Design of SAW synchronous resonators on ST cut quartz

Surface acoustic wave (SAW) resonators on ST cut quartz, with synchronous placement of the interdigital transducers (IDT), were designed, fabricated, and measured. The basic structure of the resonators was a two-port one. The one-port resonators were obtained by parallel connection of the two IDT or by short circuiting one of them. The IDT were apodized to eliminate coupling to spurious modes. The transfer function of the two-port resonators was calculated by using the scattering matrix method. Several models of these resonators were investigated in the frequency range from about 300 to 715 MHz. By matching the theoretical and experimental transfer functions, the loss coefficient as a function of frequency and the SAW velocity in the reflector area as a function of aluminium layer thickness were determined. The responses of the resonators were free of any spurious modes.     

Chemical sensor based on surface acoustic wave resonator using Langmuir-Blodgett film

A one-port surface acoustic wave (SAW) resonators incorporating Langmuir-Blodgett (LB) films has been investigated. SAW sensors are one potential applications of SAW devices. Most of the work reported on SAW sensor concerns delay lines. In this paper we characterize the mass loading effects of one-port resonators by depositing successive monolayers of LB films onto the surface. A 90 MHz SAW gas-phase sensor has been fabricated on an ST cut quartz substrate, and one-port resonator configurations have been used as the sensing element. Ultra thin monolayers of arachidic acid and arachidic acid ethyl ester have been deposited using the LB method. The resonant frequencies and the Q values have been measured as sensor response. Experimental results show that the Q values and the resonant frequencies of the one-port SAW resonator vary with film mass loading on the SAW device surface.     

Linear frequency tuning of SAW resonators

Frequency tuning in SAW (surface acoustic wave) resonator-stabilized oscillators is normally accomplished via utilization of a voltage-controlled phase shifter. The design of abrupt junction varactor diode-inductor networks which employ impedance transformation techniques to obtain linear frequency tuning of two-port SAW resonators is reported. The approach is similar to that previously developed for linear tuning of bulk wave, quartz crystal resonators. This technique uses varactor diode parallel inductance to provide a linear reactance versus voltage network, which is effectively connected in series with the resonator motional impedance in order to tune the effective resonator center frequency. Typical tuning ranges are significantly larger than those achievable using the phase shifter approach, and are on the order of 400 ppm for the 320-MHz resonator used.     

K-cut quartz SAW resonators for stable frequency sources

A new type of quartz SAW resonator for use as a stable frequency source has been developed. It was studied from the point of view of frequency instability caused by transient thermal behavior, and a new angle of cut named the K-cut for quartz SAW resonators was found. The static and dynamic frequency temperature coefficients are both zero at a room temperature. Taking into consideration the influence of the electrode-film thickness, the width modes of the waves, and power-flow angles, optimized resonators and oscillators were designed. These devices had frequency stability of 2x10(-10) for the mean time of 0.01 s.     

Scattering analysis of two-port SAW resonators

Linear equations derived from the scattering matrix approach to the two-port resonator were solved, and analytical expressions for the normalized SAW amplitudes were obtained. Asynchronous and synchronous resonators were analyzed numerically. It was shown that the output of the two-port resonator is a sum of two signals. In the case of the asynchronous resonator, these signals are in phase at a resonance frequency; for the synchronous resonator, they are in phase quadrature, which causes the higher insertion loss of the synchronous resonator     

High Q metal strip SSBW resonators using a SAW design

An experimental study of metal strip surface skimming bulk wave (SSBW) resonators using a surface acoustic wave (SAW) design is presented. Characteristics of SSBW and SAW resonators fabricated with the same photolithographic mask are compared and discussed. High Q low-loss SSBW resonators are achieved using a conventional two-port SAW resonator design and taking special care of the distance L between both interdigital transducers, the metal thickness h/lambda (lambda=acoustic wavelength) and the finger-to-gap ratio. Best overall performance of the SSBW devices in this study is achieved at L=nlambda/2-lambda/4 (compared with L=nlambda/2-lambda/8 for SAW resonators), h /lambda=1.6% (compared with 2% for SAW), and finger-to-gap ratio close to 1. The best device fabricated shows an unloaded Q of 5820 and an insertion loss of 7.8 dB at 766 MHz. The SSBW resonant frequency shows a stronger dependence on the metal thickness than the SAW one. This problem, however, is readily solved by frequency trimming using a CF(4) plasma etching technique. SSBW resonator can be trimmed by 0.2% down in frequency (compared with 0.05% for SAW) without affecting their performance.     

Wireless sensing using oscillator circuits locked to remote high-Q SAW resonators

This paper introduces a method of wireless read out of high Q surface acoustic wave (SAW) resonator sensors. The resonator is excited by a short RF pulse and decays after switching off the interrogating signal. In the measurement system, a gated phase locked loop (GPLL) locks to the resonance frequency of the SAW resonator within a few bursts. Then the frequency of the GPLL oscillator is synchronized to the resonance of the sensor and can be measured easily. The concept is intended to yield an alternative to interrogators with expensive signal processing. Considering the inherent limitations, the proposed system presents a low cost solution for temperature, force, torque, etc. measurements. We describe the sensors, the signals, and the implemented system. Results of temperature measurements using quartz resonators are presented, and merits and disadvantages are discussed.     

Ultra temperature-stable bulk-acoustic-wave resonators with SiO2 compensation layer

This paper describes temperature compensated bulk acoustic-wave resonators (BAR) with temperature coefficient of frequency (TCF) less than 1 ppm/degrees C at above 3 GHz. The temperature compensation is produced from the unique physical property of silicon dioxide's positive TCF, unlike most other materials that have negative TCF. Two types of resonators have been explored: film bulk acoustic resonator (FBAR) composed of Al/ZnO/Al/SiO2 on a surface micromachined cantilever that is released by XeF2 vapor etching and high-overtone acoustic resonator (HBAR) composed of an Al/ZnO/Al resonator on a bulk micromachined SiO2/Si/SiO2 supporting substrate.     

Gigahertz range resonant devices for oscillator applications using shear horizontal acoustic waves

It is shown that surface transverse wave (STW) resonant devices are not only very well suited for stable oscillator applications but have some unique features offering greater design flexibility than their surface acoustic wave (SAW) counterparts. Various designs for single- and multimode resonators and resonator filters are presented, and their properties in respect to applications in stable fundamental-mode fixed-frequency and voltage-controlled oscillators in the range of 750 MHz to 2 GHz are discussed. Characteristics of SAW and STW two-port metal strip resonators using identical designs are compared. Data from frequency trimming on STW resonators, using heavy ion bombardment, are presented.     

Single-walled carbon nanotubes nanocomposite microacoustic organic vapor sensors

We have developed highly sensitive microacoustic vapor sensors based on surface acoustic waves (SAWs) configured as oscillators using a two-port resonator 315, 433 and 915 MHz device. A nanocomposite film of single-walled carbon nanotubes (SWCNTs) embedded in a cadmium arachidate (CdA) amphiphilic organic matrix was prepared by Langmuir–Blodgett technique with a different SWCNTs weight filler content onto SAW transducers as nanosensing interface for vapor detection, at room temperature. The structural properties and surface morphology of the nanocomposite have been examined by X-ray diffraction, transmission and scanning electron microscopy, respectively. The sensing properties of SWCNTs nanocomposite LB films consisting of tangled nanotubules have been also investigated by using Quartz Crystal Microbalance 10 MHz AT-cut quartz resonators. The measured acoustic sensing characteristics indicate that the room-temperature SAW sensitivity to polar and nonpolar tested organic molecules (ethanol, ethylacetate, toluene) of the SWCNTs-in-CdA nanocomposite increases with the filler content of SWCNTs incorporated in the nanocomposite; also the SWCNTs-in-CdA nanocomposite vapor sensitivity results significantly enhanced with respect to traditional organic molecular cavities materials with a linearity in the frequency change response for a given nanocomposite weight composition and a very low sub-ppm limit of detection.     

1/f noise in etched groove surface acoustic wave (SAW) resonators

Measurements of 1/f (or flicker) frequency fluctuations in SAW resonators fabricated with etched groove reflectors on single crystal quartz have shown that the observed noise levels vary inversely with device size. These measurements were made on sixteen 450 MHz resonators of four different sizes. The 1/f noise levels were also evaluated on twenty-eight other SAW resonators ranging in frequency from 401 to 915 MHz. This additional data provides valuable information on the dependence of the flicker noise levels on resonator frequency. A model based an localized, independent velocity fluctuations in the quartz is proposed which correctly fits the observed size and frequency dependence of the measured 1/f noise levels. This model suggests that the velocity fluctuations originate in small regions (much less than ~5 mum in diameter) randomly distributed throughout the quartz with an average separation of about 5 mum between independent (incoherent) sources. The magnitude of the localized fractional velocity fluctuations, Deltav/v, averaged over a 5 micron cube is on the order of 1x10 (-9).     

Design considerations on surface acoustic wave resonators with significant internal reflection in interdigital transducers

This paper discusses, both qualitatively and quantitatively, the operation and the design principle of current surface acoustic wave (SAW) resonators in which the internal reflection within interdigital transducers (IDTs) is not negligible and lower capacitance ratio is necessary. For the purpose, the p-matrix expression is used with the help of the coupling-of-modes theory. The internal reflection causes: deformation of the IDT passband shape, frequency dependence of the effective SAW velocity within IDTs, and suppression of higher-order resonances. It is shown that these features can be effectively used to enhance performances of both one-port SAW resonators and two-port double-mode SAW (DMS) filters. In addition, under proper designs accounting for the internal reflection, most of all structural discontinuities can be removed, and is most preferable for the reduced scattering loss at the discontinuity. Design criteria also are presented for DMS filters of wide bandwidth, and it is demonstrated how device performances are improved by proper design accounting for the criteria.     

SAW COM-parameter extraction in AlN/diamond layered structures

Highly c-axis oriented aluminum nitride (AlN) thin piezoelectric films have been grown on polycrystalline diamond substrates by pulsed direct current (DC) magnetron reactive sputter-deposition. The films were deposited at a substrate temperature below 50/spl deg/C (room temperature) and had a typical full width half maximum (FWHM) value of the rocking curve of the AlN-002-peak of 2.1 degrees. A variety of one-port surface acoustic wave (SAW) resonators have been designed and fabricated on top of the AlN films. The measurements indicate that various SAW modes are excited. The SAW phase velocities of up to 11.800 m/s have been measured. These results are in agreement with calculated dispersion curves of the AlN/diamond structure. Finally, the coupling of modes parameters have been extracted from S/sub 11/ measurements using curve fitting for the first SAW mode, which indicate an effective coupling K/sup 2/ of 0.91% and a Q factor of about 600 at a frequency of 1050 MHz.     

Scattering matrix approach to one-port SAW resonators

The scattering matrix method was used to derive an expression for the reflection coefficient of a one-port SAW resonator. This expression was applied to calculations of an input admittance of a synchronous resonator on ST-cut quartz. Very good agreement was obtained between calculated and measured parameters of the resonator.     

Impact of SAW device passivation on RF performance

Passivation layers consisting of sputtered Al₂O₃ have been deposited onto SAW devices for the purpose of reducing the incidence of shorts. A coupling-of-modes model was used with one-port resonators, coupled resonator filters (CRF), and test structures. The passivation layer stiffens the surface with a velocity increase proportional to t/λ, where t is the passivation layer thickness. Attenuation is increased slightly, producing a 0.25-dB increase in the loss of a one-port resonator at 314 MHz. The effect on reflectivity is minimal and of much lesser importance to the designer     

Properties of SAW synchronous two-port resonators on GdCa₄O(BO₃)₃ crystal

Surface acoustic wave (SAW) synchronous two-port resonators were fabricated and measured on several orientations of the GdCa?O(BO?)? crystal. Resonance frequencies, insertion losses, and unloaded quality factors of the resonators, measured at room temperature, were in the ranges of about 432.3 to 437.5 MHz, 3.8 to 6.3 dB, and 6500 to 7500, respectively. The properties of this crystal, such as its lack of a phase transition up to its melting temperature of about 1500 °C, a SAW temperature coefficient of frequency of about -80 ppm/ °C, and good parameters of the resonators make the crystal attractive for high-temperature sensor applications.     

Transverse modes in one-port SAW resonators

The S(11) and equivalent S(21) frequency responses of a one-port surface acoustic wave (SAW) resonator with transverse modes derived from one-dimensional coupling-of-modes and transmission-matrix analysis. The two-dimensional nature of the problem is approximated by a summation of one-dimensional mode responses for each transverse mode. Comparison between theory and experimental data for a commercial 280-MHz one-port SAW resonator shows good agreement for the placement of transverse modes.     

Influence of metal thickness on phase velocity and thermal sensitivity of SAW devices

Most surface acoustic wave (SAW) devices exhibit a very small sensitivity to thermal effects. However, even on intrinsically compensated crystal cuts, the deposition of metal strips at the surface (transducers or reflectors) induces important changes in the thermoelastic properties of the device. A theoretical approach based on the Sinha-Tiersten perturbation method is proposed to model the influence of metallization on SAW properties on (ST, X) quartz, namely the temperature stability of the phase velocity of Rayleigh waves. Because this perturbation method only gives access to the first-order temperature coefficient of frequency (TCF), it is combined with a conventional calculation of the second-order TCF to predict the evolution of the turnover temperature. The proposed calculation also requires temperature derivatives of the elastic constants of the metal, which can be calculated for different materials. Finally, theoretical results are compared with experimental data measured on SAW devices on (ST, X) quartz, using aluminum gratings     

Conductance measurements on a leaky SAW harmonic one-port resonator

Conductance measurements are reported on a leaky SAW (LSAW) harmonic one-port resonator on a 64 degrees Y-X LiNbO(3) substrate. This employed a short three-finger IDT for fundamental and second harmonic operation together with long reflection gratings. Conductances were measured with and without the end gratings. From an analysis of the measurements, it was deduced that, for optimum second harmonic performance, the grating stop-band frequency should be higher than the IDT unperturbed center frequency. This result is in contrast to fundamental frequency resonator designs in which the end grating stop-band frequency is placed below the IDT center frequency for optimum performance.     

A review of wireless SAW sensors

Wireless measurement systems with passive surface acoustic wave (SAW) sensors offer new and exciting perspectives for remote monitoring and control of moving parts, even in harsh environments. This review paper gives a comprehensive survey of the present state of the measurement systems and should help a designer to find the parameters required to achieve a specified accuracy or uncertainty of measurement. Delay lines and resonators have been used, and two principles have been employed: SAW one-port devices that are directly affected by the measurand and SAW two-port devices that are electrically loaded by a conventional sensor and, therefore, indirectly affected by the measurand. For radio frequency (RF) interrogation, time domain sampling (TDS) and frequency domain sampling (FDS) have been investigated theoretically and experimentally; the methods of measurement are described. For an evaluation of the effects caused by the radio interrogation, we discuss the errors caused by noise, interference, bandwidth, manufacturing, and hardware tuning. The system parameters, distance range, and measurement uncertainty are given numerically for actual applications. Combinations of SAW sensors and special signal processing techniques to enhance accuracy, dynamic range, read out distance, and measurement repetition rate (measurement bandwidth) are presented. In conclusion, an overview of SAW sensor applications is given.