方形重掺杂硅薄膜的极限载荷分析*

考虑残余应力的情况下,薄膜在大挠度时总应力的解析表达式.通过实验观察,深腐蚀得到的浓硼重掺杂硅薄膜表面存在微蚀坑.考虑微蚀坑和残余应力的影响,运用总应力表达式和Griffith裂口强度理论,定量的得到方形浓硼重掺杂硅薄膜的最大挠度和极限载荷Pmax,与已报道的实验值相符.从而解释了浓硼重掺杂硅薄膜的实际断裂强度值远小于晶体理论断裂强度值的矛盾.可以得出,极限载荷Pmax不仅与薄膜的尺寸与形状有关,而且也与材料特性,特别是与制备工艺有关.     

应力对硅悬空薄膜的机械灵敏度的影响

运用四周固支薄板小挠度理论,分析了存在较大残余应力的浓硼重掺杂硅悬空薄膜的力学特性.给出了小挠度下,在外界载荷作用下总应力表达式和薄膜机械灵敏度表达式,并分析了残余应力对二者的影响.研究表明,对存在较大残余应力的硅薄膜,总应力和机械灵敏度主要由残余应力决定,其中机械灵敏度较忽略残余应力时的值减小三个数量级.     

用于扫描刻蚀加工的微悬臂梁优化设计

扫描刻蚀加工是一种基于并行探针驱动、集成微小等离子体刻蚀原理的新型微纳米加工手段。特种悬臂梁是扫描刻蚀加工系统中的核心器件,其性能直接影响到系统的可靠性。该特种悬臂梁为集成压电陶瓷驱动薄膜的多层复合梁,在加工工艺过程中所引起的材料内部的残余应力,将导致复合梁加工释放后的弯曲变形,影响扫描刻蚀加工系统的性能。基于弹性薄板理论建立含残余应力项的多层复合梁的理论模型。利用有限元法对多层复合梁进行数值仿真,结合田口优化方法,对多层薄膜的厚度进行优化设计。     

MEMS薄膜平均应力梯度及等效弹性模量在线提取方法

薄膜沿厚度方向的平均应力梯度及薄膜的弹性模量对器件性能有重要影响.提出了一种利用静电作用下悬臂梁的吸合电压提取薄膜沿厚度方向的平均应力梯度及等效弹性模量的方法,该方法的关键在于实现悬臂梁吸合电压的快速精确计算.考虑了悬臂梁由应力梯度引起的沿宽度方向的弯曲及实现其固定端接近理想固支的方法,提高了吸合电压的计算精度.实际模拟表明该测量方法计算速度快、精度高,能够应用于实际工艺过程中材料参数的在线测量.     

应力型微悬臂梁生化传感器响应机理研究进展

针对静态微悬臂梁表面特异性结合产生表面应力信号的响应机制问题,介绍了微悬臂梁生化传感器的工作原理,阐述了应力响应机制的简化模型,从纵向界面上和横向分子间2个方面对特异性吸附引起的悬臂梁表面应力的变化进行了剖析,讨论了界面能变化、位阻作用、静电力、氢键作用等与表面应力大小及方向之间的关系,总结了应力型微悬臂梁生化传感器的响应机理的研究。     

基于GaAs MMIC技术的残余应力测试结构的模拟与设计

残余应力对开关梁的力学特性有着重要的影响。梁的弹性系数k由梁的形状和材料特性(杨氏模量和残余应力)来决定。应力梯度会使悬臂梁发生卷曲,对k也会产生影响。由残余应力引起的梁的长度变化量在微米级别,一般实验仪器难于测量。基于GaAs基和Si基的器件残余应力不同,相应的测试结构需重新设计。为了克服这些问题,本论文重新模拟并优化了微旋转式残余应变测试结构,尽量简化对测试仪器的要求。本文使用Intellisuite仿真软件以及Matlab软件优化,同时采用对称式的结构增加了测试精度。最后本文还给出了应力梯度的测试方法。     

双晶悬臂梁式压电换能器建模与结构参数分析

针对如何提高悬臂梁压电发电效率的问题,通过对压电换能器进行力学分析并建立了一个电路等效模型,从而得到了悬臂梁谐振角振频率和输出功率的计算公式。通过代入数值进行计算仿真得出结构参数对输出功率的影响的曲线。通过分析得出:在设计悬臂梁的结构参数时尽量在结构强度允许的条件下选择更重的附加质量块,电极长度和梁的长度比值为0.8,压电陶瓷和金属层厚度比为0.25,能提高换能效率等结论。     

基于SolidWorks对玻璃透镜自重应力对光程差的影响研究

本文介绍了利用有限元仿真分析的方法评估大型玻璃透镜的自重应力引起的光程差。通过SolidWorks Simulation对大型玻璃透镜进行应力分析,计算出由于自重应力引起的光程差变化,从而帮助设计人员准确评估大型玻璃透镜内部的残余应力大小。     

机械振动焊接对残余应力的影响分析

近年来,随着我国科学技术的发展,机械振动逐渐发展成为一门新兴的焊接技术,它是通过利用机械震动对残余应力的调整技术,从而实现焊接的新型技术。在保证机械振动的频率及振幅正常的情况下,应用机械振动焊接,不仅可以降低残余应力对机械震动的影响,还能在很大程度帮助实现对机械振动残余应力的消除作用。近年来国内外开展了诸多振动时效技术对残余应力的影响的讨论。本文针对机械振动对残余应力的影响进行分析。     

一种用于高密度信息存储中数据读取的新方法的 理论和实验研究

通过测量压电悬臂梁的等效电容来检测悬臂梁的振动信息,以应用于基于扫描探针技术的高密度信息存储中进行数据读取.在压电悬臂梁的PZT压电层上施加交流电场使其工作在共振状态,并使其自由端与存储介质进行周期性的接触.当悬臂梁的自由端扫描到数据点时,其自由端的振幅和所受到的外力将发生变化,进而引起PZT压电层的介电常数发生变化.因此,通过检测悬臂梁上压电层的等效电容变化,便可以得到悬臂梁的振幅改变量,从而实现了对存储介质上数据的读取.实验结果表明,该可以实现1nm的位移检测分辨率.     

Only connect: teaching, technology and telesis

Abstract This paper describes an approach to the design of interactive multimedia materials being developed in a European Community project. The developmental process is seen as a dialogue between technologists and teachers. This dialogue is often problematic because of the differences in training, experience and culture between them. Conditions needed for fruitful dialogue are described and the generic model for learning design used in the project is explained.     

European Community policy and the market

Abstract This paper starts with some reflections on the policy considerations and priorities which are shaping European Commission (EC) research programmes. Then it attempts to position the current projects which seek to capitalise on information and communications technologies for learning in relation to these priorities and the apparent realities of the marketplace. It concludes that while there are grounds to be optimistic about the contribution EC programmes can make to the efficiency and standard of education and training, they are still too technology driven.     

一种自适应子融合集成多分类器方法

融合集成方法已经广泛应用在模式识别领域,然而一些基分类器实时性能稳定性较差,导致多分类器融合性能差,针对上述问题本文提出了一种新的基于多分类器的子融合集成分类器系统。该方法考虑在度量层融合层次之上通过对各类基多分类器进行动态选择,票数最多的类别作为融合系统中对特征向量识别的类别,构成一种新的自适应子融合集成分类器方法。实验表明,该方法比传统的分类器以及分类融合方法识别准确率明显更高,具有更好的鲁棒性。     

Avoiding semantic and temporal gaps in developing software intensive systems

Development of software intensive systems (systems) in practice involves a series of self-contained phases for the lifecycle of a system. Semantic and temporal gaps, which occur among phases and among developer disciplines within and across phases, hinder the ongoing development of a system because of the interdependencies among phases and among disciplines. Such gaps are magnified among systems that are developed at different times by different development teams, which may limit reuse of artifacts of systems development and interoperability among the systems. This article discusses such gaps and a systems development process for avoiding them.     

Designing economic np control charts: A programmed simulation approach

This paper presents control charts models and the necessary simulation software for the location of economic values of the control parameters. The simulation program is written in FORTRAN, requires only 10K of main storage, and can run on most mini and micro computers. Two models are presented - one describes the process when it is operating at full capacity and the other when the process is operating under capacity. The models allow the product quality to deteriorate to a further level before an existing out-of-control state is detected, and they can also be used in situations where no prior knowledge exists of the out-of-control causes and the resulting proportion defectives.     

The development of robot art

Going through a few examples of robot artists who are recognized worldwide, we try to analyze the deepest meaning of what is called “robot art” and the related art field definition. We also try to highlight its well-marked borders, such as kinetic sculptures, kinetic art, cyber art, and cyberpunk. A brief excursion into the importance of the context, the message, and its semiotics is also provided, case by case, together with a few hints on the history of this discipline in the light of an artistic perspective. Therefore, the aim of this article is to try to summarize the main characteristics that might classify robot art as a unique and innovative discipline, and to track down some of the principles by which a robotic artifact can or cannot be considered an art piece in terms of social, cultural, and strictly artistic interest. This work was presented in part at the 13th International Symposium on Artificial Life and Robotics, Oita, Japan, January 31–February 2, 2008     

Explanation and prediction: an architecture for default and abductive reasoning

Although there are many arguments that logic is an appropriate tool for artificial intelligence, there has been a perceived problem with the monotonicity of classical logic. This paper elaborates on the idea that reasoning should be viewed as theory formation where logic tells us the consequences of our assumptions. The two activities of predicting what is expected to be true and explaining observations are considered in a simple theory formation framework. Properties of each activity are discussed, along with a number of proposals as to what should be predicted or accepted as reasonable explanations. An architecture is proposed to combine explanation and prediction into one coherent framework. Algorithms used to implement the system as well as examples from a running implementation are given.     

Three Process Perspectives: Organizations, Teams, and People

This paper provides the author's personal views and perspectives on software process improvement. Starting with his first work on technology assessment in IBM over 20 years ago, Watts Humphrey describes the process improvement work he has been directly involved in. This includes the development of the early process assessment methods, the original design of the CMM, and the introduction of the Personal Software Process (PSP)^SM and Team Software Process (TSP){^SM}. In addition to describing the original motivation for this work, the author also reviews many of the problems he and his associates encountered and why they solved them the way they did. He also comments on the outstanding issues and likely directions for future work. Finally, this work has built on the experiences and contributions of many people. Mr. Humphrey only describes work that he was personally involved in and he names many of the key contributors. However, so many people have been involved in this work that a full list of the important participants would be impractical.     

基于复小波噪声方差显著修正的SAR图像去噪

提出了一种基于复小波域统计建模与噪声方差估计显著性修正相结合的合成孔径雷达(Synthetic Aperture Radar,SAR)图像斑点噪声滤波方法。该方法首先通过对数变换将乘性噪声模型转化为加性噪声模型,然后对变换后的图像进行双树复小波变换(Dualtree Complex Wavelet Transform,DCWT),并对复数小波系数的统计分布进行建模。在此先验分布的基础上,通过运用贝叶斯估计方法从含噪系数中恢复原始系数,达到滤除噪声的目的。实验结果表明该方法在去除噪声的同时保留了图像的细节信息,取得了很好的降噪效果。     

How do children do mathematics with LOGO?

Abstract  This paper considers some results of a study designed to investigate the kinds of mathematical activity undertaken by children (aged between 8 and 11) as they learned to program in LOGO. A model of learning modes is proposed, which attempts to describe the ways in which children used and acquired understanding of the programming/mathematical concepts involved. The remainder of the paper is concerned with discussing the validity and limitations of the model, and its implications for further research and curriculum development.