电子束辐照制备钼酸锰纳米材料

在透射电子显微镜中,利用电子束辐照诱导的方法合成了钼酸锰片状纳米材料.研究发现在电子束辐照前,由于Mn、O等的相对含量不同样品可以分为两类.其中Mn和O含量较低的样品经电子束辐照后的产物为Mn2 Mo3 O8纳米片和MoO2纳米颗粒.而Mn和O含量较高的则主要生成六角结构的新相Mnx Mo3 O8.进一步分析发现,Mnx Mo3 O8的生成可能是因为样品中Mn相对含量较高,导致Mn、Mo和O原子层堆垛方式发生了改变.同时也初步确定了MnxMo3O8的晶胞参数为aH2=0.59 nm,cH2=6.24 nm.研究结果不仅提供了利用电子束辐照制备钼酸盐纳米材料的新方法,同时也促进了对钼酸锰材料的认识.     

基于改进水热法的Ga2O3纳米棒制备及表征

采用改进的水热法对衬底进行预处理,分别在单晶硅Si(111)和蓝宝石C(0001)衬底上生长一层Ga2O3籽晶层.籽晶层退火处理后放入Ga2(NO3)3溶液高压反应釜内进行水热反应,待反应结束进行二次退火,成功制备出了Ga2 O3纳米棒.研究了不同温度对籽晶层和Ga2 O3纳米棒的影响,通过扫描电子显微镜(SEM)和X...     

添加剂SiO2在等离子喷涂陶瓷涂层及其激光重熔中的作用研究

系统研究了添加剂 Si O2 在等离子喷涂陶瓷涂层及其激光重熔中的作用 .添加剂 Si O2 的 液相烧结 作用在高熔点 Zr O2 陶瓷涂层中比较明显 ,而在较低熔点 Al2 O3陶瓷中不明显 .在激光重熔中 ,Si O2 能降低 Zr O2 熔化层应力并阻碍裂纹扩展 ;在 Al2 O3陶瓷涂层中 ,Si O2 还能使熔化层晶粒均匀化 ,并在晶粒间形成连续玻璃质抑制裂纹形成、阻碍裂纹扩展 .而 Al2 O3陶瓷涂层中的Ti O2 ,激光处理时生成 Ti Al2 O5,此相导致熔化层产生巨大的不对称应力使之易出现裂纹 ,但其能提高涂层的致密度和耐磨性     

基于HfO2栅介质的Ga2O3 MOSFET器件研制

采用金属有机化学气相沉积(MOCVD)方法在(010) Fe掺杂半绝缘Ga2O3同质衬底上外延得到n型β-Ga2O3薄膜材料,材料结构包括400 nm的非故意掺杂Ga2O3缓冲层和40 nm的Si掺杂Ga2O3沟道层.基于掺杂浓度为2.0×1018 cm-3的n型β-Ga2O3薄膜材料,采用原子层沉积的25 nm的HfO2作为栅下绝缘介质层,研制出Ga2O3金属氧化物半导体场效应晶体管(MOSFET).器件展示出良好的电学特性,在栅偏压为8V时,漏源饱和电流密度达到42 mA/mm,器件的峰值跨导约为3.8 mS/mm,漏源电流开关比达到108.此外,器件的三端关态击穿电压为113 V.采用场板结构并结合n型Ga2O3沟道层结构优化设计能进一步提升器件饱和电流和击穿电压等电学特性.     

电子束反应蒸发制备高迁移率IMO薄膜及其性能研究

研究了掺杂剂含量对电子束反应蒸发技术生长掺钼氧化铟（In2O3：Mo,IMO）薄膜的微观结构以及光学和电学性能的影响。采用高纯度In2O3：MoO3陶瓷靶和O2作为源材料。随着MoO3掺杂剂含量的增加,IMO薄膜电阻率先降低而后增加,光学性能呈现薄膜透过率下降的趋势。在1.0 wt.%MoO3掺杂剂含量时,获得最佳薄膜...     

纳米Al夹层Ga_2O_3深紫外透明导电膜的研究

用磁控溅射法在室温条件下制备了Al膜、Ga2O3膜及Ga2O3/Al/Ga2O3三层膜,对其光学和电学性能进行了表征。单层Al膜厚度大于7nm时,光学透射率在近紫外光区域大于可见光区域;Ga2O3膜在深紫外光区域(<300nm)透明,光学带隙4.96eV;Ga2O3/Al/Ga2O3三层膜透射率截止波长在245nm左右,随着顶层Ga2O3厚度增加,电导率减小,紫外光透射率峰位、吸收边、截止波长红移,透射率峰值先稍微增加,然后逐渐降低。顶层Ga2O3厚度为34nm时,Ga2O3/Al/Ga2O3三层膜在275nm处的透射率达70%,电导率为3346S.cm–1。     

热退火γ-Al2O3/Si异质结构薄膜质量改进

采用高真空MOCVD外延技术,利用TMA(Al(CH3)3)和O2作为反应源,在Si(100)衬底上外延生长γ-Al2O3绝缘膜形成γ-Al2O3/Si异质结构材料.同时,引入外延后退火工艺以便改善γ-Al2O3薄膜的晶体质量及电学性能.测试结果表明,通过在O2常压下的退火工艺可以有效地消除γ-Al2O3外延层的残余热应力及孪晶缺陷,改善外延层的晶体质量,同时可以提高MOS电容的抗击穿能力,降低漏电电流.     

热退火γ-Al2O3/Si异质结构薄膜质量改进

采用高真空MOCVD外延技术,利用TMA(Al(CH3)3)和O2作为反应源,在Si(100)衬底上外延生长γ-Al2O3绝缘膜形成γ-Al2O3/Si异质结构材料.同时,引入外延后退火工艺以便改善γ-Al2O3薄膜的晶体质量及电学性能.测试结果表明,通过在O2常压下的退火工艺可以有效地消除γ-Al2O3外延层的残余热应力及孪晶缺陷,改善外延层的晶体质量,同时可以提高MOS电容的抗击穿能力,降低漏电电流.     

采用钼-锰法的氧化铝瓷与金属的封接

所谓“钼锰法”就是采用金属化、镀镍随后用焊料焊接以形成陶瓷金属密封封接的许多方法中的一种。用这种方法将高氧化铝(94%Al_2O_3)瓷圆片和可伐件封接在一起。测量了封接层的抗张强度并用光学显微镜和扫描电子显微镜以及电子探针微分析仪来检查和分析了封接层.其结果如下: (1)当陶瓷在1450℃保温60分钟的条件下金属化时,封接层的抗张强度最大。 (2)封接层是由许多层构成的,这些层按下列次序排列: 陶瓷-中间层-金属化层一镀镍层-硬焊料层一镀镍层-可伐。中间层是由Al_2O·MnO和MgO以及少量的SiO_2和CaO-起组成的。层中的主要结晶相是MnO·A_2O_3。中间层的厚度与其相邻的金属化层的厚度成比例。 (3)铝-锰金属化层中的气孔被玻璃相和镍填充,前者来自陶瓷,后者来自镀镍层。这些物质的渗入和相互扩散形成牢固的真空密封层.     

利用激光沉积研究镧钼阴极表面发射机制

为了研究镧钼阴极表面发射机制,采用专为研究阴极设计的与俄歇能谱仪相连的脉冲激光沉积装置制备薄膜阴极.通过测量阴极发射性能和原位分析表面成分(原子数分数),研究了阴极表面元素镧La和氧O变化对阴极发射性能的影响.实验发现随着阴极表面镧膜变薄,阴极发射性能逐渐减弱;阴极发射性能与表面元素La,O 的含量有关,表面层中La/O越高,阴极的发射性能越好.结果表明,传统的单原子层理论无法解释镧钼阴极的发射机制;超额镧在镧钼阴极的发射中起到了关键作用.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers

A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.     

Diode-end-pumped Nd:YVO4/LBO lasers with 4.2W continuous-wave output at 457 nm

A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working.     

Call for Papers

正Wireless Body-area Networks The last decade has witnessed the convergence of three giant worlds:electronics,computer science and telecommunications.The next decade should follow this convergence in most of our activities with the generalization of sensor networks.In particular with the progress in medicine,people live longer and the aging of population will push the development of wireless personal networks     

Call for Papers—Feature Topic,Vol.12,No.7,2015

正Information Centric Networking Information-Centric Networking(ICN) is an emerging direction in Future Internet architecture research,gaining significant tractions among academia and industry.Aiming to replace the conventional host-to-host communication model by a data-centric model,ICN treats data content as the first