Theoretical Study on the Characteristics of Atmospheric Radio Frequency Discharges by Altering Electrode Gap

In this paper, we present a theoretical study on the discharge characteristics of radio-frequency discharges at atmospheric pressure driven by a higher frequency of 40.68 MHz while the electrode gap is altered. Based on the analytical equations and simulation data from a one-dimensional fluid model, an optimal gap between electrodes, at which the largest electron density is obtained, can be observed under a constant power condition; however, as the electrode gap increases the time-averaged electron temperature decreases, and the underpinning physics is also discussed based on the simulation results. This study indicates that at a constant power by choosing an appropriate electrode spacing, the rf discharge can be effectively optimized at atmospheric pressure.     

Comparison of Sterilizing Effect of Nonequilibrium Atmospheric-Pressure He/O2 and Ar/O2 Plasma Jets

The sterilizing effect of the non-equilibrium atmospheric pressure plasma jet by applying it to the Bacillus subtilis spores is invesigated. A stable glow discharge in argon or helium gas fed with active gas （oxygen）, was generated in the coaxial cylindrical reactor powered by the radio-frequency power supply at atmospheric pressure. The experimental results indicated that the efficiency of killing spores by making use of an Ar/O2 plasma jet was much better than with a He/O2 plasma jet. The decimal reduction value of Ar/O2 and He/O2 plasma jets under the same experimental conditions was 4.5 seconds and 125 seconds, respectively. It was found that there exists an optimum oxygen concentration for a certain input power, at which the sterilization efficiency reaches a maximum value. It is believed that the oxygen radicals are generated most efficiently under this optimum condition.     

Numerical and Experimental Investigation of Electron Beam Air Plasma Properties at Moderate Pressure简

Large size of air plasma at near atmospheric pressure has specific effects in aerospace applications. In this paper, a two dimensional multi-fluid model coupled with Monte Carlo （MC） model is established, and some experiments were carried out to investigate the characteristics of electron beam air plasma at pressure of 100-170 Torr. Based on the model, the properties of electron beam air plasma are acquired. The electron density is of the order of 1016 m-3 and the longitudinal size can exceed 1.2 m. The profiles of charged particles demonstrate that the oxygen molecule is very important for air plasma and its elementary processes play a key role in plasma equilibrium processes. The potential is almost negative and a very low potential belt is observed at the edge of plasma acting as a protection shell. A series of experiments were carried out in a low pressure vacuum facility and the beam plasma densities were diagnosed. The experimental results demonstrate that electron density increased with the electron beam energy, and the relatively low pressure was favorable for gaining high density plasma. Hence in order to achieve high density and large size plasma, it requires the researchers to choose proper discharge parameters.     

Evolution of the Pulse Width in Dielectric Barrier Atmospheric Pressure Discharge

A study of the evolution of the pulse width in homogeneous dielectric barrier dis-charge at atmospheric pressure with helium as the working gas is reported by using a one-dimensional fluid model.In this paper,a new computational method is presented to estimate the pulse width through calculating the time interval between the breakdown voltage and the extinguishing voltage.The effects on the discharge characteristics of the applied voltage and exci-tation frequency are studied based on the computational data.The results of the simulation show that the pulse width is observed to be narrower and the time intervals between two consecutive current pulses decrease with increasing amplitude and excitation frequency,which indicates that the homogeneous discharge is susceptible to the filamentary mode.The simulation results support the conclusion that in order to restrain the transition from the glow mode to filamentary mode,the applied voltage and excitation frequency should be kept within an appropriate range.     

Simulation of the spatio-temporal evolution of the electron energy distribution function in a pulsed hollow-cathode discharge

This article presents the 2D simulation results of a nanosecond pulsed hollow cathode discharge obtained through a combination of fluid and kinetic models. The spatio-temporal evolution of the electron energy distribution function(EEDF) of the plasma column and electrical characteristics of the nanosecond pulsed hollow cathode discharge at a gas pressure of 5 Torr are studied. The results show that the discharge development starts with the formation of an ionization front at the anode surface. T...     

Analysis of the characteristics of the plasma of an RF driven ion source for a neutral beam injector

A radio frequency(RF)driven ion source is a very important component of a neutral beam injector for large magnetic confinement fusion devices.In order to study the key technology and physics of an RF driven ion source for a neutral beam injector in China,an RF ion source test facility was developed at the Institute of Plasma Physics,Chinese Academy of Sciences.In this paper,a two-dimensional fluid model is used to simulate the fundamental physical characteristics of RF plasma discharge.Simulation results show the relationship of the characteristics of plasma(such as electron density and electron temperature)and RF power and gas pressure.In order to verify the effectiveness of the model,the characteristics of the plasma are investigated using a Langmuir probe.In this paper,experimental and simulation results are presented,and the possible reasons for the discrepancies between them are given.This paper can help us understand the characteristics of RF plasma discharge,and give a basis for further R&D for an RF ion source.     

Study on an Atmospheric Pressure Plasma Jet and its Application in Etching Photo-Resistant Materials

An atmospheric pressure radio-frequency plasma jet that can eject cold plasma has been developed. In this paper, the configuration of this type of plasma jet is illustrated and its discharge characteristics curves are studied with a current and a voltage probe. A thermal couple is used to measure the temperature distribution along the axis of the jet stream. The temperature distribution curve is generated for the He/O2 jet stream at the discharge power of 150 W. This jet can etch the photo-resistant material at an average rate of 100 nm/min on the surface of silicon wafers at a right angle.     

Simulation of Vacuum Arc Characteristics at Different Moments Under Power-Frequency Current

In this paper,based on the quasi-stationary magneto-hydrodynamic(MHD) model,vacuum arc characteristics are simulated and analyzed at different moments under power-frequency current.For a vacuum arc with sinusoidal current under a uniform axial magnetic field(AMF),simulation results show that at the moment of peak value current,maximal values appear in the ion number density,axial current density,heat flux density,electron temperature,plasma pressure and azimuthal magnetic field.At the same time,the distributions of these parameters along the radial position are mostly nonuniform as compared with those at other moments.In the first 1/4 cycle,the ion number density,axial current density and plasma pressure increase with time,but the growth rate decreases with time.Simulation results are partially compared with experimental results published in other papers.Simulations and experimental results both show that the arc light intensity near the cathode side is stronger than that near the anode side for diffusing vacuum arcs.     

Uniformity of Plasma Density and Film Thickness of Coatings Deposited Inside a Cylindrical Tribe by Radio Frequency Sputtering

Plasma surface modification of the inner wall of a slender tube is quite difficult to achieve using conventional means. In the work described here, an inner coaxial radio frequency （RF） copper electrode is utilized to produce the plasma and also acts as the sputtered target to deposit copper films in a tube. The influence of RF power, gas pressure, and bias voltage on the distribution of plasma density and the uniformity of film thickness is investigated. The experimental results show that the plasma density is higher at the two ends and lower in the middle of the tube. A higher RF power and pressure as well as larger tube bias lead to a higher plasma density. Changes in the discharge parameter only affect the plasma density uniformity slightly. The variation in the film thickness is consistent with that of the plasma density along the tube axis for different RF power and pressure. Although the plasma density increases with higher tube biases, there is an optimal bias to obtain the highest deposition rate. It can be attributed to the reduction in self-sputtering of the copper electrode and re-sputtering effects of the deposited film at higher tube biases.     

Spectral Measurement of Atmospheric Pressure Plasma by Means of Digital camera

A digital camera measuring system has been used sucessfully to measure the space fluctuation behaviors of Induced Dielectric Barrier Discharge (IDBD) plasma at atmospheric pressure.The experimental results showed that:(1) The uniformity of elctron Temperature of space depends on discharge condition and structure of web electrode,For a certain web electrode the higher the discharge volgage is ,the more uniform distribution of electron temperature in space will be.For a certain discharge the finer and denser the holes on web electrode are,the more uniform distribution of electron temperature in space will be(2).Digital camera is an available equipment to measure some behaviors of the plasma working at atmospheric pressure.     

Velocity Diagnosis of Critical Surface at Microwave Band in Laser-Induced Plasma

The velocity of critical surface at microwave band in laser-induced plasma was measured and the results are presented. The results indicate that the velocity of critical surface with low electron density is larger than that with the high one; and the velocity of critical surface increases with the laser power density.     

An Alternative Empirical Formula for Positive Corona Discharge I-V Characteristics in Point-to-Plate Electrode Geometry

Experimental data are presented for a study on the dependence of the I-V character- istics of the corona discharge on pressure and electrode spacing using point-to-plane electrode con- figuration. These experimental data are obtained by a fast, automatic computer data-acquisition system. The data are used to suggest an alternative dimensionally self-consistent empirical equa- tion for the parameterization of the I-V curves. The formula eliminates the need for any prior assumptions concerning the inception voltage, as is customary in this type of work.     

Synthesis of a Large Diamond Crystal with a Smooth （100） Facet at its Top Through MPCVD

A large diamond crystal up to 500μm in diameter with a smooth(100)facet at its top has been synthesized on Mo substrate through microwave plasma chemical vapor deposition(MPCVD).Its morphology and quality were characterized by scanning electron microscopy(SEM),and the growth mechanism was roughly illustrated from both macroscopic and microscopic viewpoints.It was found that morphological instabilities are a major factor resulting in synthesis of large diamond crystals,moreover,high microwave power density(MPD),high CH4 concentrations,high pressure,high substrate surface temperature and the addition of a small amount of O2 were also necessary for the synthesis of large diamond crystals.     

Plasma Limiter Based on Surface Wave Plasma Excited by Microwave

A novel plasma limiter, in which the plasma is excited by surface wave, is presented. The breakdown time of some gases filled in the limiter were calculated as a function of gas pres- sure, ionization degree and density of seed electrons under low pressure （0.01 -1 Torr） and high pressure （10 -1000 Torr） cases. The results show that the limiter filled with Xe with a pressure of 0.9 Torr, seed electron density of 10^16 m^-3, and ionization degree of 10^-4, has a breakdown time of approximate 19.6 ns.     

Study of Atmospheric Pressure Abnormal Glow Discharge

Atmospheric pressure abnormal glow discharge （APAGD） was carried out simply with a transformer of 1 ： 500 driven by a alternating current with a frequency of 50 Hz. Typical stable discharge parameters, namely voltage of 400 V to 850 V and current of 60 mA to 110 mA were measured by oscillograph. Simulation of the discharge process suggested that the stable discharge was supported by the impedance from the secondary coil of the transformer, which offered a negative feedback to prevent the discharge from turning into an arc. An interpretation was given for the oscillogram of the sinuous discharge current and square voltage. Furthermore, the electron temperature and electron density averaged in the discharge channel of APAGD were estimated.     

Deposition of Polymer Thin Film Using an Atmospheric Pressure Micro-Plasma Driven by Dual-FrequencyExcitation简

Polymer thin film deposition using an atmospheric pressure micro-plasma jet driven by dual-frequency excitations is described in this paper. The discharge process was operated with a mixture of argon （6 slm） and a small amount of acetone （0-2100 ppm）. Plasma composition was measured by optical emission spectroscopy （OES）. In addition to a large number of Ar spectra lines, we observed some spectra of C, CN, CH and C2. Through changing acetone content mixed in argon, we found that the optimum discharge condition for deposition can be characterized by the maximum concentration of carbonaceous species. The deposited film was characterized by scanning electron microscopy （SEM） and X-ray photoelectron spectroscopy （XPS） and Fourier transform infrared （FTIR） spectroscopy. The XPS indicated that the film was mostly composed of C with trace amount of O and N elements. The FTIR suggested different carbon-containing bonds （-CHx, C=O, C=C, C-O-C） presented in the deposited film.     

Effect of N_2 and O_2 on OH radical production in an atmospheric helium microwave plasma jet

UV-pulsed laser cavity ringdown spectroscopy of the hydroxyl radical OH(A–X)(0–0)band in the wavelength range of 306–310 nm was employed to determine absolute number densities of OH in the atmospheric helium plasma jets generated by a 2.45 GHz microwave plasma source.The effect of the addition of molecular gases N_2 and O_2 to He plasma jets on OH generation was studied.Optical emission spectroscopy was simultaneously employed to monitor reactive plasma species.Stark broadening of the hydrogen Balmer emission line(H_β)was used to estimate the electron density nein the jets.For both He/N_2 and He/O_2 jets, newas estimated to be on the order of 10~(15)cm~(-3).The effects of plasma power and gas flow rate were also studied.With increase in N_2 and O_2 flow rates, netended to decrease.Gas temperature in the He/O_2 plasma jets was elevated compared to the temperatures in the pure He and He/N_2 plasma jets.The highest OH densities in the He/N_2 and He/O_2 plasma jets were determined to be 1.0?×10~(16)molecules/cm~3 at x?=?4 mm(from the jet orifice)and 1.8?×?10~(16)molecules/cm~3 at x=3 mm, respectively.Electron impact dissociation of water and water ion dissociative recombination were the dominant reaction pathways, respectively, for OH formation within the jet column and in the downstream and far downstream regions.The presence of strong emissions of the N_2~+ bands in both He/N_2 and He/O_2 plasma jets, as against the absence of the N_2~+ emissions in the Ar plasma jets, suggests that the Penning ionization process is a key reaction channel leading to the formation of N_2~+ in these He plasma jets.     

Atmospheric Pressure Plasma Jet in Organic Solution: Spectra,Degradation Effects of Solution Flow Rate and Initial pH Value

The organic compounds of p-nitrophenol （PNP） solution was treated by the active species generated in a stirred reactor by an atmospheric pressure plasma jet （APPJ）. The emission intensities of hydroxyl （OH）, oxygen （O）, nitric oxide （NO）, hydrogen （H） and molecular （N2） were measured by optical emission spectroscopy （OES）. The relations between the flow rates of the PNP solution and degradation, the degradation effects and initial pH value of the solution were also investigated. Experimental results show that there exist intense emissions of O （777.1 nm）, N（337.1 nm）, OH （306-310 nm） and NO band （200-290 nm） in the region of plasma. Given the treatment time and gas flow rate, the degradation increased as a function of discharge energy and solution flow rate, respectively. The solution flow rate for the most efficient degradation ranged from 1.414 m/s to 1.702 m/s, and contributed very little when it exceeded 2.199 m/s. This indicates the existence of diffusion-controlled reactions at a low solution flow rate and activation- controlled reactions at a high solution flow rate. Moreover, increasing or decreasing the initial pH value of neutral PNP solution （pH=5.95） could improve the degradation efficiency. Treated by APPJ, the PNP solutions with different initial pH values of 5.95, 7.47 and 2.78 turned more acidic in the end, while the neutral solution had the lowest degradation efficiency. This work clearly demonstrates the close coupling of active species, photolysis of ultraviolet, the organic solution flow rate and the initial pH value, and thus is helpful in the study of the mechanism and application of plasma in wastewater treatment.