共查询到20条相似文献,搜索用时 109 毫秒
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研制了高电流增益截止频率(fT)的InAlN/GaN高电子迁移率晶体管(HEMT).采用金属有机化学气相沉积(MOCVD)再生长n+GaN非合金欧姆接触工艺将器件源漏间距缩小至600 nm,降低了源、漏寄生电阻,有利于改善器件的寄生效应;使用低压化学气相沉积(LPCVD)生长SiN作为栅下介质,降低了InAlN/GaN HEMT栅漏电;利用电子束光刻实现了栅长为50 nm的T型栅.此外,还讨论了寄生效应对器件fT的影响.测试结果表明,器件的栅漏电为3.8 μA/mm,饱和电流密度为2.5 A/mm,fT达到236 GHz.延时分析表明,器件的寄生延时为0.13 ps,在总延时中所占的比例为19%,优于合金欧姆接触工艺的结果. 相似文献
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基于90 nm InP HEMT工艺,设计了一款220 GHz功率放大器太赫兹单片集成电路,该放大器采用片上威尔金森功分器结构实现了两路五级共源放大器的功率合成。在片测试结果表明,200~230 GHz频率范围内,功率放大器小信号增益平均值18 dB。频率为210~230 GHz范围内该MMIC放大器饱和输出功率优于15.8 mW,在223 GHz时最高输出功率达到20.9 mW,放大器芯片尺寸为2.18 mm×2.40 mm。 相似文献
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我们成功研制了栅长88 nm, 栅宽2 50 μm, 源漏间距为2.4 μm 的InP基In0.53Ga0.47As/In0.52Al0.48As高电子迁移率器件(HEMT)。栅是使用PMMA/Al/UVⅢ,通过优化电子束曝光时间及其显影时间的方式制作的。这些器件有比较好的直流及其射频特性:峰值跨导、最大源漏饱和电流密度、开启电压、ft和fmax 分别为765 mS/mm, 591 mA/mm, -0.5 V, 150 GHz 和201 GHz。这些器件将非常适合于毫米波段集成电路。 相似文献
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A new PMMA/PMGI/ZEP520/PMGI four-layer resistor electron beam lithography technology is successfully developed and used to fabricate a 120 nm gate-length lattice-matched In_(0.53)Ga_(0.47)As/In_(0.52)Al_(0.48) As InP-based HEMT,of which the material structure is successfully designed and optimized by our group.A 980 nm ultra-wide T-gate head,which is nearly as wide as 8 times the gatefoot(120 nm),is successfully obtained,and the excellent T-gate profile greatly reduces the parasitic resistance and capaci... 相似文献
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Yamashita Y. Endoh A. Shinohara K. Higashiwaki M. Hikosaka K. Mimura T. Hiyamizu S. Matsui T. 《Electron Device Letters, IEEE》2001,22(8):367-369
We have succeeded in fabricating ultra-short 25-nm-gate InAlAs/InGaAs high electron mobility transistors (HEMTs) lattice-matched to InP substrates. The two-step-recessed gate technology and low temperature processing at below 300°C allowed the fabrication of such ultra-short gates. DC measurements showed that the 25-nm-gate HEMT had good pinchoff behavior. We obtained a cutoff frequency fT of 396 GHz, within the range of 400 GHz fT, for the 25-nm-gate HEMT. This fT is the highest value get reported for any type of transistor, and the gate length of 25 nm is the shortest value ever reported for any compound semiconductor transistor that exhibits device operation 相似文献
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Zaknoune M. Bonte B. Gaquiere C. Cordier Y. Druelle Y. Theron D. Crosnier Y. 《Electron Device Letters, IEEE》1998,19(9):345-347
An In0.3Al0.7As/In0.3Ga0.7 As metamorphic power high electron mobility transistor (HEMT) grown on GaAs has been developed. This structure with 30% indium content presents several advantages over P-HEMT on GaAs and LM-HEMT on InP. A 0.15-μm gate length device with a single δ doping exhibits a state-of-the-art current gain cut-off frequency Ft value of 125 GHz at Vds=1.5 V, an extrinsic transconductance of 650 mS/mm and a current density of 750 mA/mm associated to a high breakdown voltage of -13 V, power measurements performed at 60 GHz demonstrate a maximum output power of 240 mW/mm with 6.4-dB power gain and a power added efficiency (PAE) of 25%. These are the first power results ever reported for any metamorphic HEMT 相似文献
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Mathew T. Kim H.-J. Scott D. Jaganathan S. Krishnan S. Wei Y. Urteaga M. Long S. Rodwell M.J.W. 《Electronics letters》2001,37(11):667-668
A 75 GHz static frequency divider in InAlAs/InGaAs transferred-substrate heterojunction bipolar transistor (HBT) technology is reported. This is the highest reported frequency of operation for a static frequency divider. The circuit has 60 transistors and dissipates 800 mW. The divider was operated at a clock frequency of 5.0 to 75 GHz 相似文献
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A W-band monolithic integrated oscillator circuit was designed and fabricated using submicron HEMT technology. The oscillation frequency was around 81 GHz and the power was -7 dBm at the chip level. This is the first report of an InAlAs/InGaAs monolithic oscillator operating at the W-band.<> 相似文献
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研制了一种T型栅长为90 nm的InP基In0.52Al0.48As/In0.65Ga0.35As赝配高电子迁移率晶体管(PHEMTs).该器件的总栅宽为2×25 μm,展现了极好的DC直流和RF射频特性,其最大饱和电流密度和最大有效跨导分别为894 mA/mm和1640 mS/mm.采用LRM+ (Line-Reflect-Reflect -Match)校准方法实现系统在1~110 GHz全频段内一次性校准,减小了传统的分段测试多次校准带来的误差, 且测试数据的连续性较好.在国内完成了器件的1~110 GHz全频段在片测试,基于1~110 GHz在片测试的S参数外推获得的截止频率ft和最大振荡频率fmax分别为252 GHz和394 GHz.与传统的测试到40 GHz外推相比,本文外推获得的fmax更加准确.这些结果的获得是由于栅长的缩短,寄生效应的减小以及1~110 GHz全频段在片测试的实现.器件的欧姆接触电阻率减小为0.035 Ω·mm. 相似文献
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Frequency divider using InAlAs/InGaAs HEMT DCFL-NOR gates 总被引:1,自引:0,他引:1
Examines a divide-by-four circuit based on DCFL-NOR gates using a newly developed enhancement-mode n-InAlAs/InGaAs HEMT technology. A divider, with gates 1.2 mu m long, had a maximum clock frequency of 5.8GHz and a power dissipation of 2.5mW/gate. It was found that the switching speed of an InP-based HEMT is 1.5 times faster than that of a GaAs-based HEMT.<> 相似文献
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The authors have fabricated an InGaAs/InAlAs HEMT structure with a strained InGaP Schottky contact layer to achieve selective wet gate recess etching and to improve reliability for thermal stress. Strained In0.75Ga0.25P grown on InAlAs has been revealed to have sufficient Schottky barrier height for use as a gate contact. Threshold voltage standard deviation has been reduced to one fifth that of a conventional InGaAs/InAlAs HEMT, as a result of successful selective recess etching. After thermal treatment at 300°C for 5 min, the drain current and transconductance did not change, while those of the conventional HEMT decreased by more than 10% 相似文献
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Tetsuya Suemitsu Yoshino K. Fukai Hiroki Sugiyama Kazuo Watanabe Haruki Yokoyama 《Microelectronics Reliability》2002,42(1):47-52
The reliability of InP-based HEMTs is studied, focussing on how it is affected by the doped layer material and gate recess structure. Bias-and-temperature stress tests reveal that fluorine-induced donor passivation in the recess region, formed adjacent to the gate electrode, causes the source resistance (Rs) to increase at large drain bias voltages. The increase in Rs can be prevented by using InP or InAlP as the carrier supply layer material instead of InAlAs. On the other hand, the increase in the drain resistance (Rd) does not depend on the material of the carrier supply layer, which suggests that a mechanism different from that in the case of Rs should be considered. It is also found that a deep gate recess suppresses the increase in Rd after long-term stressing. 相似文献