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碳化硅陶瓷的热等静压烧结 总被引:11,自引:3,他引:11
系统地研究了不同添加剂(如Al2O3,AlN和B4C等)在热等静压(HIP)烧结条件下对SiC陶瓷之致密机理,显微结构以及力学性能的影响,结果表明:在HIP烧结过程中,Al2O3可以与SiC颗粒表面的SiO2生成低共熔的铝硅酸盐玻璃相,并有效地促进SiC陶瓷的致密化,当添加3%(以质量计)Al2O3时,采用HIP烧结工艺,在1850℃温度和200MPa压力下降结1h,就可获得相对密度和抗弯强度分别 相似文献
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碳化硅陶瓷及其复合材料的热等静压氮化 总被引:2,自引:0,他引:2
通过对SiC陶瓷,SiC-TiC复相陶瓷以及SiC晶须补强SiC基复合材料在氮气氛中进行高温的氮化处理,成功地实现了这些材料的开口气孔与表面裂纹的愈合。有关研究表明:热等静压氮化工艺可以显著提高SiC陶瓷及其复合材料的抗强度,对断裂韧性也有较大的改善作用。 相似文献
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一、引言钛酸钡陶瓷材料具有优异的电学性能,在电子工业中被广泛应用。因其与铁氧体材料有较好的匹配性,可加工性而用作高密度磁盘机磁头的浮动块材料。制备Ba_2Ti_9O_(20)陶瓷材料过程中我们发现烧结材料内部总是残留有3-4%的气孔,影响材料的性能和使用。 相似文献
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为提高热压孕镶金刚石钻头力学性能和耐磨性,使之更好地适用于强力规程钻探现场,提出常规热压+热等静压相结合的金刚石钻头制造方法。以2个优选的预合金体系钻头胎体配方为基础,分别采用常规热压、常规热压+热等静压的方式试制钻头胎体和孕镶金刚石钻头进行室内测试和现场试验对比分析。室内测试表明,相较于常规热压烧结方式,采用常规热压+热等静压烧结后,钻头胎体的硬度平均提高2.0 HRC,磨损量平均下降2.3 mg,相对密度达到98.7%和99.1%。现场试验结果表明,引入热等静压烧结之后,相同配方热压金刚石钻头其机械钻速相差不大,但耐磨性明显提高,使用寿命平均提高50.42%。 相似文献
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热等静压技术在特种陶瓷制备中的应用 总被引:7,自引:0,他引:7
引言 特种陶瓷包括结构陶瓷和功能陶瓷。由于特种陶瓷所用原料大部分为共价键原料,使得烧结时的扩散速度相当低,故烧结性很差。若选用无压烧结,要获得致密的烧结体,不得不加入添加剂,而添加剂的加入,或多或少地影响材料的各种性能。若选用热压烧结,虽然可以得到致密的烧结体,但制品的形状和尺寸要受到限制。又因为热压烧结是采用单向加压,烧 相似文献
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热等静压机在制造过程中处于高温、高压环境,循环冷却系统的稳定运行是根本保障,而实际制造过程中循环冷却系统出现的问题较多。本文介绍了某企业热等静压机的循环水冷却系统,对存在的冷却效果差、能耗高、维护不便等问题进行了分析并提出改进方案,改造后效果明显。 相似文献
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Rapid Formation of Zinc Oxide Films by an Atmospheric-Pressure Chemical Vapor Deposition Method 总被引:1,自引:0,他引:1
Kiichiro Kamata Junichi Nishino Shigeo Ohshio Kazunori Maruyama Motohiko Ohtuki 《Journal of the American Ceramic Society》1994,77(2):505-508
Zinc oxide films were prepared by an atmospheric-pressure chemical vapor deposition method using (acetylacetonato)-zinc as a source material. Transparent and uniform ZnO films of considerable area (20 × 70 mm, ∼0.3 μm thick) could be obtained easily on a crown glass (CGW #200) with a high deposition rate. The deposition rate first remained constant with increasing substrate temperature ( T s ), then increased abruptly from 120 nm/min at T s = 550°C to 220 nm/min at T s = 600°C, and finally stopped increasing above T s = 600°C. The maximum preferred orientation and best crystallinity of the films were obtained at T s = 550°C. 相似文献
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Zhong-Xin Chen Joost van der Eyden† Wouter Koot Rob van den Berg Jan van Mechelen Anke Derking 《Journal of the American Ceramic Society》1995,78(11):2993-3001
Homogeneous thin films of zinc titanate have been successfully prepared on Si(100) wafers by depositing a film of zinc and titanium oxides (ZnO-TiO2 ) by low-pressure metalorganic chemical vapor deposition (MOCVD), followed by an annealing treatment. The precursors used for the deposition were diethylzinc (DEZ), tetraisopropoxide titanium (TPT), and water. By performing the deposition at temperatures between 140 and 350C, the stoichiometry of the as-deposited films could be effectively controlled over Zn/Ti ratios between 0.5 and 2.5, which cover the composition of various zinc titanate phases identified in the literature. The as-deposited ZnO-TiO2 films are amorphous, and possess a fairly smooth surface. XPS and SIMS analysis showed that the composition of these films is uniform over the wafer as well as through the films bulk. An annealing treatment of the as-deposited films at high temperature 相似文献
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Marc Leparoux Lionel Vandenbulcke Christian Clinard 《Journal of the American Ceramic Society》1999,82(5):1187-1195
An experimental study has been performed to gain some insight into the correlations between the deposition conditions and the structure of boron nitride (BN) coatings that are used in ceramic-matrix composites. BN has been deposited at 700°C from BCl3 -NH3 -H2 mixtures on various substrates, by using chemical vapor deposition (CVD) and isothermal-isobaric chemical vapor infiltration (ICVI) processes, simultaneously in the same reactor. A kinetic study has shown that the CVD process is governed either by a combination of mass transfer with chemical kinetics at low flow rates or by the heterogeneous kinetics only at high flow velocities. In contrast, the limiting contribution of mass transfer always is observed for the ICVI process. The influence of diffusion cages that are positioned around the fibrous preforms is reported. The structure of BN deposits has been studied as a function of the various deposition conditions via transmission electron microscopy. The chosen CVD conditions lead to a poor organization of the BN deposits. Fairly well-organized BN coatings are deposited on all fibers of a fibrous preform via ICVI. The results are discussed in terms of supersaturation and deposition yields. The use of diffusion cages and the adjustment of the inlet composition and mass flow rate seem to be very important to obtain the best BN organization and thickness uniformity. 相似文献
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Jan Pieter Dekker Paul J. Van der Put Hubert J. Veringa Joop Schoonman 《Journal of the American Ceramic Society》1997,80(3):629-636
Particle-precipitation-aided chemical vapor deposition (PP-CVD) is a modification of the conventional CVD process, where an aerosol is formed in the gas phase and particles are deposited on a substrate. The driving force for particle deposition is thermophoresis. The synthesis of titanium nitride (TiN) has been studied. TiN is formed on the substrate, as well as in the gas phase. At low temperature differences, only dense microstructures with equiaxed grains are observed; porous coherent layers are found in experiments where larger temperature differences are applied. Additional increase in the temperature difference only leads to loose powder deposits. In principle, the PP-CVD process is a suitable method for the synthesis of thin porous layers of ceramics. 相似文献
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Theodore M. Besmann 《Journal of the American Ceramic Society》1990,73(8):2498-2501
The preparation of a two-phase coating of B4 C-BN was addressed as a potential wear coating because of its likelihood of having a high fracture toughness resulting from its composite nature and inherent lubrication due to the presence of BN. Equilibrium analysis identified appropriate deposition conditions; however, deposited coatings were found to be single-phase BN with a high degree of substitution of carbon for nitrogen. 相似文献
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Yiguang Wang Qiaomu Liu Jinling Liu Litong Zhang Laifei Cheng 《Journal of the American Ceramic Society》2008,91(4):1249-1252
Zirconium carbide (ZrC) coatings were fabricated by chemical vapor deposition (CVD) using ZrCl4 , CH4 /C3 H6 , and H2 as precursors. Both thermodynamic calculation results and the film compositions at different temperatures indicated that zirconium and carbon deposited separately during the CVD process. The ZrC deposition rates were measured for CH4 or C3 H6 as carbon sources at different temperatures based on coating thickness. The activation energies for ZrC deposition demonstrated that the CVD ZrC process is controlled by the carbon deposition. This is also proven by the morphologies of ZrC coatings. 相似文献
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Polycrystalline Si was used to clad several advanced ceramic materials such as SiC, Si3 N4 , sapphire, Al2 O3 , pyrolytic BN, and Si by a chemical vapor deposition (CVD) process. The thickness of Si cladding ranged from 0.025 to 3.0 mm. CVD Si adhered quite well to all the above materials except Al2 O3 , where the Si cladding was highly stressed and cracked or delaminated. A detailed material characterization of Si-clad SiC samples showed that Si adherence to SiC does not depend much on the substrate surface preparation; that the thermal cycling and polishing of the samples do not cause delamination; and that, in four-point bend tests, the Si–SiC bond remains intact, with the failure occurring in the Si. 相似文献
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Honghua Du Bernard Gallois Kenneth E. Gonsalves 《Journal of the American Ceramic Society》1990,73(3):764-766
Amorphous silicon nitride films have been deposited on single-crystal silicon from the gas mixture of methylsilazane and ammonia at 873 to 1073 K. The films have been characterized by ellipsometry, Fourier transform infrared spectroscopy, and Auger electron spectroscopy. The Si-C, Si-H, and C-H bonds in methylsilazane can be effectively cleaved and the associated C and H species removed. The structure and composition of the films do not show any apparent dependence on the deposition temperature. 相似文献
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Silicon carbide prepared by chemical vapor deposition at a substrate temperature of ∼1400425-429°C was investigated. Optical microscopy showed that the growth characteristic is dendritic; the deposits consist of columnar blocks within each of which the orientation of crystals is approximately the same. Small pores occur along the boundaries of these blocks. Transmission electron microscopy revealed finer details of the growth characteristics. The crystals were mostly 3 C in structure, but crystals with 2H and one-dimensionally-disordered structures were also found. The 3 C crystals are mostly dendritic, but some columnar growth with alternating twin bands occurs. Both 2 H and one-dimensionallydisordered crystals exhibit a columnar habit, reflecting the difference in crystal symmetry from 3 C . In all these crystals, the c axis (or one of the <111> axes in 3 C crystals) lies perpendicular to the substrate. 相似文献