Optical properties of post-annealed ZnO:Al thin films studied by spectroscopic ellipsometry

In this paper, effects of the thermal annealing on the structural, electrical, and optical properties of Al-doped ZnO (ZnO:Al) thin films prepared by reactive radio-frequency sputtering were investigated. From the X-ray diffraction observations, the orientation of ZnO:Al films was found to be a c-axis in the hexagonal structure. The optical properties of the films were investigated by optical transmittance and spectroscopic ellipsometry characterization. Based on Tauc–Lorentz model, the optical constants of ZnO:Al films were extracted in the photon energy ranging from 1.0 to 4.5 eV. Our result showed that the refractive index and extinction coefficient of the films changed consistently with annealing temperature.     

透明导电膜ZnO:Al(ZAO)的组织结构与特性

ZnO:Al(ZAO)是一种简单并半导体氧化物薄膜材料，具有高的载流子浓度和光学禁带宽度，因而具有优异的电学和光学性能，极具应用价值，对于其能级高度简并的ZAO半导体薄膜材料，在较低的温度下，离化杂质散射占主导地位，在较高的温度下，晶格振动散射将成为主要的散射机制；晶界散射仅当晶粒尺寸较小（与电子的平均自由程相当）时才起作用，本文分析了ZAO薄膜的制备方法，晶体结构特性，电子和光学性能以及载流子的散射机制。     

The fabrication and application of ZnO:Al thin films in low-frequency inductively coupled plasma fabricated silicon solar cell

A home-made radio frequency magnetron sputtering is used to systematically study the structural, electrical, and optical properties of aluminum doped zinc oxide (ZnO:Al) thin films. The intensity of the (002) peak exhibits a remarkable enhancement with increasing film thickness. Upon optimization, we achieved low resistivity of 4.2 × 10^− 4 Ω cm and high transmittance of ~ 88% for ZnO:Al films. Based on the present experimental data, the carrier transport mechanism is discussed. It is found that the grain boundary scattering needs to be considered because the mean free path of free carrier is comparable to the grain size. The 80 nm-ZnO:Al thin films are then deposited onto low-frequency inductively coupled plasma fabricated silicon solar cells to assess the effect of ZnO:Al thin films on the performance of the solar cells. Optimized ZnO:Al thin films are identified as transparent and conductive oxide thin film layers.     

The use of nanoscaled Al mid-layer for enhancing the electrical conductivity of ZnO

A nanoscaled Al thin film was placed between two ZnO thin films to form a ZnO/Al/ZnO multilayer thin film structure. Individual Al and ZnO thin films with difference thicknesses were first prepared and characterized for the optical and electrical properties. The multilayer structure was then obtained by depositing individual layers with desired thicknesses in sequence. We show that by appropriate selections of layer thickness, the use of a nanoscaled Al mid-layer in ZnO enhances the electrical conductivity of the ZnO without scarifying its optical transmittance.     

Nitrogen effect on spin-coated ZnO-based p–n homojunctions: structural,optical and electrical characteristics

In this work, ZnO:Al–N/ZnO:Al and ZnO:Ag–N/ZnO:Al homojunctions were deposited by means of spin coating method using precursors obtained by sol gel chemistry. The optical, structural and electrical properties of spin coated undoped and M-doped ZnO thin films (M?=?Al, Ag–N and Al–N) using ammonium hydroxide as a nitrogen source are reported. The films showed the wurtzite type structure with a c-axis (002) preferential orientation. The films showed a surface morphology consisting of wrinkles, which were constituted of nanocrystals in the range of ～?20 nm. The thin films were highly transparent in the visible region of the electromagnetic spectrum. The optical band gap of the films was close to 3.30 eV. Hall Effect measurements indicated that undoped and Al doped ZnO thin films showed an n-type conductivity, whereas ZnO:Al–N and ZnO:Ag–N thin films exhibited p-type conductivity, probably related to the formation of dual acceptor complexes related to nitrogen. Two types of p–n homojunctions (ZnO:Al–N/ZnO:Al and ZnO:Ag–N/ZnO:Al) were fabricated by means of sol–gel spin-coating method. In both cases, a rectifying behavior was observed, as revealed by current–voltage measurements.     

Structural, electrical and optical properties of ZnO:Al films deposited on flexible organic substrates for solar cell applications

Aluminum doped ZnO thin films (ZnO:Al) were deposited on glass and poly carbonate (PC) substrate by r.f. magnetron sputtering. In addition, the electrical, optical properties of the films prepared at various sputtering powers were investigated. The XRD measurements revealed that all of the obtained films were polycrystalline with the hexagonal structure and had a preferred orientation with the c-axis perpendicular to the substrate. The ZnO:Al films were increasingly dark gray colored as the sputter power increased, resulting in the loss of transmittance. High quality films with the resistivity as low as 9.7 × 10^− 4 Ω-cm and transmittance over 90% have been obtained by suitably controlling the r.f. power.     

Preparation of ZnO:Al thin film on transparent TPT substrate at room temperature by RF magnetron sputtering technique

Aluminum doped ZnO thin films (ZnO:Al) deposited on flexible substrates are suitable to be used as transparent conductive oxide (TCO) thin films in solar cells because of the excellent optical and electrical properties. TPT films are a kind of composite materials and are usually used as encapsulation material of solar panels. In this paper, ZnO:Al film was firstly deposited on transparent TPT substrate by RF magnetron sputtering. The structural, optical, and electrical properties of the film were investigated by X-ray diffractometry (XRD), scanning electron microscope (SEM), UV–visible spectrophotometer, as well as Hall Effect Measurement System. Results revealed that the obtained film had a hexagonal structure and a highly preferred orientation with the c-axis perpendicular to the substrate. Also, the film showed a high optical transmittance over 80% in the visible region and a resistivity of about 3.03 × 10^? 1 Ω·cm.     

Aluminum-doped zinc oxide films grown by atomic layer deposition for transparent electrode applications

We obtained zinc oxide films doped with aluminum using atomic layer deposition (ALD). Their morphology, growth mode, optical and electrical properties are studied. Al content dependence is analyzed. Carrier scattering mechanisms in ZnO:Al (AZO) films are investigated from conductivity versus temperature measurements. We also discuss how the film thickness affects its resistivity and optical transmission. The obtained film resistivities, i.e. 7 × 10^?4 ??cm, belong to the lowest reported so far for transparent ZnO:Al films grown by the ALD method.     

Effect of metal (Al, Ga, and In)-dopants and/or Ag-nanoparticles on the optical and electrical properties of ZnO thin films

ZnO thin films were deposited by a sol-gel process using zinc acetate dihydrate and 2-methoxyethanol as starting precursor and solvent, respectively. Ag-nanoparticles were prepared with uniform size (4.4 nm) by the spontaneous reduction method of Ag 2-ethylhexanoate in Dimethyl sulfoxide. The optical and electrical characteristics of ZnO films with the introduction of 3A metal (Al, Ga, and In)-dopants and/or Ag-nanoparticles were evaluated. The optical and electrical properties of metal-doped ZnO films were improved and light scatter, charge emission and the scattering behavior of Ag-nanoparticles incorporated into the ZnO thin film were measured. The introduction of Ag-nanoparticles into metal-doped ZnO films induced a slight decrease in the optical transmittance but an increase in the electrical sheet resistance.     

Plasma emission monitoring (PEM) controlled DC reactive sputtered ZnO:Al thin films

High deposition rate ZnO:Al films have been produced at room temperature by reactive DC sputtering using a plasma emission monitoring (PEM) control system. We have investigated the relationship between structural, optical and electrical properties of the ZnO:Al films. Crystal structures of the films have been studied by X-ray diffraction. Optimum ZnO:Al films, with 17-40 Ω/□ sheet resistance range and transmittance approaching 88% in the visible region, exhibited a hexagonal ZnO structure with preferential (002) orientation and crystallite sizes of about 27 nm. Resistive transparent films displayed a more random orientation showing peaks at (100) and (102) orientations. Dark “metallic” films were shown to consist of mainly zinc. The optimal ZnO:Al film has been determined from a figure of merit based on power losses due to absorption and series resistance in the ZnO:Al films. It is highly transparent, with low resistance, pronounced (002) peak and large crystallite size.     

Structural and optical properties of ZnO films grown on the AAO templates

Structural and optical properties of ZnO films grown on Al substrate and anodic alumina oxide (AAO) templates by rf magnetron reactive sputtering deposition were investigated using X-ray diffraction (XRD), atomic-force microscope (AFM) and photoluminescence (PL). We found that ZnO thin films on Al substrate show good C-axis orientation, while the orientation of ZnO film on AAO templates is disordered, this due to the fact that the crystalline of ZnO is greatly influenced by surface morphology of substrates. PL measurements show a blue band in the wavelength range of 400–500 nm caused by the interstitial Zn in the ZnO films. The intensity of emission peak of ZnO films deposited on AAO templates increases compared with that on the Al substrate. Combining electrical resistivity and carrier concentration measurements, we found that that the blue emission intensity is consistent with the concentration for the interstitial zinc in the ZnO films.     

Optical and electrical properties of electron-irradiated Cu(In,Ga)Se2 solar cells

The optical and electrical properties of electron-irradiated Cu(In,Ga)Se₂ (CIGS) solar cells and the thin films that composed the CIGS solar cell structure were investigated. The transmittance of indium tin oxide (ITO), ZnO:Al, ZnO:Ga, undoped ZnO, and CdS thin films did not change for a fluence of up to 1.5 × 10¹⁸ cm^− 2. However, the resistivity of ZnO:Al and ZnO:Ga, which are generally used as window layers for CIGS solar cells, increased with increasing irradiation fluence. For CIGS thin films, the photoluminescence peak intensity due to Cu-related point defects, which do not significantly affect solar cell performance, increased with increasing electron irradiation. In CIGS solar cells, decreasing J_SC and increasing R_s reflected the influence of irradiated ZnO:Al, and decreasing V_OC and increasing R_sh mainly tended to reflect the pn-interface properties. These results may indicate that the surface ZnO:Al thin film and several heterojunctions tend to degrade easily by electron irradiation as compared with the bulk of semiconductor-composed solar cells.     

New natively textured surface Al-doped ZnO-TCOs for thin film solar cells via magnetron sputtering

Natively textured surface aluminum doped zinc oxide (ZnO:Al) thin films were directly deposited via pulsed direct current (DC) reactive magnetron sputtering on glass substrates. During the reactive sputtering process, the oxygen gas flow rate was varied from 8.5 sccm to 11.0 sccm. The influences of oxygen flow rate on the structural, electrical and optical properties of naturally textured ZnO:Al TCO thin films with milky surface were investigated in detail. Gradual oxygen growth (GOG) technique was developed in the reactive sputtering process for textured ZnO:Al thin films. The light-scattering ability and optical transmittance of the natively textured ZnO:Al TCO thin films can be improved through gradual oxygen growth method while maintaining a low sheet resistance. Typical natively textured ZnO:Al TCO thin film with crater-like surface exhibits low sheet resistance (R_s ～ 4 Ω), high transmittance (T_a > 85%) in visible optical region and high haze value (12.1%).     

Aluminium doped zinc oxide sputtered from rotatable dual magnetrons for thin film silicon solar cells

This study addresses the electrical and optical properties as well as the surface structure after wet-chemical etching of mid-frequency magnetron sputtered aluminium doped zinc oxide (ZnO:Al) films on glass substrates from rotatable ceramic targets. Etching of an as-deposited ZnO:Al film in acid leads to rough surfaces with various feature sizes. The influence of working pressure and substrate temperature on the surface topography after etching was investigated. It was found that the growth model which Kluth et al. applied to films sputtered in radio frequency mode from planar ceramic target can be transferred to film growth from tube target. Furthermore, the influence of Ar gas flow and discharge power on the film properties was investigated. We achieved low resistivity of about 5.4 × 10^− 4 Ω·cm at high growth rates of 120 nm·m/min. Finally, surface textured ZnO:Al films were applied as substrates for microcrystalline silicon solar cells and high efficiencies of up to 8.49% were obtained.     

ZnO/CdTe heterojunctions prepared by r.f. sputtering

ZnO/CdTe heterojunctions were prepared by r.f. sputtering of ZnO films onto p-type CdTe single crystals. The ZnO deposition was carried out using a ZnO target and an Ar-H₂ mixture as the sputtering gas. The ZnO films obtained under these conditions show a very good optical transmission (about 90%) between 0.4 and 0.8 μm and a low resistivity. The electrical properties of the ZnO/CdTe heterojunctions were studied by means of current-voltage (I-V) and capacitance-voltage (C-V) measurements carried out at different temperatures. The dark I-V characteristics show that a multistep tunnelling mechanism controls the transport of charge carriers across the junction. The presence of interface states was shown to play an important role in the electrical properties of the junction. Tentative measurements of the solar energy conversion efficiency gave a value of about 3.5% without any attempt at optimization of the cell parameters.     

Filtered vacuum arc deposition of transparent conducting Al-doped ZnO films

Transparent conducting ZnO:Al and ZnO films of 380-800 nm thickness were deposited on glass substrates by filtered vacuum arc deposition (FVAD), using a cylindrical Zn cathode doped with 5-6 at.% Al or a pure Zn cathode in oxygen background gas with pressure P = 0.4-0.93 Pa. The crystalline structure, composition and electrical and optical properties of the films were studied as functions of P. The films were stored under ambient air conditions and the variation of their resistance as function of storage time was monitored over a period of several months.The Al concentration in the film was found to be 0.006-0.008 at.%, i.e., a few orders of magnitude lower than that in the cathode material. However, this low Al content influenced the film resistivity, ρ, and its stability. The resistivity of as-deposited ZnO:Al films, ρ = (6-8) × 10^− 3 Ω cm, was independent of P and lower by a factor of 2 in comparison to that of the ZnO films deposited by the same FVAD system. The ρ of ZnO films 60 days after deposition increased by a factor of ∼ 7 with respect to as-deposited films. The ZnO:Al films deposited with P = 0.47-0.6 Pa were more stable, their ρ first slowly increased during the storage time (1.1-1.4 times with respect to as-deposited films), and then stabilized after 30-45 days.     

Non-linear optical and electrical properties of ZnO doped Ni Thin Films obtained using spray ultrasonic technique

In the present study zinc oxide doped Nickel thin films (ZnO:Ni) were deposited on glass substrates using a chemical spray ultrasonic technique. The effect of Ni concentration on the structural, electrical, optical, and non-linear optical (NLO) properties of the ZnO:Ni thin films was investigated. The films were analyzed using X-ray diffraction (XRD), profilometry and optical transmittance. A polycrystalline structure with a preferential growth along the ZnO (002) plane was found, the optical transmittance was found to be higher than 80% and the band gap (E_g) varied from 3.19 to 3.27 eV. The value of the electrical conductivity was found. Moreover, the effective non-linear quadratic and cubic electronic susceptibilities of thin film samples were determined by the SHG and THG techniques, working at 1064 nm.     

Influence of working pressure on ZnO:Al films from tube targets for silicon thin film solar cells

Mid-frequency magnetron sputtering of aluminum doped zinc oxide films (ZnO:Al) from tube ceramic targets has been investigated for silicon based thin film solar cell applications. The influence of working pressure on structural, electrical, and optical properties of sputtered ZnO:Al films was studied. ZnO:Al thin films with a minimum resistivity of 3.4 × 10⁻⁴ Ω cm, high mobility of 50 cm²/Vs, and high optical transmission close to 90% in visible spectrum region were achieved. The surface texture of ZnO:Al films after a chemical etching step was investigated. A gradual increase in feature sizes (diameter and depth) was observed with increasing sputter pressure. Silicon based thin film solar cells were prepared using the etched ZnO:Al films as front contacts. Energy conversion efficiencies of up to 10.2% were obtained for amorphous/microcrystalline silicon tandem solar cells.     

Preparation of Al-doped ZnO thin films as transparent conductive substrate in dye-sensitized solar cell

We have prepared aluminum-doped Zinc oxide (AZO) thin films on glass substrates by rf magnetron sputtering technique using ZnO ceramic target in pure argon gas with different aluminum concentrations. The bandgap of the ZnO films slightly widens with increase in Al content and the lowest sheet resistance of AZO films with Al concentration of 4.3 at.% was obtained. The effects of post-annealing treatment on structural, electrical and optical properties of the AZO thin films were investigated. Using AZO thin film with 4.3 at.% Al as the transparent substrate, a titanium dioxide based dye-sensitized solar cell was constructed and a solar to electrical energy conversion efficiency of 2.9% was achieved under AM 1.5 solar simulated sunlight.     

Effect of rf power on the properties of rf magnetron sputtered ZnO:Al thin films

Aluminum doped zinc oxide ZnO:Al thin films were prepared using rf magnetron sputtering. The preparation was performed at room temperature and low pressure with varying rf power between P = 50 W and P = 500 W. Structural, electrical and optical film properties were studied depending on rf power. Special attention was paid to correlations among film structure, sheet resistance and optical transmission. Films with largest crystallite size exhibited highest optical transmission, but not lowest electrical resistivity. An explanation for this finding was sought in terms of the amount of Al atoms incorporated in the films and the places they occupy, parameters which are in turn related to rf power.