High-temperature, low threshold current, and uniform operation1×12 monolithic AlGaInAs/InP strain-compensated multiple quantumwell laser array in 1.5 μm

In this paper, we describe the fabrication of a monolithically integrated 1×12 array of 1.5-μm AlGaInAs/InP strain-compensated multiple-quantum-well (MQW) lasers, which has high reliability and highly uniform characteristics in low threshold current, slope efficiency, and lasing wavelength. Besides, each diode on the array exhibits a high characteristic temperature of 88 K and a low slope-efficiency drop of less than 1 dB between 20-80°C and a lasing wavelength of 1510 nm at 20°C and 20 mA. Also, the diode on the array has a maximum resonance frequency of above 8 GHz or 3-dB modulation bandwidth of 12 GHz     

Fabrication and Characteristics of high-speed oxide-confined VCSELs using InGaAsP-InGaP strain-compensated MQWs

This paper presents the fabrication and characteristics of high-performance 850-nm InGaAsP-InGaP strain-compensated multiple-quantum-well (MQW) vertical-cavity surface-emitting lasers (VCSELs). The InGaAsP-InGaP MQW's composition was optimized through theoretical calculations, and the growth condition was optimized using photoluminescence. These VCSELs exhibit superior performance with characteristics threshold currents /spl sim/0.4 mA and slope efficiencies /spl sim/0.6 mW/mA. The threshold current change with temperature is less than 0.2 mA, and the slope efficiency drops less than /spl sim/30% when the substrate temperature is raised from room temperature to 85/spl deg/C. A high modulation bandwidth of 14.5 GHz and a modulation current efficiency factor of 11.6 GHz/(mA)/sup 1/2/ are demonstrated. The authors have accumulated life test data up to 1000 h at 70/spl deg/C/8 mA.     

High performance 0.35 μm gate-length monolithicenhancement/depletion-mode metamorphicIn0.52Al0.48As/In0.53Ga0.47As HEMTs on GaAs substrates

Monolithic integration of enhancement (E)- and depletion (D)-mode metamorphic In_0.52Al_0.48As/In_0.53Ga_0.47 As/GaAs HEMTs with 0.35 μm gate-length is presented for the first time. Epilayers are grown on 3-inch SI GaAs substrates using molecular beam epitaxy. A mobility of 9550 cm²/V-s and a sheet density of 1.12×10^{12 -2} are achieved at room temperature. Buried Pt-gate was employed for E-mode devices to achieve a positive shift in the threshold voltage. Excellent characteristics are achieved with threshold voltage, maximum drain current, and extrinsic transconductance of 100 mV, 370 mA/mm and 660 mS/mm, respectively for E-mode devices, and -550 mV, 390 mA/mm and 510 mS/mm, respectively for D-mode devices. The unity current gain cutoff frequencies of 75 GHz for E-mode and 80 GHz for D-mode are reported     

High-speed InGaAsP/InP multiple-quantum-well laser

The authors describe practical high-speed InGaAsP/InP lasers based on compressively strained quantum wells. Buried heterostructure lasers with threshold currents of 10 mA and slope efficiencies of 0.23 mW/mA are used. A modulation bandwidth of 20 GHz is obtained at a low drive current of 90 mA. A K factor of 0.25 ns is obtained and the intrinsic bandwidth of these lasers is estimated at 35 GHz     

Highly uniform operation of high-performance 1.3-μm AlGaInAs-InPmonolithic laser arrays

We describe the fabrication of monolithically integrated 1×12 arrays of 1.3-μm strain-compensated multiquantum-well AlGaInAs-InP ridge lasers. The laser array shows highly uniform characteristics in threshold current, slope efficiency, and lasing wavelength with a standard deviation of 0.08 and 0.27 mA, 0.012 and 0.007 W/A, and 0.59 and 0.57 nm, respectively, at 20°C and 100°C. Besides, each laser on the array exhibits a low threshold current of 8 mA at 20°C and 21 mA at 100°C, a characteristic temperature of 92 K, and a slope efficiency drop of 0.7 db between 20°C and 80°C. A low thermal crosstalk of less than -4 dB can be obtained from one diode as the injected current of other elements is increased to 70 mA. Also, each laser on the array has a negligible degradation after a 24-hr burn-in test at 80 mA and 100°C. An expected lifetime of more than 20 years is estimated for the lasers when operating at 10 mW and 85°C. The lasers have a small-signal modulation bandwidth of about 9 GHz at 25°C and a low relative intensity noise of -155 dB/Hz without an isolator at 2.5 GHz. It can transmit a 2.5-GHz signal to 50 km through standard single-mode fiber and to 308 m through multimode fiber, with a clear eye opening in OC-48 data-rate tests     

High-Reliable and High-Speed 1.3 μm Complex-Coupled Distributed Feedback Buried-Heterostructure Laser Diodes With Fe-Doped InGaAsP/InP Hybrid Grating Layers Grown by MOCVD

In this paper, we report the fabrication of high-reliability and high-speed 1.3 mum complex-coupled distributed feedback (CC-DFB) buried heterostructure (BH) laser diodes (LDs) with Fe-doped InGaAsP/InP hybrid grating layers. High optical coupling coefficient and eminent current confining ability are accomplished by combining the Fe-doped InGaAsP/InP current-blocking-grating (CBG) layers to provide both the distributed-feedback index-and gain-coupling coefficients. Besides, the narrow-stripe BH LDs are implemented by burying the active region with a Fe-doped InP current-blocking layer during the epitaxial regrowth. The fabricated CBG CC-DFB BH LDs at 20degC shows a low threshold current of 5.3 mA, a maximum light output power of 36 mW at 100 mA, a high slope efficiency of 0.41 mW/mA, and a side-mode suppression ratio (SMSR) of 42 dB at twice the threshold. In addition, these LDs exhibit a maximum operation temperature of 125degC, an extremely low threshold current of 15.8 mA at 90degC, a small variation in slope efficient of only -1 dB in the temperature range from 20degC to 80degC, and a characteristic temperature of 77 K and 56 K between 20 degC and 60degC, and 70degC and 120degC, respectively. Furthermore, these 1.3 mum CBG CC-DFB BH LDs exhibit a high-speed characteristic up to 11.8 GHz at room temperature and an estimated median lifetime of more than 1.1 times 10⁵ h or 12.5 years at 5 mW and 85degC.     

Improved CW operation of quantum cascade lasers with epitaxial-sideheat-sinking

First results on the epilayer-side mounting of quantum cascade (QC) lasers are presented. Operated in continuous-wave (CW) mode, these lasers are superior to substrate-bonded devices. The maximum CW temperature is raised by 20 K (up to 175 K), and, at comparable heat sink temperatures, the performance with respect to threshold current, output power, and slope efficiency is greatly improved for the epilayer-side mounted devices. QC-laser-specific mounting procedures are discussed in this letter, such as the high reflectivity coating of the back-facet and the front-facet cleaving after mounting. Modeling of the temperature distribution inside the QC laser shows a strong temperature gradient within the active waveguide core, which partly explains the still low maximum CW operating temperatures     

Cryogenic performance of double-fused 1.5-μm vertical cavitylasers

The low-temperature performance of vertical cavity lasers (VCL's) is of interest for high-speed data transmission from superconducting and cryogenic semiconductor circuits. Our double-fused 1.5 μm lasers employ a strain-compensated InGaAsP-InP multiquantum-well (MQW) active region that is sandwiched between two AlGaAs-GaAs distributed Bragg reflectors. Continuous wave (CW) lasing at ambient temperature as low as 7 K is measured on the same type of top-emitting devices that previously lased at a record-high temperature of 337 K. The optimum temperature is found at 180 K giving minimum threshold current, maximum modulation bandwidth of 5 GHz, and more than 3 GHz/mA^1/2 modulation current efficiency. The optimum temperature agrees very well with the theoretical prediction. Further device optimization for cryogenic high-speed applications is discussed in detail     

Ga0.51In0.49P/GaAs HEMT's exhibiting goodelectrical performance at cryogenic temperatures

The DC and microwave characteristics of Ga_0.51In_0.49P/GaAs HEMTs grown by metalorganic chemical vapor deposition (MOCVD) are presented. Devices with 1-μm-long gates show transconductances of 163 and 213 mS/mm at 300 and 77 K, respectively. Their maximum cutoff frequency is 17.8 GHz. Deep traps in the doped layer are evaluated at low temperature by the threshold voltage shift and current collapse phenomena. GaInP/GaAs HEMTs show no current collapse and have almost zero threshold voltage shift compared to AlGaAs/GaAs and InAlAs/InGaAs where the corresponding values are 0.5 and 0.25 V, respectively     

InP-based enhancement-mode pseudomorphic HEMT with strainedIn0.45Al0.55As barrier andIn0.75Ga0.25As channel layers

Using strained aluminum-rich In_0.45Al_0.55As as Schottky contact materials to enhance the barrier height and indium-rich In_0.75Ga_0.25As as channel material to enhance the channel performance, we have developed InP-based enhancement-mode pseudomorphic InAlAs/InGaAs high electron mobility transistors (E-PHEMT's) with threshold voltage of about 170 mv. A maximum extrinsic transconductance of 675 mS/mm and output conductance of 15 mS/mm are measured respectively at room temperature for 1 μm-gate-length devices, with an associated maximum drain current density of 420 mA/mm at gate voltage of 0.9 V. The devices also show excellent rf performance with cutoff frequency of 55 GHz and maximum oscillation frequency of 62 GHz. To the best of the authors' knowledge, this is the first time that InP-based E-PHEMT's with strained InAlAs barrier layer have been demonstrated     

Gigabit-per-second cryogenic optical link using optimizedlow-temperature AlGaAs-GaAs vertical-cavity surface-emitting lasers

We describe the design of GaAs-AlGaAs vertical-cavity surface-emitting lasers (VCSELs) that are optimized for operation at very low temperatures and the experimental demonstration of a free-space optical interconnect for cryogenic electronic systems using a VCSEL. We demonstrate high-speed modulation of the optical link at a data rate of up to 2 Gb/s at 77 K, with a very low bit-error rate of <10^-13 , and thermally stable operation is achieved over a wide range of cryogenic temperatures without laser bias current compensation. Cryogenic VCSELs with excellent lasing characteristics have been achieved over the entire temperature range from 150 K to 6 K, including high output power (22 mW), high power-conversion efficiency (32%), high slope efficiency (~100%), low threshold voltage (1.75 V) and current (1.7 mA), as well as a high-modulation bandwidth (12 GHz) for a 16 μm diameter device at 80 K     

High-speed modulation of strain-compensated InGaAs-GaAsP-InGaP multiple-quantum-well lasers

Small signal direct modulation characteristics of InGaAs-GaAsP-InGaP multiple quantum well ridge waveguide lasers (4.5/spl times/220 /spl mu/m/sup 2/) are described. The compressive strain of four InGaAs quantum wells is compensated by the tensile strain of GaAsP barriers. The lasers have a threshold current of 8 mA and an internal differential quantum efficiency of 80%. A 3-dB bandwidth of 25 GHz is obtained at 54 mA. It is found that the strain-compensated lasers have a K factor as low as 0.15 ns, implying a maximum 3-dB bandwidth of 59 GHz.     

In(Ga)As/GaAs self-organized quantum dot lasers: DC andsmall-signal modulation properties

Self-organized growth of InGaAs/GaAs strained epitaxial layers gives rise to an ordered array of islands via the Stranski-Krastanow growth mode, for misfits >1.8%. These islands are pyramidal in shape with a base diagonal of ~20 nm and height of ~6-7 nm, depending of growth parameters. They therefore exhibit electronic properties of zero-dimensional systems, or quantum dots. One or more layers of such quantum dots can be stacked and vertically coupled to form the gain region of lasers. We have investigated the properties of such single-layer quantum dot (SLQD) and multilayer quantum dot (MLQD) lasers with a variety of measurements, including some at cryogenic temperatures. The experiments have been complemented with theoretical calculations of the electronic properties and carrier scattering phenomena in the dots. Our objective has been to elucidate the intrinsic behavior of these devices. The lasers exhibit temperature independent threshold currents up to 85 K, with T₀⩽670 K. Typical threshold currents of 200-μm long room temperature lasers vary from 6 to 20 mA. The small-signal modulation bandwidths of ridge waveguide lasers are 5-7.5 GHz at 300 K and increased to >20 GHz at 80 K. These bandwidths agree well with electron capture times of ~30 ps determined from high-frequency laser impedance measurements at 300 K and relaxation times of ~8 ps measured at 18 K by differential transmission pump-probe experiments. From the calculated results we believe that electron-hole scattering intrinsically limits the high-speed performance of these devices, in spite of differential gains as high as ~7×10^-14 cm² at room temperature     

High-speed Modulation of InGaAs: Sb-GaAs-GaAsP quantum-well vertical-cavity surface-emitting lasers with 1.27-/spl mu/m emission wavelength

1.27-/spl mu/m InGaAs: Sb-GaAs-GaAsP vertical-cavity surface-emitting lasers (VCSELs) were grown by metal-organic chemical vapor deposition and exhibited excellent performance and temperature stability. The threshold current changes from 1.8 to 1.1 mA and the slope efficiency falls less than /spl sim/35% as the temperature raised from room temperature to 70/spl deg/C. With a bias current of only 5 mA, the 3-dB modulation frequency response was measured to be 8.36 GHz, which is appropriate for 10-Gb/s operation. The maximal bandwidth is measured to be 10.7 GHz with modulation current efficiency factor (MCEF) of /spl sim/5.25 GHz/(mA)/sup 1/2/. These VCSELs also demonstrate high-speed modulation up to 10 Gb/s from 25/spl deg/C to 70/spl deg/C.     

High-frequency modulation characteristics of 1.3-/spl mu/m InGaAs quantum dot lasers

In this letter, we report results of small-signal modulation characteristics of self-assembled 1.3-/spl mu/m InGaAs-GaAs quantum dot (QD) lasers at room temperature. The narrow ridge-waveguide lasers were fabricated with multistack InGaAs self-assembled QDs in active region. A high characteristic temperature of T/sub o/=210 K with threshold current density of 200A/cm/sup 2/ was obtained. Small-signal modulation bandwidth of f/sub -3 dB/=12 GHz was measured at 300 K with differential gain of dg/dn/spl cong/2.4/spl times/10/sup -14/ cm/sup 2/ from detailed characteristics. We observed that a limitation of modulation bandwidth in high current injection appeared with gain saturation. This property can direct future high-speed QD laser design.     

Characteristics of GaAs/AlGaAs-doped channel MISFET's at cryogenictemperatures

High-frequency measurements at cryogenic temperatures to 125 K of 0.3-μm gate length GaAs-Al_0.3Ga_0.7As metal-insulator-semiconductor field-effect transistors (MISFETs) with a doped channel are discussed. Experimental results demonstrate significant improvement in performance including an increase in the maximum frequency of oscillation from 70 to 81 GHz and an increase in the unity current gain cutoff frequency from 46 to 57 GHz. Independently determined decreases in electron mobility and increases in electron velocity under similar conditions lead to the conclusion that carrier velocity and not mobility controls transport in these devices. These results show the high-speed potential of doped channel MISFETs at both room temperature and cryogenic temperatures     

DC and Dynamic Characteristics of P-Doped and Tunnel Injection 1.65-μm InAs Quantum-Dash Lasers Grown on InP (001)

We have studied the characteristics of 1.65-mum InAs self-organized quantum-dash lasers grown on InP (001) substrates, wherein special techniques of p-doping of quantum dashes and tunnel injection are incorporated for the first time. We measured a very large T₀ (196 K) in p-doped quantum-dash lasers, accompanied by an increase in threshold current density (J_th~1600 A/cm² ), compared to the undoped quantum-dash lasers (T₀=76 K and J_th~950 A/cm²). The p-doped lasers exhibit a maximum 3-dB bandwidth of 8 GHz, chirp ~1.0 Aring, and alpha-parameter ~1.0 (measured at subthreshold bias conditions) at a temperature of 278 K. Similar undoped quantum-dash lasers exhibit a 3-dB bandwidth of 6 GHz. A self-consistent model, that includes Auger recombination in quantum dashes, is developed to calculate the threshold current at various temperatures. A comparison of the calculated threshold current and T₀ with measured values reveals that Auger recombination in quantum dashes plays a major role in determining the values of threshold current and T₀ in both undoped and p-doped quantum-dash lasers. While p-doping increases the gain and differential gain, the presence of wetting layer states, the relatively large inhomogeneous broadening of quantum dashes, and the substantially increased Auger recombination upon p-doping severely limit the potential benefits. Superior characteristics, including large modulation bandwidth (f_{-3 dB}~12 GHz), near-zero alpha-parameter, and very low chirp (~0.3 Aring), are achieved when the technique of tunnel injection is also utilized     

Flip-chip bonded 0.85-/spl mu/m bottom-emitting vertical-cavity laser array on an AlGaAs substrate

We report high-performance 0.85-/spl mu/m bottom-emitting vertical-cavity surface-emitting lasers (VCSELs) on an AlGaAs substrate with 2.1 mA threshold current density 4.2 mW maximum output power, 11.7% power conversion efficiency and a maximum operating temperature of 130/spl deg/C. We also demonstrate a flip-chip bonded 0.85-/spl mu/m bottom-emitting VCSEL array, and confirm all pixels across the 8/spl times/8 VCSEL array operate at a f/sub 3/ dB bandwidth of 2.6 GHz at only 4.2 mA.     

A simple analytical model for the electrical characteristics of depletion-mode MOSFET's with application to low-temperature operation

A simple analytical model for depletion-mode MOSFET's is developed based on the gradual channel approximation and taking into account carrier freeze-out onto impurity sites implanted for threshold voltage modification. Theory is found to be in reasonable agreement with experimental results for n-channel depletion-mode MOSFET's at room temperature and at 77 K. It is shown that the common methods used for enhancement-mode devices to determine carrier channel mobility and threshold voltage, respectively, from the slope and voltage intercept of the current-gate voltage characteristics are invalid for depletion-mode devices. By comparison of enhancement and depletion devices on the same chip, it is shown that the processes associated with ion implantation had no effect on electron channel mobility at room temperature and caused at most a 25-percent reduction at 77 K. The model also is applicable to buried p-channel devices as used in CMOS technologies.     

用于10Gbit/s传输的对接集成DFB-LD/EA-MD光源

报道了用于10Gbit/s传输的DFB激光器和EA调制器对接集成器件的设计、制作和器件特性.工作主要集中于两个方面:提高激光器和调制器间的光学耦合;通过减小调制器电容提高调制带宽.集成器件显示出了良好的静态和高频特性:阈值电流典型值为15mA,最小值为8mA;100mA激光器偏置电流下,输出功率大于10mW;对消光比、电学回波损耗和调制带宽进行了测试,3dB带宽的测量值超过10GHz.