavelengths that are then converted to the path-length delay. Because of throughput considerations these channels are made sufficiently broad so that monochromatic models are inadequate for retrieving the phase/delay information. The presence of dispersion makes the polychromatic modeling problem for phase estimation even more difficult because of its effect on the complex visibility function. We introduce a class of models that rely on just a few spectral and dispersion parameters. A phase-shifting interferometry algorithm is derived that exploits the model structure. Numerical examples are given to illustrate the robustness and precision of the approach.