浸没式光刻系统中光束传输系统的设计

为实现浸没式光刻照明系统掩模面上高均匀照明性和不同照明模式,对照明系统中的光束传输系统进行了研究。浸没式光刻照明系统中的激光光束传输系统是光刻机中的重要组成部分,直接影响光刻机性能。针对浸没式光刻照明系统特点,提出了采用球面镜和柱面镜组合的光学结构,进行了激光准直扩束系统的光学设计与仿真分析。此外,对设计的准直扩束系统进行了公差分析,以保证在加工和装调完成后光束的发散角和口径均满足设计要求。最后,在系统完成的基础上对不同位置处的光斑尺寸进行测量。设计结果表明,系统能够满足光束在5~20 m传输光路范围内,不需要进行透镜间隔的调节,实现光斑大小和发散角满足设计要求,保证目标光束口径在(28.5±0.5)mm范围内,X方向发散角为1.2 mrad,Y方向发散角为1.84 mrad。通过分析发现,设计结果能够很好地满足指标的精度要求,具有重要的应用价值和实用意义。     

基于ZEMAX的二维变焦扩束光学系统设计

针对板条激光器出射光束的尺寸控制问题,设计了一个在X方向扩束倍率为14~20×,Y方向扩束倍率为1.25~1.55×的二维连续变焦扩束光学系统。通过对三组元变焦系统的分析,在理论上推导出固定组、变倍组以及补偿组之间的运动轨迹。利用ZEMAX对理论值进行优化,使系统像差满足使用要求。该系统工作波长为1064 nm,可将尺寸在一定范围内的出射光束扩束整形至35~40 mm。该系统具有结构简单、变焦行程短以及变焦曲线平滑等优点。     

一种激光二极管像散光束准直整形方法研究

为了准直并整形具有像散的激光二极管光束,采用高斯光束q参量变换规律,推导了利用柱面自聚焦透镜整形激光二极管光束应满足的条件,并在此基础上,通过软件模拟优化,得到了一套效果良好的光束整形准直系统。经过准直整形后光束快慢轴方向发散角基本相等,均小于0.7mrad,束腰位置差异小于2.8mm。结果表明,系统中柱面自聚焦透镜的应用起到了较好的效果,准直整形后的光束具有发散角较小且旋转对称等特点。     

基于平行相位调制算法的半导体激光光束整形方法

半导体激光器的发射光束存在发散角大、光照强度分布不均匀等缺陷,使其不能直接用于干涉测量,为改善光束质量,提出基于平行相位调制算法的半导体激光光束整形方法。首先,分析平行相位调制基本原理,设计相位函数,提高信号光照强度,使脉冲相位分布情况满足傅里叶变换极限脉冲水平;其次为获取理想的基模高斯光束,结合正弦光栅算法,获取光束整形的全息图函数表达式;最后为确保入射光束能够铺满整个调制器,使该光束透过扩束镜,调整光束尺寸,并将扩束后的光束消像散全息图叠加到整形全息图中,从而得到理想的激光光束。仿真实验表明,所提方法使激光光束整形为无像散的基模高斯光束,光斑发散角对称性较明显,最低光束质量为81. 4 mm°mrad高于文献方法,能够满足精准度较高的干涉测量要求。     

硼酸铝钕[NdAl_3(BO_3)_4](NAB)的脉冲激光特性

本文报道了我所生长的大尺寸硼酸铝钕晶体的脉冲激光特性。当用氙闪光灯泵浦时,φ3.2mm×23.7mm的NAB激光棒,最大激光输出为每个脉冲422mJ。对于φ1.8mm×2.4mm的激光棒,激光阈值为67mJ。激光输出为线性偏振光,波长1.063μm。用BDN染料片调Q时,φ1.2mm×8.4mm的NAB棒激光单脉冲宽度为8ns,光束发散度为2mrad。     

MEMS-LiDAR的光源准直透镜设计

半导体激光器能量转换效率高、体积小、稳定性好,因此激光雷达常以半导体激光器作为光源。针对半导体激光发散角大,而传统的分离式双柱面准直透镜组存在装调误差大、结构复杂、稳定性低的缺点,提出一体化非球面柱透镜准直方案,分别在两面的相互正交的两个方向设计不同的面型,压缩发散角,同时实现半导体激光器快慢轴两个方向的准直。根据费马原理及扩束准直理论初步确定两正交方向准直面面型参数,以最小光斑半径和最大光通量为目标,以MEMS微镜尺寸为限制因素进行优化,最终完成发射端光学设计。准直后光束快轴发散角2 mrad,慢轴发散角9.6 mrad,准直效果接近车规级激光雷达的平均角分辨率,透镜体积为10×10×24 mm~3,发射端系统总长40 mm,系统通光率大于98.6%,满足MEMS-LiDAR对光源准直度、发射端系统集成度和稳定性的要求。     

千瓦级高光束质量半导体激光线阵合束光源

低光束质量严重限制了大功率半导体激光器的应用,为了满足日益增长的工业和国防领域应用需求,发展兼具高功率和高光束质量激光输出的半导体激光光源具有重要意义。采用线阵合束方式集成20个传导热沉封装半导体激光单元,结合斜45°柱透镜阵列整形方法和准直技术,直接均衡激光束快慢轴方向的光斑和发散角,通过波长合束和偏振合束,研制出一种可实用化、连续输出功率1030W、快慢轴方向光参量积分别为18.3mm.mrad和17.7mm.mrad、最大电-光转换效率44%的808nm和870nm双波长半导体激光合束光源,实现了高效率、高功率和高光束质量激光输出,可作为直接光源应用于工业和国防领域。     

紫外-可见光谱水质检测系统的多束LED光纤耦合研究

针对紫外-可见光谱水质检测系统单个LED光源输出功率低、光束质量差的问题,提出了一种多束紫外LED光源与光纤合束耦合的结构设计方案.运用ZEMAX光学分析软件开展了仿真设计研究,针对紫外LED光源与光纤耦合发散角较大的问题,设计了非球面准直透镜,准直后发散角为0.403 mrad;针对光束尺寸与光纤的匹配问题,进行了消色差双分离聚焦耦合透镜的设计.实验结果表明,合束LED光束汇聚的弥散斑的RMS尺寸为186.412 μm,GEO点尺寸为290.071 μm,光束中95％以上的能量集中在300μm以内,实现了多束LED光源与光纤的高效耦合.     

1.06 μm脉冲激光高倍率变焦的扩束发射光学系统设计

远距离激光主动探测体制对扩束发射光学系统的扩束能力和跟踪适应性能提出了较高的要求。针对1.06 μm YAG调Q脉冲激光扩束发射光学系统进行了具体的分析设计,采用一级折射变焦式和二级离轴反射式相结合的两级扩束系统,可将输出激光束最小发散角压缩到近0.1 mrad,输出光束最大宽度达到130 mm以上,并且在满足一定准直性的基础上,实现了大约1.5~50倍扩束比的高倍率变焦范围,使系统能够满足扫描搜索以及适应距离的远近变化来进行跟踪探测的要求。     

一维光束整形系统仿真及实验技术研究

针对高功率板条激光放大系统光束整形的需要,基于CODE V软件对一维光束整形系统进行仿真,光束整形方向输出光光学传递函数接近衍射极限。光束整形方向视场0.5 mrad时,引入波像差为0.105λ。利用四波剪切干涉仪测量He-Ne光以及光纤种子光整形后波前,P-V值变化小于0.25λ,RMS变化小于0.05λ。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers

A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.     

Diode-end-pumped Nd:YVO4/LBO lasers with 4.2W continuous-wave output at 457 nm

A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working.     

Call for Papers

正Wireless Body-area Networks The last decade has witnessed the convergence of three giant worlds:electronics,computer science and telecommunications.The next decade should follow this convergence in most of our activities with the generalization of sensor networks.In particular with the progress in medicine,people live longer and the aging of population will push the development of wireless personal networks     

Call for Papers—Feature Topic,Vol.12,No.7,2015

正Information Centric Networking Information-Centric Networking(ICN) is an emerging direction in Future Internet architecture research,gaining significant tractions among academia and industry.Aiming to replace the conventional host-to-host communication model by a data-centric model,ICN treats data content as the first