共查询到19条相似文献,搜索用时 468 毫秒
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《中国无线电电子学文摘》2003,(3)
TN4 2003030705碳纳米管原子力显微镜针尖的研究进展/国立秋,赵铁强,董申,陈明君(哈尔滨工业大学)11微细加工技术一2002,(3)一52一59碳纳米管具有很小的半径、较高的纵横比、高的柔软性能、独特的化学结构和确定的电子特性,这一系列性质使得它很适合用作原子力显微镜针尖.针尖的制作原先是手工操作,目前应用较广泛的是化学汽相沉积法(CVD),这种针尖使原子力显微镜的分辨率得到很大的提高,纳米操纵能力大大加强.图9参28(刚)通过实例,介绍多分区响应表面法的优点及其给工艺综合带来的好处,并用其构建的响应表面模型分析工艺窗口带来的影响.… 相似文献
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采用直流电化学刻蚀方法制备扫描隧道显微镜钨针尖,研究了电化学刻蚀过程中NaOH溶液浓度、钨丝浸入长度和刻蚀电压对针尖形貌的影响。通过扫描电子显微镜(SEM)测量针尖曲率半径和针尖纵横比值,以表征针尖的尺寸和形状;通过能谱仪(EDS)分析针尖表面成分,以表征表面清洁度;通过场发射显微镜(FEM)得到Fowler-Nordheim (F-N)曲线来检测针尖发射性能。实验结果表明,当溶液浓度为2 mol/L、钨丝浸入长度为4 mm、刻蚀电压为3 V时,可以得到曲率半径约为100 nm、纵横比值为13的针尖,且表面无钨的氧化层。FEM结果显示当对针尖施加500 V的负偏压时,针尖可以稳定发射50 nA量级的电流,且针尖性能具有良好的一致性。 相似文献
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用扫描电镜制备高性能AFM针尖 总被引:3,自引:1,他引:2
随着各种纳米材料研究的不断深入 ,扫描探针显微镜 (SPM)已在这些领域中获得广泛应用 ,并迅速成为表征纳米材料形态及物性的重要手段。用SPM对材料进行表征时 ,对结果起至关重要作用的是SPM探针的质量及性质。以原子力显微镜 (AFM)为例 ,在对各种材料作表征时 ,要求针尖曲率半径小、硬度强 ,在做电学性质测试时 ,还要求针尖有良好的导电性。但商用的AFM针尖是用Si3N4 或Si通过化学腐蚀等方法制备的 ,因此针尖导电性不好 ,而且为了保证其硬度 ,尖体不可能太细 ,这些问题无疑对AFM的应用带来限制 ,比如 :用AFM对表… 相似文献
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微加工硅表面基于AFM的纳米压痕测量与分析 总被引:1,自引:0,他引:1
原子力显微镜(AFM)在完成对单晶硅的微加工后,其金刚石针尖被用做一个纳米压痕头以实现微加工区域内外机械性质的测量与分析。结果表明,以安装有金刚石针尖的AFM在经过化学机械抛光的硅基片上所进行的微加工,即使使用极小的切削力也会在加工表面形成变质层,但是其厚度值要小于化学机械抛光的硅表面变质层。由AFM测量的纳米级硬度值要大于由传统的Vickers和Hysitron硬度测试仪所测量的值。另外,随着AFM压入载荷的减小,纳米级硬度值呈现出增加的趋势,这是由于在很小的压入载荷下所呈现出的压痕尺寸效应所导致。 相似文献
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原子力显微镜是利用接近试样表面的探针针尖上的作用力而工作的。针尖与试件表面纳米接触力的变化对表面检测有重要的影响。在分析原子力显微镜工作原理和纳米接触力计算模型基础上,根据Hamaker假设,利用连续介质方法,建立了针尖同试样表面在接近过程中的纳米接触力计算模型;根据Hertzian接触理论,建立了针尖同试样表面在接触压入过程中的接触力的计算模型。通过叠加计算,获得了耦合接近过程和接触压入过程中的接触力计算方法。根据计算模型,利用Matlab编程计算获得了针尖与试样表面纳米接触作用力的变化规律。为提高原子力显微镜的表面检测精度和进行误差分析提供基础。 相似文献
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扫描探针显微镜(SPM)是通过探测针尖与样品间不同的相互作用力而获得表面的不同性质,在扫描探针测量技术上发展起来的磁力显微镜(MFM)主要用于材料表面的磁场力分布。 相似文献
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本文采用磁力显微镜(MFM)对磁性石榴石(YGdBi)3(GaFe)5O12薄膜的磁畴结构进行了观察研究。实验结果表明,磁性针尖的磁特性进行对石榴石MFM图像的影响较大,而且随着针尖与样品间距的增大,磁针尖对石榴石畴结构的影响有所降低。另外,改变针尖的磁化方向,得到的石榴石磁畴结构也有所不同。 相似文献
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提出了一种用于针尖扫描原子力显微镜(AFM)的光点跟踪设计方案,结构简单,容易实现。设计方案对扫描器的负载能力要求不高,而且能使原子力显微镜实现较大范围的针尖扫描。实验结果表明,采用此光点跟踪设计方案的针尖扫描原子力显微镜能实现最大100μm×100μm范围的扫描,z方向上的误差最大1 nm,能很好地满足大样品扫描的需要。 相似文献
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Atomic force microscopy with carbon nanotube probe resolves the subunit organization of protein complexes 总被引:6,自引:0,他引:6
Hohmura KI Itokazu Y Yoshimura SH Mizuguchi G Masamura YS Takeyasu K Shiomi Y Tsurimoto T Nishijima H Akita S Nakayama Y 《Journal of electron microscopy》2000,49(3):415-421
Among many scanning probe microscopies, atomic force microscopy (AFM) is a useful technique to analyse the structure of biological materials because of its applicability to non-conductors in physiological conditions with high resolution. However, the resolution has been limited to an inherent property of the technique; tip effect associated with a large radius of the scanning probe. To overcome this problem, we developed a carbon nanotube probe by attaching a carbon nanotube to a conventional scanning probe under a well-controlled process. Because of the constant and small radius of the tip (2.5-10 nm) and the high aspect ratio (1:100) of the carbon nanotube, the lateral resolution has been much improved judging from the apparent widths of DNA and nucleosomes. The carbon nanotube probes also possessed a higher durability than the conventional probes. We further evaluated the quality of carbon nanotube probes by three parameters to find out the best condition for AFM imaging: the angle to the tip axis; the length; and the tight fixation to the conventional tip. These carbon nanotube probes, with high vertical resolution, enabled us to clearly visualize the subunit organization of multi-subunit proteins and to propose structural models for proliferating cell nuclear antigen and replication factor C. This success in the application of carbon nanotube probes provides the current AFM technology with an additional power for the analyses of the detailed structure of biological materials and the relationship between the structure and function of proteins. 相似文献
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B. G. Konoplev O. A. Ageev V. A. Smirnov A. S. Kolomiitsev N. I. Serbu 《Russian Microelectronics》2012,41(1):41-50
The paper presents the results of experimental investigations into probe modification for atomic-force microscopy (AFM) and
scanning tunneling microscopy (STM) by etching the point of AFM cantilevers and tungsten STM probes by applying the method
of focused ion beams (FIBs). It is shown that the use of etching by the IB method allows one to obtain the probes with rounding
that is less than 10 nm and with an aspect ratio of 1: 50. The application of these probes increases the resolution and the
reliability of measuring by the AFM and STM methods. The obtained results can be used for developing the technological processes
of production and modification of sensor probes for AFM and STM, as well as the methods for diagnostics of the structures
of microelectronics, nanoelectronics and the microsystem and nanosystem technologies. 相似文献
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目前商用原子力显微镜(AFM)大多使用的微悬臂式探针,力灵敏度可达到pN级别。然而受到工艺水平及检测方法限制,微悬臂谐振频率难以超过3.5 MHz,且Q值较低,制约了AFM的成像速度以及在液体中的成像效果。另外,光杠杆的检测方法无法与探针本身进行片上集成,较小的悬臂也给激光束的聚焦带来困难。基于以上考虑,本文提出两种基于MEMS谐振器的探针,振频率可达11 MHz,Q值为4 000,并集成了执行与传感功能以及批量加工纳米针尖的工艺。目前两种探针都已经实现对树脂图案的成像功能,力灵敏度最高可达5pN/√Hz。 相似文献
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Nanofabrication with proximal probes 总被引:4,自引:0,他引:4
Snow E.S. Campbell P.M. Perkins F.K. 《Proceedings of the IEEE. Institute of Electrical and Electronics Engineers》1997,85(4):601-611
In this paper, we describe the use of proximal probes, such as the atomic force microscope (AFM) and the scanning tunneling microscope (STM), for nanofabrication. A resistless proximal probe-based lithographic technique has been developed that uses the local electric field of an STM or conductive AFM tip that is operated in air to selectively oxidize regions of a sample surface. The resulting oxide, typically 1-10 nm thick, can be used either as a mask for selective etching or to directly modify device properties by patterning insulating oxides on thin conducting layers. In addition to this resistless approach, we also describe the use of the STM/AFM to modify the chemical functionality of self-assembling monolayer films. Such modified films are used as a template for the selective electroless plating of metal films. The above processes are fast simple to perform, and well suited for device fabrication. We apply the anodic oxidation process to the fabrication of both semiconductor and metal-oxide devices. In these latter structures, sub-10 nm-sized device features are easily achieved, and we describe the fabrication of the smallest possible device, a single, atomic-sized metallic point contact by using in situ-controlled AFM oxidation 相似文献
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介绍了采用氮气离子束溅射 ,高纯石墨为靶材 ,沉积掺氮碳薄膜的设备及工艺技术。对薄膜的沉积过程作了讨论 ,采用 X射线光电子能谱 (XPS)技术等对薄膜结构成分、氮 -碳、碳 -碳原子之间的键以及结合能作了研究 ,在 (1 1 1 )单晶硅片上沉积掺氮碳薄膜 ,构成 C/Si异质结 ,在 1 0 0 m W/cm2 光照下 ,开路电压达 2 0 0 m V。 相似文献
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在轻敲工作模式下,原子力显微镜(AFM)压电微悬臂以较大的振幅振动。以纳米管针尖为例建立了压电微悬臂振动的数学模型并描述了纳米管尖端的振动轨迹,从纳米管尖端的振动轨迹和仿真图形的关系,指出压电微悬臂振动影响测量精度的有关参数及减小由振动产生膨胀变形的方法。根据数学图形学膨胀理论仿真出纳米管尖端振动轨迹对标准线宽模型的影响,AFM测量线宽的试验验证了上述结果。 相似文献