Plasma-induced TCO texture of ZnO:Ga back contacts on silicon thin film solar cells

This paper considers texturing of ZnO:Ga (GZO) films used as back contacts in amorphous silicon (a-Si) thin film solar cells. GZO thin films are first prepared by conventional methods. The as-deposited GZO surface properties are modified so that their use as back contacts on a-Si solar cells is enhanced. Texturing is performed by simple dry plasma etching in a CVD process chamber,at power=100 W, substrate temperature=190 °C (temperature is held at 190 °C because thin film solar cells are damaged above 200 °C), pressure=400 Pa and process gas H₂ flow=700 sccm. Conventional a-Si solar cells are fabricated with and without GZO back contact surface treatment. Comparison of the with/without texturing GZO films shows that plasma etching increases optical scattering reflectance and reflection haze. SEM and TEM are used to evaluate the morphological treatment-induced changes in the films. Comparison of the a-Si solar cells with/without texturing shows that the plasma treatment increases both the short-circuit current density and fill factor. Consequently, a-Si solar cell efficiency is relatively improved by 4.6%.     

Modelling of material properties influence on back junction thin polycrystalline silicon solar cells

The influence of polycrystalline silicon properties on the performances of thin back junction solar cells has been investigated by means of a 3-dimensional model taking into account grain size, grain boundary recombination, volumic recombination, and surface recombination. The drastic influence of front surface recombination has been confirmed. The grain size has been shown to be of minor importance provided the grain size is not too small and the grain boundaries are correctly passivated. An optimal base thickness has been determined which is all the smaller that the material is more imperfect.     

Applying analytical and numerical methods for the analysis of microcrystalline silicon solar cells

The results of numerical device simulations for p–i–n diodes and the closed-form expression of the current–voltage characteristics developed for p–n diodes are compared. It is shown that the closed-form expression correctly predicts the functional relationship between material parameters and device performance of p–i–n diodes. The ideality factor between 1 and 2 is analyzed in detail. The effect of the defect density, the intrinsic carrier concentration, the mobility and the built-in potential on device performance are demonstrated. These insights are applied to analyze microcrystalline silicon thin-film solar cells deposited by chemical vapor deposition at temperatures below 250 °C.     

Control of LPCVD ZnO growth modes for improved light trapping in thin film silicon solar cells

By controlling the deposition parameters of low pressure chemical vapor deposition (LPCVD) grown ZnO transparent conductive oxide (TCO), we show that it is possible to achieve a switch of crystallographic orientations and to obtain novel surface nanotexture. The new layers are (0 0 0 2) oriented and exhibit light scattering at larger angles than state-of-the-art TCO used in thin film silicon solar cells. This property translates into a strong enhancement of the top amorphous cell current in micromorph tandem devices.     

The effect of transient depletion of source gases on the properties of microcrystalline silicon solar cells

In is paper, the transient behavior of silane molecules in the initial plasma ignition stage on the properties of microcrystalline silicon films is studied using tailored initial SiH₄ density method, and the results are analyzed by Raman spectroscopy and spectroscopic ellipsometry. Compared with standard plasma ignition conditions, tailored initial SiH₄ density conditions result higher crystallinity in the interface between substrate and bulk film. Finally, tailored and standard conditions are used in i-layer deposition processes of p-i-n and n-i-p solar cells. It is demonstrated that tailored initial SiH₄ density conditions is helpful for the efficiency improvement of n-i-p solar cells and standard plasma ignition conditions for p-i-n solar cells.     

Preparation of microcrystalline single junction and amorphous–microcrystalline tandem silicon solar cells entirely by hot-wire CVD

The hot-wire chemical vapour deposition (HWCVD) has been used to prepare highly conducting p- and n-doped microcrystalline silicon thin layers as well as highly photoconducting, low defect density intrinsic microcrystalline silicon films. These films were incorporated in all-HWCVD, all-microcrystalline nip and pin solar cells, achieving conversion efficiencies of η=5.4% and 4.5%, respectively. At present, only the nip-structures are found to be stable against light-induced degradation. Furthermore, microcrystalline nip and pin structures have been successfully incorporated as bottom cells in all-hot-wire amorphous–microcrystalline nipnip- and pinpin-tandem solar cells for the first time. So far, the highest conversion efficiencies of the “micromorph” tandem structures are η=5.7% for pinpin-solar cells and 7.0% for nipnip solar cells.     

Surface texturing of sputtered ZnO:Al/Ag back reflectors for flexible silicon thin-film solar cells

Al-doped zinc oxide/silver (ZnO:Al/Ag) back reflectors for silicon thin-film solar cells with an n-i-p configuration were prepared on flexible stainless steel substrates by dc magnetron sputtering. The surface morphologies of the back reflectors were modified by changing the deposition temperature of the Ag films to improve the light-scattering properties on the back reflectors, resulting in the enhancement of the light-trapping effect in the solar cells. By elevating the deposition temperature from room temperature to 500 °C, the surface roughness of the Ag films increased from 6.62 to 46.64 nm. The films at 500 °C had coarse surface features with irregular grain size distributions between 200 and 900 nm, whereas the films produced at low temperatures below 100 °C had smooth surfaces consisting of small grains between 100 and 200 nm. Even after the 100-nm thick ZnO:Al films were deposited on the modified Ag surfaces, the surface microstructure of the ZnO:Al/Ag bilayers was similar to that of the Ag films. The surface roughness of bilayers increased from 7.12 to 39.30 nm with coarsening the Ag surfaces. Haze factor (a ratio of diffuse reflectance to total reflectance) of Ag films was enhanced remarkably from 59% to 74% in a wide wavelength range from 350 to 1100 nm with increasing the surface roughness of the Ag films from 6.62 nm to 46.64 nm. Enhancement in the haze factor was due to the increase of diffuse reflectance on the Ag films, because the total reflectance did not change much with increasing surface roughness of the Ag films. This increasing roughness indicated that the light scattering from the rough surface of the back reflectors improved. The enhanced light scattering from the back reflectors influenced the performance of the solar cells mainly in terms of the short-circuit current density (J_sc). Compared to the back reflectors with smooth surface features, leading to a J_sc value of 9.94 mA/cm², the back reflectors with large surface roughness improved the J_sc value of the solar cells to 13.36 mA/cm² without detrimental changes in the fill factor (FF) and open circuit voltage (V_oc); they eventually increased the conversion efficiency of the solar cells from 5.59% to 7.60%.     

High-efficiency multicrystalline silicon solar cells by liquid phase-epitaxy

Thin-film silicon cells produced on crystalline silicon substrates have the potential to achieve high cell efficiencies at low cost. We have used a modified liquid-phase epitaxy growth process to produce very smooth, high-quality silicon films on multicrystalline silicon substrates. Photoconductivity decay measurements indicate that the minority carrier lifetimes in these layers are at least 10 μs, sufficient to achieve cell efficiencies in excess of 16%. This efficiency potential is confirmed in small area cells, which have displayed efficiencies up to 15.4%. Further improvements up to 17% efficiency are possible in the short term, even without the introduction of any light-trapping schemes into the device structure.     

Microcrystalline silicon films and solar cells deposited by PECVD and HWCVD

The application of microcrystalline silicon (μc-Si:H) in thin-film solar cells is addressed in the present paper. Results of different technologies for the preparation of μc-Si:H are presented, including plasma enhanced chemical vapour deposition (PECVD) using 13.56 MHz (radio frequency, rf) and 94.7 MHz (very high frequency, vhf) and hot-wire chemical vapour deposition (HWCVD). The influence of the silane concentration (SC) on the material and solar cell parameters is studied for the different techniques as the variation of SC allows to optimise the solar cell performance in each deposition regime. The best performance of μc-Si:H solar cells is always observed near the transition to amorphous growth. The highest efficiency obtained so far at a deposition rate of 5 Å/s is 9.4%, achieved with rf-PECVD in a deposition regime of using high pressure and high discharge power. High deposition rates and solar cell efficiencies could be also achieved by vhf-PECVD. An alternative approach represents the HWCVD which also demonstrated high deposition rates for μc-Si:H. However, good material quality and solar cell performance could only be achieved at low substrate temperatures and, consequently, low deposition rates. The μc-Si:H solar cells prepared by HWCVD exhibit comparably high efficiencies up to 9.4% and exceptionally high open circuit voltages up to 600 mV but at lower deposition rates (≈1 Å/s). The properties of PECVD and HWCVD solar cells are carefully compared.     

Porous silicon layer transfer processes for solar cells

A promising cost-effective way of converting sun light into electricity could be a solar cell realized in a thin monocrystalline silicon film, due to its potential to achieve cell efficiencies of more than 20% in a 20 μm thick film. A porous silicon layer transfer technique provides an opportunity to get monocrystalline films on low-cost substrates such as glass. This paper reviews various processes, which are being developed for the layer transfer using porous silicon as a sacrificial layer while reusing of starting silicon substrate. The four basic steps—porous silicon formation, active layer deposition, layer separation and transfer, and device fabrication—have been identified in layer transfer process. The processes have been categorized and compared on the basis of the sequence of steps used in individual processes.     

Thickness dependence of microcrystalline silicon solar cell properties

This paper addresses the performance of pin and nip solar cells with microcrystalline silicon (μc-Si:H) absorber layers of different thickness. Despite the reverse deposition sequence, the behavior of both types of solar cells is found to be similar. Thicker absorber layers yield higher short-circuit currents, which can be fully attributed to an enhanced optical absorption. Open-circuit voltage V_OC and fill factor FF decrease with increasing thickness, showing limitations of the bulk material. As a result of these two contrary effects the efficiency η varies only weakly for absorber layers of 1 to 4 μm thickness, yielding maximum values up to 8.1 %. For a-Si:H/μc-Si:H stacked solar cells an initial efficiency of 12% has been obtained.     

The influence of drift fields in thin silicon solar cells

The influence of electric “drift” fields in the base of silicon solar cells on device performance is investigated. The drift fields are the result of a nonuniform dopant density in the base material. Numerical modelling is carried out for a range of representative cell structures and two different models for the dependence of the minority carrier lifetime on the dopant density. The cell design variables, in particular the dopant densities and the thicknesses of the device regions, are optimized with respect to the cell efficiency. Comparison of optimized cells incorporating a drift field with those not having a drift field, shows that a drift field can offer only small efficiency advantages for particular cell structures and recombination parameters, and only if large variations in dopant concentration can be achieved.     

Development of thin film amorphous silicon oxide/microcrystalline silicon double-junction solar cells and their temperature dependence

We have developed thin film silicon double-junction solar cells by using micromorph structure. Wide bandgap hydrogenated amorphous silicon oxide (a-SiO:H) film was used as an absorber layer of top cell in order to obtain solar cells with high open circuit voltage (V_oc), which are attractive for the use in high temperature environment. All p, i and n layers were deposited on transparent conductive oxide (TCO) coated glass substrate by a 60 MHz-very-high-frequency plasma enhanced chemical vapor deposition (VHF-PECVD) technique. The p-i-n-p-i-n double-junction solar cells were fabricated by varying the CO₂ and H₂ flow rate of i top layer in order to obtain the wide bandgap with good quality material, which deposited near the phase boundary between a-SiO:H and hydrogenated microcrystalline silicon oxide (μc-SiO:H), where the high V_oc can be expected. The typical a-SiO:H/μc-Si:H solar cell showed the highest initial cell efficiency of 10.5%. The temperature coefficient (TC) of solar cells indicated that the values of TC for conversion efficiency (η) of the double-junction solar cells were inversely proportional to the initial V_oc, which corresponds to the bandgap of the top cells. The TC for η of typical a-SiO:H/μc-Si:H was −0.32%/ °C, lower than the value of conventional a-Si:H/μc-Si:H solar cell. Both the a-SiO:H/μc-Si:H solar cell and the conventional solar cell showed the same light induced degradation ratio of about 20%. We concluded that the solar cells using wide bandgap a-SiO:H film in the top cells are promising for the use in high temperature regions.     

Realization of high efficiency micromorph tandem silicon solar cells on glass and plastic substrates: Issues and potential

High conversion efficiency for (amorphous/microcrystalline) "micromorph" tandem solar cells requires both a dedicated light management, to keep the absorber layers as thin as possible, and optimized growth conditions of the microcrystalline silicon (μc-Si:H) material. Efficient light trapping is achieved here by use of textured front and back contacts as well as by implementing an intermediate reflecting layer (IRL) between the individual cells of the tandem. This paper discusses the latest developments of IRLs at IMT Neuchâtel: SiO_x based for micromorphs on glass and ZnO based IRLs for micromorphs on flexible substrates were successfully incorporated in micromorph tandem cells leading to high, matched, current above 13.8 mA/cm² for p-i-n tandems. In n-i-p configuration, asymmetric intermediate reflectors were employed to achieve currents of up to 12.5 mA/cm². On glass substrates, initial and stabilized efficiencies exceeding 13% and 11%, respectively, were thus obtained on 1 cm² cells, while on plastic foils with imprinted gratings, 11.2% initial and 9.8% stable efficiency could be reached. Recent progress on the development of effective front and back contacts will be described as well.     

Deposition of transparent and conductive Al-doped ZnO thin films for photovoltaic solar cells

The effect of the substrate temperature on the optoelectronic properties of ZnO-based thin films prepared by rf magnetron sputtering has been studied. Three different targets (Zn/Al 98/2 at%, ZnO:Al 98/2 at% and ZnO:Al₂O₃ 98/2 wt%) have been investigated in order to compare resulting samples and try to reduce the substrate temperature down to room temperature. From the ZnO:Al₂O₃ target, transparent conductive zinc oxide has been obtained at 25°C with the average optical transmission in the 400–800 nm wavelength range, T = 80–90% and resistivity, = 3−5 × 10⁻³ Ωcm. In Al:Zn0 layers, the spatial distribution of the electrical properties across the substrate placed parallel to the target has been improved by depositing at high substrate temperatures, above 200°C. Besides, owing to diffusion processes of CuInSe₂ and CdS take place at 200°C, an AI:ZnO/CdS/CuInSe₂ polycrystalline solar cell made with the Al:ZnO deposited at 25°C as the transparent conductive oxide, has shown a more efficient photovoltaic response, η = 6.8%, than the one measured when the aluminium-doped zinc oxide has been prepared at 200°C, η = 1.8%.     

The light stability of microcrystalline silicon thin films deposited by VHF-PECVD method

Microcrystalline silicon thin film is deposited under different conditions by plasma enhanced chemical vapor deposition. The light stability with different crystallinity and grain size is studied, and the growth mechanism is analyzed using the scaling behavior of roughening surface evolution. Degradation of photoconductivity mainly depends on crystallinity and grain size, but fundamentally, on the growth mechanism. Materials with high crystallinity and large grain size are more stable under light soaking. With the increasing of deposition pressure and input power, growth process transfers to zero diffusion limit growth mechanism, and films deposited present less grain size and poor light stability.     

Highly reflective nanotextured sputtered silver back reflector for flexible high-efficiency n-i-p thin-film silicon solar cells

High reflectivity is essential when a metal is used as back contact and reflector in thin-film silicon solar cells. We show that thermal annealing at 150 °C improves the reflectivity of silver films deposited by sputtering at room temperature on nanotextured substrates. The annealing provokes two interlinked effects: rearrangement of the silver layer with a modification of its morphology and an increase of up to 42% in the grain size of the polycrystalline film for the preferential orientation as measured by X-ray diffraction. The main consequence of these two mechanisms is a large increase in the reflectivity of silver when measured in air. This reflectivity increase is also noticeable in devices: amorphous silicon thin-film solar cells grown on annealed silver films yield higher internal and external quantum efficiencies compared to cells grown on as-deposited silver. The morphology modification smoothes down the substrate, which is revealed by a clear increase of the open-circuit voltage and fill factor of the cells grown on top. An amorphous silicon cell with a 200 nm nominally thick i-layer fabricated on a flexible plastic substrate yielded an initial efficiency close to 10% with 15.9 mA/cm² of short-circuit current using highly reflective annealed textured silver. We also propose, for industrial purpose, the sputtering of thin silver layer (120 nm) under moderate substrate temperature (∼150 °C) to increase the layer reflectivity, which avoids lengthening of the back reflector fabrication.     

Amorphous silicon solar cells

The perfectioning of the deposition techniques of amorphous silicon over large areas, in particular film homogeneity and the reproducibility of the electro-optical characteristics, has allowed a more accurate study of the most intriguing bane of this material: the degradation under sun-light illumination. Optical band-gap and film thickness engineering have enabled device efficiency to stabilize with only a 10–15% loss in the as-deposited device efficiency. More sophisticated computer simulations of the device have also strongly contributed to achieve the highest stable efficiencies in the case of multijunction devices. Novel use of nanocrystalline thin films offers new possibilities of high efficiency and stability. Short term goals of great economical impact can be achieved by the amorphous silicon/crystalline silicon heterojunction. A review is made of the most innovative achievements in amorphous silicon solar cell design and material engineering.     

Rough ZnO layers by LP-CVD process and their effect in improving performances of amorphous and microcrystalline silicon solar cells

Doped ZnO layers deposited by low-pressure chemical vapour deposition technique have been studied for their use as transparent contact layers for thin-film silicon solar cells.Surface roughness of these ZnO layers is related to their light-scattering capability; this is shown to be of prime importance to enhance the current generation in thin-film silicon solar cells. Surface roughness has been tuned over a large range of values, by varying thickness and/or doping concentration of the ZnO layers.A method is proposed to optimize the light-scattering capacity of ZnO layers, and the incorporation of these layers as front transparent conductive oxides for p–i–n thin-film microcrystalline silicon solar cells is studied.     

Ultra-thin metal layer passivation of the transparent conductive anode in organic solar cells

Efficiency of organic solar cells shows a strong improvement when the transparent conductive anode (indium tin oxide—ITO, aluminium-doped zinc oxide—AZO, fluorine-doped tin oxide—FTO), is covered with an ultra-thin metallic film. It is shown that the best results are achieved with a gold film (0.5 nm). The efficiency of the solar cells using AZO or FTO is improved up to one order of magnitude, while in the case of ITO it is at least 50%. It is shown that if the matching between the work function of the anode and the highest occupied molecular orbital (HOMO) of the organic electron donor is the most important factor limiting the hole transfer efficiency, others factors such as transparent conductive oxide (TCO) surface roughness and adhesion of the organic layer are also key factors.