两种不同气源制备的高氢含量aSi_(1-x)C_x∶H薄膜的微结构及其热稳定性研究

通过电子自旋共振实验、红外光谱和透射 反射谱等手段 ,系统地研究了CH4 SiH4和C2 H2 SiH4两种不同气源制备的具有高氢含量的a Si1 xCx∶H薄膜的微结构及其随退火温度的变化 ,用网络再构和化学键断裂竞争过程探讨了微结构随退火温度的变化规律。     

两种没气源制备的高氢含量a—Si1—xCx：H薄膜的微结构及其热稳定性研究

通过电子自旋共振实验，红外光谱和透射－反射谱等手段，系统地研究了CH4＋SiH4和C2H2＋SiH4两种不同气源制备的具有高氢含量的a-Si1-xCx:H薄膜的微结构及其退火温度的变化，用网络再构和化学键断裂竞争过程探讨了微结构随退火温度的变化规律。     

脉冲调制射频容性耦合SiH/C2H4/Ar放电的发射光谱诊断

本文采用发射光谱法诊断了低气压下氩气(Ar)、硅烷(SiH4)及乙烯(C2H4)混合气体(SiH4/C2H4/Ar)脉冲调制射频放电等离子体特性,利用了Ar发射光谱中的五条谱线通过Boltzmann斜率法计算了电子激发温度,研究了占空比、调制频率、功率及气压等对电子激发温度和谱线相对强度的影响.     

退火温度对硅基溅射铜膜应力的影响

采用光学相移法 ,对Si基片上Cu膜应力随退火温度的变化进行了研究。研究表明 :随退火温度的升高 ,Cu膜应力减小 ,2 0 0℃时平均应力减小为 - 0 2 6 1× 10 8Pa,且应力分布均匀 ,在选区范围内应力差仅为 2 2 4 4× 10 8Pa。同时用X射线衍射技术测量分析了Cu膜经过不同退火温度热处理后的微结构组织 ,研究了Cu膜的微结构对其应力的影响     

退火温度对溅射Al膜微结构及应力的影响

用直流溅射法在Si基片上制备了 2 5 0nm厚的Al膜 ,并在不同退火温度下进行退火处理 ,用X射线衍射和光学干涉相位移法对薄膜的微结构及应力随退火温度的变化进行了研究。结构分析表明 :退火后的Al膜均呈多晶状态 ,晶体结构仍为面心立方 ;随着退火温度由 2 0℃升高到 4 0 0℃ ,薄膜的平均晶粒尺寸由 2 2 8nm增加到 2 5 1nm ;薄膜晶格常数在不同退火温度下均比标准值 4 0 4 96 A稍小。应力分析表明 :随退火温度的升高 ,Al膜应力减小 ,30 0℃时平均应力减小为 2 730× 10 8Pa且分布均匀 ;在 4 0 0℃时选区范围内应力差仅为 3 82 8× 10 8Pa。     

纳米硅镶嵌复合薄膜退火前后的微结构及发光特性研究

采用减压化学气相沉积方法,依靠纯N2稀释的SiH4气体的热分解反应,在玻璃表面生长了纳米硅镶嵌的复合薄膜.实验研究了退火前后薄膜样品的结晶状态和光致发光特性.结果表明,未退火样品的光致发光特性随沉积温度升高反而减弱.退火温度Ta＞600℃时,晶化趋势明显,Ta＜600℃时,退火温度对晶化的贡献不大,但提高退火温度或延长退火时间可以增加PL强度.同时在退火样品中发现Si-Ox的单晶结构.通过Raman、PL、TEM的分析比较,认为在退火前后分别有两种不同的发光机制起主导作用.     

热处理对TaN薄膜微结构及电性能的影响

采用直流磁控溅射制备TaN薄膜,研究了热处理对TaN薄膜微结构及电性能的影响.结果表明,退火温度及退火时间都将影响薄膜的微结构及方阻.随退火温度的升高和时间的延长,TaN薄膜的方阻逐渐增大,但当退火温度高于800℃时,由于氧化严重导致薄膜的方阻异常增大.退火可显著改善薄膜的TCR,制备态TaN薄膜的TCR值为-1.2X10-3,薄膜经800℃退火30min后,其TCR可降低到-7.0x10-4.     

退火处理对Si/SiC纳米复合薄膜性能与结构的影响

我们以硅烷(SiH4)和乙烯(C2H4)为原料,采用常压热分解APCVD法制备出了Si/SiC复合镀膜玻璃,并对其进行了退火处理.本文利用多种测试技术对退火后硅镀膜玻璃的光学性能以及其组成结构、化学稳定性等方面作了系统研究,发现退火处理能在保持镀膜玻璃其它重要性能变化不大的基础之上较好地改善硅镀膜玻璃的光学性能、降低玻璃的反射率、有效地防止目前日趋严重地光污染问题,为改善SSi/SiC复合镀膜玻璃的性能、扩大其应用领域作了有益的探索.     

微波等离子体化学气相沉积法生长非晶碳化硅薄膜

利用SiH4(80%Ar稀释)和CH4作为源气体,通过改变源气体流量比、基片温度、沉积气压等参量,使用微波电子回旋共振化学气相沉积法生长非晶碳化硅薄膜。实验结果表明碳化硅薄膜沉积速率随气体流量比R(CH4/(CH4+SiH4))的增加而减小、随基片温度的升高明显减小、随沉积气压的增加先增大后减小。红外结构表明:在较低流量比R下,薄膜主要由硅团簇和非晶碳化硅两相组成,而当R>0.5时,薄膜的结构主要由非晶碳化硅组成,薄膜中键合的H主要是Si和C的封端原子。同时,沉积温度的升高使碳化硅薄膜中Si-H,C-C和C-H键的含量减少,而薄膜中Si-C含量明显增加且峰位发生了红移。薄膜相结构的转变是薄膜光学带隙变化的原因。     

本征纳米硅薄膜的微结构表征

采用PECVD技术,在玻璃衬底上低温沉积了优质本征纳米硅薄膜,并利用Raman光谱对其微结构作了表征。研究结果表明,硅烷浓度、衬底温度Ts对表征纳米硅薄膜微结构的晶化率和平均晶粒尺寸参数影响很大。SiH4浓度越低,越有利于晶化,对应的晶化率拐点温度越低。平均晶粒尺寸、晶化率随衬底温度的升高具有相似的变化规律,谱中出现的拐点温度一致,暗示它们之间存在紧密的联系。从薄膜生长角度对该实验结果作了合理解释。     

Structural and optical properties of AlxOy/Pt/AlxOy multilayer absorber

We report on the microstructure and optical properties of Al_xO_y–Pt–Al_xO_y interference-type multilayer films, deposited by electron beam (e-beam) deposition onto corning 1737 glass, silicon (1 1 1) and copper substrates. The structural properties were investigated by Rutherford backscattering spectrometry, X-ray diffraction, scanning electron microscopy, energy dispersive X-ray spectroscopy and atomic force microscopy. The optical properties were extracted from specular reflection/transmission, diffuse reflectance and emissometer measurements. The stratification of the coatings consists of a semi-transparent middle Pt layer sandwiched between two layers of Al_xO_y. The top and bottom Al_xO_y layers were non-stoichiometric with no crystalline phases present. The Pt layer is in the fcc crystalline phase with a broad size distribution and spheroidal shape in and between the rims of Al_xO_y. The surface roughness of the stack was found to be comparable to the inter-particle distance. The optical calculations confirm a high solar absorptance of ∼0.94 and a low thermal emittance of ∼0.06 for the multilayer stack, which is attributed not only to the optimized nature of the multilayer interference stacks, but also to the specific surface morphology and texture of the coatings. These optical characteristics validate the spectral selectivity of the Al_xO_y–Pt–Al_xO_y interference-type multilayer stack for use in high temperature solar-thermal applications.     

Synthesis of a new perovskite Pb(Li14Nb34)O3

A high-pressure technique was adopted to obtain perovskite-type $\text{Pb(Li}{}_{\mathrm{<mtext>1</mtext><mtext>4</mtext>}}\text{Nb}{}_{\mathrm{<mtext>3</mtext><mtext>4</mtext>}}\text{)}\text{O}{}_3$. A new perovskite $\text{Pb(Li}{}_{\mathrm{<mtext>1</mtext><mtext>4</mtext>}}\text{Nb}{}_{\mathrm{<mtext>3</mtext><mtext>4</mtext>}}\text{)}\text{O}{}_3$ was characterized to have a cubic symmetry with $\text{a}{}_{\mathrm{<mtext>o</mtext>}}\text{= 4.069}\text{A}\text{?}$; Li and Nb ions in the B-site of perovskite lattice may be in a random arrangement.     

Bulk crystalline BaPb34Bi14O3: A ceramic superconductor

The preparation conditions of the high T_C ceramic superconductor Ba(Pb,Bi)O₃ is correlated with the superconducting transition. Transition onsets of all materials are similar, but transition widths and transition completeness is strongly dependent on firing temperature. Only materials prepared over a narrow temperature range, resulting in a nearly ideal weight loss, have a complete and narrow transition.     

Optimization of AlxOy/Pt/AlxOy multilayer spectrally selective coatings for solar-thermal applications

Spectrally selective Al_xO_y/Pt/Al_xO_y multilayer absorber coatings were deposited onto corning 1737 glass, Si (111) and copper substrates using electron beam (e-beam) vacuum evaporator at room temperature. The employment of ellipsometric measurements and optical simulation was proposed as an effective method to optimize and deposit multilayer solar absorber coatings. The optical constants (n and k) measured using spectroscopic ellipsometry, showed that both Al_xO_y layers, which used in the coatings, were dielectric in nature and the Pt layer was semi-transparent. The optimized multilayer coatings exhibited high solar absorptance α ∼ 0.94 ± 0.01 and low thermal emittance ? ∼ 0.06 ± 0.01 at 82 °C. The Rutherford backscattering spectroscopy (RBS) data of Al_xO_y/Pt/Al_xO_y multilayer absorber indicated the Al_xO_y layers present in the coating were nearly stoichiometry. The scanning electron microscope analysis (SEM) result indicated that the average diameter and inter-particles distance of Pt grains were statistically about 146 ± 0.17 nm and 6-10 ± 0.2 nm respectively.     

Electrostriction in Pb (Zn13Nb23)O3

The electrostriction in $\text{Pb (Zn}{}_{\mathrm{<mtext>1</mtext><mtext>3</mtext>}}\text{Nb}{}_{\mathrm{<mtext>2</mtext><mtext>3</mtext>}}\text{)}\text{O}{}_3$ crystals has been investigated using a strain gauge method. In the ferroelectric phase below 140 C, the strain vs the electric field shows a hysteresis, which is ascribed to the effect of ferroelectric domains. A quadratic relation holds between the strain x and the electric polarization P as x = QP² above about 170 C in the paraelectric phase. Values of the electrostrictive Q coefficients are determined from the measurements near 190 C, as Q₁₁ = 1.6·10^?2m⁴/C², Q₁₂ = ?0.86·10^?2m⁴/C², and Q₄₄ = 0.85·10^?2m⁴/C².     

Magnetic,electrical and thermal studies on the V1−xMox02

The monoclinic-to-tetragonal structure transition of oxides V_1?xMo_x0₂ with $\text{0≤}\text{x}\text{≤0.20}$ has been studied by means of DTA, X-ray diffraction, magnetic susceptibility (powder samples) and electrical conductivity (single crystals) measurements within the temperature region 80 K to 400 K. A linear decrease of the transition temperature of 11 K per atom % Mo was observed. The magnetic susceptibility of the low temperature phase was found to be temperature independent paramagnetic for all preparations. Electrical conductivity measurements on the same phase showed crystals with $\text{x}\text{? 0.04}$ to be semiconducting, while a metallic behavior was observed in the region $\text{0.10 ?}\text{x}\text{? 0.14}$.     

n-PbTep+−Pb1−xSnxTe heterojunctions prepared by a modified hot wall technique

$\text{n-PbTe}\text{p}{}^{\mathrm{+}}\text{?}\text{Pb}{}_{\mathrm{1?x}}\text{Sn}{}_{\mathrm{x}}\text{Te}$ heterojunctions with a long wavelength spectral cutoff (λ_c ≈ 6 μm) were prepared using the double-channel hot wall technique. The electrical and photoelectrical properties of the heterojunctions at 77, 197 and 300 K were investigated. Detectors with R_oA equal to 170 Ω cm² and a quantum efficiency of 25–40% were obtained. Reasons for the shift of the long wavelength spectral cutoff of the heterojunctions towards shorter wavelengths are given.     

Reactive plasma deposited SixCyHz films

Si_xC_yH_z films have been prepared at 200°C by reactive plasma deposition from SiH₄ and CH₄ diluted in helium in a tubular reactor. These films have a ratio s (equal to $\text{Si}\text{(}\text{Si+C}\text{))}$ ranging from 0.2 to 0.8, a refractive index ranging from 1.96 to 2.6 and an optical energy band gap in the range 2.7-2.2 eV. The total quantity of hydrogen in the film is 40% when s=0.5. Infrared analysis shows that these films have large fractions of homonuclear bonds and that this material is best described as a polymer. Mass spectrometric measurements of the gaseous products formed in the SiH₄-CH₄-He plasma have been performed and the results are related to the composition of the deposited layers.     

Core-current-enhanced domain-wall pinning in nanocrystalline Fe/sub 73.5/Cu/sub 1/Nb/sub 3/Si/sub 15.5/B/sub 7/ ribbon

We have studied the influence of surface fields H/sub p/ (generated by either direct or alternating core current) on soft magnetic properties of amorphous and nanocrystalline Fe/sub 73.5/Cu/sub 1/Nb/sub 3/Si/sub 15.5/B/sub 7/ ribbon. While in an amorphous ribbon the coercive field H/sub c/ decreases with H/sub p/, in the same optimally annealed ribbon (H/sub c/=1.3 A/m, M/sub m//spl ap/M/sub s/) H/sub c/ increases with H/sub p/ for all the explored types of H/sub p/ (static and dynamic with different phases with respect to that of the magnetizing field H). The unexpected increase of H/sub c/ in nanocrystalline ribbon is associated with the influence of H/sub p/ on the surface and main (inner) domain structure. Here, we develop a model that takes into account this influence and explains the experimental results.     

Interfacial microstructure of NiSix/HfO2/SiOx/Si gate stacks

Integration of NiSi_x based fully silicided metal gates with HfO₂ high-k gate dielectrics offers promise for further scaling of complementary metal-oxide- semiconductor devices. A combination of high resolution transmission electron microscopy and small probe electron energy loss spectroscopy (EELS) and energy dispersive X-ray analysis has been applied to study interfacial reactions in the undoped gate stack. NiSi was found to be polycrystalline with the grain size decreasing from top to bottom of NiSi_x film. Ni content varies near the NiSi/HfO_x interface whereby both Ni-rich and monosilicide phases were observed. Spatially non-uniform distribution of oxygen along NiSi_x/HfO₂ interface was observed by dark field Scanning Transmission Electron Microscopy and EELS. Interfacial roughness of NiSi_x/HfO_x was found higher than that of poly-Si/HfO₂, likely due to compositional non-uniformity of NiSi_x. No intermixing between Hf, Ni and Si beyond interfacial roughness was observed.