Scanning Optical Microscopy via a Scanning Electron Microscope

We have described in detail the principles of operation of a commercially available SEM-based scanning optical microscope. The stage consists of a cathodoluminescent material which converts the scanning electron beam into a scanning optical beam and an optical system to focus the light beam onto the specimen. The resolution attainable with such a stage is discussed as well as the efficiency of electron-to-photon conversion. Simplified formulae are given and a set of curves plotted which can be used to determine the appropriate tradeoff between resolution and optical power. Examples of the imaging ability in the optical beam induced current mode from various semiconductor devices are presented.     

激光共焦扫描显微镜简介

激光共焦扫描显微镜是显微光学技术发展史上的新里程碑,它集激光技术、光学技术、电子计算机技术,作为现代化的显微成像系统倍受广大科研工作者的关注,并在生命科学、材料科学等领域中具有广泛的应用。本文就激光共焦扫描显微镜的主要技术特点作综合性介绍。     

石英音叉扫描探针显微镜

石英音叉是一种谐振频率稳定、品质因数高的时基器件,其音叉臂的谐振参数(谐振振幅和谐振频率)对微力极其敏感。利用石英音叉对外力的敏感性,与钨探针结合,构成一种新型的表面形貌扫描测头。该测头与xyz压电工作台结合,利用测头音叉臂谐振频率对扫描微力的敏感性,研制基于相位反馈控制的扫描探针显微镜。首先介绍石英音叉测头的构成、工作原理和特性测试,以及由该测头构建的扫描探针显微镜的结构和测试、分析。通过对测头和系统的测试结果分析,系统达到1.2 nm的垂直分辨率,并通过对一维栅的测量,给出扫描获得的试样表面微观形貌图以及相位图,证明系统的有效性。另外,由于采用大长径比的钨探针,该系统具有测量大深宽比微器件表面轮廓的能力。     

激光扫描共焦显微镜技术的应用

本文介绍了激光扫描共焦显微镜的组成原理及功能特点,并较全面概括地介绍了其在生物医学中的重要应用。     

激光扫描共聚焦显微镜技术在材料学研究中的应用

激光扫描共聚焦显微镜技术(laser scanning confocal microscopy,LSCM)有效地排除了非焦平面信息,提高了分辨率和对比度,使图像更为精确清晰,与计算机及相应的软件技术组合,LSCM实现了连续光学切片,广泛应用于生物三维结构重组及动态分析.LSCM是一种无损深层形态结构分析的重要方法,可以对材料进行深层形貌观察;本文主要综述了LSCM的成像原理以及LSCM在高分子材料和生物工程材料方面的应用.     

一个自动扫描电子显微镜系统方法

扫描电子显微镜对于材料研究来说是一个很好的工具,该工具在较大扫描尺度上需要在人工操作下探索材料的形貌和组成.当前其发展重点是:通过无需仪器设置的完全自动的仪器操作方法快速地检测出大量的不同性质的样品,例如颗粒样品.技术领域的不断创新与仪器领域关键区域的革新带来一个新层次的操作,其具有的可靠性和准确性开创了一个新的应用领域.     

利用STM技术的原子纳米尺度操纵

介绍了扫描隧道显微技术（STM）在材料表面进行原子和原子簇的纳米尺度操纵的操纵机制和实际的应用。     

一种新型垂直扫描白光显微干涉测量仪

研究开发了一种新型垂直扫描白光显微干涉测量仪。基于Linnik显微干涉结构,设计了干涉测量仪的显微干涉系统,介绍了干涉系统的工作原理;设计了Z向一维位移工作台,介绍了其结构和驱动原理;分析了测量仪的工作原理,并采用标准样板对测量仪的测量精度进行了验证。     

The Third International Conference on Scanning Tunnelling Electron Microscopy

The transition quasi-crystalline→crystalline is found to be very sluggish in the ternary alloy Al₆₀Mn₁₁Ni₄. This makes it possible to study in detail the relationship between the decagonal phase, obtained after furnace cooling, and two different crystalline phases, which result after long annealing at 400°C. Use is made of electron diffraction, high resolution electron microscopy and optical diffraction. The crystalline phases still exhibit features which are closely related to those of the decagonal phase. This can be concluded from a comparison of the electron diffraction patterns of the quasi-crystalline phase along a number of zones, with those of the crystalline phases along corresponding zones. The crystalline phases contain different types of defects which are analysed in detail using high resolution images and diffuse scattering in the electron diffraction patterns. The close relationship between the electron diffraction patterns of the crystalline and quasi-crystalline phases is explained in terms of general optical principles. Some characteristic features of a model of the quasi-crystalline phase are tentatively proposed.     

Scanning Electron Microscopy Study of Charging Phenomena on Insulating Materials

Instruments and Experimental Techniques - Charging phenomena of insulating materials were studied thanks to a scanning electron microscope SEM LEO 440 which allows the injection of electrons doses...     

光子扫描隧道显微镜（PSTM）的研制与应用

本文对光子扫描隧道显微镜(PSTM)的发展背景、成像机理、当前国内外发展动态及其技术价值都作了较为深入的研究,并从经典几何光学和波动理论上对PSTM显微成像机理进行了探讨。此外,对解决假像问题和高精度分辨的突破提出了初步的看法。     

Functionalization of Scanning Force Microscopy Cantilevers via Galvanic Displacement Technique

A galvanic displacement technique is used to coat silicon scanning force microscopy cantilevers with copper. The copper coating is characterized using X-ray photoelectron spectroscopy, scanning force microscopy, contact angle measurements, scanning electron microscopy and energy-dispersive X-ray spectroscopy. This coating technique results in uniform, reflective and conformal films and hence, no stress-induced bending of the cantilever is observed. To demonstrate the effectiveness of this approach for tribological studies, the coated cantilevers are chemically modified with alkanethiol monolayers in order to functionalize the cantilevers. The effect of changed surface energy are detected with adhesion measurements in water and ethanol.     

激光共焦扫描显微镜的光学特性研究

研究了最新发展的激光头焦扫描显微镜的下述光学特性：分辨本领及像的反差，层析分析原理及三维构像。还给出激光共焦扫描显微镜的基本光学系统及其光路按排。     

Ultrastructure of Tracheal Surface Liquid: Low-Temperature Scanning Electron Microscopy

A layer of liquid lines the airways in the lung. Previous microscopic studies have suggested that it is in two phases, with a mucous gel lying above a periciliary sol. However, shrinkage artifacts due to chemical fixation, dehydration, and drying have prevented reliable estimates of the depth of these layers. To avoid such problems, we have studied the surface liquid of bovine trachea by low-temperature scanning electron microscopy (LTSEM). A polished copper probe cooled to liquid nitrogen temperature was applied to the mucosal surface of sheets of excised tracheal epithelium to effect rapid freezing of surface liquid. Tissue sheets were then mounted in an LTSEM (AMRay 1000A with Biochamber) which maintains samples at -180°C with a Joule-Thompson refrigerator built into the stage. Tissues were fractured at right angles to the epithelial surface, coated with gold, and viewed, all at 10^?5 to 10^?6 torr without transfer through air. The sample was stable under the electron beam at accelerating voltages up to 20 kV. Epithelial features (nuclei, cilia, microvilli, mucous granules) were well preserved. The mucosal surface of the cells was covered with material on the order of 8 μm in depth. The mucous gel and periciliary sol could be seen as distinct layers and could be distinguished by the size and pattern of ice crystal voids generated by radiant-etching of the fractured surface of the sample.     

扫描电镜低电压显微的实现

介绍了扫描电镜低电压显微的优点和限制及为实现低电压显微而对扫描电镜的改进。     

Tribometer for In Situ Scanning Electron Microscopy of Microstructured Contacts

Here, we report on a special tribometer built to operate inside an environmental scanning electron microscope enabling charge-free imaging of non-conductive and/or hydrated materials. The device is intended to be used for simultaneous testing and in situ visual inspection of biological and biomimetic patterned surfaces during contact formation, pulling-off, peeling, and shearing modeling the behavior of biological microstructured attachment systems in nature. To demonstrate its performance, a simple array of hexagonal elastomer micropillars is tested. The results obtained show that direct link between precise data on the contact forces and images of the contact elements deformed by these forces indeed allows getting an insight into how contact surface patterns function when in contact.     

Efficient Detection of Secondary Electrons in Low-Voltage Scanning Electron Microscopy

A new detection method is proposed allowing an efficient extraction of the secondary electrons without affecting the scanning spot of the primary beam. The suggested detector arrangements can be regarded as generalized Wien filters whose electric and magnetic fields do not affect the primary electrons with average beam energy, yet strongly influence the paths of the secondary electrons. The new detectors are especially useful in low-voltage scanning electron microscopy.