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1.
Tuncay Tunç ?emsettin Altindal ?brahim Uslu ?lbilge Dökme Habibe Uslu 《Materials Science in Semiconductor Processing》2011,14(2):139-145
Current–voltage (I–V) characteristics of Au/PVA/n-Si (1 1 1) Schottky barrier diodes (SBDs) have been investigated in the temperature range 80–400 K. Here, polyvinyl alcohol (PVA) has been used as interfacial layer between metal and semiconductor layers. The zero-bias barrier height (ΦB0) and ideality factor (n) determined from the forward bias I–V characteristics were found strongly dependent on temperature. The forward bias semi-logarithmic I–V curves for different temperatures have an almost common cross-point at a certain bias voltage. The values of ΦB0 increase with the increasing temperature whereas those of n decrease. Therefore, we have attempted to draw ΦB0 vs. q/2kT plot in order to obtain evidence of a Gaussian distribution (GD) of the barrier heights (BHs). The mean value of BH and standard deviation (σ0) were found to be 0.974 eV and 0.101 V from this plot, respectively. Thus, the slope and intercept of modified vs. q/kT plot give the values of and Richardson constant (A?) as 0.966 eV and 118.75 A/cm2K2, respectively, without using the temperature coefficient of the BH. This value of A* 118.75 A/cm2K2 is very close to the theoretical value of 120 A/cm2K2 for n-type Si. Hence, it has been concluded that the temperature dependence of the forward I–V characteristics of Au/PVA/n-Si (1 1 1) SBDs can be successfully explained on the basis of the Thermionic Emission (TE) theory with a GD of the BHs at Au/n-Si interface. 相似文献
2.
Small high-quality Au/P-Si Schottky barrier diodes (SBDs) with extremely low reverse leakage current using wet lithography were produced. Their effective barrier heights (BHs) and ideality factors from current–voltage (I-V) characteristics were measured by a conducting probe atomic force microscope (C-AFM). In spite of identical preparation of the diodes there was a diode-to-diode variation in ideality factor and barrier height Parameters. By extrapolating of the plots the built in potential of the Au /p-Si contact was obtained as Vbi=0.5425 V and the barrier height value (ФB(C-V)) was calculated to be ФB(C-V)=0.7145 V for Au/p-Si. It is found that for the diodes with diameters smaller than 100 µm the diode barrier height and ideality factor dependency to their diameters and correlation between the diode barrier height and its ideality factor are nonlinear, where similar to the earlier reported different metal semiconductor diodes in the literature, these parameters for the here manufactured diodes with diameters more than 100 µm are also linear. Based on the very obvious sub-nanometer C-AFM produced pictures the scientific evidence behind this controversy is also explained. 相似文献
3.
Small high-quality Au/P-Si Schottky barrier diodes (SBDs) with an extremely low reverse leakage current using wet lithography were produced. Their effective barrier heights (BHs) and ideality factors from current-voltage (Ⅰ-Ⅴ) characteristics were measured by a conducting probe atomic force microscope (C-AFM). In spite of the identical preparation of the diodes there was a diode-to-diode variation in ideality factor and barrier height parameters. By ex-trapolating the plots the built in potential of the Au/p-Si contact was obtained as Vbi = 0.5425 V and the barrier height value φB(C-V) was calculated to be φB(C-V) = 0.7145 V for Au/p-Si. It is found that for the diodes with diameters smaller than 100 μm, the diode barrier height and ideality factor dependency to their diameters and correlation between the diode barrier height and its ideality factor are nonlinear, where similar to the earlier reported different metal semi-conductor diodes in the literature, these parameters for the here manufactured diodes with diameters more than 100μm are also linear. Based on the very obvious sub-nanometer C-AFM produced pictures the scientific evidence behind this controversy is also explained. 相似文献
4.
5.
In this study, a gold/poly(3-hexylthiophene):[6,6]-phenyl C61 butyric acid methyl ester/n-type silicon (Au/P3HT:PCBM/n-Si) metal-polymer-semiconductor (MPS) Schottky barrier diode (SBD) was fabricated. To accomplish this, a spin-coating system and a thermal evaporation were used for preparation of a P3HT/PCBM layer system and for deposition of metal contacts, respectively. The forward- and reverse-bias current–voltage (I–V) characteristics of the MPS SBD at room temperature were studied to investigate its main electrical parameters such as ideality factor (n), barrier height (ΦB), series resistance (Rs), shunt resistance (Rsh), and density of interface states (Nss). The I–V characteristics have nonlinear behavior due to the effect of Rs, resulting in an n value (3.09) larger than unity. Additionally, it was found that n, ΦB, Rs, Rsh, and Nss have strong correlation with the applied bias. All results suggest that the P3HT/PCBM interfacial organic layer affects the Au/P3HT:PCBM/n-Si MPS SBD, and that Rs and Nss are the main electrical parameters that affect the Au/P3HT:PCBM/n-Si MPS SBD. Furthermore, a lower Nss compared with that of other types of MPS SBDs in the literature was achieved by using the P3HT/PCBM layer. This lowering shows that high-quality electronic and optoelectronic devices may be fabricated by using the Au/P3HT:PCBM/n-Si MPS SBD. 相似文献
6.
H. Do?an 《Microelectronic Engineering》2008,85(4):655-658
We have identically prepared as many as eight Ni/n-GaAs/In Schottky barrier diodes (SBDs) using an n-type GaAs substrate with a doping density of about 7.3 × 1015 cm−3. The thermal stability of the Ni/n-GaAs/In Schottky diodes has been investigated by means of current-voltage (I-V) techniques after annealed for 1 min in N2 atmosphere from 200 to 700 °C. For Ni/n-GaAs/In SBDs, the Schottky barrier height Φb and ideality factor n values range from 0.853 ± 0.012 eV and 1.061 ± 0.007 (for as-deposited sample) to 0.785 ± 0.002 eV and 1.209 ± 0.005 (for 600 °C annealing). The ideality factor values remained about unchanged up to 400 °C annealing. The I-V characteristics of the devices deteriorated at 700 °C annealing. 相似文献
7.
J.H. Evans-FreemanM.M. El-Nahass A.A.M. Farag A. Elhaji 《Microelectronic Engineering》2011,88(11):3353-3359
The temperature-dependent electrical characteristics of the Au/n-Si Schottky diodes have been studied in the temperature range of 40-300 K. Current density-voltage (J-V) characteristics of these diodes have been analyzed on the basis of thermionic emission theory with Gaussian distribution model of barrier height. The basic diode parameters such as rectification ratio, ideality factor and barrier height were extracted. Under a reverse bias, the conduction process at low voltage is determined by Schottky emission over a potential barrier but at higher voltage the Poole Frenkel effect is observed. The capacitance-voltage (C-V) features of the Au/n-Si Schottky diodes were characterized in the high frequency of 1 MHz. The barrier heights values obtained from the J-V and C-V characteristics have been compared. It has been seen that the barrier height value obtained from the C-V measurements is higher than that obtained from the J-V measurements at various temperatures. Possible explanations for this discrepancy are presented. Deep level transient spectroscopy (DLTS) has been used to investigate deep levels in Au/n-Si. Three electron trap centers, having different emission rates and activation energies, have been observed. It is argued that the origin of these defects is of intrinsic nature. A correlation between C-V and DLTS measurements is investigated. 相似文献
8.
《Microelectronics Reliability》2014,54(12):2766-2774
In this study, the gold/poly(3-hexylthiophene):[6,6]-phenyl C61 butyric acid methyl ester/n-type silicon (Au/P3HT:PCBM/n-Si) metal–polymer–semiconductor (MPS) Schottky barrier diodes (SBDs) were investigated in terms of the effects of PCBM concentration on the electrical parameters. The forward and reverse bias current–voltage (I–V) characteristics of the Au/P3HT:PCBM/n-Si MPS SBDs fabricated by using the different P3HT:PCBM mass ratios were studied in the dark, at room temperature. The main electrical parameters, such as ideality factor (n), barrier height (ΦB0), series resistance (Rs), shunt resistance (Rsh), and density of interface states (Nss) were determined from I–V characteristics for the different P3HT:PCBM mass ratios (2:1, 6:1 and 10:1) used diodes. The values of n, Rs, ΦB0, and Nss were reduced, while the carrier mobility and current were increased, by increasing the PCBM concentration in the P3HT:PCBM organic blend layer. The ideal values of electrical parameters were obtained for 2:1 P3HT:PCBM mass ratio used diode. This shows that the electrical properties of MPS diodes strongly depend on the PCBM concentration of the P3HT:PCBM organic layer. Moreover, increasing the PCBM concentration in P3HT:PCBM organic blend layer improves the quality of the Au/P3HT:PCBM/n-Si (MPS) SBDs which enables the fabrication of high-quality electronic and optoelectronic devices. 相似文献
9.
S. Khanna A. Noor S. Neeleshwar M.S. Tyagi 《International Journal of Electronics》2013,100(12):1733-1741
Pt/4H-SiC Schottky barrier diodes have been fabricated to investigate the effect of annealing on the electrical characteristics of the fabricated devices. The parameters such as barrier height, ideality factor and donor concentration were deduced from the current–voltage (I–V) and the capacitance–voltage (C–V) measurements at room temperature. Diodes showed non-ideal behaviour like high value of ideality factor and lower value of barrier height. A barrier height of 1.82?eV was obtained from C–V measurements and it was 1.07?eV when obtained from the I–V measurements with ideality factor 1.71 for as-deposited diodes at room temperature. The diodes, therefore, were annealed in the temperature range from 25°C to 400°C to observe the effect of annealing temperature on these parameters. Schottky barrier height and ideality factors were found to be temperature-dependent. After rapid thermal annealing upto 400°C, a barrier height of 1.59?eV from C–V measurements and the value of 1.40?eV from I–V measurements with ideality factor 1.12 were obtained. Barrier heights deduced from C–V measurements were consistently larger than those obtained from I–V measurements. To come to terms with this discrepancy, we re-examined our results by including the effect of ideality factor in the expression of the barrier height. This inclusion of ideality factor results in reasonably good agreement between the values of barrier height deduced by the above two methods. We believe that these improvements in the electrical parameters result from the improvement in the quality of interfacial layer. 相似文献
10.
We have prepared the Au/PbS/n-6H-SiC Schottky diodes with interface layer and the reference Au/n-6H-SiC/Ni Schottky diodes without interface layer to realize Schottky barrier height (SBH) modification in the Au/SiC Schottky diodes. The BH reduction has been succeeded by the PbS interlayer to modify the effective BH by influencing the space charge region of the SiC. The PbS thin layer on the SiC was formed by the vacuum evaporation. The SBH values of 0.97 and 0.89 eV for the samples with and without the interfacial PbS layer were obtained from the forward bias current-voltage (I-V) characteristics. X-ray diffraction (XRD) study was carried out to determine the structural formation of the PbS on SiC. The reduction of the BH in the Au/PbS/n-6H-SiC Schottky diodes has been attributed to the fact that the interface states have a net positive interface charge in metal/n-type semiconductor contact, and thus the positive space charge Qsc in the Au/PbS/n-6H-SiC Schottky diodes becomes smaller than if the interface state charges Qss were absent. The experimental carrier concentration value of 4.73 × 1017 cm−3 obtained from the forward and reverse bias capacitance-voltage characteristics for the Au/PbS/n-6H-SiC contacts is lower than the value of 5.52 × 1017 cm−3 obtained for the reference diode, and this is an evidence of the reduction of the BH by the modification of the space charge density of the SiC. 相似文献
11.
Shiyang Zhu Xin-Ping Qu R. L. Van Meirhaeghe C. Detavernier Guo-Ping Ru F. Cardon Bing-Zong Li 《Solid-state electronics》2000,44(12)
Ballistic electron emission microscopy (BEEM) and ballistic electron emission spectroscopy have been performed on polycrystalline and epitaxial CoSi2/n-Si(1 0 0) contacts at temperatures ranging from −144°C to −20°C. The ultra-thin CoSi2 films (10 nm) were fabricated by solid state reaction of a single layer of Co (3 nm) or a multilayer of Ti (1 nm)/Co (3 nm)/amorphous-Si(1 nm)/Ti (1 nm) with a Si substrate, respectively. The spatial distribution of barrier height over the contact area obeys a Gaussian function at each temperature. The mean barrier height increases almost linearly with decreasing temperature with a coefficient of −0.23±0.02 meV/K for polycrystalline CoSi2/Si diodes and −0.13±0.03 meV/K for epitaxial diodes. This is approximately equal to one or one-half of the temperature coefficient of the indirect energy gap in Si, respectively. It suggests that the Fermi level is pinned to different band positions of Si. The width of the Gaussian distribution is about 30–40 meV, without clear dependence on the temperature. The results obtained from conventional current–voltage and capacitance–voltage (I–V/C–V) measurements are compared to BEEM results. 相似文献
12.
The purpose of this paper is to analyze interface states in Al/SiO2/p-Si (MIS) Schottky diodes and determine the effect of SiO2 surface preparation on the interface state energy distribution. The current-voltage (I-V) characteristics of MIS Schottky diodes were measured at room temperature. From the I-V characteristics of the MIS Schottky diode, ideality factor (n) and barrier height (ΦB) values of 1.537 and 0.763 eV, respectively, were obtained from a forward bias I-V plot. In addition, the density of interface states (Nss) as a function of (Ess-Ev) was extracted from the forward bias I-V measurements by taking into account both the bias dependence of the effective barrier height (Φe), n and Rs for the MIS Schottky diode. The diode shows non-ideal I-V behaviour with ideality factor greater than unity. In addition, the values of series resistance (Rs) were determined using Cheung’s method. The I-V characteristics confirmed that the distribution of Nss, Rs and interfacial insulator layer are important parameters that influence the electrical characteristics of MIS Schottky diodes. 相似文献
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14.
Au/n-GaN Schottky diodes with the Au electrode deposited at low temperature (LT=77K) have been studied. In comparison, the
same chip of GaN epitaxial layer was also used for room temperature Schottky diodes. The low temperature Schottky diodes exhibit
excellent performance. Leakage current density as low as 2.55×10−11 A·cm−2 at −2.5 V was obtained in the LT Schottky diodes. The linear region in the current-voltage curve at forward bias extends
more than eight orders in current magnitude. Current-voltage-temperature measurements were carried out to study the characteristics
of the LT Schottky diodes. A typical barrier height of about 1.32 eV for the LT diode, which is the highest value ever reported,
was obtained. The obvious enhancement in electrical performance makes the LT processing a very promising technique for GaN
device application although the detailed mechanisms for the LT Au/n-GaN Schottky diodes are still under investigation. 相似文献
15.
4H-SiC Schottky barrier diodes (SBDs) were fabricated and characterized from room temperature to 573 K using HfNxBy as Schottky electrodes. The results are compared to SBDs fabricated using other electrodes that include Ni, Pt, Ti and Au. The Schottky barrier height Φb for as-deposited HfNxBy/n−/n+ diodes, determined from room temperature current-voltage characteristics, is 0.887 eV. This is lower than those of SBDs fabricated using other metals such as Au, where Φb is 1.79 eV. The HfNxBy/n−/n+ diodes studied have a much higher on-resistance Ron of around 38.24 mΩ-cm2, which is about four times that of Au/n−/n+ diodes, due to the higher sheet resistance of the sputtered HfNxBy electrode layer. The barrier height Φb and ideality factor η of the HfNxBy/n−/n+ diodes remain almost unchanged after 400 and 750 °C anneal in N2. This suggests excellent thermal and chemical stability of HfNxBy in contact with 4H-SiC. 相似文献
16.
Thomas J. Licata Michael T. Schmidt Dragan V. Podlesnik Vladimir Liberman Richard M. Osgood Winston K. Chan Rajaram Bhat 《Journal of Electronic Materials》1990,19(11):1239-1246
Much recent attention has been paid to elevating the barrier height of contacts to InP and In0.53Ga0. 47As via the formation of a thin, intermediate layer between the semicon-ductor and a conventionally deposited, highly conductive contact layer. Here, we report on the use of thin (~200Å) excimer laser photodeposited Cd as an interlayer between these semiconductors and Au overlayers in order to raise the barrier height of the re-sulting diodes. Current-voltage measurements of ideal Schottky diodes fabricated using this process yield barrier heights of 0.70 eV and 0.55 eV to InP and In0.53Ga0. 47As, re-spectively. The photodeposition process has been integrated with conventional clean room processing resulting in Au/Cd/In0.53Ga0. 47As transistors with high transconductances (~200 mS/mm) and operating frequencies (f max ~ 30 GHz). X-ray photoelectron spec-troscopy of thin Cd photodeposits on InP shows that the process produces an interfacial (~10Å thick) Cd-InP reaction zone covered by metallic Cd. 相似文献
17.
The influence of high energy electron (HEE) irradiation from a Sr-90 radio-nuclide on n-type Ni/4H–SiC samples of doping density 7.1×1015 cm−3 has been investigated over the temperature range 40–300 K. Current–voltage (I–V), capacitance–voltage (C–V) and deep level transient spectroscopy (DLTS) were used to characterize the devices before and after irradiation at a fluence of 6×1014 electrons-cm−2. For both devices, the I–V characteristics were well described by thermionic emission (TE) in the temperature range 120–300 K, but deviated from TE theory at temperature below 120 K. The current flowing through the interface at a bias of 2.0 V from pure thermionic emission to thermionic field emission within the depletion region with the free carrier concentrations of the devices decreased from 7.8×1015 to 6.8×1015 cm−3 after HEE irradiation. The modified Richardson constants were determined from the Gaussian distribution of the barrier height across the contact and found to be 133 and 163 A cm−2 K−2 for as-deposited and irradiated diodes, respectively. Three new defects with energies 0.22, 0.40 and 0.71 eV appeared after HEE irradiation. Richardson constants were significantly less than the theoretical value which was ascribed to a small active device area. 相似文献
18.
本文通过对Au/n-CdTe肖特基二极管I-V-T测量得出:在室温附近,势垒高度随温度升高而线性增加,增加速率约为 9 ×10~(-4)eV/K.这一结果与 Hattori 等对InP的研究结果一致, 相似文献
19.