Atomic-layer-deposited Al2O3 and HfO2 on GaN: A comparative study on interfaces and electrical characteristics

Al₂O₃, HfO₂, and composite HfO₂/Al₂O₃ films were deposited on n-type GaN using atomic layer deposition (ALD). The interfacial layer of GaON and HfON was observed between HfO₂ and GaN, whereas the absence of an interfacial layer at Al₂O₃/GaN was confirmed using X-ray photoelectron spectroscopy and transmission electron microscopy. The dielectric constants of Al₂O₃, HfO₂, and composite HfO₂/Al₂O₃ calculated from the C-V measurement are 9, 16.5, and 13.8, respectively. The Al₂O₃ employed as a template in the composite structure has suppressed the interfacial layer formation during the subsequent ALD-HfO₂ and effectively reduced the gate leakage current. While the dielectric constant of the composite HfO₂/Al₂O₃ film is lower than that of HfO₂, the composite structure provides sharp oxide/GaN interface without interfacial layer, leading to better electrical properties.     

Influence of La substitution on the electrical properties of metal-ferroelectric (BiFeO3)-insulator (CeO2)-semiconductor nonvolatile memory structures

Metal-multiferroic (La-substituted BiFeO₃)-insulator (CeO₂)-semiconductor (MFIS) capacitors has been fabricated. The crystalline phase and amount of La³⁺ substitution at Bi-site were investigated by XRD and XPS in the postannealing temperature range from 500 to 700 °C, respectively. The microstructure and interfacial layer between CeO₂ and Si substrate were characterized by HRTEM. The memory windows as functions of insulator film thickness and DC power for La were measured. The maximum memory window is about 1.9 V under ±6 V applied voltage. The ferroelectric polarization increases with increasing substitution amount. The morphologies of La-substituted BiFeO₃ films were also studied by AFM.     

氮气或氧气气氛退火的氧化铪材料电荷泄漏情况研究

本文中, 使用开尔文探针显微镜,研究了不同退火气氛(氧气或氮气)情况下氧化铪材料的电子和空穴的电荷保持特性。与氮气退火器件相比,氧气退火可以使保持性能变好。横向扩散和纵向泄露在电荷泄露机制中都起了重要的作用。 并且,保持性能的改善与陷阱能级深度有关。氮气和氧气退火情况下,氧化铪存储结构的的电子分别为0.44 eV, 0.49 eV,空穴能级分别为0.34 eV, 0.36 eV。 最后得到,不同退火气氛存储器件的电学性能也与KFM结果一致。对于氧化铪作为存储层的存储器件而言,对存储特性的定性和定量分析,陷阱能级,还有泄漏机制研究是十分有意义的。     

Impact of Cu-rich growth on the Cu2ZnSnSe4 surface morphology and related solar cells behavior

In order to study the influence of Cu-rich growth on the performance of the Cu₂ZnSnSe₄ (CZTSe) thin film solar cells, a multi-stage co-evaporation process is applied. The CZTSe films are grown at a lower substrate temperature to reduce the existence time of Cu_xSe_y at the first period caused by the volatility of SnSe_x. This study examines the surface morphology and device performance in Cu-rich growth and close-to-stoichiometric growth. Although the grain size of Cu-rich growth film increases a little, the difference was not dramatic as the results of CIGS reported previously. A model based on the grain boundary migration theory is proposed to explain the experimental results. The mechanisms of Cu-rich growth between CZTSe and CIGS might be different.     

Excellent performance of gas sensor based on In2O3-Fe2O3 nanotubes

In₂O₃-Fe₂O₃ nanotubes are synthesized by an electrospinning method. The as-synthesized materials are characterized by scanning electron microscope and X-ray powder diffraction. The gas sensing results show that In₂O₃-Fe₂O₃ nanotubes exhibit excellent sensing properties to acetone and formaldehyde at different operating temperatures. The responses of gas sensors based on In₂O₃-Fe₂O₃ nanotubes to 100 ppm acetone and 100 ppm formaldehyde are 25 (240℃) and 15 (260℃), and the response/recovery times are 3/7 s and 4/7 s, respectively. The responses of In₂O₃-Fe₂O₃ nanotubes to 1 ppm acetone (240℃) and formaldehyde (260℃) are 3.5 and 1.8, respectively. Moreover, the gas sensor based on In₂O₃-Fe₂O₃ nanotubes also possesses an excellent selectivity to acetone and formaldehyde.     

Enhanced photovoltaic performance in TiO2/P3HT hybrid solar cell by interface modification

A TiO2/P3HT hybrid solar cell was fabricated by infiltrating P3HT into the pores of TiO2 nanorod arrays. To further enhance the photovoltaic performance, anthracene-9-carboxylic acid was employed to modify the interface of TiO2/P3 HT before P3HT was coated. Results revealed that the interface treatment significantly enhances the photovoltaic performance of the cell. The efficiency of the hybrid solar cells reaches 0.28% after interface modification, which is three times higher compared with the un-modified one. We find that except for the increased exciton dissociation efficiency recognized by the previous reports, the suppressing of electron back recombination is another important factor leading to the enhanced photovoltaic performance.     

Fabrication and electrical characteristics of ultrathin (HfO2)x(SiO2)1−x films by surface sol-gel method and reaction-anneal treatment

Hafnium oxide (HfO₂) films were deposited on Si substrates with a pre-grown oxide layer using hafnium chloride (HfCl₄) source by surface sol-gel process, then ultrathin (HfO₂)_x(SiO₂)_1−x films were fabricated due to the reaction of SiO₂ layer with HfO₂ under the appropriate reaction-anneal treatment. The observation of high-resolution transmission electron microscopy indicates that the ultrathin films show amorphous nature. X-ray photoelectron spectroscopy analyses reveal that surface sol-gel derived ultrathin films are Hf-Si-O alloy instead of HfO₂ and pre-grown SiO₂ layer, and the composition was Hf_0.52Si_0.48O₂ under 500 °C reaction-anneal. The lowest equivalent oxide thickness (EOT) value of 0.9 nm of film annealed at 500 °C has been obtained with small flatband voltage of −0.31 V. The experimental results indicate that a simple and feasible solution route to fabricate (HfO₂)_x(SiO₂)_1−x composite films has been developed by means of combination of surface sol-gel and reaction-anneal treatment.     

Enhancement of photodetection based on perovskite/MoS2 hybrid thin film transistor

Perovskite/MoS₂ hybrid thin film transistor photodetectors consist of few-layered MoS₂ and CH₃NH₃PbI₃ film with various thickness prepared by two-step vacuum deposition. By implementing perovskite CH₃NH₃PbI₃ film onto the MoS₂ flake, the perovskite/MoS₂ hybrid photodetector exhibited a photoresponsivity of 10⁴A/W and fast response time of about 40 ms. Improvement of photodetection performance is attributed to the balance between light absorption in the perovskite layer and an effective transfer of photogenerated carriers from perovskite entering the MoS₂ channel. This work may provide guidance to develop high-performance hybrid structure optoelectronic devices.     

Structural and electrical characteristics of RF-sputtered HfO2 high-k based MOS capacitors

The HfO₂ high-k thin films have been deposited on p-type (1 0 0) silicon wafer using RF magnetron sputtering technique. The XRD, AFM and Ellipsometric characterizations have been performed for crystal structure, surface morphology and thickness measurements respectively. The monoclinic structured, smooth surface HfO₂ thin films with 9.45 nm thickness have been used for Al/HfO₂/p-Si metal-oxide-semiconductor (MOS) structures fabrication. The fabricated Al/HfO2/Si structure have been used for extracting electrical properties viz dielectric constant, EOT, barrier height, doping concentration and interface trap density through capacitance voltage and current-voltage measurements. The dielectric constant, EOT, barrier height, effective charge carriers, interface trap density and leakage current density are determined are 22.47, 1.64 nm, 1.28 eV, 0.93 × 10¹⁰, 9.25 × 10¹¹ cm⁻² eV⁻¹ and 9.12 × 10⁻⁶ A/cm² respectively for annealed HfO₂ thin films.     

CH3NH3PbI3/p-Si异质结的光电特性研究

利用一步溶液法在p型Si衬底上生长有机/无机杂化钙钛矿CH3NH3PbI3薄膜,构成CH3NH3PbI3/p-Si异质结。利用原子力显微镜(AFM)、扫描电子显微镜(SEM)对薄膜形貌和结构进行表征,通过无光照和有光照条件下的电流-电压(I-V)、电容-电压(C-V)测试对异质结的光电特性进行研究。I-V测试结果显示CH3NH3PbI3/p-Si异质结具有整流特性,正反偏压为±5V时,整流比大于70,并在此异质结上观察到了光电转换现象,开路电压为10mV,短路电流为0.16uA。C-V测试结果显示Ag/CH3NH3PbI3/p-Si异质结具有与MIS(金属-绝缘层-半导体)结构相似的C-V特性曲线,与理想MIS的C-V特性曲线相比,异质结的C-V曲线整体沿电压轴向正电压方向平移。C-V特性曲线的这种平移表明Ag/CH3NH3PbI3/p-Si异质结界面存在界面缺陷,CH3NH3PbI3层也可能存在固定电荷。这种界面缺陷是导致CH3NH3PbI3/p-Si异质结开路电压的大幅度降低的重要原因。此外,CH3NH3PbI3薄膜的C-V测试结果显示其具有介电非线性特性,其介电常数约为4.64。     

Study on electrical characteristics and reliability of fluorinated HfO2 for HKMG

The dielectric properties and reliability of fluorinated HfO₂ have been studied. The fluorinated HfO₂ dielectric treated by NF₃ plasma showed improved dielectric characteristics but resulted in interfacial layer (IL) regrowth during the fluorine plasma treatment process, which led to an oxide capacitance reduction and poor electrical characteristics. Through the analysis of chemical composition and electrical characteristics, it has been revealed that the Hf-O bonds in HfO₂ layer were converted to Hf-F bonds by the plasma treatment and then the dissociated oxygen diffused to the IL. In order to suppress the IL regrowth, newly fluorinated HfO₂ has been developed. Reliability of fluorinated HfO₂ dielectric was sharply improved without a decrease in the oxide capacitance at fluorine plasma treatment conditions of low power and temperature.     

TiO2基染料敏化太阳能电池的表面修饰及性能研究

采用水热法制备TiO₂浆料,用La(NO₃)₃溶 液浸泡TiO₂薄膜获得修饰电极。用X射线光电子能谱(XPS) 和扫描电子显微镜(SEM)对修饰电极的主要成分及形貌进行表征的结果显示,电极薄膜分为 上下两层,表 面包覆层粒径较大,为La₂O₃颗粒;下层颗粒粒径较小,为TiO₂颗粒。电流-电压测 试结果显示,与修饰 前相比,用La(NO₃)₃溶液浸泡30min获得的膜电极性能最优,使 开路电压和短路电流分别提高了6.8%和 18.5%。电化学阻抗谱(EIS)测试结果表明,相同偏压下,TiO₂/La ₂O₃电极界面复合电阻比TiO₂要大,说明 La₂O₃包覆层在一定程度上抑制了界面的电子复合,改善了电池的光电化学性能。     

近紫外基白光LEDs用NaY(MoO4)2:Eu3+材料的发光特性

采用固相法于550℃灼烧4h,合成了Eu³⁺ 单掺杂的NaY(MoO₄)₂材料,研究了材料的 发光特性。X射线衍射(XRD)结果显示,掺杂少量杂质的材料仍为纯相的NaY(MoO₄)₂。以 393nm波长 近紫外光作为激发源时,NaY(MoO₄)₂:Eu³⁺可以发射主峰位于616nm波长的红色光,对应Eu³⁺的 ⁵D₀-⁷F₂跃迁发射。研究发现,增大Eu³⁺掺杂量 时,对应材料的发射强度会逐渐增大,但是 未发现浓度猝灭现象,通过相应的衰减曲线解释了此结果。测量不同Eu³⁺掺杂量下 , NaY(MoO₄)₂:Eu³⁺的色坐标结果显示,色坐标基本不变,位于红色区域。上述 结果表明, NaY(MoO₄)₂:Eu³⁺在白光LEDs领域有一定的应用潜力。     

WO3/SnO2复合薄膜的制备及光电性能

采用水热法和电化学沉积法,成功制备了包覆有SnO₂纳米颗粒的WO₃纳米棒阵列薄膜,退火处理后形成WO₃/SnO₂异质结复合薄膜。通过改变SnO₂的沉积时间得到了复合薄膜的最佳制备条件。采用XRD,FESEM对WO₃/SnO₂复合薄膜的物相和形貌进行了分析,通过电化学工作站对WO₃/SnO₂复合薄膜的光电性能进行了研究,结果表明,电沉积时间为120 s时,WO₃/SnO₂复合薄膜具有最小的阻抗,且在0.6 V的偏压下光电流密度为0.46 mA/cm²,相比于单一WO₃纳米棒薄膜,表现出更好的光电化学性能。     

原子层沉积氧化铝薄膜对多晶太阳能电池表面钝化的影响

A stack of Al2O3/SiNx dual layer was applied for the back side surface passivation of p-type multi-crystalline silicon solar cells, with laser-opened line metal contacts, forming a local aluminum back surface field （local Al-BSF） structure. A slight amount of Al2O3, wrapping around to the front side of the wafer during the thermal atomic layer deposition process, was found to have a negative influence on cell performance. The different process flow was found to lead to a different cell performance, because of the Al2O3 wrapping around the front surface. The best cell performance, with an absolute efficiency gain of about 0.6% compared with the normal full Al-BSF structure solar cell, was achieved when the Al2O3 layer was deposited after the front surface of the wafer had been covered by a SiNx layer. We discuss the possible reasons for this phenomenon, and propose three explanations as the Ag paste, being hindered from firing through the front passivation layer, degraded the SiNx passivation effect and the Al2O3 induced an inversion effect on the front surface. Characterization methods like internal quantum efficiency and contact resistance scanning were used to assist our understanding of the underlying mechanisms.     

用于白光LED的KNaCa2(PO4)2:Eu2+蓝色荧光粉的发光特性

采用高温固相法合成了蓝色荧光粉KNaCa₂(PO₄)₂:Eu²⁺,利用X射线衍射(XRD)和光谱技术等表征了材料的性能。结果显示,少量Eu 2+的掺入并没有影响KNaCa₂(PO₄)₂的晶体结构。 在399nm近紫外光激发下,KNaCa₂(PO₄)₂:Eu²⁺材料发 射蓝光,发射光谱为400～600nm, 主发射峰位于471nm,对应Eu²⁺的4f^65d1→ 4f⁷跃迁发射;471nm发射峰,对应的激发光 谱为250～450nm,主激发峰位于399nm,与近紫外芯片匹配很好。 以365nm近紫外光作为 激发源时,KNaCa₂(PO₄)₂:Eu²⁺材料的发射强度约为商用蓝色荧光粉BAM:Eu 2+的85%;而以 399nm近紫外光作为激发源时,相较于BAM:Eu²⁺,KNaCa₂(P O₄)₂:Eu²⁺材料具有更强的发射强 度。此外,KNaCa₂(PO₄)₂:Eu²⁺和BAM:Eu²⁺的CIE色坐标接近,均位于蓝 色区域,色坐标分别 为(0.154,0.154)和(0.141,0.112)。研究结果 表明,KN aCa₂(PO₄)₂:Eu²⁺是一种在三基色白光LED中有应用前景的蓝色荧光粉。     

Comparative study of AlGaN/GaN metal-oxide-semiconductor heterostructure field-effect transistors with Al2O3 and HfO2 gate oxide

AlGaN/GaN metal-oxide-semiconductor heterostructure field-effect transistors (MOSHFETs) with Al₂O₃ gate oxide which was deposited by atomic layer deposition (ALD) were fabricated and their performance was then compared with that of AlGaN/GaN MOSHFETs with HfO₂ gate oxide. The capacitance (C)-voltage (V) curve of the Al₂O₃/GaN MOS diodes showed a lower hysteresis and lower interface state density than the C-V curve of the HfO₂/GaN diodes, indicating better quality of the Al₂O₃/GaN interface. The saturation of drain current in the I_D-V_GS relation of the Al₂O₃ AlGaN/GaN MOSHFETs was not as pronounced as that of the HfO₂ AlGaN/GaN MOSHFETs. The gate leakage current of the Al₂O₃ MOSHFET was five to eight orders of magnitude smaller than that of the HfO₂ MOSHFETs.     

New dielectric material system of Nd(Mg1/2Ti1/2)O3–CaTiO3 at microwave frequency

The microwave dielectric properties of (1 − x)CaTiO₃–xNd(Mg_1/2Ti_1/2)O₃ (0.1  x  1.0) ceramics prepared by the conventional solid state method have been investigated. The system forms a solid solution throughout the entire compositional range. The dielectric constant decreases from 152 to 27 as x varies from 0.1 to 1.0. In the (1 − x)CaTiO₃–xNd(Mg_1/2Ti_1/2)O₃ system, the microwave dielectric properties can be effectively controlled by varying the x value. At 1400 °C, 0.1CaTiO₃–0.9Nd(Mg_1/2Ti_1/2)O₃ has a dielectric constant (ε_r) of 42, a Q × f value of 35 000 GHz and a temperature coefficient of resonant frequency (τ_f) of −10 ppm/°C. As the content of Nd(Mg_1/2Ti_1/2)O₃ increases, the highest Q × f value of 43 000 GHz for x = 0.9 is achieved at the sintering temperature 1500 °C.     

p-CuAlO2/(n-, p-)Si异质结的制备与电学性质

采用化学溶液法在n型和p型Si衬底上成功制备了单相CuAlO2薄膜。薄膜的电导率-温度曲线显示,薄膜在200K-300K温度范围内呈热激活导电模式,激活能约为0.3eV。电流-电压特性测试显示,p-CuAlO2/n-Si异质结具有明显的整流特性,开启电压约为1.6V,在±3V处的整流率约为35,而p-CuAlO2/p-Si同型异质结表现出类似肖特基结的电学性质,由于p-CuAlO2导电性远低于p-Si衬底,正向电流受空间电荷限制。     

插层Al2O3对氧化铪基忆阻器的性能优化及多值特性研究

近年来,氧化铪基忆阻器因其优异的阻变性能及与CMOS工艺兼容等特点而被广泛研究。然而,氧化铪基忆阻器仍存在以下问题:1) 器件良率、可靠性、均一性不足;2) Set和Reset 过程中电流突变,导致多值特性较差。为实现氧化铪基忆阻器的性能优化及多值特性,文章在HfO₂表面生长一层1~5 nm Al₂O₃,构造Al₂O₃/HfO₂双介质层忆阻器,并对HfO₂和Al₂O₃的厚度进行优化,最终得到性能显著提升的Al₂O₃/HfO₂双介质层多值忆阻器。该器件呈现出保持性良好的10个不同电阻态(1×10⁴ s@85℃)。由于氧离子在Al₂O₃层的迁移率更低,限制了氧空位细丝生长速率及宽度,且Al₂O₃具有热增强作用,使氧空位分布更均匀,促使氧空位细丝生成/断裂过程由突变转为渐变。该工作为进一步实现氧化铪基忆阻器的性能优化及多值特性提供了参考。