Verification of the positioning accuracy of industrial coordinate measuring machine using optical-comb pulsed interferometer with a rough metal ball target

An optical-comb pulsed interferometer was developed for the positioning measurements of the industrial coordinate measuring machine (CMM); a rough metal ball was used as the target of the single-mode optical fiber interferometer. The measurement system is connected through a single-mode fiber more than 100 m long. It is used to connect a laser source from the 10th floor of a building to the proposed measuring system inside a CMM room in the basement of the building. The repetition frequency of a general optical comb is transferred to 1 GHz by an optical fiber-type Fabry–Pérot etalon. Then, a compact absolute position-measuring system is realized for practical non-contact use with a high accuracy of measurement. The measurement uncertainty is approximately 0.6 μm with a confidence level of 95%.     

Diagonal in space of coordinate measuring machine verification using an optical-comb pulsed interferometer with a ball-lens target

This paper presents a new optical method of coordinate measuring machine (CMM) verification. The proposed system based on a single-mode fiber optical-comb pulsed interferometer with a ball lens of refractive index 2 employed as the target. The target can be used for absolute-length measurements in all directions. The laser source is an optical frequency comb, whose repetition rate is stabilized by a rubidium frequency standard. The measurement range is confirmed to be up to 10 m. The diagonals of a CMM are easier to verify by the proposed method than by the conventional artifact test method. The measurement uncertainty of the proposed method is also smaller than that of the conventional method because the proposed measurement system is less affected by air temperature; it achieves an uncertainty of approximately 7 μm for measuring lengths of 10 m. The experimental results show that the measurement accuracy depends on noise in the interference fringe, which arises from airflow fluctuations and mechanical vibrations.     

Calibration of a 3D-ball plate

The presented 3D-ball plate is used for testing machine tools with a workspace of 500 mm × 500 mm × 320 mm. The artefact consists of a 2D-ball plate which is either located by a kinematic correct coupling on a base plate or on a spacer. The spacers are placed between the base plate and the ball plate and are also kinematic coupled to the other elements of the artefact. The kinematic couplings provide a high repeatability of the measurement setup. Because of the specific application the known calibration procedures for 2D-ball plates are not applicable.A calibration method for the pseudo-3D-artefact on a coordinate measuring machine (CMM) is presented, with the aim to minimise the influence of geometric CMM errors. Therefore a computer simulation is used to analyse the effects of these disturbing errors on the calibration of the ball plate and the spacers. Using a reversal method, the plate is measured at four different horizontal positions after rotating the ball plate around its vertical axis. A couple of the CMM errors, e.g., a squareness error C0Y between the X- and Y-axis of the CMM, can be eliminated by that method—others have to be determined with additional measurements, e.g., the positioning errors EXX or EYY of the X- and Y-axis, respectively. The paper also contains a measurement uncertainty estimation for the calibration by use of experiments, tolerances and Monte Carlo-simulations. The achieved uncertainty for ball positions in the working volume is less than 2.1 μm (coverage factor k = 2).     

Simultaneous distributed measurement of the strain and temperature for a four-point bending test using polarization-maintaining fiber Bragg grating interrogated by optical frequency domain reflectometry

We demonstrate a simultaneous distributed strain and temperature measurement technique with the spatial resolution of 1 mm using fiber Bragg gratings inscribed in a polarization-maintaining and absorption-reducing fiber (PANDA-FBGs) and optical frequency domain reflectometry (OFDR). We conduct four-point bending tests in an environmental chamber. Using high birefringent PANDA-FBGs that are manufactured specifically for the simultaneous measurements, the uniform temperature distributions and the typical strain distribution profiles of the four-point bending tests were successfully obtained. The measurement errors of strain were from −31 με to 19 με, and of temperature were from −0.9 °C to 1.3 °C. The spatial standard deviation was 7.5 με and 0.9 °C. We also discussed the effect of the residual strain of the sensor-bonding procedures and the data averaging.     

High-precision radius measurement of ball indenter

To solve the problem of calibrating the radius of a ball indenter in a hardness tester, a laser confocal radius measurement and calibration method for the ball indenter is proposed without separating the ball from the body of the indenter. The laser confocal radius measurement and calibration method uses the maximum of the confocal axial intensity curve to precisely identify the cat’s eye and confocal position of the test ball indenter. The distance between these two positions is then measured to achieve high-precision radius measurement. The theoretical analyses and experimental results indicate that the radius measurement uncertainty of the ball indenter with a diameter of 1.5875 mm is within 0.12 μm.     

Development of high-precision micro-roundness measuring machine using a high-sensitivity and compact multi-beam angle sensor

With recent development in advanced manufacturing, demand for nanometric accuracy in dimensional metrology has increased dramatically. To satisfy these requirements, we propose a high-accuracy micro-roundness measuring machine (micro-RMM) using a multi-beam angle sensor (MBAS). The micro-RMM includes three main parts: the MBAS, a rotary unit, and a bearing system. The MBAS has been designed and established in order to improve motion accuracy of the micro-RMM. The dimensions of the MBAS are 125(L) mm × 130(W) mm × 90(H) mm. Compared with other methods, an MBAS is less susceptible to spindle error (stage-independence) when detecting angles, can maintain high sensitivity with miniaturized size, and can be used conveniently at the factory level. The optical probe, reported in this paper, is based on the principle of an autocollimator, and the stability is improved when using the MBAS. Unlike multi-probe methods, the micro-RMM is constructed to realize roundness measurement by using only one probe, which is less susceptible to instrumental errors. Experimental results confirming the feasibility of the multi-beam angle sensor for roundness measurement are also presented.     

An ultra high-pressure test rig for measurements of small flow rates with different viscosities

Within the framework of a research project regarding investigations on a high-pressure Coriolis mass flow meter (CMF) a portable flow test rig for traceable calibration measurements of the flow rate (mass - and volume flow) in a range of 5 g min⁻¹ to 500 g min⁻¹ and in a pressure range of 0.1 MPa to 85 MPa was developed. The measurement principle of the flow test rig is based on the gravimetrical measuring procedure with flying-start-and-stop operating mode. Particular attention has been paid to the challenges of temperature stability during the measurements since the temperature has a direct influence on the viscosity and flow rate of the test medium. For that reason the pipes on the high-pressure side are double-walled and insulated and the device under test (DUT) has an enclosure with a separate temperature control. From the analysis of the first measurement with tap water at a temperature of 20 °C and a pressure of 82.7 MPa an extensive uncertainty analysis has been carried out. It was found that the diverter (mainly due to its asymmetric behaviour) is the largest influence factor on the total uncertainty budget. After a number of improvements, especially concerning the diverter, the flow test rig has currently an expanded measurement uncertainty of around 1.0% in the lower flow rate range (25 g min⁻¹) and 0.25% in the higher flow rate range (400 g min⁻¹) for the measurement of mass flow. Additional calibration measurements with the new, redesigned flow test rig and highly viscous base oils also indicated a good agreement with the theoretical behaviour of the flow meter according to the manufacturers׳ specifications with water as test medium. Further improvements are envisaged in the future in order to focus also on other areas of interest.     

Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system

A shear mode micro-probing system was constructed for gap measurement of a precision slot die coater with a nominal gap width of 90 μm and a length of 200 mm. A glass micro-stylus with a nominal tip ball diameter of 52.6 μm was oscillated by a tuning fork quartz crystal resonator with its oscillation direction parallel to the measurement surfaces. An on-line qualification setup was established to compensate for the influences of the uncertainty sources, including the water layers on the measurement surfaces. The measurement uncertainty of the measured gap width was estimated to be less than 100 nm.     

Characterisation and laboratory investigation of a new ultraviolet multi-wavelength measuring system for high-temperature applications

In the framework of the HiTeMS project of the European Metrology Research Pogramme (EMRP) a new multi-wavelength device for measurement of high temperatures in industrial applications was developed at INRIM. The apparatus takes advantage of the ultra-violet operation with working wavelengths from 350 nm up, which reduces the possible errors connected with the multi-wavelength approach. The instrument has been characterised in terms of optical and electronic behaviour and some laboratory trials were carried out to verify the reliability of the multi-wavelength approach. The true temperature of a blackbody source at 1300 °C with optical windows of unknown spectral transmittance interposed has been defined. By applying an approach that allows a result to be accepted when a threshold limit is reached, it was found that, when an acceptable result can be obtained, errors are comprised within less than 1% of the temperature of the source. Three others single-band thermometers, at 508 nm, 650 nm and an IR broadband 0.8–1.1 μm, were also used to the purpose of a comparison. It has been found that, when the multi-wavelength approach is applicable, it provides generally better or in few cases, at worst similar results of corrected single-wavelength thermometers.     

Design of a micro floating element shear stress sensor

A silicon-based micro-machined, floating element sensor for wall shear-stress measurement has been developed. Sensor with the dimension of 4×3×0.5 mm³ has been fabricated by inductively coupled plasma (ICP) etching techniques with single mask. An optical system was designed to identify whether there is defect in the structure of the fabricated sensor. Detection of the floating element motion induced by shear stress of fluid is accomplished using differential capacitance measurement. A special package was used to reduce the parasitic capacitance and realize flush mounted between the sensor and the wall. Calibration tests were carried out in a laminar flow channel; the result indicates that the sensitivity of the sensor is measured to be 27 mv/Pa. The measured non-linearity is less than 3.4% while the repeatability is within 4.9% in the regime of 0–35 Pa.     

Reaffirmation of measurement uncertainty in pressure sensitivity determination of LS2P microphones by reciprocity method

The paper presents the accuracy and precision associated with realization of primary standard of sound using the reciprocity method. An experimental determination of the front cavity volume on Universal Measuring Machine has lead to reaffirmation of measurement uncertainty in pressure sensitivity determination to 0.04–0.15 dB in frequency range 31.5 Hz to 25 kHz. The reduced measurement uncertainty has also been validated from the results of the recent APMP Key comparison and also by comparison to the manufacturer’s value for LS2P microphones. The use of optical method for measuring the front cavity volume has refined the measurement methodology followed with adaptation of a self reliant, traceable and systematic measurement procedure in comparison to the earlier use of nominal values for sensitivity fitting exercise conducted on MP.EXE program. Consequently, the measurement uncertainty associated with the calibration of working standard microphones, multifunction acoustic calibrator and A-weighted sound pressure level measurements is also reduced.     

Cost effective refractive index sensor based on optical fiber micro cavities produced by the catastrophic fuse effect

We propose a refractive index optical fiber sensor based on the micro cavities generated through the fiber catastrophic fuse effect. This sensor was tested in the measurement of solutions with refractive indices ranging from 1.3320 to 1.4280. The linear dependence of the reflection spectra modulation period as function of the surrounding environment refractive index leads to a resolution of 3 × 10⁻⁴ RIU. The proposed sensor is an innovative solution based on optical fiber damaged by the fuse effect, resulting in a cost effective solution.     

High-accuracy displacement metrology and control using a dual Fabry-Perot cavity with an optical frequency comb generator

A displacement metrology and control system using an optical frequency comb generator and a dual Fabry-Perot cavity is developed with sub-nm accuracy. The optical frequency comb generator has expanded the displacement measurement range and the dual cavity system has suppressed the environmental fluctuation. We evaluated the absolute uncertainty of the developed displacement measurement system to be approximately 190 pm for the displacement of 14 μm and the accurate displacement control using a phase-locked loop was demonstrated with a resolution of approximately 24 pm.     

The tribological characteristics of TiCN coating at elevated temperatures

The tribological behaviour of TiCN coating prepared by unbalanced magnetron sputtering is studied in this work. The substrates made from austenitic steel were coated by TiCN coatings during one deposition. The measurements were provided by high temperature tribometer (pin-on-disc, CSM Instruments) allowing measuring the dependency of friction coefficient on cycles (sliding distance) up to 500 °C. The evolution of the friction coefficient with the cycles was measured under different conditions, such as temperature or sliding speed and the wear rate of the ball and coating were evaluated. The 100Cr6 balls and the Si₃N₄ ceramic balls were used as counter-parts. The former were used at temperatures up to 200 °C, the latter up to 500 °C. The wear tracks were examined by optical methods and SEM. The surface oxidation at elevated temperatures and profile elements composition of the wear track were also measured.The experiments have shown considerable dependency of TiCN tribological parameters on temperature. Rise in temperature increased both friction coefficient and the wear rate of the coating in case of 100Cr6 balls. The main wear mechanism was a mild wear at temperatures up to 200 °C; fracture and delamination were dominating wear mechanisms at temperatures from 300 to 500 °C.     

The design and optimization of micro polycrystalline diamond ball end mill for repairing micro-defects on the surface of KDP crystal

Micro-milling is a promising approach to repair the micro-defects on the surface of KH₂PO₄ (KDP) crystal. The geometrical parameters of micro ball end mill will greatly influence the repairing process as a result of the soft brittle properties of KDP crystal. Two types of double-edged micro ball end mills were designed and a three-dimensional finite element (FE) model was established to simulate the micro milling process of KDP crystal, which was validated by the milling experiments. The rake angle of −45°, the relief angle of 45° and the cutting edge radius of 1.5–2 μm were suggested to be the optimal geometrical parameters, whereas the rake angle of −25° and the relief angle of 9° were optimal just for micro ball end mill of Type I, the configuration with the rake angles ranging from 0° to 35°, by fully considering the cutting force, and the stress–strain distribution over the entire tool and the cutting zone in the simulation. Moreover, the micro polycrystalline diamond (PCD) ball end mills adopting the obtained optimal parameters were fabricated by wire electro-discharge machining (WEDM) and grinding techniques, with the average surface roughness Ra of tool rake face and tool flank face ∼0.10 μm, and the cutting edge radius of the tool ∼1.6 μm. The influence of tool's geometrical parameters on the finished surface quality was verified by the cutting experiments, and the tool with symmetric structure was found to have a better cutting performance. The repairing outlines with Ra of 31.3 nm were processed by the self-fabricated tool, which could successfully hold the growth of unstable damage sites on KDP crystal.     

Optical fiber distributed temperature sensor using short term Fourier transform based simplified signal processing of Raman signals

A simplified technique using short term Fourier transform to reduce the errors in distributed temperature measurement with a Raman scattering based optical fiber sensor system is presented. The two main sources of errors are differential attenuation to anti-Stokes and Stokes signal by fiber and local change in Stokes due to change in temperature. The proposed technique compensates these errors and extracts correct temperature profile in spite of practical difficulties encountered in applying the theoretical concept. Moreover proposed technique is less complex, self-reliant, can tolerate variation in laser power, requires less dead zone and suits automation using embedded solution. Results of measurement carried out, using the system developed at RRCAT, Indore, for two hot zones having spatial width of 1.9 m (kept at 56 °C) and 1.5 m (kept at 78 °C), located at 47 m and 85 m respectively, show that these parameters can be recovered with significantly small errors.     

Development of a gas micro-flow transfer standard

LNE has ability to calibrate gas micro-flow rates using the dilution method for nitrogen flow rates in the range from 2 µg/s to 200 µg/s or helium ones in the range 0.75–30 µg/s. In addition, a primary constant pressure flowmeter for leak rate measurements from 0.05 µg/s to 35 µg/s is also available. This equipment will be used to validate the dilution method below 30 µg/s. In order to compare these reference facilities, LNE is developing a micro-flow transfer standard (µFTS) in collaboration with ATEQ France, a manufacturer of control equipment for leak testing. The flowmeter consists mainly of an array of three stainless steel capillaries designed to cover the ranges from 0.035 µg/s to 0.35 µg/s, 0.35 µg/s to 3.5 µg/s and 3.5 µg/s to 35 µg/s for nitrogen (0.1–100 ml/h). A dynamic model of the µFTS determines the mass flow rate from the input pressure, the differential pressure of the capillary, the gas temperature, viscosity and density and the length and radius of the capillary. A comparison of both reference methods is carried out with the µFTS from 0.35 µg/s to 35 µg/s.     

Slug frequency in high viscosity oil-gas two-phase flow: Experiment and prediction

The number of slug units that traverses a particular point at a given time within a defined pipe cross-section is known as slug frequency. The behaviour of this critical parameter for two-phase flow in high viscosity oils is significantly different from those of conventional oils (of less than 1 Pa s). In this experimental investigation, new data on slugging frequency in high viscosity oil-gas flow are reported. Scaled experiments were carried out using a mixture of air and mineral oil in a 17 m long horizontal pipe of 0.0762 m ID. A high-speed Gamma Densitometer of frequency of 250 Hz was used for data acquisition over a time interval of 30 s. For the range of flow conditions investigated, increase in oil viscosity was observed to strongly influence the slug frequency. Comparison of the present data with prediction models available in the literature revealed discrepancies. A new correlation incorporating the effect of viscosity on slug frequency has been proposed for horizontal flow. The proposed correlation will improve the prediction of slug frequency in high viscosity oils.     

Compact and inexpensive iodine-stabilized diode laser system with an output at 531 nm for gauge block interferometers

A compact and inexpensive iodine-stabilized diode laser system with an output at 531 nm has been applied to long gauge block measurements. Although the optical frequency of the output beam was widely modulated (modulation width of ∼22 MHz), the coherence length and interference phase stability are sufficiently long and high, respectively, for the interferometric measurement of long gauge blocks of up to 1000 mm in length. The effective uncertainty of laser frequency in the interferometric measurement was theoretically and experimentally confirmed to be less than 10⁻⁹.     

High flow-rate ultrasonic seeder

Application of optical techniques to gaseous flows usually requires seeding the fluid with tracers sufficiently small to follow the flow, added in suitable concentrations. This work describes the design and manufacture of a seeder based on ultrasonic atomization of aqueous solutions or other fluids of similar viscosity, capable of operating in a continuous way with high atomization rates. It includes a dozen piezoceramic disks that oscillate at 1.65 MHz, generating droplets with Sauter mean diameter in the range of 4–5 μm and rates over 0.6 g/s when working with water. To test its performance, the device has been used to seed a simple free air jet issuing from a 3.5 cm diameter pipe. Initially the seeding density is very satisfactory, but if only water is nebulized the droplets evaporate in a short time and the concentration becomes too low when moving downstream. The situation can be greatly improved mixing the water with a less volatile liquid. Here, a small percentage of glycerol (5% in volume) has been added to the water to extend the droplet lifetime, although in general, atomization rate strongly decreases when increasing the liquid viscosity. The seeded flow has been visualized, and the 3D velocity field has been successfully measured using stereoscopic particle image velocimetry.