等离子体浸没离子注入(PⅢ)在材料表面改性中的应用及发展

等离子体浸没离子注入(PⅢ)是一种用于材料表面改性的新的离子注入技术.系统地分析和讨论了等离子体浸没离子注入技术的原理和特点:该技术直接将待处理材料浸没在等离子体中进行注入,保留了常规束线离子注入(CBⅡ)技术的主要特点,消除了常规束线离子注入所固有的视线限制,克服了保持剂量问题,使注入装置变得简单和价廉.综述了等离子体浸没离子注入技术在金属材料、半导体材料和高分子材料改性方面的应用.展示了等离子体浸没离子注入技术应用的发展前景.     

碳离子注入医用Ti性能研究

采用等离子体浸没离子注入与沉积(PIIID)技术将碳离子注入Ti基体,研究碳离子注入对材料表面形貌、结构和组成的影响,评价改性材料的表面亲水性、荷电性、力学性能、耐腐蚀性以及细菌黏附能力和细胞相容性,探讨材料的结构和组成对其生物学性能的影响。结果表明,碳等离子体浸没离子注入与沉积(C-PIIID)技术处理的Ti基体表面主要由无定形碳组成。经碳离子注入改性,Ti表面形貌无明显变化,但其疏水性增加,表面负电性提升,表面力学性能和耐腐蚀性能得到提高。基体表面细胞的黏附、铺展和增殖情况良好,同时对大肠杆菌的黏附具有一定的抑制作用。     

GCr15轴承钢的PIIID表面改性工艺研究

采用等离子体浸没离子注入与沉积(PIIID)技术在GCr15轴承钢表面制备了TiN、TiC薄膜，并对其进行了显微硬度和摩擦磨损测量。结果发现：注入时间、注入脉宽和工作气体对GCr15轴承钢表面改性效果具有显著的影响。通过对比分析，获取了最佳处理工艺参数。     

文辑摘要

表面热功能结构制造领域的发展及关键技术,等离子体浸没离子注入与沉积技术的发展及前沿问题,中频交流磁控溅射制备氧化锌铝薄膜的研究     

Ti6A14V的射频激励等离子体浸没离子注入

本文利用电感耦合的射频激励产生的氮等离子体对Ti6A14V进行等离子体浸没离子注入．处理结果发现，随射频功率及氮离子注入剂量增加，Ti6A4V表面显微硬度增加；注入能量及剂量对材料摩擦磨损性能有显著影响，而且注入能量不同，最佳注入剂量也相应变化；射频激励下等离子体浸没离子注入具有注入和氮化双重作用．     

Ti6A14V的射频激励等离子体浸没离子注入

本文利用电感耦台的射频激蛐产生的氨等离子体对Ti6A14V进行等离子体浸没离子注入．处理结果发现，随射频功率及氨离子注入剂量增加，Ti6A14V表面显微硬度增加；注入能量及剂量对材料摩擦磨损性能有显著影响，而且注入能量不同，最佳注入剂量电相应变化；射频激励下等离子体浸没离子注入具有注入和氮化双重作用。     

离子束表面工程技术的进展*

综述了离子束表面工程技术近期研究进展,重点讨论了等离子体浸没离子注入(PIII)、强流脉冲离子束技术(HIPIB)、等离子体喷涂物理气相沉积(PS-PVD)、电子回旋共振(ECR)等离子体和磁过滤阴极真空弧沉积等表面工程技术;介绍了离子束表面工程在替代传统电镀技术、航空航天材料表面改性、太阳能利用中材料的表面改性、生物医学材料的表面改性等领域的应用。指出了离子束表面工程技术的未来研究方向,即深入研究离子束与材料表面的作用机理,开发高性能结构涂层和功能涂层,发展新的离子束复合表面技术。     

9Cr18轴承钢的金属离子加氮离子复合注入处理新工艺

简单地叙述了金属等离子体浸没离子注入与沉积（ＭｅＰⅢＤ）表面处理新工艺的发展,以及ＭｅＰⅢＤ工艺对于脉冲阴极弧金属等离子体源的要求。详细报导了９Ｃｒ１８轴承钢样品的氮离子注入表面处理工艺及金属离子加氮离子复合注入处理新工艺,对被处理和未被处理试样进行了显微硬度、磨痕、摩擦因数及腐蚀特性测试后表明：用金属离子加氮离子复合注入处理的９Ｃｒ１８钢试样的表面特性改善明显优于只有氮离子处理的试样,证明脉冲阴     

MEVVA源金属离子注入和金属等离子体浸没注入

ＭＥＶＶＡ源金属离子注入技术和金属等离子体浸没注入技术ＭｅＰＩＩＩ的共同特性是强流金属离子注入。它们各具长处,相互补充,共同发展。前者因无鞘层重叠问题和其方向强的特点,特别适用于小件、简单件的大批量金属离子注入处理,能保证处理的均匀性和高效率。后者因无视线加工限制并克服了保持剂量问题,特别适用于处理体积较大、形状复杂的工件,能保证工件所有暴露表面的加工均匀性,调整工作参数,还能进行金属膜沉积和各种     

等离子浸没式注入表面改性

采用新型的离子注入技术－离等子体浸没式离子注入对４５钢进行了氮离子注入,测定了注入层的氮浓度俄歇剖面会布,显微硬度和摩擦性能,对磨损表面进行了扫描电镜分析。结果表明,采用等离子浸没式离子注入技术能够获得钢表改性效果。     

Batch treatment of industrial components using plasma immersion ion implantation and deposition

Surface modifications of industrial components, such as the balls, inner and outer rings of bearings, are very difficult to perform for their sophisticated shapes. Plasma immersion ion implantation and deposition (PIIID) offers an effective way for surface treatment of such components. However, implantation doses of these components are not uniform in a conventional PIIID process. To obtain uniform surface modifications, we designed a rotating target holder. Using the target holder and proper process parameters, the PIIID batch treatment of sophisticated-shape components has become easy work. In the PIIID batch treatments of balls, outer and inner surfaces of cylinder-like components, the dose uniformity can be evidently improved by using sample rotation, short width high frequency implantation pulse, and middle-frequency and -voltage glow discharge, respectively. The practical test results reveal that the life of these components can be improved significantly by this novel PIIID batch treatment.     

全方位离子注入与沉积类金刚石碳膜的结构与性能

用等离子体浸没离子注入与沉积(PIIID)复合强化新技术在AISI440C不锈钢表面制备了类金刚石(DLC)碳膜。膜层表面的原子力显微镜(AFM)形貌显示出DLC膜结构致密均匀。Raman光谱分析结果表明,制备的DLC主要是由金刚石键(sp3)和石墨键(sp2)组成的混合无定形碳膜,且sp3键含量大于10%。以纯石墨棒做阴极,C2H2为工作气体条件下合成的DLC薄膜中,sp3键含量总体上较单纯用石墨作阴极而无工作气体条件下合成的DLC薄膜中sp3键含量高。与基体相比,薄膜试样的显微硬度和摩擦磨损性能均得到了较大改善,最大硬度提高88.7%,磨损寿命延长超过4倍。     

Duplex diamond-like carbon film fabricated on 2Cr13 martensite stainless steel using inner surface ion implantation and deposition

A duplex plasma immersion ion implantation and deposition (PIIID) process, involving carbon ion implantation and diamond-like carbon (DLC) film deposition, is proposed to treat the inner surface of a tube. Samples of 2Cr13 martensite stainless steel were placed inside the tube to investigate the performance of the films. Carbon ion implantation was finished by biasing the tube with a high voltage, and the DLC film deposition was obtained by biasing the tube with a medium voltage. Raman spectrum, ball-on-disc, indentation and scratch tests were used to investigate the structure, tribological property and adhesion strength of the as-deposited films. The Raman spectrum shows that the sp³ bonding is formed in the as-synthesized film. Tribological and scratch test results reveal that the duplex DLC coating with the implantation time of 1 h has the largest adhesion strength and the best wear resistance.     

Diamond-like carbon films synthesized on bearing steel surface by plasma immersion ion implantation and deposition

Diamond-like carbon (DLC) films were synthesized by plasma immersion ion implantation and deposition (PIIID) on 9Cr18 bearing steel surface. Influences of working gas pressure and pulse width of the bias voltage on properties of the thin film were investigated. The chemical compositions of the as-deposited films were characterized by Raman spectroscopy. The micro-hardness, friction and wear behavior, corrosion resistance of the samples were evaluated, respectively. Compared with uncoated substrates, micro-hardness results reveal that the maximum is increased by 88.7%. In addition, the friction coefficient decreases to about 0.1, and the corrosion resistance of treated coupons surface are improved significantly.     

Properties of Zr-ZrC-ZrC/DLC gradient films on TiNi alloy by the PIIID technique combined with PECVD

The Zr-ZrC-ZrC/DLC gradient composite films were prepared on TiNi alloy by the techniques combined plasma immersion ion implantation and deposition (PIIID) and plasma enhanced chemical vapor deposition (PECVD). With this method, the Zr-ZrC intermixed layers can be obtained by the ion implantation and deposition before the deposition of the ZrC/DLC composite film. In our study, an optimal gradient composite film has been deposited on the NiTi alloys by optimizing the process parameters for implantation and deposition. The surface topography was observed through AFM and the influence of the deposition voltage on the surface topography of the film was investigated. XPS results indicate that on the outmost layer, the Zr ions are mixed with the DLC film and form ZrC phase, the binding energy of C 1s and the composition concentration of ZrC depend heavily on the bias voltage. With the increase of bias voltage, the content of ZrC and the ratio of sp³/sp² firstly increases, reaching a maximum value at 200 V, and then decreases. The nano-indentation and friction experiments indicate that the gradient composite film at 200 V has a higher hardness and lower friction coefficient compared with that of the bare NiTi alloy. The microscratch curve tests indicate that gradient composite films have an excellent bonding property comparing to undoped DLC film. Based on the electrochemical measurement and ion releasing tests, we have found that the gradient composite films exhibit better corrosion resistance property and higher depression ability for the Ni ion releasing from the NiTi substrate in the Hank's solution at 37°C.     

Modification of biomedical NiTi shape memory alloy by TiC/Ti films using PIIID

TiC/Ti coatings were deposited on the surface of Ti-50.6 at.% Ni alloy by plasma immersion ion implantation and deposition (PIIID) technique. The microstructure, mechanical properties and hemocompatibility of the samples were investigated by means of XRD, AFM, nanoindentation, and scratch and platelet adhesion tests. The result of XRD analysis shows that the crystalline TiC coating has a preferential orientation of (111) in the normal direction. The surface presents a very smooth and dense microstructure with 1.517 nm root mean square roughness (RMS). The average hardness and modulus values of the TiC coating are much higher than those of the NiTi substrate. In the initial stage of scratching, some obvious transversal cracks and worm-like cracks spreading into the film from both side of the scratch track were observed. At higher normal loads for the scratching test, the film delaminated from the substrate at the margins of the substrate. Platelet adhesion tests demonstrate that the hemocompatibility of the coated sample is improved.     

NiTi合金表面类金刚石膜的表面特征和腐蚀行为

采用等离子浸没离子注入和沉积（PIIID）法以C2H2为等离子源对NiTi合金进行表面改性。利用Raman光谱分析膜层结构。采用原子力显微镜和纳米压痕分析涂层前后NiTi的表面形貌和力学性能。利用电化学测试、扫描电镜和原子吸收光谱测试涂层前后基体的耐腐蚀性和Ni离子析出。结果表明：NiTi合金表面的膜层是类金刚石（DLC）；经过PIIID处理后，基体表面的粗糙度降低；纳米硬度得到提高；耐腐蚀性能获得明显改善；Ni离子析出得到有效的抑制。     

Improving the properties of titanium alloys by ion implantation

Recent advances in the ion implantation process have shed light on the underlying mechanisms for improved surface properties of titanium alloys. Ion implantation of reactive species such as carbon or nitrogen creates hard-phase carbide or nitride precipitates which impart surface hardness to titanium alloys. Concurrently, the ion implantation process creates disorder in the surface of titanium and destroys the grain boundaries, and is responsible for lower friction of the surface. The ion implantation process duplicates shot peening on a microscopic scale and imparts compressive stress to the surface of the titanium, thereby improving high-cycle fatigue life of titanium components. Ion implantation also improves the resistance to corrosion and chemical etching of titanium surfaces.     

The effect of surface modification on fretting fatigue in Ti Alloy turbine components

Severe fretting damage has been observed on the pressure surfaces of fan and compressor blade dovetails/disks in an aerospace gas turbine engine. A study has been carried out to evaluate the effect of an ion implantation technique in combination with the presently used surface treatments, such as shot peening and coating, on the fretting fatigue life of titanium alloy gas turbine engine components. The results from fretting fatigue tests, residual stress measurements, and nanoindentation tests were used to quantitatively evaluate the effect of various surface treatments on the fretting fatigue life of the fan blade and disk materials. Results from microstructural characterization and analyses of elemental and phase distributions within the implanted region are used to understand the effect of ion implantation on the surface properties of the alloys. Finally, an attempt has been made to evaluate the potential for improving the fretting fatigue life of the engine components using various surface modification techniques.