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1.
单晶Tm2O3高k栅介质漏电流输运机制研究   总被引:1,自引:0,他引:1  
利用分子束外延技术在p型Si(001)衬底上外延生长了单晶Tm2O3高k栅介质薄膜,分别在不同温度下测量了薄膜的电流-电压特性。基于变温电流-电压特性数据的漏电流输运机制分析表明,单晶Tm2O3栅介质薄膜在正偏压下的主要漏电流输运机制为肖特基发射,而在负偏压下的主要漏电流输运机制为Frenkel-Poole发射。  相似文献   

2.
采用反应脉冲激光沉积方法(PLD)分别在n-Si(100)和Pt/Ti/SiO2/Si(111)衬底上生长了Ni-Al-O栅介质薄膜,将样品在不同温度下进行快速退火处理.通过XRD和AFM对其结构和表面形貌进行了表征,利用LCR表和Keithley表对其介电性能和漏电流进行了研究.结果表明,样品经过750℃退火后仍然保持非晶状态,且样品的表面平整,均方根粗糙度小于0.5 nm.在1 MHz测试频率下,由Pt/Ni-Al-O/Pt电容器测得的介电常数为9.9.MOS电容器的电学测试显示,700℃以上退火的样品有较高的电容值,较低的漏电流密度.研究表明,Ni-Al-O薄膜是一种有潜力的新型高k栅介质材料.  相似文献   

3.
利用射频(RF)溅射在Pt/Ti/SiO2/Si衬底上沉积(Ba0.65Sr0.35)TiO3(BST)薄膜,制成Pt/BST/Pt平板电容,研究在正反偏压下BST薄膜漏电流的J-V和J-T特性.反偏压时,上电极Pt和BST薄膜形成肖特基接触,漏电流遵循肖特基发射机制.正偏压时,BST薄膜和下电极Pt界面存在大量的界面态,使得漏电流遵循空间电荷限制电流(SCLC)机制,漏电流密度随偏压的增加而急剧增加,随测试温度的增加而减小产生了PTCR效应.利用深陷阱空间电荷限制电流模型,解释了BST薄膜的PTCR效应受εr(T)和V(Tc/T) 1的共同作用,其中εr(T)的作用占优.  相似文献   

4.
采用溶胶-凝胶法在Pt/Ti/SiO_2/Si(111)衬底上制备了Bi_(0.975)La_(0.025)Fe_(0.975)Ni_(0.025)O_3(BLFNO)铁电薄膜。利用X射线衍射(XRD)、原子力显微镜(AFM)及其压电模式(PFM)对薄膜的晶体结构、表面形貌以及铁电畴结构进行了研究。研究发现,BLFNO为结晶良好的钙钛矿结构多晶薄膜,且薄膜表面颗粒生长均匀。PFM测试图显示铁电薄膜在自发极化下的铁电畴结构清晰,铁电电容器具有良好的铁电性能。应用铁电测试仪对Pt/BLFNO/Pt电容器进行测量,得到了饱和性良好的电滞回线。在828kV/cm的外加电场下,Pt/BLFNO/Pt电容器的剩余极化强度为74.3μC/cm~2,表明La、Ni的共掺杂没有明显抑制铁电电容器的剩余极化强度,铁电电容器具有良好的铁电性能。漏电流研究结果表明,La、Ni元素的共掺杂有效降低了薄膜的漏电流密度,在277.8kV/cm外加电场下漏电流密度在10-4 A/cm2量级,明显小于纯BFO薄膜的漏电流密度。正半支漏电流曲线满足SCLC导电机制,对于负半支曲线,当电场强度大于22.2kV/cm时,同样遵循SCLC导电机制;但是,当电场强度小于22.2kV/cm时,曲线斜率约为4.8,表明参与导电贡献的电子数较多,归因于极浅陷阱俘获的电子在外加电场作用下参与了导电行为。室温下磁滞回线测试结果表明BLFNO薄膜具有反铁磁性质。  相似文献   

5.
利用溶胶-凝胶法在LaNiO3/SiO2/Si衬底上分别制备出0.7BiFeO3-0.3PbTiO3(BFPT7030),PbTiO3(PT)-BFPT7030(BFPT7030-1、BFPT7030-2)薄膜。通过对薄膜进行XRD、AFM测试可知,薄膜均完全结晶,并呈现高度(100)择优取向,3种薄膜的表面平整,均方根粗糙度较小。通过介电性能、铁电性能及漏电流测试结果可知,增加有PT缓冲层的BFPT7030薄膜的介电性能、铁电性能有所改善,漏电流较小。其中BFPT7030-2薄膜的剩余极化最大,达到38μC/cm2。  相似文献   

6.
采用脉冲激光沉积法(PLD),在掺铌的钛酸锶单晶基片(Nb∶SrTiO3,NSTO)上外延生长了15nm厚度的BTO薄膜。并采用X射线衍射(XRD)、原子力显微镜(AFM)、高分辨透射电子显微镜(HRTEM)等技术,分别测试了BTO薄膜的晶相结构和微观形貌与结构,证实了薄膜的外延生长特征。以磁控溅射法制备金属铂(Pt)上电极,在室温下测试了BTO薄膜的电流-电压(I-V)曲线。通过拟合I-V曲线,结果表明:在正向电压下,薄膜的漏电流符合空间电荷受限电流机制(SCLC);在反向电压下,漏电流先为普尔-弗伦克尔发射机制(Poole-Frenkel emission),随着反向电压的升高,转变为福勒-诺德海姆隧穿机制(Fowler-Nordheim tunneling)。分析指出,在Pt/BTO界面存在一个可变的肖特基势垒,该势垒受到BTO薄膜内部迁移的氧空位影响,从而决定了上述漏电流机制。  相似文献   

7.
利用氧离子辅助电子束蒸发沉积Ta2O5薄膜,在dd定氧离子能量的条件下研究了氧离子束流密度对Ta2O5薄膜的微观结构、化学计量比和漏电流密度的影响.利用原子力显微镜和X射线衍射仪对Ta2O5薄膜微观结构进行表征研究,发现随着离子束流密度增大,沉积的Ta2O5薄膜致密性提高,粗糙度下降,但薄膜一直保持非晶态;同时能谱仪测试的结果表明,薄膜中O/Ta比例逐渐提高,直至呈现富氧状态.测量了不同薄膜样品的漏电流密度和击穿场强,发现随着离子束流密度增大,薄膜漏电流密度显著降低,击穿场强提高.总之,提高氧离子束流密度能够明显改善Ta2O5薄膜的微观结构和电学性能.  相似文献   

8.
作为微电子器件中最具发展前景的高介电薄膜材料,HfO2薄膜得到了学者们的广泛研究。低漏电流是HfO2薄膜使器件获得优良性能的前提,但易受晶粒尺寸、氧空位和粗糙度等因素影响。针对反应磁控溅射所得薄膜表面粗糙度高及漏电流密度大等缺点,本文在溅射过程中通过在衬底施加偏压的方法降低了HfO2薄膜的漏电流密度。结果表明:通过在衬底施加适当的偏压使得Y掺杂HfO2(Y∶HfO2)薄膜的漏电流密度降低到8×10-8 A/cm2。漏电流密度的变化与薄膜粗糙度和晶粒尺寸有关,而薄膜粗糙度和晶粒尺寸主要受衬底偏压的影响,但衬底偏压对薄膜物相的影响可以忽略。通过施加衬底偏压,利用反应磁控溅射方法制备了低漏电流和高k值Y∶HfO2薄膜,可为高性能器件的制备提供基础。  相似文献   

9.
用溶胶一凝胶方法在LaNiO3底电极上制备了BiFeO3/PbTiO3多层薄膜.研究了室温下薄膜的结构,铁电性质和漏电流性质,并将其与纯的BiFeO3薄膜的性质进行了比较.从薄膜的XRD模式中可以观察到共存的BiFe3O相和PbTiO3相.通过电滞回线测量发现,在较低的测试电场下,BiFeO3/PbqTiO3多层薄膜表现出反铁电性;而在较强的测试电场下表现出铁电性.相对于纯的BiFeO3薄膜,BiFeO3/PbTiO3多层薄膜能够承受更高的测试电场而获得充分极化,从而表现出较强的铁电性.漏电流特性测试表明,相对于纯的BiFeO3薄膜,BiFeO3/PbTiO3多层薄膜具有更低的漏电流.  相似文献   

10.
王乐  张亚军  祖帅  钟传杰 《功能材料》2012,(7):820-822,827
介电常数分别为2.6的聚甲基丙烯酸甲酯(PMMA)及介电常数为16的偏氟乙烯-三氟乙烯共聚物(P(VDF-TrFE))两种不同的有机绝缘材料,通过溶液旋涂的方法在P型硅衬底上制备了不同结构的复合栅介质膜并测试了它们的高频C-V特性及漏电特性。实验结果表明Si-PMMA-P(VDF-TrFE)-Ag结构绝缘膜上单位面积电容达到了35nF/cm2,40V电压下漏电流随着扫描次数的增加逐渐由7.29×10-7 A/cm2降低至3.44×10-7 A/cm2。而Si-P(VDF-TrFE)-PM-MA-Ag结构栅介质膜测得的单位面积电容仅为15nF/cm2,在相同电压下的单位面积漏电流为1.93×10-8 A/cm2。在此基础上分析了电子陷阱以及电场强度对双层栅绝缘膜C-V、I-V特性的影响。  相似文献   

11.
In this paper, we present a new method for inserting several triangulated surfaces into an existing tetrahedral mesh generated by the meccano method. The result is a conformal mesh where each inserted surface is approximated by a set of faces of the final tetrahedral mesh. First, the tetrahedral mesh is refined around the inserted surfaces to capture their geometric features. Second, each immersed surface is approximated by a set of faces from the tetrahedral mesh. Third, following a novel approach, the nodes of the approximated surfaces are mapped to the corresponding immersed surface. Fourth, we untangle and smooth the mesh by optimizing a regularized shape distortion measure for tetrahedral elements in which we move all the nodes of the mesh, restricting the movement of the edge and surface nodes along the corresponding entity they belong to. The refining process allows approximating the immersed surface for any initial meccano tetrahedral mesh. Moreover, the proposed projection method avoids computational expensive geometric projections. Finally, the applied simultaneous untangling and smoothing process delivers a high‐quality mesh and ensures that the immersed surfaces are interpolated. Several examples are presented to assess the properties of the proposed method.  相似文献   

12.
Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.……  相似文献   

13.
14.
We associate a variety of innovations with the term "Industry 4.0". The pioneer of many 4.0 modifications forms the basisfor the trend towards the integrated di...  相似文献   

15.
A flow calorimeter for enthalpy increment measurements on condensed gases is presented. A better knowledge of the properties of the liquefied natural gas is needed, and therefore a liquid loop has been designed for our flow calorimeter. The fluid loop in the calorimeter is designed in order to avoid the two-phase region, since two phases would give compositional disturbances in the measurements. The avoidance of the two-phase region is made possible by increasing the pressure of the test fluid after the measurement section, then heating the fluid at super-critical pressure past the critical point. Finally, the fluid is throttled to the low-pressure gas state at the inlet condition of the compressor that circulates the fluid. To perform the pressure increase, a new cryogenic pump has been designed. To evaluate the new equipment, measurements were taken on liquid ethane over the temperature range 146–256 K at pressure between 0.9 and 5.1 MPa.  相似文献   

16.
On November 30, 2007, the China Association for Standardization (CAS) held a press conference at Beijing Diaoyutai State Guest House. Leaders from the China Household Electric Appliance Research Institute, the China Household Electric Appliance Association, and the China Consumers' Association attended and made speeches.……  相似文献   

17.
ABSTRACT

The production of ferrous metal increased during the Roman Late Republican period, Principate and Empire. The direct bloomery process was used to extract the metal from its ores using slag-tapping and slag-pit furnaces. The fuel was charcoal and an air blast was introduced by bellows-operated tuyères. Iron formed as a bloom, often as a spongy mass of metal, which contained impurities from the smelting process, including unreacted ore, fuel, slag and fragments from the furnace walls, while the metal was often inhomogeneous with varied carbon contents. Blooms were either smithed directly into bars or ingots or they were broken up, which also allowed the removal of gross impurities and a selection of pieces with similar properties to be made. These could then be forge-welded together and formed into characteristically shaped ingots. Making steel in the furnace seems to have been achieved: it depended on the ore and the furnace and conditions within it. Surface carburization was also carried out. Iron and steel were used extensively in construction and for tools and weapons. Fire welding was often used to add pieces of steel to make the edges of tools and weapons, which could be heat-treated by quenching to harden them.  相似文献   

18.
Zusammenfassung Bei der Gestaltung von Ernteprozessen — beispielsweise des Prozesses Mähdrusch, Körnertransport und -abnahme — als transportverbundene Fließarbeitsverfahren mit mindestens zwei verschiedenen Arbeitsmitteln gibt es einen großen Optimierungsspielraum. Solche Prozesse sind mehrstufige Bedienungsprozesse mit gemischter Anordnung der Bedienungseinrichtungen. Außerdem besitzen sie stark ausgeprägte räumliche Aspekte. Es wird vor allem gezeigt, welche Merkmale solcher Prozesse in Simulationsmodellen abgebildet sein müssen, welche Zielgrößen in Abhängigkeit von welchen Einflußgrößen unter Berücksichtigung welcher Prozeßbedingungen ermittelt werden sollten und wie der Bewertungsprozeß zur Ermittlung der gewünschten Informationen gestaltet werden muß.  相似文献   

19.
In the present study a high‐boron high speed steel (HSS) roll material was designed. Many expensive alloy elements have been substituted by cheap boron alloy, and high‐boron high speed steel roll has been manufactured by centrifugal casting method. The microstructures, mechanical properties and wear resistance of centrifugal casting high‐boron high speed steel roll have been investigated by optical microscopy (OM), scanning electron microscopy (SEM), and X‐ray diffraction (XRD) analysis, hardness test, impact test and wear test. The results indicated that the solidification microstructures of high‐boron high speed steel roll consisted of M2(B,C), (W,Mo)2(B,C), M3(B,C), M23(B,C)6 type borocarbides and martensite, a small amount of retained austenite. Borocarbides were continuously distributed over the grain boundary. After quenching from 1050 °C, local broken network appeared in partial borocarbides, and fine secondary borocarbide precipitated from the matrix. After tempering from 525 °C, the amount of precipitated borocarbide increased significantly. After heat treatment, the hardness of high‐boron high speed steel roll excelled 60 HRC, and its impact toughness excelled 8.0 J/cm2. The single groove steel rolling amount of high‐boron high speed steel rolls increases by 500% than that of bainite cast iron roll, when the rolls are used in K1 mill housing of bar mill.  相似文献   

20.
The definition of the thixotropy is a decrease in viscosity with time in shear and a subsequent recovery of viscosity after the shear deformation is removed.We ...  相似文献   

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