Effect of sol concentration on the structural, morphological, optical and photoluminescence properties of zirconia thin films

ZrO₂ thin films were deposited on quartz substrates from 10 wt.%, 20 wt.% and 40 wt.% solutions of Zirconium-n-butoxide in isopropanol by sol-gel dip-coating technique. Higher concentrated sols of 20 wt.% and 40 wt.% exhibited faster gelation, where as 10 wt.% sol remained stable for two months and films synthesized from this sol remained transparent and continuous even for 12 coatings. Ellipsometric study revealed that refractive index of the films increased with increase in sol concentration which is ascribed to the decrease in porosity. X-ray diffraction study showed that a tailoring of grain size from 7.9 to 39.2 nm is possible with increase in sol concentration. Atomic force microscopy studies showed a change in growth mode from vertical to lateral mode with increase in sol concentration. The film surface revealed positive skewness and high kurtosis values which make them favorable for tribological applications. The average optical transmittance in the visible region is highest (greater than 90%) for the film deposited from 10 wt.% sol. The optical band gap decreased from 5.74 to 5.62 eV with increase in the sol concentration. Photoluminescence (PL) spectra of the films exhibit an increase in the emission intensity with increase in sol concentration which substantiates better crystalline quality of the film deposited from 40 wt.% sol and increase in oxygen vacancies. The “Red shift” of the PL spectra with increase in sol concentration originates from the increase in the grain size with sol concentration which makes it suitable for generation of solid state lighting in light emitting diode.     

Morphological, optical and electrical properties of samarium oxide thin films

We present here results on samarium oxide thin films, obtained by pulsed laser deposition and by radio frequency assisted pulsed laser deposition. Three different substrate types were used: silicon, platinum covered silicon and titanium covered silicon. The influence of the deposition parameters (oxygen pressure and laser fluence) on the structure and morphology of the thin films was studied. The substrate-thin film interface zone was investigated; the optical and electrical properties (the losses, dielectric constant and leakage currents) were also determined.     

Structural, morphological and optical properties of thermal annealed TiO thin films

Structural, morphological and optical properties of TiO thin films grown by single source thermal evaporation method were studied. The films were annealed from 300 to 520 °C in air after evaporation. Qualitative film analysis was performed with X-ray diffraction, atomic force microscopy and optical transmittance and reflectance spectra. A correlation was established between the optical properties, surface roughness and growth morphology of the evaporated TiO thin films. The X-ray diffraction spectra indicated the presence of the TiO₂ phase for the annealing temperature above 400 °C.     

Structural and optical properties of thermally evaporated 1,4,8,11,15,18,22,25-octahexylphthalocyanine thin films

Metal-free 1,4,8,11,15,18,22,25-octahexylphthalocyanine was prepared directly by the cyclotetramerization of 3,6-dihexylphthalonitrile using lithium butoxide in butanol. Thin films of the material were deposited on glass substrates by the thermal evaporation technique. The structure of the films was found to be in the form, and showed a strong peak indicating preferential orientation. The surface morphology of the thin films was investigated by atomic force microscopy and showed that the molecules of 1,4,8,11,15,18,22,25-octahexylphthalocyanine grow in stacks of parallel rows. The spectrophotometric measurements of transmittance and reflectance were carried out in the wavelength range 190–3000 nm. The refractive index, n, and absorption index, k, were found to be independent of annealing at 373 K. The B band absorption occurred at 356 nm, and the Q band showed a doublet at 667 and 739 nm. Other optical parameters, such as absorption coefficient and optical dielectric constant ε, were determined.     

The effect of rapid thermal annealing on structural and electrical properties of TiB2 thin films

This work reports on the effect of post-deposition rapid thermal annealing on the structural and electrical properties of deposited TiB₂ thin films. The TiB₂ thin films, thicknesses from 9 to 450 nm, were deposited by e-beam evaporation on high resistivity and thermally oxidized silicon wafers. The resistivity of as-deposited films varied from 1820 μΩ cm for the thinnest film to 267 μΩ cm for thicknesses greater than 100 nm. In the thickness range from 100 to 450 nm, the resistivity of TiB₂ films has a constant value of 267 μΩ cm.

A rapid thermal annealing (RTA) technique has been used to reduce the resistivity of deposited films. During vacuum annealing at 7 × 10⁻³ Pa, the film resistivity decreases from 267 μΩ cm at 200 °C to 16 μΩ cm at 1200 °C. Heating cycles during RTA were a sequence of 10 s. According to scanning tunneling microscopy analysis, the decrease in resistivity may be attributed to a grain growth through polycrystalline recrystallization, as well as to an increase in film density.

The grain size and mean surface roughness of annealed films increase with annealing temperature. At the same time, the conductivity of the annealed samples increases linearly with grain size. The obtained results show that RTA technique has a great potential for low resistivity TiB₂ formation.     

Artifacts in SPM measurements of thin films and coatings

Ideally, scanning probe microscopy (SPM) should generate a three-dimensional map of a sample surface such that the result is an exact replication of the actual sample. Any measurement data that result in an image differing from the actual sample surface are artifacts. The chief sources of SPM artifacts are mechanical systems, piezoelectric crystals, electronic scanners, tip-sample interaction, and image processing. For example, choosing the proper SPM probe for a specific sample is only the first step in minimizing probe-related artifacts. In fact, geometrical effects cause the largest number of artifacts. Good quality atomic SPM images can be clearly seen in raw data and should respond appropriately when the scan range or rotation is changed. Because SPM images are often periodic, it is possible for heavily filtered “data” to sometimes be misinterpreted as “atomic resolution images”. This paper presents SPM image studies using a range of materials from hard rough diamond films to soft nanometer smooth polyimide films. The investigation brings out the hidden sources of SPM artifacts for samples with different geometries and physical properties. Ten suggestions are presented which, if implemented/followed, should minimize the number of SPM image artifacts thereby assuring high quality images.     

Morphology and microstructure of textured SnO2 thin films obtained by spray pyrolysis and their effect on electrical and optical properties

Tin dioxide thin films on glass substrate with different Zn doping levels were obtained by spray pyrolysis. Their microstructure, preferred crystallographic orientation, electrical and optical properties were extensively studied. The characterization techniques employed were scanning electron microscopy, transmission electron microscopy, atomic force microscopy, X-ray diffraction, electrical conductivity and optical transmission measurements. It was found that the material obtained has a nano-scale texture which characteristic size and orientation strongly depend on the Zn doping level. Doping-induced variations in texture and structure modify both the electrical and optical properties of films (namely, refractive index and transparency). The results obtained are relevant for potential applications of the studied films in gas sensing and photoconductive devices.     

Doping induced structural and compositional changes in ZnO spray pyrolysed films and the effects on optical and electrical properties

Highly transparent, conductive ZnO films have been deposited by spray pyrolysis of a zinc acetate based solution. Quality films are yielded as our process is analogous to an aerosol assisted chemical vapour deposition rather than a droplet deposition spray pyrolysis technique. The properties of the films are governed by the additives to the base precursor solution. When aluminium acetylacetonate is added to the precursor solution, ZnO:Al films are grown with free charge carrier concentrations of more than 10²⁰ cm⁻³. The carrier density and mobility are measured by both Hall probe and near infrared spectroscopy. Film growth and grain size, morphology and orientation are altered using an increased percentage of ZnCl₂ in the precursor, which results in a 10 fold increase in charge carrier mobility. An investigation is presented correlating the composition of the precursor solution with the chemical, structural, electrical and optical properties of the grown films.     

Patterned structures fabricated on chalcogenide phase-change thin films by laser direct writing

In laser direct writing technology, the pattern is usually written in a photoresist. In this work, we use the chalcogenide phase change thin films as the laser direct writing materials, and patterned structures with different shapes and sizes were directly written with different laser wavelengths. Compared with traditional photoresist materials, the patterned structures can be directly formed in the chalcogenide phase change thin films without developing and etching procedures, and also can be directly written with different laser wavelengths. By tuning the laser parameters precisely, patterned structures with different sizes and shapes could be obtained as well. The analysis indicates that the formation mechanism of the patterned structure is mainly due to the volume expansion caused by material vaporization and the interior of the patterned structure is hollow with some solid leavings, and the chalcogenide phase change thin films are very good candidate materials for patterned structure formation.     

Effect of the microwave oven on structural, morphological and electrical properties of SrBi4Ti4O15 thin films grown on Pt/Ti/SiO2/Si substrates by a soft chemical method

Thin films of SrBi₄Ti₄O₁₅ (SBTi), a prototype of the Bi-layered-ferroelectric oxide family, were obtained by a soft chemical method and crystallized in a domestic microwave oven. For comparison, films were also crystallized in a conventional method at 700 °C for 2 h. Structural and morphological characterization of the SBTi thin films were investigated by X-ray diffraction (XRD) and atomic force microscopy (AFM), respectively. Using platinum coated silicon substrates, the ferroelectric properties of the films were determined. Remanent polarization P_r and a coercive field E_c values of 5.1 μC/cm² and 135 kV/cm for the film thermally treated in the microwave oven and 5.4 μC/cm² and 85 kV/cm for the film thermally treated in conventional furnace were found. The films thermally treated in the conventional furnace exhibited excellent fatigue-free characteristics up to 10¹⁰ switching cycles indicating that SBTi thin films are a promising material for use in non-volatile memories.     

Spectroscopic ellipsometry investigations of the optical properties of manganese doped bismuth vanadate thin films

The optical properties of Bi₂V_1−xMn_xO_5.5−x {x = 0.05, 0.1, 0.15 and 0.2 at.%} thin films fabricated by pulsed laser deposition on platinized silicon substrates were studied in UV-visible spectral region (1.51-4.17 eV) using spectroscopic ellipsometry. The optical constants and thicknesses of these films have been obtained by fitting the ellipsometric data (Ψ and Δ) using a multilayer four-phase model system and a relaxed Lorentz oscillator dispersion relation. The surface roughness and film thickness obtained by spectroscopic ellipsometry were found to be consistent with the results obtained by atomic force and scanning electron microscopy. The refractive index measured at 650 nm does not show any marginal increase with Mn content. Further, the extinction coefficient does not show much decrease with increasing Mn content. An increase in optical band gap energy from 2.52 to 2.77 eV with increasing Mn content from x = 0.05 to 0.15 was attributed to the increase in oxygen ion vacancy disorder.     

The growth of nanoscale ZnO films by pulsed-spray evaporation chemical vapor deposition and their structural, electric and optical properties

Great interest in nanoscale thin films (sub-100 nm) has been stimulated by the developing demands of functional devices. In this paper, nanoscale zinc oxide (ZnO) thin films were deposited on glass substrates at 300 °C by pulsed-spray evaporation chemical vapor deposition. Scanning electron micrographs indicate uniform surface morphologies composed of nanometer-sized spherical particles. The growth kinetics and growth mode are studied and the relationship between the film thickness and the electric properties with respect to the growth mode is interpreted. X-ray diffraction shows that all ZnO films grown by this process were crystallized in a hexagonal structure and highly oriented with their c-axes perpendicular to the plane of the substrate. Optical measurements show transparencies above 85% in the visible spectral range for all films. The absorbance in the UV spectral range respects well the Beer-Lambert law, enabling an accurate optical thickness measurement, and the absorption coefficient was measured for a selected wavelength. The measured band gap energies exhibit an almost constant value of 3.41 eV for all films with different thicknesses, which attributed to the thickness-independent crystallite size.     

Substrate temperature dependence of electrical and structural properties of Ru films

Microstructures and resistivities of sputtered Ru films were investigated as a function of substrate temperature to obtain a single-layered Ru barrier without a Ta/TaN under layer. High resistivity Ru films with a high density of crevices, which enhances Cu diffusion along the crevices, were formed by the conventional sputtering process, i.e., sputtering at room temperature and annealing at 400 °C-700 °C for 30 min in Ar + 3%H₂. But, crevice-free and smooth Ru films with low resistivity, the same as that for the bulk phase, were formed when substrate temperature add sputtering was raised to 700 °C. Ru films formed by this process had (002) preferred orientation and then Cu (111) was formed by plating. This result corresponded to the tendency predicted by ab initio calculations.     

Investigation on structural, electrical and optical properties of tungsten-doped tin oxide thin films

Tungsten-doped tin oxide (SnO₂:W) transparent conductive films were prepared on quartz substrates by pulsed plasma deposition method with a post-annealing. The structure, chemical states, electrical and optical properties of the films have been investigated with tungsten-doping content and annealing temperature. The lowest resistivity of 6.67 × 10^− 4 Ω cm was obtained, with carrier mobility of 65 cm² V^− 1 s^− 1 and carrier concentration of 1.44 × 10²⁰ cm^− 3 in 3 wt.% tungsten-doping films annealed at 800 °C in air. The average optical transmittance achieves 86% in the visible region, and approximately 85% in near-infrared region, with the optical band gap ranging from 4.05 eV to 4.22 eV.     

Correlation study between structural, magnetic and transport properties of annealed Co thin films

This paper presents structural, magnetization and transport properties measurements carried out on as-deposited Co (400 Å) thin film as well as samples annealed in the temperature range 100-500 °C in steps of 100 °C for 1 h. The samples used in this work were deposited on float glass substrates using ion beam sputtering technique. The magnetization measurements carried out using MOKE technique, clearly indicates that as-deposited as well as annealed samples up to 500 °C show well saturation magnetization with applied magnetic field. The as-deposited sample shows coercivity value (H_c) of 26 Oe, and it is increased to 94 Oe for 500 °C-annealed sample. A minimum coercivity value of 15 Oe is obtained for 200 °C annealed sample. The XRD measurements of as deposited films show microcrystalline nature of Co film, which becomes crystalline with increase in annealing temperature. The corresponding resistivity measurements show gradual decrease in resistivity. AFM technique was employed to study the surface morphology of as deposited film as well as annealed thin films. Observed magnetization, and resistivity behaviour is mainly attributed to the (i) change in crystal structure (ii) increase in grain size and (iii) stress relaxation due to the annealing treatment.     

Investigation of size dependent structural and optical properties of thin films of CdSe quantum dots

Cadmium selenide (CdSe) quantum dots were grown on indium tin oxide substrate using wet chemical technique for possible application as light emitting devices. The structural, morphological and luminescence properties of the as deposited thin films of CdSe Q-dot have been investigated, using X-ray diffraction, transmission electron microscopy, atomic force microscopy and optical and luminescence spectroscopy. The quantum dots have been shown to deposit in an organized array on ITO/glass substrate. The as grown Q-dots exhibited size dependent blue shift in the absorption edge. The effect of quantum confinement also manifested as a blue shift of photoluminescence emission. It is shown that the nanocrystalline CdSe exhibits intense photoluminescence as compared to the large grained polycrystalline CdSe films.     

Effect of thickness on structural,optical, electrical and morphological properties of nanocrystalline CdSe thin films for optoelectronic applications

This paper presents effect of thickness on the physical properties of thermally evaporated cadmium selenide thin films. The films of thickness 445 nm, 631 nm and 810 nm were deposited employing thermal evaporation technique on glass and ITO coated glass substrates followed by thermal annealing in air atmosphere at temperature 300 °C. The as-deposited and annealed films were subjected to the XRD, UV–Vis spectrophotometer, source meter, SEM and EDS to find the structural, optical, electrical, morphological and compositional analysis respectively. The structural analysis shows that the films have cubic phase with preferred orientation (1 1 1) and nanocrystalline nature. The structural parameters like inter-planner spacing, lattice constant, grain size, number of crystallites per unit area, internal strain, dislocation density and texture coefficient are calculated. The optical band gap is found in the range 1.69–1.84 eV and observed to decrease with thickness. The electrical resistivity is found to increase with thickness for as-deposited films and decrease for annealed films. The morphological studies show that the as-deposited and annealed films are homogeneous, smooth, fully covered and free from crystal defects like pin holes and voids. The grains in the as-deposited films are densely packed, well defined and found to be increased with thickness.     

1.7MeV电子束在VO2热致相变薄膜中引起的结构和光电性能的变化

利用能量为1.7MeV,注量分别为10^13-10^15/cm^2的电子辐照VO2薄膜,采用XPS,XRD等测试手段对电子辐射前后的样品进行分析,并采用光透射性能和电光性能测试研究了电子辐照对样品相变过程中光电性能的影响,结果表明电子辐照在VO2薄膜中出现变价效应,产生新的X射线衍射峰,带来薄膜化学成分的变化,电子辐照在样品中产生的这些变化对VO2的热致相变特性有明显影响。     

The effect of annealing on single-layer CoCrPtNb thin films

The effect of Nb addition on grain size segregation and intergranular coupling of ternary CoCrPt alloys prepared by annealing of crystalline samples and crystallization of the Nb-rich (more than 4.6 at.%) amorphous films is investigated. Mean surface roughness as a function of Nb addition decreased for Nb contents of up to 2.7 at.% and then increased. The size and distribution of magnetic clusters were significantly affected by Nb addition. Vacuum annealing of the ternary and quaternary films (2.7 at.% Nb) increased the coercivity of the films from 53.71 kA/m and 52.09 kA/m to about 61.14 kA/m and 105 kA/m, respectively. Film with 12.1 at.% Nb was also produced and then annealed at different times and temperatures. Increasing the temperature to 700 °C caused the recrystallization of the 12.1 at.% Nb amorphous film. The observed magnetic properties are discussed in terms of composition, crystallographic orientation of deposited layer and oxidation of elements during annealing.     

Effect of alumina doping on structural, electrical, and optical properties of sputtered ZnO thin films

A systematic study of the influence of alumina (Al₂O₃) doping on the optical, electrical, and structural characteristics of sputtered ZnO thin films is reported in this study. The ZnO thin films were prepared on 1737F Corning glass substrates by R.F. magnetron sputtering from a ZnO target mixed with Al₂O₃ of 0-4 wt.%. X-ray diffraction (XRD) analysis demonstrates that the ZnO thin films with Al₂O₃ of 0-4 wt.% have a highly (002) preferred orientation with only one intense diffraction peak with a full width at half maximum (FWHM) less than 0.5°. The electrical properties of the Al₂O₃-doped ZnO thin films appear to be strongly dependent on the Al₂O₃ concentration. The resistivity of the films decreases from 74 Ω·cm to 2.2 × 10^− 3 Ω·cm as the Al₂O₃ content increases from 0 to 4 wt.%. The optical transmittance of the Al₂O₃-doped ZnO thin films is studied as a function of wavelength in the range 200-800 nm. It exhibits high transparency in the visible-NIR wavelength region with some interference fringes and sharp ultraviolet absorption edges. The optical bandgap of the Al₂O₃-doped ZnO thin films show a short-wavelength shift with increasing of Al₂O₃ content.