勾形磁场下直径300mm CZ Si 熔体中氧浓度分布的数值模拟

采用低雷诺数K-ε紊流模型,考虑自然对流、晶体旋转和坩埚旋转等因素,对晶体直径为300mm,磁场强度变化范围在0～0.12T条件下,熔体硅内流场及氧的浓度分布、磁场分布等作了数值模拟.计算中采用有限体积法,运用SIMPLE(semi-implicit method for pressure linked equations)算法耦合压力和速度场,动量方程、能量方程中对流项的离散采用QUICK(quadratic upwind interpolation of convective kinematics)格式,紊动能和耗散项方程中对流项的离散采用迎风格式.数值模拟结果表明,在勾形磁场作用下,熔体硅内的流场、氧的浓度分布与无磁场作用相比有较大不同,随着磁场强度的增加,生长界面处氧的浓度降低,并且磁场确实能有效地抑制熔体内的紊流,有利于晶体生长.     

Cusp磁场中CZ硅氧浓度分布的数值模拟

利用FEAMG-CZ软件,模拟研究了cusp磁场对称面(定义为0高斯面)与熔体自由表面距离对直拉硅固液界面氧浓度分布的影响。结果表明:随着0高斯面的下移,熔体中的最小氧浓度降低,而固液界面的氧浓度升高,且径向均匀性变差。分析表明,这与熔体自由表面处的Marangoni流有关,抑制该流动有利于熔体中氧的蒸发,从而在自由表面下获得更低氧浓度的熔体,但会阻碍自由表面下方低氧熔体往固液界面的输运。因此,推断当0高斯面位于熔体自由表面下某一位置时,固液界面氧浓度将达到最低。模拟中,该位置位于Hm=0～-0.01m之间。     

在磁场中的Bridgman—Hg1—xCdxTe晶体生长数值模拟研究

结垂直Ｂｒｉｄｇｍａ－Ｈｇ１－ｘＣｄｘＴｅ晶体和平共处和数值模拟方法研究了与晶锭轴同方向的恒定磁场对熔体中温度场，流场，浓度场及ｓ－１界面产生的影响，介绍了边界条件的处理方法。     

利用装置环形永磁场的直拉炉（PMCZ）生长单晶硅和掺锗硅晶体

设计了一种永磁（钕铁硼）环形磁场装置代替常规电磁场用于直拉炉生长单晶硅和掺锗单晶硅（PMCZ法）．磁力线呈水平辐射状均匀分布．只要磁场强度足够强,即可有效地抑制熔体中热对流和晶体旋转产生的离心强迫对流,从而有效地抑制了固液界面处的温度波动,降低以至消除微观生长速率的起伏,造成了一种类似于空间微重力环境下生长晶体的条件．在这种条件下,杂质和掺杂剂的运动方式受扩散规律控制．利用这种装置生长了掺锗（Ge∶Si重量比为1.0%,5.0%和10.0%）和不掺锗的硅晶体,获得了氧浓度较低,掺杂剂径向分布均匀性好的较高质量的晶体．该装置磁场强度可方便地通过调节磁环之间相对位置及磁环相对固液界面位置进行调控,满足不同工艺条件对不同的场强的要求．     

掺锗直拉硅体单晶的生长

为了控制锗在硅中的分凝和分布的均匀性 ,抑制熔体中因重力场引起的无规律热对流和质量对流 ,文中设计制造了一种新型的环型永磁场直拉炉 ( PMCZ法 ) ,生长了掺锗量 0 .1～ 5 .0 % ( Ge∶Si重量比 )、 65 mm和 5 2 mm的硅锗体单晶 ,拉速一般控制在 0 .2～ 0 .5 mm/分。当磁场强度较高时 ,熔体中由于重力场引起的热对流和质量对流在一定程度上被抑制 ,类似于空间微重力环境生长晶体的条件 ,晶体中锗和氧杂质分布均匀性的问题得到了较好地控制。文中利用扫描电子显微镜 ( SEM)能谱分析和二次离子质谱 ( SIMS)等方法观测了PMCZ法生长的掺锗 Si单晶中锗的分布状况。发现用 PMCZ法生长的锗硅晶体比常规 CZ法生长的晶体杂质均匀性要好些。同时发现 ,由于晶体生长速率很低 ,使得掺锗硅中产生了大量的过饱和氧的微沉淀。这些微沉淀经过 1 2 5 0°C热处理后会溶解消失。在晶体尾部 ,由于锗在硅中的分凝系数小于 1 ,使得锗在熔体中高度富集 ,产生了“组份过冷现象”,出现了枝状结晶生长。     

磁场中硅熔体的磁黏度

利用魔环磁场,对硅熔体施加横向可调的磁场.采用回转振荡法,测量了硅熔体在不同温度、不同水平方向磁场下的磁黏度.研究结果表明,引入磁场,使硅熔体的磁黏度增加,且磁黏度与磁场强度呈抛物线关系.     

一种新型洁净室送、回风型式的数值模拟

本文以工程中广泛使用的紊流模型为基础，采用有限差分法，对半圆柱形送风口、相对两侧墙下部回风式洁净进行三维紊流流场和污染物扩散场的数值模拟，分析气流的流动特性和污染物的分布规律，得到了此类洁净室优化设计的技术参数表，为此种新型洁净室的设计及推广提供了依据。     

磁场中硅熔体的磁黏度

利用魔环磁场,对硅熔体施加横向可调的磁场.采用回转振荡法,测量了硅熔体在不同温度、不同水平方向磁场下的磁黏度.研究结果表明,引入磁场,使硅熔体的磁黏度增加,且磁黏度与磁场强度呈抛物线关系.     

利用装置环形永磁场的直拉炉(PMCZ)生长单晶硅和掺锗硅晶体

设计了一种永磁 (钕铁硼 )环形磁场装置代替常规电磁场用于直拉炉生长单晶硅和掺锗单晶硅 (PMCZ法 ) .磁力线呈水平辐射状均匀分布 .只要磁场强度足够强 ,即可有效地抑制熔体中热对流和晶体旋转产生的离心强迫对流 ,从而有效地抑制了固液界面处的温度波动 ,降低以至消除微观生长速率的起伏 ,造成了一种类似于空间微重力环境下生长晶体的条件 .在这种条件下 ,杂质和掺杂剂的运动方式受扩散规律控制 .利用这种装置生长了掺锗 (Ge∶ Si重量比为 1.0 % ,5 .0 %和 10 .0 % )和不掺锗的硅晶体 ,获得了氧浓度较低 ,掺杂剂径向分布均匀性好的较高质量的晶体 .     

在磁场中的Bridgman－Hg_（1－x）Cd_xTe晶体生长数值模拟研究

对垂直Ｂｒｉｄｇｍａｎ－Ｈｇ１－ｘＣｄｘＴｅ晶体生长系统，用数值模拟方法研究了与晶锭轴同方向的恒定磁场对熔体中温度场、流场、浓度场及ｓ－ｌ界面产生的影响，介绍了边界条件的处理方法．结果表明，随着磁场强度的增加，熔体中的热对流强度逐渐减弱，ｓ－ｌ界面逐渐向上移动并趋于平坦．     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.