激光共聚焦扫描显微镜在微机电系统中的应用

在微机电系统中,三维微结构分析是对微加工工艺进行表征的一种重要手段。随着微机电系统研究的深入和产业化的需求,其微结构分析在微机电系统中的重要性日益凸现。激光共聚焦扫描显微镜因其高分辨率、非接触、数据结构分析快等优点,在微结构分析中得到了大量的应用。本文介绍激光共聚焦扫描显微镜的成像原理,重点介绍激光共聚焦显微镜在大角度测量和形貌分析中的应用。同时,与台阶仪、扫描电子显微镜和白光干涉仪相比较,指出激光共聚焦扫描显微镜在微结构分析中的优点和局限性。     

Modeling and verification of a five-axis laser scanning system

Today several new kinds of laser beam sensors appear with high resolution and accuracy and find their applications in reverse engineering and quality control. Due to the incapability of changing their orientations continuously in response to the surface fluctuation of a part to be measured, they are not competent for measuring parts with complicated structures. In this paper a five-axis laser scanning system integrated with a CMM, a laser beam sensor and a PH10 rotary head is proposed, which can measure complicated parts by frequently indexing the laser sensor approximately consistent with the normal direction of the surface. As the laser value is a 1-D data and the measured data must be given in 3-D expression in the world coordinate system, a system model for coordinate transformation is established. An “equivalent probe” approach is presented for system verification, and an iterative verifying process is adopted to eliminate the verification error caused by the inclination error of the laser sensor. Experiment study shows that the system can measure a part from any direction with an accuracy of 30 μm.     

Reproducing aircraft structural components using laser scanning

In the past few years, laser scanning has become a popular digitising tool for rapidly manufacturing commercial products, moulds and dies, and industrial parts. This popularity can be attributed to continual improvement in the accuracy and reliability of the technology. In this study, the re-engineering and re-manufacturing capabilities of laser scanning systems in aircraft structural components manufacturing are evaluated. The study includes surveying state-of-the-art laser scanning systems; scanning, modelling, and machining a sample aircraft structural component; comparing the duplicated model/part with the original model/part; and estimating savings achieved by laser scanning. The significant findings from this study include the following:Laser scanning technologies have matured to a stage at which they can capture and reproduce volumetric features, such as pockets, slots, steps, irregular cavities, bosses, etc., typically present in aircraft structural components.Laser scanning technologies, through both re-engineering and re-manufacturing approaches, can dramatically reduce the part turnround time and skill levels required to replicate aircraft structural components.     

Validation of terrestrial laser scanning and photogrammetry techniques for the measurement of vertical underclearance and beam geometry in structural inspection of bridges

This research shows a novel methodology based on the application of terrestrial laser scanning and photogrammetry techniques as auxiliary metric tools for bridge inspections procedures. These methodologies are validated throughout a case study where the minimum underclearance and the overall geometry of a prestressed concrete beam are obtained. Data obtained are compared with high accurate measurements provided by a total station. Results show a good agreement for beam geometry with high statistical correlation coefficients. Minimum vertical underclearance also shows a good agreement for all the systems, which appears good enough due the metric tolerances required in these inspection works.     

数控激光扫描测量系统

概述了激光非接触测量在逆向工程中的应用，介绍了数控激光扫描测量机的组成与实现原理，分析了测量的流程，重点讨论了激光扫描测量机的标定、圆台校准以及测量与软件系统的实现。     

CR扫描仪激光扫描光学系统的设计

设计了一种适合于计算机X射线扫描仪的新型激光扫描系统,其空间分辨率为10lp/mm。针对常用扫描机构的不足,用五角棱镜和聚焦物镜组成扫描臂取代传统的Fθ镜头,利用成像板的柔韧性实现圆弧形进片,扫描臂同时作为接收器收集激发出的荧光,从而简化系统结构,提高系统性能。利用所设计的光学系统,分析了激光光点大小对分辨率的影响,结果显示光点越小,系统分辨率越高。分析了系统中影响激光光点大小的因素,在高转速条件下对扫描臂进行了有限元仿真,计算了当入射光与五角棱镜入射面不垂直及五角棱镜存在安置误差时,对激光光点大小的影响。结果显示光点直径最大相对变化量为0.07%,表明所设计的激光扫描光学系统具有一定的容差性和实用性。通过实验验证了所研制扫描仪的性能,结果表明图像具有良好的视觉效果,能够满足工业检测要求。     

Continuous scanning laser Doppler vibrometry and speckle noise occurrence

Continous scanning laser Doppler vibrometry (CSLDV) is a type of “spatial field” non-contact technique for measuring structural vibrations by employing a laser Doppler vibrometer whose laser beam is moving continuously on the structure surface. When an LDV is scanned continuously along an arbitrarily line, the LDV output is an amplitude-modulated sine wave according to the structure operational deflection shape. Smooth mode shapes, which can be defined by polynomial functions across the scanned area, may be recovered as a set of polynomial coefficients derived from the LDV output analysed in the frequency domain, which spectrum comprises sidebands centred on the excitation frequency and spaced at multiples of the scan frequency(ies).This paper concentrates its attention to the influence of the speckle noise on the measured data quality, the speckle being an unavoidable phenomenon occurring when a coherent light beam is scattered back from an optically rough surface.     

Enhanced scanning control in a confocal scanning laser microscope

A fast and flexible scanning unit, allowing scanning rates of more than 1 kHz over regions identified in a specimen, has been developed and evaluated. This scanning unit replaces the original scanning unit in the Phoibos confocal scanning laser microscope and features full backward compatibility, while at the same time allowing fast and flexible scanning modes, such as point scanning, line scanning, and scanning along user-selected closed curves. The scanning unit uses two galvanometer-mounted mirrors for scanning. A standard procedure for recordings with this scanning unit would be to scan an overview image with conventional raster scanning to identify a region of interest, mark a point, a line, or a closed curve over this region, and to start the scanner. An iterating algorithm then calculates the waveforms needed by the scanner to follow the identified curves with pixel precision. With this scanning unit and its controlling software, experiments demanding time-resolved recordings within the millisecond range can be performed. Repetition rates up to > 1 kHz for line scanning and curve scanning, and > 100 kHz for point scanning are obtainable. This allows time-resolved studies of fast reactions in living tissue to be performed with the spatial resolution and signal-to-noise ratio obtainable with a point scanning confocal microscope.     

Enhanced scanning control in a confocal scanning laser microscope

A fast and flexible scanning unit, allowing scanning rates of more than 1 kHz over regions identified in a specimen, has been developed and evaluated. This scanning unit replaces the original scanning unit in the Phoibos confocal scanning laser microscope and features full backward compatibility, while at the same time allowing fast and flexible scanning modes, such as point scanning, line scanning, and scanning along user-selected closed curves. The scanning unit uses two galvanometer-mounted mirrors for scanning. A standard procedure for recordings with this scanning unit would be to scan an overview image with conventional raster scanning to identify a region of interest, mark a point, a line, or a closed curve over this region, and to start the scanner. An iterating algorithm then calculates the waveforms needed by the scanner to follow the identified curves with pixel precision. With this scanning unit and its controlling software, experiments demanding time-resolved recordings within the millisecond range can be performed. Repetition rates up to >1 kHz for line scanning and curve scanning, and >100 kHz for point scanning are obtainable. This allows time-resolved studies of fast reactions in living tissue to be performed with the spatial resolution and signal-to-noise ratio obtainable with a point scanning confocal microscope.     

Path planning of multi-patched freeform surfaces for laser scanning

In this paper, a new method for scanning a complex surface model with multiple patches is proposed. In scanning of freeform-shaped models, it is difficult to generate a measuring plan by human intuition due to the complexity of the part. The developed method calculates the number of scans, scan direction, and scan path for a stripe-type laser scanner. The user can designate the surface patches that need to be scanned. In generating the scan plan, surface information is first extracted from the CAD model automatically. Other information such as, design knowledge, functionality and machine parameters are provided interactively. Based on this information, the original surface model is sampled in the u, v parameter domain and the sampled points are grouped using the view angle of the laser scanner. The scan direction is determined by calculating the global mean vector of the sampled points that belong to a group. The range of the view angle can be varied to enhance the quality of captured point data. The optical scan paths for each scan direction are calculated by projecting the sampled points onto a 2D plane. The optical constraints are also verified to guarantee the generated scan plan.     

激光扫描共聚焦光谱系统设计

为提高激光扫描共聚焦显微镜光谱模块的分光性能,设计了双Amici棱镜光谱结构.根据棱镜色散特性,计算得到Amici棱镜和双Amici棱镜的线性与非线性数学模型,给出直视型棱镜结构参数.比较相同色散条件下Amici和双Amici棱镜结构,得到双Amici棱镜组能提供更好的色散线性度.在光谱波段400～700 nm,中心波...     

Integrated laser/CMM system for the dimensional inspection of objects made of soft material

The applications of the coordinate measuring machines (CMMs) with a contact trigger probe to the dimensional inspection of manufactured products are restricted to the parts made of hard material, such as steel. By combining the laser and CMM, the applications of the CMMs can be extended to the inspection of objects made of soft materials, such as foils, plastics, wood, wax and clay materials. In this research, replacing the contact probe with an inexpensive laser sensor is attempted so as to eliminate the possible deflection of the component being measured when using contact probe. By combining a laser sensor with the existing automated inspection environment, a CAD-directed, three-dimensional coordinate sampling system which can perform non-contact dimensional inspection is developed.     

Nano-pulsed laser irradiation scanning system for phase-change materials

Recently, the demand of a laser irradiation tester is increasing for phase change random access memory (PRAM) as well as conventional optical storage media. In this study, a nano-pulsed laser irradiation system is developed to characterize the optical property and writing performance of phase-change materials, based on a commercially available digital versatile disk (DVD) optical pick-up. The precisely controlled focusing and scanning on the material's surface are implemented using the auto-focusing mechanism and a voice coil motor (VCM) of the commercial DVD pick-up. The laser irradiation system provides various writing and reading functions such as adjustable laser power, pulse duration, recording pattern (spot, line and area), and writing/reading repetition, phase transition, and in situ reflectivity measurement before/after irradiation. Measurements of power time effect (PTE) diagram and reflectivity map of Ge(2)Sb(2)Te(5) samples show that the proposed laser irradiation system provides the powerful scanning tool to quantify the optical characteristics of phase-change materials.     

激光扫描共聚焦光谱成像系统

在激光扫描共聚焦显微成像技术基础上引入了光谱成像技术以便区分生物组织中的不同荧光成分。采用分光棱镜对荧光进行光谱展开,在光谱谱面处设置两个可移动缝片形成出射狭缝,两个步进电机带动安装其上的两个缝片设置系统在整个工作波长（400~700 nm）内的光谱带宽,其最小光谱带宽优于5 nm。用488 nm激光和低压汞灯实际测量了几条谱线对应的狭缝位置并和理论值做了比较,结果显示实际狭缝位置和理论值的差值均小于0.1 mm。在全光谱和50 μm出射狭缝（对应2.5 nm光谱带宽）对老鼠肾脏组织进行了共聚焦光谱成像实验,获得了老鼠肾脏组织中DAPI标定的细胞核图像和Alexa Fluor^®488标定的肾脏小球曲管图像,实现了对老鼠肾脏组织不同成分的区分。实验结果表明：提出的系统能够进行共聚焦光谱成像,扩大了共聚焦显微镜的适用范围。     

用于SLS快速成形制造中振镜式激光扫描系统的关键技术

针对选择性激光烧结快速成形制造的需求，探讨并深入研究了振镜式激光扫描系统的组成，成形过程中线性扫描、图形畸变的校正、扫描系统机械滞后性的补偿、激光功率与扫描速度的匹配及成形精度等关键技术问题。     

激光主动探测系统二维均匀扫描设计

二维扫描振镜是激光主动探测系统实现一定视场范围内扫描探测的重要部件.针对振镜非均匀扫描的缺陷,讨论了二维扫描振镜的工作原理,分析了扫描激光光斑全覆盖条件,推导了等间距扫描量与驱动信号之间的关系式,结合单片机控制电路,给出了均匀扫描的软件实现方法,并对实现均匀扫描的电路进行了时序分析.该方法过程简单,激光光斑的均匀采样易...     

2-D localization system utilizing M-sequence encoded laser beam scanning

1IntroductionThere are various types of demands for position meas-urement in a restricted environment,and many localizationmethods have been proposed fornavigation of autonomous ro-bots or vehicles.We proposed the concept of the optical sig-nal field for this kind of position measurement and have de-scribed some practical examples[1-3].Since all these methodsare based on intensity of light,positional resolution is limit-ed by S/N ratio of received signal.If the radiated signal isdivided regio…     

激光制导测量机器人几何误差分析

目的: 为了实现对工件进行自动高效地测量,建立了激光制导测量机器人系统,研制了测量机器人样机。对测量机器人的光靶自动跟踪装置旋转轴偏心误差和光靶与两轮中心连线误差进行了研究。方法:首先,介绍了基于“光束运动-光靶跟踪”理论的激光制导测量机器人技术和原理。接着,根据系统原理,研制了实验样机,并给出其理想的几何关系。然后,推出了旋转轴偏心误差和光靶与两轮中心连线误差几何误差数学模型。最后,利用三坐标测量机与激光制导测量机器人系统对样机进行了比对实验。结果：实验结果表明：光靶中心偏离理想位置的误差（x轴）为0.13mm。结论：对激光制导测量机器人移动反馈控制系统的设计和实现具有指导性作用。     

面向微纳材料的激光扫描二维成像系统

在对微纳材料光学特性表征中,需要获得分辨率更高的波长和强度的荧光图像。普通的显微镜无法满足测试的要求,因此将普通的成像显微镜、光谱仪以及纳米移动台组成激光扫描显微镜成像系统,并利用LabVIEW开发了一套完整的集二维扫描采集与信号图像处理一体的系统上位机软件。扫描采集过程使用了低通滤波等数字信号处理方法消除光谱仪信号噪声的影响。利用本系统测量硒化镉纳米带、单层二硫化钼得到了荧光强度图像以及荧光峰值波长图像,能分辨出最小波长为0.03 nm的荧光。将采集长度与实际长度进行比较并分析荧光强度差异,取得了较好的效果。