微波烧结钛酸锶钡陶瓷材料的介电性能

采用碳酸盐固相合成法制备Ba0.6Sr0.4TiO3(BST)粉体,应用微波烧结技术将粉体烧结成陶瓷。对样品的介电性能进行了测试,研究分析了材料的介电性能,并与传统制备工艺获得的样品进行了性能对比。结果表明:微波烧结成瓷温度和时间较传统制备工艺大大降低,分别为1 300℃和30 min,可以获得晶粒尺寸5μm以下的BST陶瓷;材料的εr变化不大,但tanδ大幅降低。     

微波烧结Ba_(6-3x)Sm_(8+2x)Ti_(18)O_(54)陶瓷材料的初步研究

研究了Ba_(6-3x)Sm_(8+2x)Ti_(18)O_(54)(x=0.67,BST)陶瓷材料的微波烧结情况,从烧结特性、微结构与相组成及微波介电性能等方面对微波烧结的样品与传统工艺制得的样品进行了对比.结果表明, 与传统制备工艺相比,微波烧结BST陶瓷缩短了烧结周期,并促进了样品的致密化,其物相组成和传统烧结的样品没有区别,且晶粒细小分布均匀.微波烧结BST陶瓷可获得较优的微波介电性能:介电常数ε_r=82.89,品质因数与频率之积Qf=8 450 GHz(频率f=4.75 GHz),谐振频率温度系数τ_f=22.58×10~(-6)/℃.     

微波烧结法制备Ba0.65Sr0.35TiO3热释电陶瓷

采用溶胶－凝胶工艺制备了（Ba,Sr)TiO3凝胶，并利用微波烧结技术对粉体进行了合成和烧结，获得了晶粒尺寸在1μm以内的Ba0.65Sr0.35TiO3热释电陶瓷。对样品的介电特性和热释电特性进行了测试，分析了微波烧结工艺对材料电性能的影响。实验结果表明：该工艺可将钙钛矿相的合成温度由1100℃降低至900℃，并在1310℃烧结25min获得细晶粒的Ba0.65Sr0.35TiO3，其热释电系数和介电常数与传统陶瓷相差不大，从而材料的热释电响应优值因子要比传统方法获得的样品提高了近1倍。     

钛酸锶钡纳米粉体与陶瓷的制备及性能

以低成本钡、锶的碳酸盐替代醋酸盐为原料,采用溶胶-凝胶法制备了Ba0.6Sr0.4TiO3超细粉体,成型后分别在1 300℃和1 330℃下烧结成瓷。采用DTA-TG、XRD、SEM、精密电感电容电阻数字电桥(LCR)测试仪分别对凝胶的晶化过程、粉体的物相结构、烧结体的晶粒形貌、陶瓷的介电性能进行了测试分析。结果表明,在750℃可合成出平均晶粒尺寸为20 nm的立方相Ba0.6Sr0.4TiO3粉体;其陶瓷烧结体的介电损耗在室温附近可降低约至0.002,且温度稳定性良好;随着陶瓷晶粒平均尺寸的降低,居里温度向负温方向移动,其介电峰有弥散化趋势;外加直流电场为10 kV/cm时样品的介电可调谐性可达65%。     

制备工艺对0.7CaTiO3-0.3NdAlO3材料的影响

用固相反应和熔盐法制备工艺合成了0.7CaTiO3-0.3NdAlO3(CTNA)粉体,研究了制备工艺对CT-NA陶瓷的合成过程和微波介电性能的影响。结果表明,相比于固相反应的长时间合成,熔盐法中,混合粉料在1 200℃2、h下即可合成CTNA单相,样品在1 375℃下可烧结致密,获得的样品具有与固相反应相当的微波介电性能,即介电常数rε=43;品质因数与频率的乘积Q×f=35 736 GHz;频率温度系数τf=1.32×10-6/℃。     

Pechini法制备超细BST粉体及其陶瓷的研究

采用Pechini法制备了约100nm的（Ba0.79Sr0.21）TiO3超细粉体,并在其中掺杂超细Bi4Ti3O12粉体制备了BST混合粉体．并用其制备了平均粒径为0．5μm、ετ为1740和tanδ为0．0038的BST陶瓷．研究了热处理温度和分散剂的量对粉体性能的影响,烧结温度对BST陶瓷介电性能和显微结构的影响。得到了较优的工艺参数,即热处理温度800℃、分散剂的量2．25mL和烧结温度1150℃．     

微波烧结制备钛酸锶钡红外探测器材料

以乙酸盐为原料,聚乙烯吡咯烷酮(PVP)为稳定剂,采用sol-gel法制备了Mn掺杂Ba0.6Sr0.4TiO3(BST)凝胶,分析了凝胶的热演化过程,分别用传统烧结和微波烧结技术制备BST纳米粉体。与传统烧结相比,900℃微波烧结0.5h即可合成纯钙钛矿相BST粉体,相同烧结温度下所需时间缩短3/4,有效控制晶粒长大,粉体粒径约60nm。采用该粉体制备的BST厚膜材料,εm>1000,tanδ<0.02,弥散指数降低,是制备大阵列非制冷红外焦平面阵列(UFPA)的优选材料。     

钛酸锶钡-氧化锌复合陶瓷的结构与介电性能

分别采用熔盐法和固相反应法预制的Ba0.85Sr0.15TiO3(BST)粉体,制备了BST-ZnO复合陶瓷。对陶瓷的晶相组成、微观形貌特征及介电性能进行了研究。结果表明,BST-ZnO复合陶瓷微观结构及介电性能受BST粉体性质的影响显著。以熔盐法预制BST粉体时,陶瓷的ZnO晶粒显著长大,其εr可达104量级。而以固相反应法预制BST粉体时,陶瓷的ZnO晶粒较小。当r(BST:ZnO)=0.4时产生纤维状ZnO晶粒,并在16~20℃附近出现与BST材料相似的相变特征。     

添加CuO对Ba_(3.99)Sm_(9.34)Ti_(18)O_(54)陶瓷烧结及微波介电性能的影响

采用传统固相工艺制备了Ba3.99Sm9.34Ti18O54(BSTO)微波介质陶瓷,研究了烧结助剂CuO对BSTO的结构及介电性能的影响。结果表明,添加CuO能较好促进BSTO晶粒致密化,降低烧结温度约140℃。当添加质量分数1.0%的CuO时,1220℃保温3h烧结的BSTO样品的介电性能较好:εr=86.87,Q·f=5138GHz(f=4.95GHz),τf=–10.84×10–6℃–1。     

溶胶-凝胶法制备硼硅玻璃掺杂BST陶瓷的研究

研究了Si-B-O系玻璃掺杂对钛酸锶钡(BST)陶瓷的相结构和介电性能的影响.实验结果表明,当x(SiO_2)＞10%时,Si-B-O系玻璃掺杂BST陶瓷易出现杂相,即Ba_2TiSi_2O_8相.x(SiO_2)≤10%,Si-B-O系玻璃掺杂BST陶瓷粉体的相结构为立方钙钛矿相结构,其合成温度大于等于600 ℃,不存在第二相. Si-B-O系玻璃掺杂BST陶瓷的烧结温度低于传统工艺.Si-B-O系玻璃掺杂BST陶瓷的显微结构呈细晶结构(晶粒尺寸＜1 μm).随玻璃含量的增加,Si-B-O系玻璃掺杂BST陶瓷介电常数ε降低,介电峰变低,平坦,峰形宽化,介电损耗降低,居里温度TC向低温移动.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.