Dopant-free GaN/AlN/AlGaN radial nanowire heterostructures as high electron mobility transistors

We report the rational synthesis of dopant-free GaN/AlN/AlGaN radial nanowire heterostructures and their implementation as high electron mobility transistors (HEMTs). The radial nanowire heterostructures were prepared by sequential shell growth immediately following nanowire elongation using metal-organic chemical vapor deposition (MOCVD). Transmission electron microscopy (TEM) studies reveal that the GaN/AlN/AlGaN radial nanowire heterostructures are dislocation-free single crystals. In addition, the thicknesses and compositions of the individual AlN and AlGaN shells were unambiguously identified using cross-sectional high-angle annular darkfield scanning transmission electron microscopy (HAADF-STEM). Transport measurements carried out on GaN/AlN/AlGaN and GaN nanowires prepared using similar conditions demonstrate the existence of electron gas in the undoped GaN/AlN/AlGaN nanowire heterostructures and also yield an intrinsic electron mobility of 3100 cm(2)/Vs and 21,000 cm(2)/Vs at room temperature and 5 K, respectively, for the heterostructure. Field-effect transistors fabricated with ZrO(2) dielectrics and metal top gates showed excellent gate coupling with near ideal subthreshold slopes of 68 mV/dec, an on/off current ratio of 10(7), and scaled on-current and transconductance values of 500 mA/mm and 420 mS/mm. The ability to control synthetically the electronic properties of nanowires using band structure design in III-nitride radial nanowire heterostructures opens up new opportunities for nanoelectronics and provides a new platform to study the physics of low-dimensional electron gases.     

Exploiting nanostructure-thin film interfaces in advanced sensor device configurations

In this report, we present a study on the exploitation of nanostructure-thin film interfaces. Here, the objective is to utilize such interfaces for developing nanostructures for advanced sensing devices, while using state-of-the-art microelectronic technology that enables batch production. In this context, growth of ZnO nanostructures on the GaN/AlGaN heterostructure layers was studied. A fabrication process, based on a hydrothermal growth method, was used for preparing the interfaces of nanostructured thin film. Samples were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM) and obtained results suggested near epitaxial quality of the hetero-interface. Field-effect transistors (FETs) based on ZnO nanorods/GaN heterostructures were fabricated and tested in a controlled gas environment. Thus, it was demonstrated that nanostructures could be exploited in unconventional ways by employing them in scalable and batch-producible conventional semiconductor devices.     

Selective formation of GaN-based nanorod heterostructures on soda-lime glass substrates by a local heating method

We report on the fabrication of high-quality GaN on soda-lime glass substrates, heretofore precluded by both the intolerance of soda-lime glass to the high temperatures required for III-nitride growth and the lack of an epitaxial relationship with amorphous glass. The difficulties were circumvented by heteroepitaxial coating of GaN on ZnO nanorods via a local microheating method. Metal-organic chemical vapor deposition of ZnO nanorods and GaN layers using the microheater arrays produced high-quality GaN/ZnO coaxial nanorod heterostructures at only the desired regions on the soda-lime glass substrates. High-resolution transmission electron microscopy examination of the coaxial nanorod heterostructures indicated the formation of an abrupt, semicoherent interface. Photoluminescence and cathodoluminescence spectroscopy was also applied to confirm the high optical quality of the coaxial nanorod heterostructures. Mg-doped GaN/ZnO coaxial nanorod heterostructure arrays, whose GaN shell layers were grown with various different magnesocene flow rates, were further investigated by using photoluminescence spectroscopy for the p-type doping characteristics. The suggested method for fabrication of III-nitrides on glass substrates signifies potentials for low-cost and large-size optoelectronic device applications.     

Synthesis and characterization of ZnO nanowires for nanosensor applications

In this paper we report the synthesis of ZnO nanowires via chemical vapor deposition (CVD) at 650 °C. It will be shown that these nanowires are suitable for sensing applications. ZnO nanowires were grown with diameters ranging from 50 to 200 nm depending on the substrate position in a CVD synthesis reactor and the growth regimes. X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS), photoluminescence (PL), and Raman spectroscopy (RS) have been used to characterize the ZnO nanowires. To investigate the suitability of the CVD synthesized ZnO nanowires for gas sensing applications, a single ZnO nanowire device (50 nm in diameter) was fabricated using a focused ion beam (FIB). The response to H₂ of a gas nanosensor based on an individual ZnO nanowire is also reported.     

Core/multishell nanowire heterostructures as multicolor, high-efficiency light-emitting diodes

We report the growth and characterization of core/multishell nanowire radial heterostructures, and their implementation as efficient and synthetically tunable multicolor nanophotonic sources. Core/multishell nanowires were prepared by metal-organic chemical vapor deposition with an n-GaN core and InxGa1-xN/GaN/p-AlGaN/p-GaN shells, where variation of indium mole fraction is used to tune emission wavelength. Cross-sectional transmission electron microscopy studies reveal that the core/multishell nanowires are dislocation-free single crystals with a triangular morphology. Energy-dispersive X-ray spectroscopy clearly shows shells with distinct chemical compositions, and quantitatively confirms that the thickness and composition of individual shells can be well controlled during synthesis. Electrical measurements show that the p-AlGaN/p-GaN shell structure yields reproducible hole conduction, and electroluminescence measurements demonstrate that in forward bias the core/multishell nanowires function as light-emitting diodes, with tunable emission from 365 to 600 nm and high quantum efficiencies. The ability to synthesize rationally III-nitride core/multishell nanowire heterostructures opens up significant potential for integrated nanoscale photonic systems, including multicolor lasers.     

Specific Features of the Luminescence of ZnO:Te/GaN/Al2O3 Heterostructures

High-quality heteroepitaxial (0001)ZnO:Te/(0001)GaN/(0001)Al₂O₃ structures have been grown by hydrogen vapor-phase epitaxy in a low-pressure continuous flow reactor. X-ray diffraction analysis of these heterostructures has been carried out, which revealed the high structural quality of thin zinc oxide layers. The surface morphology and specific features of UV photoluminescence of the ZnO/GaN/Al₂O₃ heterostructure have been analyzed.

     

Semiconductor Nanowire Light‐Emitting Diodes Grown on Metal: A Direction Toward Large‐Scale Fabrication of Nanowire Devices

Bottom‐up nanowires are attractive for realizing semiconductor devices with extreme heterostructures because strain relaxation through the nanowire sidewalls allows the combination of highly lattice mismatched materials without creating dislocations. The resulting nanowires are used to fabricate light‐emitting diodes (LEDs), lasers, solar cells, and sensors. However, expensive single crystalline substrates are commonly used as substrates for nanowire heterostructures as well as for epitaxial devices, which limits the manufacturability of nanowire devices. Here, nanowire LEDs directly grown and electrically integrated on metal are demonstrated. Optical and structural measurements reveal high‐quality, vertically aligned GaN nanowires on molybdenum and titanium films. Transmission electron microscopy confirms the composition variation in the polarization‐graded AlGaN nanowire LEDs. Blue to green electroluminescence is observed from InGaN quantum well active regions, while GaN active regions exhibit ultraviolet emission. These results demonstrate a pathway for large‐scale fabrication of solid state lighting and optoelectronics on metal foils or sheets.     

Multi-quantum-well nanowire heterostructures for wavelength-controlled lasers

Rational design and synthesis of nanowires with increasingly complex structures can yield enhanced and/or novel electronic and photonic functions. For example, Ge/Si core/shell nanowires have exhibited substantially higher performance as field-effect transistors and low-temperature quantum devices compared with homogeneous materials, and nano-roughened Si nanowires were recently shown to have an unusually high thermoelectric figure of merit. Here, we report the first multi-quantum-well (MQW) core/shell nanowire heterostructures based on well-defined III-nitride materials that enable lasing over a broad range of wavelengths at room temperature. Transmission electron microscopy studies show that the triangular GaN nanowire cores enable epitaxial and dislocation-free growth of highly uniform (InGaN/GaN)n quantum wells with n=3, 13 and 26 and InGaN well thicknesses of 1-3 nm. Optical excitation of individual MQW nanowire structures yielded lasing with InGaN quantum-well composition-dependent emission from 365 to 494 nm, and threshold dependent on quantum well number, n. Our work demonstrates a new level of complexity in nanowire structures, which potentially can yield free-standing injection nanolasers.     

A comparative study on the NO2 gas sensing properties of ZnO thin films, nanowires and nanorods

ZnO thin films were fabricated using the spin coating method, ZnO nanowires by cathodically induced sol-gel deposition by the means of an anodic aluminum oxide (AAO) template, and ZnO nanorods with the hydrothermal technique. For thin film preparation, a clear, homogeneous and stable ZnO solution was prepared by the sol-gel method using zinc acetate (ZnAc) precursor which was then coated on a glass substrate with a spin coater. Vertically aligned ZnO nanowires which were approximately 65 nm in diameter and 10 μm in length were grown in an AAO template by applying a cathodic voltage in aqueous zinc nitrate solution at room temperature. For fabrication of the ZnO nanorods, the sol-gel ZnO solution was coated on glass substrate by spin coating as a seed layer. Then ZnO nanorods were grown in zinc nitrate and hexamthylenetetramine aqueous solution. The ZnO nanorods are approximately 30 nm in diameter and 500 nm in length. The ZnO thin film, ZnO nanowires and nanorods were characterized by X-ray diffraction (XRD) analysis and scanning electron microscope (SEM). The NO₂ gas sensing properties of ZnO thin films, nanowires and nanorods were investigated in a dark chamber at 200 °C in the concentration range of 100 ppb-10 ppm. It was found that the response times of both ZnO thin films and ZnO nanorods were approximately 30 s, and the sensor response was depended on shape and size of ZnO nanostructures and electrode configurations.     

Local vapor transport synthesis of zinc oxide nanowires for ultraviolet-enhanced gas sensing

A novel local vapor transport technique via induction heating is presented to enable selective, localized synthesis and self-assembly of nanowires, providing a simple and fast method for the direct integration of nanowires into functional devices. The single-crystalline zinc oxide (ZnO) nanowires are grown locally across the silicon-on-insulator microelectrodes within minutes, and the enhancement of gas sensing of ZnO nanowires is demonstrated under ultraviolet (UV) illumination at room temperature. Experiments indicate that when suspended nanowires are exposed to UV light, a twelve-fold increase in conductance and a near five-fold improvement in oxygen response are measured. Furthermore, the UV-enhanced transient responses exhibit a two-level photocurrent decay attributed to carrier recombination and oxygen readsorption. As such, the local vapor transport synthesis and UV-enhanced sensing scheme could provide a promising approach for the construction of miniaturized and highly responsive nanowire-based gas sensors.     

Fabrication of PANI–ZnO nanocomposite thin film for room temperature methanol sensor

In the recent past, polymer–metal oxide nanocomposites have been identified as one of the key and new class of materials for fabricating gas sensors owing to their swift redox characteristics. In this line of thought, chemical oxidative process was employed to synthesize zinc oxide (ZnO) and polyaniline (PANI) nanocomposite thin films with different mass concentrations of ZnO to explore their gas sensing signatures. X-ray diffraction patterns and Fourier transform infrared spectra confirmed the formation of pure ZnO and PANI–ZnO composites. Field emission scanning electron micrographs revealed the leaf like structure of ZnO, porous nature of PANI and the uniformly distributed blend of these two structures for the composite films. Further, the room temperature gas/vapour sensing characteristics revealed the selective nature of nanocomposite films towards methanol vapour in the presence of other vapours with better response, swift response and recovery times of 7 and 20 s respectively.     

Laser ablated ZnO layers for ALGaN/GaN HEMT passivation

ZnO layer in a role of passivation of the AlGaN/GaN-based high electron mobility transistors (HEMTs) is presented. The thin layer is deposited by pulsed laser deposition technique. It is fully compatible with the process technology of high electron mobility transistors prepared on AlGaN/GaN heterostructures due to its physical properties similar to the GaN. We have succeeded to (1) suppress the gate leakage current; (2) increase the maximum of the drain current and the electron drift mobility, and (3) ensure the threshold voltage to be unaltered by employment of the thin ZnO layer to the channel area of the HEMT.     

Multilayer AIN/AlGaN/GaN/AlGaN heterostructures with quantum wells for high-power field-effect transistors grown by ammonia MBE

High-power field-effect transistors (FETs) are among the main applications of heterostructures based on group III metal nitrides, which in most cases implement the classical GaN/AlGaN structure with a single junction. An alternative approach based on the use of double heterostructures with imporved two-dimensional electron gas (2DEG) confinement offers a number of advantages, but such structures are usually characterized by a lower carrier mobility and density (in GaN layers of reduced thickness) as compared to the values in the single-junction structures. Optimization of the heterostructure design and ammonia MBE growth conditions allowed us to obtain multilayer AlN/AlGaN/GaN/AlGaN heterostructures with quantum wells, which are characterized by a 2DEG carrier mobility of 1100–1300 cm²/(V s) and a sheet electron density of (1.1–1.3) × 10¹³ cm^-2. Experimental FETs based on the obtained multilayer heterostructures in a static regime exhibit working current densities up to 0.6 A/mm at a transconductance of up to 150 mS/mm and a breakdown voltage above 100 V.     

ZnO薄膜的晶体性能的分析

在硅基上制备出了c轴取向高度一致的ZnO薄膜 ,这将有可能成为新型GaN单晶薄膜的过渡层。对ZnO薄膜的晶体性能进行了分析 ,研究不同衬底和不同衬底温度对ZnO薄膜的结晶状况的影响 ,并着重用TEM研究了硅基ZnO薄膜的晶体性能。     

Brush-shaped ZnO heteronanorods synthesized using thermal-assisted pulsed laser deposition

Brush-shaped ZnO heteronanostructures were synthesized using a newly designed thermal-assisted pulsed laser deposition (T-PLD) system that combines the advantages of pulsed laser deposition (PLD) and a hot furnace system. Branched ZnO nanostructures were successfully grown onto CVD-grown backbone nanowires by T-PLD. Although ZnO growth at 300 °C resulted in core-shell structures, brush-shaped hierarchical nanostructures were formed at 500-600 °C. Materials properties were studied via photoluminescence (PL), scanning electron microscopy (SEM) and transmission electron microscopy (TEM) characterizations. The enhanced photocurrent of a SnO(2)-ZnO heterostructures device by irradiation with 365 nm wavelength ultraviolet (UV) light was also investigated by the current-voltage characteristics.     

Fabrication and characterization of a composite ZnO semiconductor as electron transporting layer in dye-sensitized solar cells

ZnO nanocomposites involving nanowires and nanoparticles with a thickness of 4 μm were grown by chemical bath deposition and used as electron transporting layer in dye-sensitized solar cells (DSSCs). The growth of ZnO nanowires was initially achieved in a zinc nitrate and hexamethylenetetramine aqueous solution on a fluorine-doped tin oxide thin film seeded with ZnO nanoparticles. Subsequently, layered hydroxide zinc acetate (LHZA) nanoparticles were deposited on the nanowires by dip coating in a zinc acetate methanolic solution. A relatively conformal deposit of nanoparticles all along the nanowires was revealed by scanning and transmission electron microscopy. It is shown by X-ray diffraction measurements that a subsequent annealing convert the LHZA nanoparticles into ZnO nanoparticles. The resulting DSSCs present a short circuit current density almost three times higher when the ZnO nanowire interstices were filled with ZnO nanoparticles, which is due to a higher dye loading for a constant device thickness. This is correlated with a very high specific surface area in ZnO nanocomposites, which is 250 times larger than the geometrical surface area. Although a decrease in both the open circuit voltage and the fill factor was shown by electrochemical impedance spectroscopy owing to an increase in electron radiative and nonradiative recombinations, the efficiency of ZnO nanocomposite-based-DSSCs was on average 1.75%, which is 70% higher than for single ZnO nanowire-based-DSSCs.     

Giant piezoelectric size effects in zinc oxide and gallium nitride nanowires. A first principles investigation

Nanowires made of materials with noncentrosymmetric crystal structure are under investigation for their piezoelectric properties and suitability as building blocks for next-generation self-powered nanodevices. In this work, we investigate the size dependence of piezoelectric coefficients in nanowires of two such materials - zinc oxide and gallium nitride. Nanowires, oriented along their polar axis, ranging from 0.6 to 2.4 nm in diameter were modeled quantum mechanically. A giant piezoelectric size effect is identified for both GaN and ZnO nanowires. However, GaN exhibits a larger and more extended size dependence than ZnO. The observed size effect is discussed in the context of charge redistribution near the free surfaces leading to changes in local polarization. The study reveals that local changes in polarization and reduction of unit cell volume with respect to bulk values lead to the observed size effect. These results have strong implication in the field of energy harvesting, as piezoelectric voltage output scales with the piezoelectric coefficient.     

Characterization of infrared chemical sensors modified with ZnO nanowires for the detection of volatile organic compounds

In this paper we describe the application and characterization of zinc oxide (ZnO) nanowires in an infrared (IR) chemical sensing system for the detection of volatile organic compounds (VOCs). Under suitable conditions, we grew ZnO nanowires on the surfaces of IR internal reflection elements (IREs) and obtained successful results for the detection of VOCs. ZnO nanowires offer a large surface area to effectively adsorb the examined species; the sensitivity of these IR sensing systems was increased by 3- to 15-fold after surface treatment with the ZnO nanowires. To explore the performance of this type of sensor, we correlated the morphologies of the ZnO nanowires grown on the surfaces of the IREs with the adsorption behavior observed during the sensing of the VOCs. To characterize the properties of the ZnO nanowires during the detection of VOCs having a range of functionalities, we classified the VOCs and examined their enrichment factors by comparing the IR signals detected in the presence and absence of the ZnO nanowires. Our results indicate that the ZnO nanowires exhibited better performance for the detection of aromatic-type VOCs than they did for non-aromatic compounds. For quantitative analyses, we examined several compounds for their responses toward varying quantities of injected VOCs. Our results indicate that the IREs treated with ZnO nanowires display acceptable linearity in their standard curves; the linear regression coefficients were higher than 0.995 for a range of volatile compounds.     

Submicrometre resolved optical characterization of green nanowire-based light emitting diodes

The electroluminescent properties of InGaN/GaN nanowire-based light emitting diodes (LEDs) are studied at different resolution scales. Axial one-dimensional heterostructures were grown by plasma-assisted molecular beam epitaxy (PAMBE) directly on a silicon (111) substrate and consist of the following sequentially deposited layers: n-type GaN, three undoped InGaN/GaN quantum wells, p-type AlGaN electron blocking layer and p-type GaN. From the macroscopic point of view, the devices emit light in the green spectral range (around 550 nm) under electrical injection. At 100 mA DC current, a 1 mm2 chip that integrates around 10(7) nanowires emits an output power on the order of 10 μW. However, the emission of the nanowire-based LED shows a spotty and polychromatic emission. By using a confocal microscope, we have been able to improve the spatial resolution of the optical characterizations down to the submicrometre scale that can be assessed to a single nanowire. Detailed μ-electroluminescent characterization (emission wavelength and output power) over a representative number of single nanowires provides new insights into the vertically integrated nanowire-based LED operation. By combining both μ-electroluminescent and μ-photoluminescent excitation, we have experimentally shown that electrical injection failure is the major source of losses in these nanowire-based LEDs.     

Multilayer AlN/AlGaN/GaN/AlGaN heterostructures for high-power field-effect transistors grown by ammonia MBE

The results of the optimization of the ammonia MBE technology of AlN/AlGaN/GaN/AlGaN heterostructures for high-power microwave field-effect transistors (FETs) are presented. The creation of technological systems of the EPN type for the deposition of group III nitrides by ammonia MBE, in combination with the development of optimum growth and postgrowth processes, make it possible to obtain AlN/AlGaN/GaN/AlGaN based heterostructures for high-power microwave FETs with the output static characteristics on the world best level. One of the main fields of application of the semiconductor heterostructures based on group III nitrides is the technology of high electron mobility transistors (HEMTs). Most investigations in this field have been devoted to the classical GaN/AlGaN structures with a single heterojunction. An alternative approach based on the use of double heterostructures with improved two-dimensional electron gas (2DEG) confinement offers a number of advantages, but such structures are usually characterized by a lower carrier mobility as compared to that in the single-junction structures. We succeeded in optimizing the double heterostructure parameters and growth conditions so as to obtain conducting channels with a 2DEG carrier mobility of 1450, 1350, and 1000 cm²/(V s) and a sheet electron density of 1.3 × 10¹³, 1.6 × 10¹³, and 2.0 × 10¹³ cm^?2, respectively. Experimental HEMTs with 1-μm-long gates based on the obtained multilayer heterostructure with a doped upper barrier layer exhibit stable current-voltage characteristics with maximum saturation current densities of about 1 A/mm and a transconductance of up to 180 mS/mm.