SiC在异质衬底生长金刚石膜的作用分析

利用扫描电子显微镜（ＳＥＭ）、Ｒａｍａｎ光谱分析了Ｓｉ衬底上金刚石膜核化和生长的过程,并着重分析了核化过程产生的ＳｉＣ的性能。利用划痕法测量了ＷＣ衬底上沉积ＳｉＣ和未沉积ＳｉＣ时生长金刚石膜的粘附力,同时还分析了ＷＣ半底上有和没有ＳｉＣ沉积层时表面附近金刚石膜的内应力。结果表明,ＳｉＣ层大大地增强了含碳粒子的聚集和金刚石膜与衬底之间的粘附性,降低了金刚石膜与衬底之间的内应力。     

γ射线辐照对类金刚石薄膜结构与特性的影响

用射频等离子体方法在玻璃基底上制备了类金刚石薄膜。分析了γ射线辐照类金刚石薄膜（以下简称ＤＬＣ薄膜）的结构与特性改变。采用Ｒａｍａｎ及红外光谱进行结构分析表明：随辐照剂量的增加，在膜中出现ＳＰ３Ｃ—Ｈ及 ＳＰ２Ｃ—Ｈ 键的断裂与减少，ＳＰ３Ｃ—Ｃ键的略微增加．当辐照剂量达 １０ ×１０４Ｇｙ时，ＳＰ３Ｃ—Ｈ键减少约５０％，与此同时，出现膜中氢的重新键合，并从中释出。γ射线辐照使ＤＬＣ薄膜的电阻率呈上升趋势，膜的类金刚石特征更加明显，结构得到改善。本文对γ射线对ＤＬＣ薄膜的辐照机制进行了简要的讨论。     

类金刚石薄膜作为HgCdTe红外器件增透膜和钝化膜的研究

采用高频等离子体化学气相色沉积法（ＲＦＣＶＤ）在ＨｇＣｄＴｅ红外器件上沉积类金刚石薄膜，俄歇电子能谱对ＤＬＣ／ＨｇＣｄＴｅ界面分析结果表明类金刚石薄膜中的碳原子对衬底材料影响较小，７０ｎｍ的类金刚石薄膜抑制衬底组份的外扩散，而且具有纯度较高的类金刚石薄膜外表面层，是一种理想的钝化膜材料，红外透射光谱测试结果表明类金刚石薄膜在较宽的波长范围内（４－１２μｍ）具有明显的增透效应。     

不锈钢衬底上沉积类金刚石薄膜的硬度

利用射频辉光放电法在不锈钢衬底上制备了类金刚石薄膜，用显微硬度计测试了薄膜与衬底复合膜度和衬底硬度。并用Ｂ．Ｊｏｎｓｏｎ和Ｂ．Ｈｏｇｍａｒｋ方法将薄硬度分离出来，得到了硬度值与制与制备参数间的关系，确定了在不锈钢衬底上沉积高度和强附丰度类金刚石薄膜的最佳工艺条件范围，并对实验结果进行了理论解释。     

WC和Si衬底生长金刚石薄膜的研究

采用ＳＥＭ,Ｒａｍａｎ光谱等手段,较全面系统地研究了ＨＦＣＶＤ法在ＷＣ和Ｓｉ衬底上生长金刚石薄膜时,衬底预处理、碳源深度、热丝及衬底温度等对金刚石形核、生长的影响。并对两种衬底进行了对比与分析,最后总结出影响金刚石形核密度、形核速率、晶形结构及晶形完善性的关键因素。     

氧化物La—Ca—Mn—O巨磁电阻薄膜的制备有其结构特性的研究

采用磁控溅射方法在ＺｒＯ２（００１），Ｓｉ（００１）和玻璃衬底上成功地制备了Ｌａ－Ｃａ－Ｍｎ－Ｏ巨磁电阻薄膜。Ｘ－射线分析表明，ＺｒＯ２的晶格常数与ＬＣＭＯ的晶格常数失配虽然较大，仍可得到较好的ＬＣＭＯ薄。膜。在Ｓｉ片上难以制备出致密完整的ＬＣＭＯ薄膜，其原因有待查明。     

氧化物La-Ca-Mn-O巨磁电阻薄膜的制备及其结构特性的研究

采用磁控溅射方法在ＺｒＯ２（００１）、Ｓｉ（００１）和玻璃衬底上成功地制备了ＬａＣａＭｎＯ（以下简称为ＬＣＭＯ）巨磁电阻薄膜。Ｘ－射线分析表明，ＺｒＯ２的晶格常数与ＬＣＭＯ的晶格常数失配虽然较大，仍可得到较好的ＬＣＭＯ薄膜。在Ｓｉ片上难以制备出致密完整的ＬＣＭＯ薄膜，其原因有待查明。玻璃衬底上可以获得纯相的ＬＣＭＯ巨磁电阻薄膜，在ＺｒＯ２衬底上制备的ＬＣＭＯ薄膜，其巨磁电阻效应在１５０Ｋ，３０００Ｇａｕｓ下达１３％左右。     

ECR—PECVD制备Si3N4硬质陶瓷薄膜的研究

采用电子回旋共振等离子体化学气相沉积（ＥＣＲ－ＰＥＣＶＤ）技术制备了Ｓｉ３Ｎ４薄膜。利用显微硬度计测定了Ｓｉ３Ｎ４薄膜的表面微硬度。由摩擦测试机对ＳｉＮ４薄膜的摩擦性能进行了测试分析。结果表明，Ｓｉ３Ｎ４薄膜的摩擦系数和单位时间的磨损量较小，该膜具有良好的耐磨性和耐划伤能力。     

C60薄膜的热处理性能研究

通过对Ｓｉ（１００）衬底上Ｃ６０薄膜在不同温度处理后的ＡＥＳ谱线性研究发现,Ｃ６０分子于９７３Ｋ时开始分解,生成石墨类碳碎片,１０７３Ｋ时Ｃ原子已与Ｓｉ原子键合形成ＳｉＣ,１１２３Ｋ时Ｃ６０分子全部分解,这一研究结果对解释Ｃ６０分子促进金刚石成核将起到重要作用。     

PECVD方法制备SnO2气敏薄膜的电子显微镜研究

通过ＳＥＭ、ＴＥＭ研究了ＰＥＣＶＤ方法制备的ＳｎＯ＿２薄膜的显微结构，讨论了沉积速率与颗粒大小的关系；在Ｓｉ、陶瓷和ＫＢｒ３种不同衬底上沉积的ＳｎＯ＿２薄膜的差异以及退火对ＳｎＯ＿２膜结晶状态的影响。结果表明，ＰＥＣＶＤ方法制备的ＳｎＯ＿２薄膜是非晶态，具有柱状结构。退火使非晶ＳｎＯ＿２膜向着多晶方向转化，演化过程为：非晶大颗粒→超微粒多晶→晶粒长大。     

Optical and mechanical properties of diamond like carbon films deposited by microwave ECR plasma CVD

Diamond like carbon (DLC) films were deposited on Si (111) substrates by microwave electron cyclotron resonance (ECR) plasma chemical vapour deposition (CVD) process using plasma of argon and methane gases. During deposition, a d.c. self-bias was applied to the substrates by application of 13·56 MHz rf power. DLC films deposited at three different bias voltages (−60 V, −100 V and −150 V) were characterized by FTIR, Raman spectroscopy and spectroscopic ellipsometry to study the variation in the bonding and optical properties of the deposited coatings with process parameters. The mechanical properties such as hardness and elastic modulus were measured by load depth sensing indentation technique. The DLC film deposited at −100 V bias exhibit high hardness (∼ 19 GPa), high elastic modulus (∼ 160 GPa) and high refractive index (∼ 2·16–2·26) as compared to films deposited at −60 V and −150 V substrate bias. This study clearly shows the significance of substrate bias in controlling the optical and mechanical properties of DLC films.     

Analysis of plastic deformation in diamond like carbon films-steel substrate system with tribological tests

The influence of plastic deformation of the substrate on the tribological properties of diamond like carbon (DLC) films was investigated in DLC films-steel substrate system. The tribological properties of DLC films deposited on different hardness steel were evaluated by a ball on disk rotating-type friction tester at room temperature under different environments. In dry nitrogen, DLC films on soft steel exhibited excellent tribological properties, especially obvious under high load (such as 20 N and 50 N). However, DLC films on hard steel were worn out quickly at load of 20 N. Plastic deformation was observed on soft steel after tribological tests. The width and depth of plastic deformation track increased with increase of the experimental load. Super low friction and no measurable wear were kept in good condition even large plastic deformation under high load conditions in DLC films-soft steel system. In open air, DLC films on soft steel exhibited high coefficient of friction and DLC films on ball were worn out quickly. Plastic deformation was not observed on soft steel because the contact area increased and the thick hardened layer on contact surface were formed by DLC films and debris particles together on the steel substrate. The wear track on steel became deep and wide with increase of loads and DLC films were worn out. The experimental results showed that super low friction and high wear resistance of DLC films on soft steel can be attributed to the good adhesion and plastic deformation. Plastic deformation played an active role in the tribological properties of DLC films on soft steel in the present work.     

Optimisation of diamond-like carbon films by unbalanced magnetron sputtering for infrared transmission enhancement

Diamond-like carbon (DLC) films have potential applications in infrared transmission enhancement. Reducing or eliminating mechanical stress and optical absorption of DLC is important in such applications because relatively thick films are necessary. In this work, DLC was deposited in an unbalanced magnetron sputtering (UBMS) system. Mechanical and optical properties of the DLC films were analysed. Thick DLC films were deposited which satisfied applications for the infrared windows at 3–5 and 8–10 μm. At optimised conditions, the stress in the DLC films decreased with increasing thickness, approaching 1 GPa. For single side DLC coated silicon substrate, about 69% transmittance was achieved at wavelengths near 5 μm, close to the theoretical value for non-absorbing DLC material. Other properties such as surface roughness, wetting angle, and stability were also studied, which showed that the DLC films produced in the UBMS system were excellent for infrared transmission enhancement applications in tough environments.     

Structure, mechanical and tribological properties of diamond-like carbon films on aluminum alloy by arc ion plating

The low hardness and poor tribological performance of aluminum alloys restrict their engineering applications. However, protective hard films deposited on aluminum alloys are believed to be effective for overcoming their poor wear properties. In this paper, diamond-like carbon (DLC) films as hard protective film were deposited on 2024 aluminum alloy by arc ion plating. The dependence of the chemical state and microstructure of the films on substrate bias voltage was analyzed by X-ray photoelectron spectroscopy and Raman spectroscopy. The mechanical and tribological properties of the DLC films deposited on aluminum alloy were investigated by nanoindentation and ball-on-disk tribotester, respectively. The results show that the deposited DLC films were very well-adhered to the aluminum alloy substrate, with no cracks or delamination being observed. A maximum sp³ content of about 37% was obtained at −100 V substrate bias, resulting in a hardness of 30 GPa and elastic modulus of 280 GPa. Thus, the surface hardness and wear resistance of 2024 aluminum alloy can be significantly improved by applying a protective DLC film coating. The DLC-coated aluminum alloy showed a stable and relatively low friction coefficient, as well as narrower and shallower wear tracks in comparison with the uncoated aluminum alloy.     

DLC膜厚度对镁基表面DLC/MAO复合膜层性能的影响

采用线性离子束沉积技术于AZ80镁合金微弧氧化(MAO)陶瓷层表面沉积不同厚度的类金刚石碳(DLC)膜,形成DLC/MAO复合膜层。对比研究4种膜基系统的表面结构特征、力学性能以及摩擦学性能差异。结果表明:随DLC膜厚度增加,复合膜层表面微孔数量减少,孔径减小,但凹凸不平趋势增加,且DLC膜表面颗粒特征更加明显,表现为DLC-80min/MAO/AZ80膜基系统具有最小的表面粗糙度,最大的硬度H、弹性模量E及H/E值;不同厚度DLC/MAO/AZ80膜基系统平均摩擦因数较MAO/AZ80显著降低;DLC膜厚度增加导致3种复合膜基系统的表面微观结构改变,使得摩擦因数与磨痕形貌存在差异;各膜基系统表面磨痕处均形成了Fe的转移层,由于表层DLC膜"裸露"的大量C对磨损界面具有很好的润滑作用,而使得镁合金基体获得有效保护。     

Hydrophobic properties of the ion beam deposited DLC films containing SiOx

Diamond like carbon (DLC) films received considerable interest due to outstanding mechanical and tribological properties as well as chemical inertness and hydrophobicity. That combination is particularly interesting for possible application of the DLC as anti-sticking layers in novel lithographic techniques such as nanoimprint lithography, because Si, quartz and Ni - the most often used materials for imprint stamp formation - have high surface energy and, as a result, bad anti-adhesive properties. In present study, SiO_x containing DLC thin films were synthesized from hexamethyldisiloxane vapor and hydrogen gas mixture by direct ion beam deposition. Anti-sticking properties of the grown DLC thin films were evaluated measuring surface contact angle with water. Chemical composition and structure of the deposited films were investigated by X-ray photoelectron spectroscopy and FTIR spectrometry. Morphology of the films was measured by atomic force microscopy. Effects of hexamethyldisiloxane flux on structure, anti-sticking properties and surface morphology of the SiO_x containing DLC thin films were defined.     

离子辅助轰击能量对类金刚石薄膜性能的影响

研究了利用ＩＢＡＤ方法沉积类金刚石薄膜时,离子的辅助轰击能量对薄的微观结构、表面粗糙度,弹性、硬度以及摩擦系数的影响,获得了机械和摩擦性能优异的类金刚石薄膜。讨论了薄膜微观结构和性能之间的关系。分析了不同硬度测试方法的差异。     

非平衡磁控溅射无氢DLC增透膜的研制

非平衡磁控溅射(UBMS)技术近年来得到了广泛地应用.采用该技术制备的类金刚石薄膜(DLC)具有许多独特的性质.本文利用正交实验方法,对非平衡磁控溅射技术制备无氢DLC膜增透膜进行了研究,得到了影响薄膜光学性能的主要因素和最佳的制备工艺.结果表明,非平衡磁控溅射制备的无氢DLC膜具有较宽的光谱透明区,锗基底单面沉积DLC膜,其峰值透射率达到61.4%,接近理论值.     

Electrochemical performance of diamond-like carbon thin films

Diamond-like carbon (DLC) thin films used in this study were intended for their electrochemical properties. The DLC films were deposited by a filtered cathodic vacuum arc (FCVA) process on p-type silicon (100) substrates biased at different pulse voltages (0-2000 V). The chemical bonding structures of the DLC films were characterized with micro-Raman spectroscopy and the electrochemical properties were evaluated by means of electrochemical impedance spectroscopy (EIS) and potentiodynamic polarization. The DLC films showed high impedance, high polarization resistance and high breakdown potential in a 0.5 M H₂SO₄ aqueous solution, which were attributed to the high sp³ content and uniformity of the films. The excellent chemical inertness of the DLC films made them promising corrosion resistant coating materials.     

等离子体源离子注入法制备类金刚石薄膜

用等离子体源注入(PSII)在Si(100)上制备类金刚石膜，放电气体采用CH4，用微波电子回旋共振(ECR)产生等离子体。将-20～-30kV的高压加在衬底上，来提高离子的能量。通过Raman光谱和FT-IR光谱检测了类金刚石膜的化学组成及状态，并对其机械性能和表面形貌进行了检测。结果显示，硅片硬度和摩擦因数得到了改善，用PSII能够制备出性能优良的膜，可以将其应用到微电子器件(MEMS)上去。