A 4-Mbit DRAM with half-internal-voltage bit-line precharge

A single 5-V supply 4-Mb dynamic random access memory (DRAM) was developed by using a buried-storage-electrode memory cell, a half-internal-voltage bit-line precharge method combined with a constant voltage converter, and a high signal-to-noise ratio sensing scheme. The chip was designed in a double-polycide, single-Al, epitaxial substrate NMOS technology with a 0.8-/spl mu/m minimum design rule. As a result, a 4M word/spl times/1-bit DRAM with 95-ns typical access time and 99.2-mm/SUP 2/ chip area was attained by 10.58-/spl mu/m/SUP 2/ storage cells.     

A 4-Mbit CMOS EPROM

A high-density (512K-word/spl times/8-b) erasable programmable read-only memory (EPROM) has been designed and fabricated by using 0.8-/spl mu/m n-well CMOS technology. A novel chip layout and a sense-amplifier circuit produce a 120-ns access time and a 4-mA operational supply current. The interpoly dielectric, composed of a triple-layer structure, realizes a 10-/spl mu/s/byte fast programming time, in spite of scaling the programming voltage V/SUB PP/ from 12.5 V for a 1-Mb EPROM to 10.5 V for this 4-Mb EPROM. To meet the increasing demand for a one-time programmable (OTP) ROM, a circuit is implemented to monitor the access time after the assembly. A novel redundancy scheme is incorporated to reduce additional tests after the laser fuse programming. Cell size and chip size are 3.1/spl times/2.9 /spl mu/m/SUP 2/ and 5.86/spl times/14.92 mm/SUP 2/, respectively.     

A 60-ns 3.3-V-only 16-Mbit DRAM with multipurpose register

A single 3.3-V 16-Mbit DRAM with a 135-mm/sup 2/ chip size has been fabricated using a 0.5- mu m twin-well process with double-metal wiring. The array architecture, based on the twisted-bit-line (TBL) array, includes suitable dummy and space word-line configurations which suppress the inter-bit-line noise and bring yield improvement. The multipurpose register (MPR) designed for the hierarchical data bus structure provides a line-mode test (LMT), copy write, and cache access capability. The LMT with on-chip test circuits using the MPR and a comparator creates a random test pattern and reduces the test time to 1/1000. A field shield isolation and a T-shaped stacked capacitor allow the layout of a 4.8- mu m/sup 2/ cell size with a storage capacitance of 35 fF. These techniques enable the 3.3-V 16-Mbit DRAM to achieve a 60-ns RAS access time and 300-mW power dissipation at 120-ns cycle time.<>     

An experimental 4-Mbit CMOS DRAM

A 4-Mb dynamic RAM has been designed and fabricated using 1.0-/spl mu/m twin-tub CMOS technology. The memory array consists of trenched n-channel depletion-type capacitor cells in a p-well. Very high /spl alpha/-particle immunity was achieved with this structure. One cell measures 3.0/spl times/5.8 /spl mu/m/SUP 2/ yielding a chip size of 7.84/spl times/17.48 mm/SUP 2/. An on-chip voltage converter circuit was implemented as a mask option to investigate a possible solution to the MOSFET reliability problem caused by hot carriers. An 8-bit parallel test mode was introduced to reduce the RAM test time. Metal mask options provide static-column-mode and fast-age-mode operation. The chip is usable as /spl times/1 or /spl times/4 organizations with a bonding option. Using an external 5-V power supply, the row-address-strobe access time is 80 ns at room temperature. The typical active current is 60 mA at a 220-ns cycle time with a standby current of 0.5 mA.     

A high-speed 16-kbit n-MOS random-access memory

This paper presents one version of a high-speed 16-kbit dynamic MOS random-access memory (RAM). This memory utilizes a one transistor cell with an area of 22/spl times/36 /spl mu/m/SUP 2/ which is fabricated using advanced n-channel silicon-gate MOS technology (5-/spl mu/m photolithography). The main feature of the design is a sense circuitry scheme, which allows a high speed (read access time of 200 ns) with low-power dissipation (600 mW at the 400-ns cycle time). The fully decoded memory is fabricated on a 5/spl times/7 mm/SUP 2/ chip and is assembled in a 22-lead ceramic dual-in-line package.     

A 3.5-ns, 2-W, 20-mm/SUP 2/, 16-kbit ECL bipolar RAM

A 3.5-ns emitter-coupled logic (ECL) 16-kbit bipolar RAM with a power dissipation of 2 W, a cell size of 495 /spl mu/m/SUP 2/, and a chip size of 20 mm/SUP 2/ has been developed. High performance is achieved using a high-speed Schottky barrier diode decoder with a pull-up circuit and a double-stage discharge circuit for a word-line driver. Small cell size is obtained using ultra-thin Ta/SUB 2/O/SUB 5/ film capacitors and 1-/spl mu/m U-groove isolation technology. An access time of 3.5 ns in this 16-kb bipolar RAM is equivalent to an effective access time of 2.5 ns at the system level, due to an on-chip address buffer and latch.     

A 16-Mb MRAM featuring bootstrapped write drivers

A 16-Mb magnetic random access memory (MRAM) is demonstrated in 0.18-/spl mu/m three-Cu-level CMOS with a three-level MRAM process adder. The chip, the highest density MRAM reported to date, utilizes a 1.42/spl mu/m/sup 2/ 1-transistor 1-magnetic tunnel junction (1T1MTJ) cell, measures 79 mm/sup 2/ and features a /spl times/16 asynchronous SRAM-like interface. The paper describes the cell, architecture, and circuit techniques unique to multi-Mb MRAM design, including a novel bootstrapped write driver circuit. Hardware results are presented.     

A GaAs 16 K SRAM with a single 1-V supply

A GaAs 4 K/spl times/4-b static random access memory (SRAM) with 11-ns access time and 1-W power dissipation is described. The device is fabricated using 1.0-/spl mu/m WSi/SUB x/ selfaligned gate metal semiconductor FET (MESFET) and double-level interconnection technology. Optimization of fan-out and adoption of an address precoder circuit enable both fast access time and low power dissipation. The SRAM operates with a single 1.0-V supply.     

A 4-Mbit DRAM with folded-bit-line adaptive sidewall-isolated capacitor (FASIC) cell

A 5-V 4-Mb word/spl times/1-b/1-Mb word/spl times/4-b dynamic RAM with a static column model and fast page mode has been built in a 0.8-/spl mu/m twin-tub CMOS technology with single-metal, two-polycide, and single poly-Si interconnections. It uses an innovative folded-bit-line adaptive sidewall-isolated capacitor (FASIC) cell that measures 10.9 /spl mu/m/SUP 2/ and requires only a 2-/spl mu/m trench to obtain a storage capacitor of 50 fF with 10-nm SiO/SUB 2/ equivalent dielectric film. A shared-PMOS sense-amplifier architecture used in this DRAM provides a low power consumption, small C/SUB B/-to-C/SUB S/ capacitance ratio, and accurate reference level for the nonboosted word-line scheme with little area penalty. These concepts have allowed the DRAM to be housed in the industry standard 300-mil dual-in-line package with performances of 90-ns RAS access time and 30-ns column address access time.     

A 4-Mbit DRAM with trench-transistor cell

An experimental 5-V-only 1M-word/spl times/4-bit dynamic RAM with page and SCD modes has been built in a relatively conservative 1-/spl mu/m CMOS technology with double-level metal and deep trenches. It uses a cross-point one-transistor trench-transistor cell that measures only 9 /spl mu/m/SUP 2/. A double-ended adaptive folded bit-line architecture used on this DRAM provides the breakthrough needed to take full density advantage of this cross-point cell. The 30-fF storage capacitance of this cell is expected to provide high alpha immunity since the charge is stored in polysilicon and is oxide isolated from the substrate. A 150-ns now-address-stable access time and 40-ns column-address-strobe access time have been observed.     

A 25-ns 1-Mbit CMOS SRAM with loading-free bit lines

A 128 K/spl times/8-b CMOS SRAM is described which achieves a 25-ns access time, less than 40-mA active current at 10 MHz, and 2-/spl mu/A standby current. The novel bit-line circuitry (loading-free bit line), using two kinds of NMOSFETs with different threshold voltages, improves bit-line signal speed and integrity. The two-stage local amplification technique minimizes the data-line delay. The dynamic double-word-line scheme (DDWL) allows the cell array to be divided into 32 sections along the word-line direction without a huge increase in chip area. This allows the DDWL scheme to reduce the core-area delay time and operating power to about half that of other conventional structures. A double-metal 0.8-/spl mu/m twin-tub CMOS technology has been developed to realize the 5.6/spl times/9.5-/spl mu//SUP 2/ cell size and the 6.86/spl times/15.37-mm/SUP 2/ chip size.     

A 1-Mbit DRAM with 33-MHz serial I/O ports

High-speed operation, a 33-MHz serial cycle, and a 10-ns serial data access time have been realized by internal serial/parallel conversion circuits, a newly designed I/O controller circuit, new dynamic register circuits, a divided sensing method, and an optimized layout design. The chip is fabricated with a 1.2-/spl mu/m double-level polysilicon and double-level aluminium n-channel MOS process technology. An optimized interlevel insulator realizes equivalent first- and second-level aluminium pitches for a compact chip design. The chip size is 5.88/spl times/11.2 mm/SUP 2/. This memory has high-speed input and output capability as well as random accessibility. These features are suitable for TV and VCR frame-memory-system applications.     

A low-power sub 100 ns 256K bit dynamic RAM

A 256K-word /spl times/ 1-bit NMOS dynamic RAM using 2-/spl mu/m design rules and MoSi/SUB 2/ gate technology is described. A marked low-power dissipation of 170 mW (5 V V/SUB cc/, 260-ns cycle time) has been achieved by using a partial activation scheme. Optimized circuits exhibit a typical CAS access time of 34 ns. For the purpose of optimizing circuit parameters, an electron beam tester was successfully applied to observe the internal timing of real chips. Laser repairable redundancy with four spare rows and four spare columns is implemented for yield improvement.     

An experimental 80-ns 1-Mbit DRAM with fast page operation

An experimental general purpose 5-V 1-Mb dynamic RAM has been designed for increased performance, high density, and enhanced reliability. The array consists of a one-device overlapped I/O cell with a metal bitline architecture. The cell measures 4.1 /spl mu/m by 8.8 /spl mu/m, which yields a chip size of 5.5 mm by 10.5 mm with an array to chip area ratio of 65.5%. The chip was designed in a double-poly single-metal NMOS technology with selected 1-/spl mu/m levels and an average feature size of 1.5 /spl mu/m. Key design features include a fast page mode cycle with minimum column precharge delay and improved protection for short error rate using a boosted word-line after sense amplifier set scheme. The CAS access time is 40 ns and the cycle is 65 ns at 4.5 V and 85/spl deg/C. The RAS access time is 80 ns and the cycle is 160 ns at 4.5 V and 85/spl deg/C with a typical active power of 625 mW. The chip is usable as a X1, X2, or X4 with the use of block select inputs and the selected package option. The package options include a 500-mil/SUP 2/ pin grid array module with 23 pins, and a 22 pin or 26 pin 300-mil surface solder plastic package.     

A fault-tolerant 256K RAM fabricated with molybdenum-polysilicon technology

Describes a 256K molybdenum-polysilicon (Mo-poly) gate dynamic MOS RAM using a single transistor cell. Circuit technologies, including a capacitive-coupled sense-refresh amplifier and a redundant circuitry, enable the achievement of high performance in combination with Mo-poly technology. Electron-beam direct writing and dry etching technologies are fully utilized to make 1 /spl mu/m accurate patterns. The 256K word/spl times/1 bit device is fabricated on a 5.83 mm/spl times/5.90 mm chip. Cell size is 8.05 /spl mu/m/spl times/8.60 /spl mu/m. The additional 4K spare cells and the associated circuits, in which newly developed electrically programmable elements are used, occupy less than 10 percent of the whole chip area. The measured access time is 160 ns under V/SUB DD/=5 V condition.     

Single transistor MOS RAM using a short-channel MOS transistor

The relationship between sensitivity and other factors in the sense circuit of a single transistor MOS RAM has been investigated by computer simulation. An expression for sensitivity of the sense circuit has been derived. It suggests key points to increase the sensitivity of the sense circuit. A new sense circuit that defects a signal less than /spl plusmn/30 mV and has low power capability 50 /spl mu/W/circuit is realized by following the suggestions. The high performance of the proposed sense circuit has been verified through the fabrication of a 1K MOS RAM. Fine pattern technology, such as 2-/spl mu/m minimum pattern width and spacing and 500-/spl Aring/ gate oxide thickness, has been adopted. The threshold voltage of the MOS transistor is 0.8 V and dc supplies are 7 V and /spl plusmn/2 V. This 1K RAM has characteristics of 80-ns access time, 150-ns cycle time, and 30-mW power dissipation.     

A 0.85-ns 1-kbit ECL RAM

A 1-kb ECL RAM with an address access time of 0.85 ns is described. This excellent performance is achieved by combining super self-aligned technology (SST) with 1-/spl mu/m design rules and high-speed circuit design. SST provides a narrow emitter stripe width of 0.5 /spl mu/m and a high cutoff frequency of 12.4 GHz at V/SUB CE/=3 V. A two-level metallization process is used. The minimum metallization pitches are 3 /spl mu/m in the first layer and 6 /spl mu/m in the second one. The chip size is 2.5/spl times/2.5 mm/SUP 2/ and the power dissipation is 950 mW. This RAM is promising for use in super computers and/or high-speed digital systems.     

A 1024-bit MNOS RAM using avalanche-tunnel injection

MNOS memory cells which consist of one MNOS transistor and two MOS transistors are incorporated into a fully decoded 1024-word by 1-bit random access memory (RAM) with nonvolatility. The features of the present nonvolatile RAM are: 1) by introducing a novel mode of write operation, electrical isolators, such as p-n junction isolation between the memory cells and the other circuits are not required, 2) stored data can last more than one year without any kind of external power supply, 3) the chip size of the memory is 3.60/spl times/3.61 mm/SUP 2/, 4) the read-access time is 600 ns and the write cycle time is 10 /spl mu/s-100 /spl mu/s.     

An embedded DRAM with a 143-MHz SRAM interface using a sense-synchronized read/write

This paper describes a 4-Mb embedded DRAM macro using novel fast random cycle architecture with sense-synchronized read/write (SSR/SSW). The test chip has been fabricated with a 0.15-/spl mu/m logic-based embedded DRAM process and the 1.5-V 143-MHz no-wait row random access operation has been confirmed. Data retention power is suppressed to 92 /spl mu/W owing to the hierarchical power supply and SSR. The macro size is 4.59 mm/sup 2/. The cell occupation ratio of the macro is 46%, which is the same as that of a conventional embedded DRAM macro. The macro size and the data retention power are 30% and 4.6%, respectively, of a 4-Mb embedded SRAM macro fabricated by an identical process.     

A monolithic 64 bit floating-point coprocessor

A double/single-precision floating-point processor using a titanium disilicide 3.5-/spl mu/m NMOS process achieves double-precision add/subtract, multiply, and divide in 2, 8, and 16 /spl mu/s respectively. The chip has about 35K devices and is about 400 mil on the side. The chip uses a single 5-V supply with TTL-compatible levels on all signals except for the clocks, which require 4.5 V for a logic high. Four input clocks are used to generate eight 50-ns intervals. A -2.5 V substrate bias generator is designed on the chip but uses a pin for an external capacitor. The processor, which is to be used in a desktop implementation of a minicomputer, executes the floating-point instruction set for the micro-Eclipse computer.