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1.
常压MOCVD制备MgO薄膜的研究   总被引:1,自引:0,他引:1  
曾建明  王弘 《功能材料》1996,27(4):342-346
本文首次报道用常压金属有机化学气相沉积(AP-MOCVD)在Si(100),SiO2/Si(100)和Pt/Si(100)衬底上外延高质量的MgO薄膜。研究了衬底温度与薄膜的取向性关系和MgO薄膜的潮解特性。高纯magnesiumacetylacetonate[bis(2,4-pentanetane-diono)magnesium][Mg(CH2COCH2COCH3)2]作为金属有机源,扫描电镜(SEM),透射电镜(TEM)和X-RAY衍射实验显示,在较低的衬底温度(~480℃)下一次淀积成单晶膜。薄膜均匀,致密,结晶性和取向性很好,衬底温度(Ts)在400℃到680℃之间,在Si(100)衬底上生长的MgO薄膜都具有[100]取向,在Si(100)、SiO2/Si(100)和Pt/Si(100)衬底上生长的MgO薄膜也都具有[100]取向。  相似文献   

2.
利用含有Ca,La和Fe成分的水溶胶(摩尔比为Ca:La:Fe=0.25:0.75:l),经浸渍──提拉──干燥──焙烧过程分别在玻璃衬底及Al_2O_3基片上制备了薄膜。通过XRD和XPS分析表明玻璃衬底上的薄膜是成分准确的钙钛矿结构的(Ca_0.25La_0.75)FeO_3薄膜,而Al_2O_3基片上的薄膜是成分不确切且呈混合相的薄膜;借助SEM观察了薄膜的表面微结构;测试Al203基片上的薄膜对酒精的气敏效应,发现在较低的工作温度下,薄膜对低浓度的酒精蒸气有高的灵敏度。  相似文献   

3.
IBAD薄膜与基体界面的显微结构   总被引:3,自引:0,他引:3  
采用中能离子束辅助沉积(IBAD)技术,在单晶Al2O3(0001)基片上沉积Mo膜,在GAAs(001)基片上合成Fe16N2薄膜,用HREM等研究了Moeajd-Al2O3(0001),Fe16n2膜-GaAs(001)界面的显微结构,结果表明:Mo膜的晶粒呈细小柱状或纤维状,晶粒平均尺寸约8nm,Fe16N2薄膜为等轴晶,晶粒平均尺寸约为10nm,在Mo膜-Al2O3(0001)界面及Fe1  相似文献   

4.
用溶胶-凝胶法制备了PZT压电薄膜,研制了Au/PZT/PT/TiO2/NiTi/Si(100)多层膜结构,用XRD,AFM,TEM-EDX和SAD技术考察了薄膜的表面形貌,相结构演化,以及面的元素分布特性。结果表明:PZT膜与NiTi合金膜的结合良好,稳定;PT层的引入,使无定型PZT薄膜在550℃退火后,转变为钙钛矿结构,降低了晶化温度,并有效地抑制焦碌石相的形成;NiTi薄膜结晶良好;TiO  相似文献   

5.
研究了用溶胶-凝胶(sol-gel)方法在LaAlO3(100)衬底上制备的La-1xCaxMn1.03O3外延薄膜的磁电阻效应。x在0.2~0.621范围内变化,外延薄膜的电阻率与温度的关系从类半导体行为向金属导电行为转变。在x≥0.5的4个样品中没有发现电荷有序绝缘体(COI)和反铁磁绝缘体(AFI)现象。x=0.2样品在1.5T磁场下磁电阻率MR的最大值为10^4%、磁转变温度为230K。  相似文献   

6.
以用酸钠为原料,乙二醇为溶剂,用溶胶-凝胶法制备MoO3薄膜通过对干凝胶粉做DTA和TG分析,用SEM和XRD分析还胶膜、热处理后氧化物膜及多次重复浸涂热处理薄膜的显微结构和晶相组成,研究了氧化物薄膜的形成过程.重复4次浸涂热处理可得到约2μm厚连续致密的、主晶相为择优取向的斜方MoO3薄膜.  相似文献   

7.
以金属醇盐乙酸钾[K(OC2H5)],乙醇铌[Nb(OC2H5)5]和乙醇钽[Ta(OC2H5)5]为原料,用Sol-Gel法合成了K(Ta,Nb)O3超细粉末和薄膜,研究了工艺参数如前驱体溶液浓度、热处理温度等因素对材料结构及物性的影响.粉料的粒径为20~40nm,所需合成温度约为700℃,比通过传统的固相反应制备同种材料的合成温度低近100℃;以SrTiO3(100)单晶作基片,采用匀胶法获得了沿(100)高取向生长的K(Ta0.65Nb0.35)O3薄膜,薄膜表面均匀、致密,室温时呈立方相晶格结构.研究表明,选择物理性质相似、晶格常数相匹配的材料作基片,适当控制工艺参数,尤其是前驱体溶液的浓度、升降温速度及烧结温度是获得优质薄膜的关键.  相似文献   

8.
BAS玻璃陶瓷的晶化行为与性能   总被引:5,自引:0,他引:5  
用XRD,DTA,SEM,TEM和三点弯曲试验研究了溶胶-凝胶法合成的BAS(BaO.Al2O3.2SiO2)凝胶玻璃的结晶行为,晶型转变和热压BAS的显微结构与性能,结果表明,BAS凝胶玻璃法〉1000℃时开始析晶,1100℃时完全晶化,结晶相为六方钡长石,不加成核剂,呈现整体结晶特性,晶粒小于1μm加入50mg.g^-1单斜钡长石作为晶种,可促进六方→单斜晶型转变,在1250℃处理7h约有80  相似文献   

9.
系统地研究了溶胶-凝胶(Sol-Gel)方法制备(Pb1-xLax)Ti(1-x/4)O3(简称PLT)薄膜时催化剂(或pH值)、溶液浓度在室温下对形成溶胶和凝胶的影响规律,用X射线结构分析和SEM研究了热处理工艺对薄膜结构及晶粒尺寸的影响。实验表明,浓度、醋酸含量都存在一个最佳的范围,且随镧(La)含量的增加,该范围减小;实验还发现,随着La含量的增加,薄膜的晶化温度降低。在单晶(100)Si衬  相似文献   

10.
佳能EF28─105mmf/3.5─4.5USM变焦镜头使用体会蒋宁佳能(Canon)EF28-105mmf/3,5-4.5USM变焦镜头是佳能公司配合35mm自动聚焦单反相机EOSS(在欧美市场上该机型号为眼控聚焦的EOSAZE和非眼控聚焦的EOS...  相似文献   

11.
We report on the microstructure and optical properties of AlxOy–Pt–AlxOy interference-type multilayer films, deposited by electron beam (e-beam) deposition onto corning 1737 glass, silicon (1 1 1) and copper substrates. The structural properties were investigated by Rutherford backscattering spectrometry, X-ray diffraction, scanning electron microscopy, energy dispersive X-ray spectroscopy and atomic force microscopy. The optical properties were extracted from specular reflection/transmission, diffuse reflectance and emissometer measurements. The stratification of the coatings consists of a semi-transparent middle Pt layer sandwiched between two layers of AlxOy. The top and bottom AlxOy layers were non-stoichiometric with no crystalline phases present. The Pt layer is in the fcc crystalline phase with a broad size distribution and spheroidal shape in and between the rims of AlxOy. The surface roughness of the stack was found to be comparable to the inter-particle distance. The optical calculations confirm a high solar absorptance of ∼0.94 and a low thermal emittance of ∼0.06 for the multilayer stack, which is attributed not only to the optimized nature of the multilayer interference stacks, but also to the specific surface morphology and texture of the coatings. These optical characteristics validate the spectral selectivity of the AlxOy–Pt–AlxOy interference-type multilayer stack for use in high temperature solar-thermal applications.  相似文献   

12.
Spectrally selective AlxOy/Pt/AlxOy multilayer absorber coatings were deposited onto corning 1737 glass, Si (111) and copper substrates using electron beam (e-beam) vacuum evaporator at room temperature. The employment of ellipsometric measurements and optical simulation was proposed as an effective method to optimize and deposit multilayer solar absorber coatings. The optical constants (n and k) measured using spectroscopic ellipsometry, showed that both AlxOy layers, which used in the coatings, were dielectric in nature and the Pt layer was semi-transparent. The optimized multilayer coatings exhibited high solar absorptance α ∼ 0.94 ± 0.01 and low thermal emittance ? ∼ 0.06 ± 0.01 at 82 °C. The Rutherford backscattering spectroscopy (RBS) data of AlxOy/Pt/AlxOy multilayer absorber indicated the AlxOy layers present in the coating were nearly stoichiometry. The scanning electron microscope analysis (SEM) result indicated that the average diameter and inter-particles distance of Pt grains were statistically about 146 ± 0.17 nm and 6-10 ± 0.2 nm respectively.  相似文献   

13.
14.
Integration of NiSix based fully silicided metal gates with HfO2 high-k gate dielectrics offers promise for further scaling of complementary metal-oxide- semiconductor devices. A combination of high resolution transmission electron microscopy and small probe electron energy loss spectroscopy (EELS) and energy dispersive X-ray analysis has been applied to study interfacial reactions in the undoped gate stack. NiSi was found to be polycrystalline with the grain size decreasing from top to bottom of NiSix film. Ni content varies near the NiSi/HfOx interface whereby both Ni-rich and monosilicide phases were observed. Spatially non-uniform distribution of oxygen along NiSix/HfO2 interface was observed by dark field Scanning Transmission Electron Microscopy and EELS. Interfacial roughness of NiSix/HfOx was found higher than that of poly-Si/HfO2, likely due to compositional non-uniformity of NiSix. No intermixing between Hf, Ni and Si beyond interfacial roughness was observed.  相似文献   

15.
In our previous works, we have shown that most existing ceramic superconductors can be considered to be built of superconductor-semiconductor composite and we have estimated the change in phonon spectrum of the intrinsic superconductor unit if a semiconductor unit is attached to it. Moreover, the proximity effect under the size quantization condition has been examined in the superconductor-semiconductor composite. Each of the stated effects by itself could causeT c enhancement in general as more semiconductor blocks are added to the system. We extend our study in this paper to analyze the combined actions of phonon spectral change and proximity effect without size quantization condition onT c variation in members of the Tl1 series of high-T c superconductors. Our results indicate that an optimumT c is obtained if the stated effects are included in the idealized unit cells of the superconductors made up of a superconductor-semiconductor array.  相似文献   

16.
The Anomalous Hall Effect (AHE) was investigated in IV–VI ferromagnetic semimagnetic semiconductors of Sn1–x Mn x Te codoped with either Eu or Er. The analysis of experimental data is as follows. Hall resistivity and magnetization showed that AHE coefficient R s depends on temperature and its value decreases with thetemperature increase. We observe that above ferromagnet–paramagnet transition temperature R s changes sign. We discuss the possible physical mechanisms responsible for observed temperature dependence of R s , particularly change of the sign.  相似文献   

17.
A high-pressure technique was adopted to obtain perovskite-type Pb(Li14Nb34)O3. A new perovskite Pb(Li14Nb34)O3 was characterized to have a cubic symmetry with ao = 4.069A?; Li and Nb ions in the B-site of perovskite lattice may be in a random arrangement.  相似文献   

18.
The preparation conditions of the high TC ceramic superconductor Ba(Pb,Bi)O3 is correlated with the superconducting transition. Transition onsets of all materials are similar, but transition widths and transition completeness is strongly dependent on firing temperature. Only materials prepared over a narrow temperature range, resulting in a nearly ideal weight loss, have a complete and narrow transition.  相似文献   

19.
The electrostriction in Pb (Zn13Nb23)O3 crystals has been investigated using a strain gauge method. In the ferroelectric phase below 140 C, the strain vs the electric field shows a hysteresis, which is ascribed to the effect of ferroelectric domains. A quadratic relation holds between the strain x and the electric polarization P as x = QP2 above about 170 C in the paraelectric phase. Values of the electrostrictive Q coefficients are determined from the measurements near 190 C, as Q11 = 1.6·10?2m4/C2, Q12 = ?0.86·10?2m4/C2, and Q44 = 0.85·10?2m4/C2.  相似文献   

20.
The superconducting transition temperature,T c , of La2–x Ba x CuO4 has been measured under high pressure up to 8 GPa.T c is found to change drastically at the pressure where the structural phase transition takes place. This finding clearly indicates that there exists an intimate relation between the crystal structure and superconductivity.  相似文献   

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