衬底表面状态对碲镉汞薄膜表面起伏的影响

通过改变碲锌镉衬底的表面加工方法及溴-甲醇腐蚀液的浓度,研究衬底的表面状态对碲镉汞薄膜表面起伏情况的影响。利用傅里叶红外透射(FTIR)光谱议、晶片扫描成像系统、光学显微镜等工具对不同条件下的碲镉汞薄膜的表面起伏情况进行观察和比较。研究初步发现碲锌镉衬底不经过化学抛光,以及不经过腐蚀直接进行外延的情况下得到的碲镉汞薄膜的表面起伏状况会得到一定程度的改善,但是考虑溴-甲醇腐蚀液对机械抛光造成的表面应力的释放作用以及外延过程中的衬底回熔的相互作用会使得外延所得碲镉汞薄膜表面起伏情况更加复杂。因此,仍需要对衬底使用前的化学抛光对薄膜表面起伏的作用以及确定合适的溴-甲醇腐蚀液的浓度进行进一步的研究。     

分子束外延用碲锌镉(211)B衬底表面预处理技术

本文主要分析了作为分子束外延碲镉汞的碲锌镉衬底的表面预处理工艺。湿化学处理工艺主要目的是去除衬底表面损伤层,0.5%溴甲醇溶液的腐蚀速率为7 nm/s,但腐蚀的同时会形成表面富Te层和氧化层,氧化层的厚度随溴甲醇的浓度增加而增加;高温热处理工艺主要是消除湿化学腐蚀形成的富Te层和氧化层,340℃的高温处理可去除表面氧化层;也可以直接通过回旋共振等离子体处理衬底表面,形成化学计量比正常的干净表面。     

分子束外延用碲锌镉(211)B衬底湿化学预处理技术研究

主要分析了不同溴甲醇溶液腐蚀方法对分子束外延用碲锌镉(211)B衬底表面粗糙度及反射式高能电子衍射(RHEED)图样的影响。实验发现化学抛光后未使用溴甲醇腐蚀的CZT(211)B衬底虽然表面粗糙度较小(小于1.0 nm),但表面RHEED衍射图样无任何衍射点或者条纹;采用0.05%溴体积比的溴甲醇溶液腐蚀CZT(211)B衬底时,即使腐蚀极短的时间,衬底表面粗糙度也达到2.0 nm以上,且表面存在高密度的柱状物,衬底表面RHEED图样呈圆点状或条纹较粗且存在亮点;采用0.01%溴体积比的溴甲醇溶液腐蚀CZT(211)B衬底,表面粗糙度可控制在1.0 nm左右,同时RHEED图样为特征的CZT(211)B晶面短条纹衍射图样,条纹清晰,同时多片衬底重复实验结果一致。同时在其上分子束外延的未优化的中波碲镉汞材料半峰宽为(49.1±5.9)arcsec,组分为0.3083±0.0003,厚度为6.54±0.019 μm。     

HgCdTe材料的溴-甲醇抛光工艺研究

碲镉汞(HgCdTe)红外探测器制备中的化学-机械抛光工艺会在碲镉汞材料表面形成一定深度的损伤层。用溴-甲醇化学机械抛光取代溴腐蚀工艺,有效地降低了抛光过程所产生的表面损伤。在溴-甲醇抛光工艺中,可变参数有溶液的浓度比、抛光时间、转盘转速等,不同的参数组合对于抛光效果有不同的影响,经过正交试验可以以较少的试验次数高效经济地得到最佳的溴-甲醇抛光工艺参数组合。以该优化参数进行抛光所得到的碲镉汞材料通过XRD测试以及Ar+刻蚀后表面形貌的测试表明,HgCdTe晶片表面剩余损伤大大减小。     

劳厄形貌术在碲镉汞器件研制中的应用

讨论了反射劳厄形貌术的优缺点，结合碲镉汞器件研制工作给出了实际应用的几个例子。如磅镉汞晶片结构检查，观察碲镉汞晶片表面的磨抛损伤、跟踪观察碲镉汞晶片在光刻、化学腐蚀成形、离子刻蚀成形前后的晶格变化等。     

CdZnTe中富碲沉积相缺陷引起的液相外延HgCdTe薄膜表面缺陷

为了研究液相外延碲镉汞薄膜表面缺陷形成机制,采用光刻工艺结合化学腐蚀方法在碲锌镉衬底表面实现了网格化,研究了碲锌镉近表面富碲沉积相与外延薄膜表面缺陷的关系.结果表明:衬底近表面富碲沉积相会导致碲镉汞薄膜表面孔洞、类针形凹陷坑缺陷以及三角形凹陷坑聚集区;在液相外延过程中,高温碲镉汞熔液与CdZnTe衬底间的回熔作用可以减少与富碲沉积相相关的表面缺陷,薄膜表面缺陷与衬底表面富碲沉积相的匹配度与回熔深度负相关;回熔过程以及富碲沉积相形态、深度影响HgCdTe薄膜表面缺陷形态和分布.     

液相外延p型碲镉汞表面区与腐蚀凹坑的不同扫描隧道谱特征

利用超高真空扫描隧道显微镜对经过溴甲醇溶液腐蚀处理的液相外延碲镉汞材料进行了表征.发现经过腐蚀处理(3%浓度,2.5 min)的样品表面出现高密度的凹坑结构,凹坑深度约几十纳米,横向尺度在几十到几百纳米之间.扫描隧道谱测量表明,腐蚀样品表面平坦区呈现较大表观带隙,需考虑针尖诱导的能带弯曲效应,而凹坑区在零偏压区的扫描隧道谱线则近似为线性变化,说明该区域包含较高的带隙态并直接参与隧穿,从而掩盖了带隙信息.     

碲锌镉衬底表面在碲镉汞液相外延工艺中的热腐蚀效应

该研究以提高液相外延碲镉汞材料的质量为出发点,研究液相外延生长过程中碲锌镉衬底受到高温汞蒸气影响后的变化情况,并利用光学显微镜、白光干涉仪、能谱仪等分析测试手段对碲锌镉衬底表面进行分析.研究结果表明,液相外延生长过程中,高温汞蒸气对碲锌镉衬底中表面沉淀物尺寸无明显影响,但在衬底表面发现两种类型的腐蚀点,一种是尺寸为25μm左右的较大腐蚀点,分布较均匀;另一种是尺寸为7μm左右的圆形腐蚀点,分布不均匀.衬底经过液相外延薄膜成核生长前的温度变化过程以及高温Hg蒸气的作用,碲锌镉衬底表面形貌呈鱼鳞状,粗糙度增大了50%以上.     

碲镉汞p型接触孔湿法腐蚀工艺研究

针对碲镉汞芯片p型接触孔湿法腐蚀工艺进行研究,采用不同条件的湿法腐蚀工艺完成碲镉汞p型接触孔制备,通过扫描电子显微镜和激光扫描显微镜分析腐蚀后的接触孔表面形貌,电学接触性能通过伏安特性曲线表征。实验结果表明,传统湿法腐蚀工艺在碲镉汞芯片接触孔制备过程中存在钻蚀严重和均匀性不好等问题,针对以上问题提出了一种超声辅助湿法腐蚀工艺,制备出形貌及均匀性较好的p型接触孔。     

碲镉汞p型接触孔低损伤干法刻蚀技术研究

对碲镉汞材料干法刻蚀损伤进行研究,采用感应耦合等离子体干法刻蚀技术、湿法腐蚀方法完成碲镉汞接触孔刻蚀,通过扫描电子显微镜和激光扫描显微镜分析刻蚀后样品的表面形貌,利用伏安特性曲线分析刻蚀样品的表面损伤。实验结果表明,干法刻蚀工艺极易造成碲镉汞p型接触孔表面反型,提出了一种新型的干法混合刻蚀技术,该技术通过两步干法刻蚀工艺实现,有效地降低了刻蚀引入的表面损伤。     

Interfacial reaction and shear strength of SnAgCu-xNi/Ni solder joints during aging at 150 °C

The interfacial microstructure and shear strength of Sn3.8Ag0.7Cu-xNi (SAC-xNi, x = 0.5, 1, and 2) composite solders on Ni/Au finished Cu pads were investigated in detail after aging at 150 °C for up to 1000 h. The interfacial characteristics of composite solder joints were affected significantly by the weight percentages of added Ni micro-particles and aging time. After aging for 200 h, the solder joints of SAC, SAC-0.5Ni and -1Ni presented duplex intermetallic compound (IMC) layers regardless of the initial interfacial structure on as-reflowed joints, whose upper and lower IMC layers were comprised of (CuNi)₆Sn₅ and (NiCu)₃Sn₄, respectively. Only a single (NiCu)₃Sn₄ IMC layer was ever observed at the SAC-2Ni/Ni interface on whole aging process. Based on the compositional analysis, the amount of Ni within the IMC regions increased as the proportion of Ni addition increased. The IMC (NiCu)₃Sn₄ layer thickness on the interface of SAC and SAC-0.5Ni grew more slowly when compared to that of SAC-1Ni and -2Ni, while for the (CuNi)₆Sn₅ layer the reverse is true. Except the IMCs sizes are increased with increased aging time, the interfacial IMCs tended to transfer their morphologies to polyhedra. In all composite joints testing, the shear strengths were approximately equal to non-composite joints. The fracturing observed during shear testing of composite joints occurred in the bulk solder, indicating that the SAC-xNi/Ni solder joints had a desirable joint reliability.     

有机发光二极管中ADN掺杂ErQ的1.54μm电致发光

自行设计了基于8-羟基喹啉铒(ErQ)为发射层(EMLs)和二硝酰胺铵(ADN)为蓝光主体材料的近红外有机发光二级管.器件的基本结构为(p-Si/NPB/EML/Bphen/Bphen:Cs2CO3/Sm/Au),设计并比较了三套不同发射层结构(ErQ/ADN为双层结构器件,(ErQ/ADN)×3为多层结构器件,ErQ:ADN为掺杂结构器件)的器件.三组器件在一定的偏压下,均可发出1.54μm的光,对应三价铒离子4I13/2→4I15/2的跃迁.其中,ADN:ErQ(1∶1)掺杂结构的近红外电致发光强度是ADN/ErQ双层结构中的三倍.此外,不同掺杂浓度的ADN:ErQ复合膜做了以下表征:吸收谱、光致发光谱和荧光寿命谱.实验结果证实了在近红外电致发光过程中存在从ADN主体分子到ErQ发射分子的高效率的能量转移.     

BNBST无铅压电陶瓷的制备工艺研究

设计了（Bi0.55Na0.5）1-X（BaaSrb）xTiO3（BNBST[100x-100a／100b]）无铅压电陶瓷新体系。该体系压电陶瓷具有工艺特性及压电响应好，压电常数高的特点，且有实际应用前景的新型压电陶瓷材料体系。采用传统的陶瓷工艺制备了（Bi0.55Na0.5）1-X（BaaSrb）xTiO3无铅压电陶瓷，研究了制备工艺参数对其物化结构性能的影响。生料的热重-差热（TGA-DTA）分析表明，粉料合成过程中，先是SrTiO3、BaTiO3的形成，然后是（Bi0．5Na0．5）Tio，的形成，同时三者形成固溶体；密度测试表明，陶瓷的体积密度随烧结温度的升高而增大，可较易获得理论密度94％的陶瓷；X-射线能谱分析（EDAX）研究表明，陶瓷的Bi、Na的挥发随着烧结温度的升高而加剧。研究结果表明，要制备性能优良的无铅压电陶瓷，需要精确控制制备工艺。     

Emerging interconnects: a state-of-the-art review and emerging solutions

Aluminium was a primary material for interconnection in integrated circuits (ICs) since their inception. Later, copper was introduced as interconnect material which has better metallic conductivity and resistance to electromigration. As the aggressive technology scaling continues, the copper resistivity increased because of size effects, which causes increase in delay, power dissipation and electromigration. The need to reduce the resistor-capacitor??????? delay, dynamic power utilisation and the crosstalk commotion is as of now the fundamental main impetus behind the presentation of new materials. The purpose of this paper is to do a survey of interconnect material used in IC from introduction of ICs to till date. This paper studies and reviews new materials available for interconnect application which are optical interconnects, carbon nanotube (CNT), graphene nanoribbons (GNRs) and silicon nanowires which are alternatives to copper. While doing a survey of interconnect material, it is found that multiwalled CNTs, multilayer GNR and mixed CNT bundles are promising candidates and are ultimate choice that can strongly address the problems faced by copper but on integration basis copper would last for coming years.     

钠离子对poly(dT).poly(dA).poly(dT)三螺旋DNA分子呼吸模式的影响

利用分子结构的螺旋对称性,建立了一个包括钠离子的三链DNA分子poly(dT)*poly(dA)*poly(dT)的晶格动力学模型,计算了poly(dT)*poly(dA)*poly(dT)的氢键呼吸模式.结果发现钠离子的加入明显地淬灭了位于较低频率的几个最为强烈的Hoogensteen氢键呼吸模式,而对Watson-Crick氢键呼吸模式影响不明显,这说明钠离子能提高poly(dT)*poly(dA)*poly(dT)三螺旋结构的稳定性.该计算结果很好地解释了poly(dT)*poly(dA)*poly(dT)的热融化实验.     

聚对苯撑苯并双(口恶)唑发光及其器件制备

采用光谱技术,研究了聚对苯撑苯并双(口恶)唑(PBO)溶液的光敏发光特性,并用相对法估算出溶液发光效率在50%范围.结合光谱技术、半导体电学和电化学等研究手段,具体研究了以PBO为发光层的单层电致发光器件,研究结果显示,电致发光与薄膜的光致发光有具有相同的发光中心,峰值位于510 nm左右.同时发现,由于存制备过程中不同处理条件使得不同厚度薄膜残留的掺杂物质浓度不同,从而引起薄膜的导电性的不同.使得器件的阈值场强随PBO厚度的减小而逐渐增加.     

人小肠粘膜免疫酶的定位研究—光镜和电镜免疫组织化学染色法

本文对免疫酶组织化学的样品制备程序和染色方法做了详细的阐述。用直接法、间接法和ABC法,对人小肠免疫酶的定位,进行了光镜和电镜的观察,染色阳性反应显著,获得了满意的效果。并对染色技巧做了分析和探讨。     

Arsenic deposition as a precursor layer on silicon (211) and (311) surfaces

We investigate the properties of arsenic (As) covered Si(211) and Si(311) surfaces by analyzing data from x-ray photoelectron spectroscopy (XPS) and low-energy electron diffraction (LEED) images. We then create a model using total surface energy calculations. It was found that both Si(211) and Si(311) had 0.68±0.08 surface As coverage. Si(211) had 0.28±0.04 Te coverage and Si(311) had 0.24±0.04 Te coverage. The Si(211) surface replaces the terrace and trench Si atoms with As for a lower surface energy, while the Si edge atoms form dimers. The Si(311) surface replaces all terrace atoms and adsorbs an As dimer every other edge site. These configurations imply an improvement in the mean migration path from the bare silicon surface by allowing the impinging atoms for the next epitaxial layer, tellurium (Te), to bind at every other pair of edge atoms, and not the step terrace sites. This would ensure a nonpolar, B-face growth.     

盲多用户检测技术中的恒模算法分析

恒模算法（CMA）是一种广泛应用于阵列处理、均衡和多用户检测中的盲算法。现对恒模算法及其在盲多用户检测技术中的应用进行了分析,并指出其研究方向。     

Joint estimation of TOA and DOA in IR-UWB system using a successive propagator method

Impulse radio ultra-wideband (IR-UWB) ranging and positioning require accurate estimation of time-of-arrival (TOA) and direction-of-arrival (DOA). With receiver of two antennas, both of the TOA and DOA parameters can be estimated via two-dimensional (2D) propagator method (PM), in which the 2D spectral peak searching, however, renders much higher computational complexity. This paper proposes a successive PM algorithm for joint TOA and DOA estimation in IR-UWB system to avoid 2D spectral peak searching. The proposed algorithm firstly gets the initial TOA estimates in the two antennas from the propagation matrix, then utilises successively one-dimensional (1D) local searches to achieve the estimation of TOAs in the two antennas, and finally obtains the DOA estimates via the difference in the TOAs between the two antennas. The proposed algorithm, which only requires 1D local searches, can avoid the high computational cost in 2D-PM algorithm. Furthermore, the proposed algorithm can obtain automatically paired parameters and has better joint TOA and DOA estimation performance than conventional PM algorithm, estimation of signal parameters via rotational invariance techniques algorithm and matrix pencil algorithm. Meanwhile, it has very close parameter estimation to that of 2D-PM algorithm. We have also derived the mean square error of TOA and DOA estimation of the proposed algorithm and the Cramer-Rao bound of TOA and DOA estimation in this paper. The simulation results verify the usefulness of the proposed algorithm.