Atmospheric plasma deposition of diamond-like carbon coatings

The atmospheric pressure plasma-enhanced chemical vapor deposition of diamond-like carbon (DLC) has been investigated. The DLC coatings were grown with a mixture of acetylene, hydrogen and helium that was fed through a linear plasma source. The plasma was driven with radio frequency power at 27.12 MHz. Deposition rates exceeded 0.10 µm/min at substrate temperatures between 155 and 200 °C. Solid-state carbon-13 nuclear magnetic resonance revealed that the coatings contained approximately 43% sp²-bonded carbon and 57% sp³-bonded carbon. Coefficient of friction values for the coatings were found to be 0.24 ± 0.02, which is within the range observed for vacuum deposited DLC.     

Characterization of physical and biomedical properties of nitrogenated diamond-like carbon films coated on polytetrafluoroethylene substrates

A technique to coat hydrogen-free diamond-like carbon (DLC) films on polytetrafluoroethylene (PTFE) substrates has been developed by sputtering of a negatively biased graphite target in a mixture of argon and nitrogen plasma. The coated films were characterized by various methods to investigate their chemical, electronic features, and particularly their biomedical properties. DLC films produced by this method have up to 20% sp³ carbon bonds depending on the nitrogen concentration in the plasma. Raman spectroscopy revealed that, bond-disorder increases with nitrogen doping. The average grain size of DLC decreases in the nitrogen doped samples by almost 30%. The roughness of the uncoated PTFE substrate surfaces decreased dramatically from 660 nm to 170 nm after DLC coating. However, the nitrogen contents in the plasma have little effects on the roughness, the cluster size, and shapes. Electronic band gap of the samples decreases with adding nitrogen from ~ 2 eV in nitrogen-free samples to ~ 1 eV in nitrogenated samples. Lower adhesion and aggregation of platelets on PTFE surfaces coated with DLC-10% nitrogen and DLC-20% nitrogen have been observed while there is greater adhesion of platelets on DLC-30% nitrogen and DLC-40% nitrogen.     

The effect of refractive index on the friction coefficient of DLC coated polymer substrates

This paper describes the enhanced mechanical performance that can be achieved by the application of diamond-like carbon (DLC) coatings to polymer substrates. The polymers coated are silicone and polyethylene, and the effect on the friction coefficient is studied. Film adhesion is found to depend on the DLC film refractive index (n), whereas the friction is largely independent of n in the range studied. Films were deposited from a He/C₂H₂ mixture at 20 Pa (0.15 Torr) on to the polymer substrates placed on a 10-cm-diameter electrode driven at 13.56 MHz. Film growth was monitored by in-situ ellipsometry (at 675 nm), which was performed on a glass slide placed near the polymer substrate. Friction measurements were obtained using a pin-on-disk tribometer, and measurements were carried out using a stainless-steel pin at a linear speed of 6 cm s⁻¹. Film adhesion was evaluated using a pull-adhesion tester. It was found that DLC coatings adhere well to the polymer substrates and can significantly reduce the friction coefficient of polymers such as silicone. Higher refractive index films (which are harder and have a higher mechanical strength) were found to have a poorer adhesion and provide a slightly increased friction on the polymer surface when compared to lower-index films. This study indicates that DLC may be used to enhance the tribological properties of polymers with potential applications in the biomaterials and light-engineering industries.     

Localized DLC etching by a non-thermal atmospheric-pressure helium plasma jet in ambient air

Using a versatile atmospheric-pressure helium plasma jet, diamond-like carbon (DLC) films were etched in ambient air. We observed that the DLC films are etched at a nominal rate of around 60 nm/min in the treated area (230 μm in diameter) during a 20-min exposure. The etching rate increased after the initial 10-min exposure. During this period, the flat DLC surface was structurally modified to produce carbon nanostructures with a density of ~ 2.4 × 10¹¹ cm^− 2. With this increase in surface area, the etching rate increased. After 20 min, the DLC film had a circular pattern etched into it down to the substrate where silicon nanostructures were observed with sizes varying from 10 nm to 1 μm. The initial carbon nanostructure formation is believed to involve selective removal of the sp²-bonded carbon domains. The carbon etching results from the formation of reactive oxygen species in the plasma.     

Synthesis and mechanical properties of carbon nanotube/diamond-like carbon composite films

Diamond-like carbon (DLC) coatings were successfully deposited on carbon nanotube (CNT) films with CNT densities of 1 × 10⁹/cm², 3 × 10⁹/cm², and 7 × 10⁹/cm² by a radio frequency plasma-enhanced chemical vapor deposition (CVD). The new composite films consisting of CNT/DLC were synthesized to improve the mechanical properties of DLC coatings especially for toughness. To compare those of the CNT/DLC composite films, the deposition of a DLC coating on a silicon oxide substrate was also carried out. A dynamic ultra micro hardness tester and a ball-on-disk type friction tester were used to investigate the mechanical properties of the CNT/DLC composite films. A scanning electron microscopic (SEM) image of the indentation region of the CNT/DLC composite film showed a triangle shape of the indenter, however, chippings of the DLC coating were observed in the indentation region. This result suggests the improvement of the toughness of the CNT/DLC composite films. The elastic modulus and dynamic hardness of the CNT/DLC composite films decreased linearly with the increase of their CNT density. Friction coefficients of all the CNT/DLC composite films were close to that of the DLC coating.     

Properties of DLC films deposited by an oxyacetylene flame

Diamond-like carbon (DLC) films were obtained by spinning a tungsten carbide substrate at a high speed using an oxyacetylene flame. The films deposited at a typical experimental condition of substrate temperature of 810°C, rotation of 600 rpm and 3 h deposition time, exhibited an uniform, very smooth, hard and glassy surface covering the entire exposed face of the substrate. These films were identified as DLC by their characteristic broad Raman spectra centered at 1554 cm⁻¹ and micro-Vicker's hardness >3400 kg mm⁻². For substrate temperatures <800°C the film started losing the uniform glassy surface and the hardness deteriorated. For temperatures >950°C the film was still hard and shiny, but black in color. DLC films were also obtained in a wide range of speeds of rotation (300–750 rpm), as long as the temperature remained close to 850°C.     

Structural and mechanical properties of DLC films prepared by bipolar PBII&D

In the present study, diamond-like carbon (DLC) films were prepared by bipolar plasma based ion implantation and deposition (PBII&D), and the structural and mechanical properties of the DLC films deposited on Si substrates were evaluated by Raman spectroscopy. In the PBII&D processing, the positive and negative pulse voltages were varied from 1 to 3 kV and from ? 1 to ? 15 kV, respectively. With an increase in the pulse voltages, the Raman G-peak position and I(D) / I(G) ratio increased, and the G-peak full width at half maximum (FWHM(G)) decreased, indicating graphitization of the DLC films. In the low wavenumber regime, the FWHM(G) increases when the G-peak shifts to higher wavenumbers, reaching a maximum value at around 1540 cm^? 1, and then decreases. This behavior was due to the structural changes occurring in the DLC films with an increase in the wavenumber. DLC to polymer-like carbon (PLC) transition occurred in the low wavenumber regime, and DLC to graphite-like carbon (GLC) transition occurred in the high wavenumber regime. Further, two different trends were observed in the relationship between the mechanical properties (hardness, elastic modulus, and internal stress) of the DLC films and the FWHM(G), originating from the structural change from DLC to GLC and PLC.     

Preparation,characterization and properties of Cr-incorporated DLC films on magnesium alloy

Cr-incorporated diamond-like carbon (Cr-DLC) films were deposited on AZ31 magnesium alloy as protective coatings by a hybrid beams deposition system, which consists of a DC magnetron sputtering of Cr target (99.99%) and a linear ion source (LIS) supplied with CH₄ precursor gas. The Cr concentration (from 2.34 to 31.5 at.%) in the films was controlled by varying the flow ratio of Ar/CH₄. Scanning electron microscopy (SEM), transmission electron microscopy (TEM), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) were used to investigate the microstructure and composition of Cr-DLC films systematically. An electrochemical system and a ball-on-disk tribotester were applied to test the corrosion and tribological properties of the film on the AZ31 substrate, respectively. At low Cr doping (2.34 at.%), the film mainly exhibited the feature of amorphous carbon, while at high doping (31.5 at.%), chromium carbide crystalline phase occurred in the amorphous carbon matrix of the film. In this study, all the prepared Cr-DLC films showed higher adhesion to AZ31 than the DLC film. Especially for the film with low Cr doping (2.34 at.%), it owned the lowest internal stress and the highest adhesion to substrate among all the films. Furthermore, this film could also improve the wear resistance of magnesium alloy effectively. But, none of the films could improve the corrosion resistance of the magnesium alloy in 3.5 wt.% NaCl solution due to the existence of through-thickness defects in the films.     

Effect of oxygen plasma treatment on non-thrombogenicity of diamond-like carbon films

The non-thrombogenicity of oxygen-plasma-treated DLC films was investigated as surface coatings for medical devices. DLC films were deposited on polycarbonate substrates by a radio frequency plasma enhanced chemical vapor deposition method using acetylene gas. The deposited DLC films were then treated with plasma of oxygen gas at powers of 15 W, 50 W, and 200 W. Wettability was evaluated by water contact angle measurements and the changes in surface chemistry and roughness were examined by X-ray photoelectron spectroscopy and atomic force microscope analysis, respectively. Each oxygen-plasma-treated DLC film exhibited a hydrophilic nature with water contact angles of 11.1°, 17.7° and 36.8°. The non-thrombogenicity of the samples was evaluated through the incubation with platelet-rich plasma isolated from human whole blood. Non-thrombogenic properties dramatically improved for both 15 W- and 50 W-oxygen-plasma-treated DLC films. These results demonstrate that the oxygen plasma treatment at lower powers promotes the non-thrombogenicity of DLC films with highly hydrophilic surfaces.     

Comparison of the wear particle size distribution of different a-C coatings deposited by vacuum arc

For biomedical application in the field of artificial hip joints diamond-like carbon (DLC) coatings have been widely studied due to their tribological properties. The wear particles as the main factor limiting the life expectancy of hip joints have attracted more and more interest, not only the number of them, but also the distribution of their size. In this study we have deposited DLC coatings on stainless steel (P2000) by a vacuum arc adjustable from anodic to cathodic operation mode, with the anode–cathode diameter ratio of d_a/d_c = 3/1 at a DC bias of − 250 V to − 1000 V. To improve the adhesion of the DLC coating on P2000, titanium as a metallic interlayer was deposited by cathodic vacuum arc evaporation. The internal structure of the coating was investigated by the visible Raman spectroscopy with the four-Gaussian curve fitting method. Comparing the results with the previous work (coatings deposited with d_a/d_c = 1/1), it was found that the anode–cathode diameter ratio has an effect on the structure (e.g. I_D/I_G) as well as the wear particle size distribution. It was shown that the maximum of the frequency distribution e.g. at − 1000 V bias can be shifted to below 1 μm with increasing d_a/d_c.     

Duplex DLC coatings fabricated on the inner surface of a tube using plasma immersion ion implantation and deposition

A duplex plasma immersion ion implantation and deposition (PIIID) process, involving carbon ion implantation and diamond-like carbon (DLC) deposition, is proposed to modify the inner surface of a tube. In the research, samples of GCr15 bearing steel were placed inside a tube in the vacuum chamber. After the vacuum chamber was evacuated to a base pressure of 6 × 10^− 3 Pa, C₂H₂ gas was introduced into the chamber, and the tube was biased by a negative pulsed bias. Since a pulsed glow discharge (PGD) plasma can be formed by the bias, carbon ion implantation and DLC film deposition process can be obtained by biasing the tube with a high and low bias, respectively. To synthesize different DLC films, single PIIID processes employing a low voltage (several kV) PGD method and duplex PIIID processes combining the high (several tens kV) and low voltage PGD techniques were carried out. The as-synthesized films were characterized by Raman spectrum, nano-indentation, scratch, tribological and electrochemical tests. Raman results show that duplex DLC films were synthesized by this duplex PIIID process. In addition, compared with the single DLC film synthesized by the low voltage PGD process, the duplex DLC films can obtain a high wear and corrosion resistances. Furthermore, using this duplex PIIID method, batch treatment of outer-rings of the bearing was realized.     

Electron field emission from filtered arc deposited diamond-like carbon films using Au and Ti layers

In this work, tetrahedral diamond-like carbon (DLC) films are deposited on Si, Ti/Si and Au/Si substrates by a new plasma deposition technique — filtered arc deposition (FAD). Their electron field emission characteristics and fluorescent displays of the films are tested using a diode structure. It is shown that the substrate can markedly influence the emission behavior of DLC films. An emission current of 0.1 μA is detected at electric field E_DLC/Si=5.6 V/μm, E_DLC/Au/Si=14.3 V/μm, and E_DLC/Ti/Si=5.2 V/μm, respectively. At 14.3 V/μm, an emission current density J_DLC/Si=15.2 μA/cm², J_DLC/Au/Si=0.4 μA/cm², and J_DLC/Ti/Si=175 μA/cm² is achieved, respectively. It is believed that a thin TiC transition layer exists in the interface between the DLC film and Ti/Si substrate.     

X-ray reflectivity analysis on initial stage of diamond-like carbon film deposition on Si substrate by RF plasma CVD and on removal of the sub-surface layer by oxygen plasma etching

The multi-layered structure of thin diamond-like carbon (DLC) films was investigated by X-ray reflectivity (XRR) analysis. Thin DLC films were deposited on Si substrate by RF plasma chemical vapor deposition (CVD) from acetylene source gas with short duration of plasma operation from 0.08 to 4.99 s. It was confirmed from XRR analysis that the thin DLC film on Si substrate had 3 layers consisting of a subsurface layer on the grown surface, a mixing layer at the interface to Si substrate, and a bulk-DLC layer sandwiched between the 2 layers. The 3 layers had been formed in 0.08 s at beginning of deposition with distinctive bulk-DLC layer of 1.7 nm thick already appeared due to extremely higher deposition rate only at the initial stage of CVD. The thickness of bulk-DLC layer increased with increasing CVD duration while both the mixing layer of higher density and the sub-surface layer of extremely low density continuously existed. By oxygen plasma etching, it was confirmed by XRR analysis that the sub-surface layer was clearly removed and another layer of lower density than the bulk DLC appeared.     

Anti-adhesion performance of various nitride and DLC films against high strength steel in metal forming operation

High strength steel (HSS) is widely used for automobile reinforcement parts and the quantity required is rapidly grown. However, the strength and hardness of the steel are relatively high, its formability is very low and adhesion to tool material can be easily found under forming operation. This paper aimed to evaluate the anti-adhesion performance of commercial nitride and DLC films coated on cold work tool steel against HSS in forming operation. The friction coefficient and wear rate of the non-coated ball (SKD11; hardness 60 ± 2 HRC), balls coated with TiN-PVD, TiCN-PVD, AlTiN-PVD, Nitride + CrN and DLC have been evaluated in sliding contact against SPFH 590 (JIS) disk. The scratch and nano-indentation tests were done on each type of coated tools to characterize the adhesive strength between the film and the substrate, and the hardness and the elastic modulus, respectively. The anti-adhesion performance of various films coated tool in metal stamping process was also investigated by performing U-bending experiment. The cold roll carbon steel; SPCC (JIS) was also used to compare a material transfer problem to the case of using HSS (JIS: SPFH590). As the results, for HSS sheet, the adhesion of workpiece material on a non-coated die surface was detected after 49 strokes whereas adhesion could not be found in case of stamping SPCC sheet up to 500 strokes. The TiCN, AlTiN, and Nitride + CrN films showed good anti-adhesion performance when forming HSS, while the TiN and DLC films did not provide the satisfied results.     

Preparation of diamond like carbon thin films above room temperature and their properties

Diamond like carbon (DLC) thin films were deposited on p-type silicon (p-Si), quartz and ITO substrates by microwave (MW) surface-wave plasma (SWP) chemical vapor deposition (CVD) at different substrate temperatures (RT ∼ 300 °C). Argon (Ar: 200 sccm) was used as carrier gas while acetylene (C₂H₂: 20 sccm) and nitrogen (N: 5 sccm) were used as plasma source. Analytical methods such as X-ray photoelectron spectroscopy (XPS), FT-IR and UV–visible spectroscopy were employed to investigate the structural and optical properties of the DLC thin films respectively. FT-IR spectra show the structural modification of the DLC thin films with substrate temperatures showing the distinct peak around 3350 cm^− 1 wave number; which may corresponds to the sp² C–H bond. Tauc optical gap and film thickness both decreased with increasing substrate temperature. The peaks of XPS core level C 1 s spectra of the DLC thin films shifted towards lower binding energy with substrate temperature. We also got the small photoconductivity action of the film deposited at 300 °C on ITO substrate.     

Surface properties and biological behaviour of Si-DLC coatings fabricated by a multi-target DC–RF magnetron sputtering method for medical applications

The Si-incorporated diamond-like carbon (DLC) coatings deposited on AISI 316 LVM medical steel using magnetron sputtering method are currently not widely described in the literature, especially in terms of their biological response. Therefore, in this study both the haemocompatibility and cytotoxicity, as well as the surface properties of the Si-DLC films prepared by multi-target DC–RF magnetron sputtering were assessed. According to the XPS analysis the content of Si in the obtained coatings varied from ~ 4 at.% up to ~ 16 at.%. SEM investigations showed that the surface of the Si-DLC coatings is uniform and homogenous without any local defects. The surface energy measurements and FTIR analysis demonstrated that hydrophilicity and polarity of the examined surfaces changes with the varying Si-concentration. The evaluation of biological response towards the deposited coatings revealed that the increasing concentration of Si suppresses the platelet adhesion and decreases their activation level. Moreover, the results of the live/dead test indicated that the examined Si-DLC coatings are not cytotoxic, regardless of the Si concentration. Only a slight decrease in the endothelial cells' proliferation was observed with the growing Si content. Hence, it was concluded that the Si-DLC layer with the Si concentration ~ 16 at.% would be the most bio- and haemocompatible.     

Electrical and optical properties of diamond-like carbon films deposited by pulsed laser ablation

Pulsed laser ablation of a graphite target was carried out by ArF excimer laser deposition at a laser wavelength of 193 nm and fluences of 10 and 20 J/cm² to produce diamond-like carbon (DLC) films. DLC films were deposited on silicon and quartz substrates under 1 × 10^? 6 Torr pressure at different temperatures from room temperature to 250 °C. The effect of temperature on the electrical and optical properties of the DLC films was studied. Laser Raman Spectroscopy (LRS) showed that the DLC band showed a slight increase to higher frequency with increasing film deposition temperature. Spectroscopic ellipsometry (SE) and ultraviolet–visible absorption spectroscopy showed that the optical band gap of the DLC films was 0.8–2 eV and decreased with increasing substrate temperature. These results were consistent with the electrical resistivity results, which gave values for the films in the range 1.0 × 10⁴–2.8 × 10⁵ Ω cm and which also decreased with deposition temperature. We conclude that at higher substrate deposition temperatures, DLC films show increasing graphitic characteristics yielding lower electrical resistivity and a smaller optical band gap.     

Diamond-like carbon sintered compacts formed by spark plasma sintering

A spark plasma sintering (SPS) method was utilized for the novel production of diamond-like carbon (DLC) compacts. Two amorphous carbon powders with different particle sizes (45 μm and 24 nm diameter) were employed as starting materials for the sintering experiments. The carbon powders were sintered using a SPS system at various sintering temperatures and holding times. The structural properties of the sintered compacts were evaluated using X-ray diffraction (XRD) analysis and high-resolution transmission electron microscopy (HRTEM). Disk-shaped compacts were obtained by sintering the powder with a particle diameter of 45 μm, although the compacts were very brittle and easily broken. However, sintering of the 24 nm diameter powder particles at temperatures of 1473 to 1573 K with a holding time of 300 s led to the successful production of sintered compacts without breakage. Reflection peaks related to graphite structure were observed in XRD patterns of the compacts sintered from the 24 nm diameter particles. HRTEM analysis revealed that the compacts sintered at 1473 K with a holding time of 300 s had an amorphous structure and consisted of 34% sp³ carbon bonding. Evaluation of the structural properties indicated that sintered compacts with DLC structure could be created by the SPS method with 24 nm diameter amorphous carbon particles.     

A superhard diamond-like carbon film

A superhard hydrogen-free amorphous diamond-like carbon (DLC) film was deposited by pulsed arc discharge using a carbon source accelerator in a vacuum of 2×10⁻⁴ Pa. The growth rate was about 15 nm/min and the optimum ion-plasma energy was about 70 eV. The impact of doping elements (Cu, Zr, Ti, Al, F(Cl), N) on the characteristics of DLC films deposited on metal and silicon substrates was studied aiming at the choice of the optimum coating for low friction couples. The microhardness of thick (≥20 μm) DLC films was studied by Knoop and Vickers indentations, medium thick DLC films (1–3 μm) were investigated using a ‘Fischerscope’, and Young's module of thin films (20–70 nm) was studied by laser induced surface acoustic waves. The bonds in DLC films were investigated by electron energy loss spectroscopy (EELS), X-ray excited Auger electron spectroscopy (XAES), and X-ray photoelectron spectroscopy (XPS). The adhesion of DLC films was defined by the scratch test and Rockwell indentation. The coefficient of friction of the Patinor DLC film was measured by a rubbing cylinders test and by a pin-on-disk test in laboratory air at about 20% humidity and room temperature. The microhardness of the Patinor DLC film was up to 100 GPa and the density of the film was 3.43–3.65 g/cm³. The specific wear rate of the Patinor DLC film is comparable to that of other carbon films.     

Antibacterial property of DLC film coated on textile material

To evaluate the antibacterial property for diamond-like carbon films (DLC), DLC films were coated on textile material (cotton fibres) using a plasma-based ion implantation (PBII). Raman spectra show the DLC films were successfully coated on the cotton fibres. An antibacterial property of DLC film against two types of bacteria (Staphylococcus aureus, and Klebsiella pneumoniae) was investigated by the standard evaluation technique International Organization for Standardization (ISO) 20743. After incubation for 18 h, the number of cell colonies of the normal cotton fibres increased 100 times more than that of the initial condition. In contrast with the cotton fibres with DLC coating, no active bacteria could be observed after incubation for 18 h. X-ray photoelectron spectroscopy confirms that DLC coating formed C–H bond on cotton surface. Consequently, DLC film coating is a promising method to inhibit the increase of active bacteria. The DLC coatings are expected for biomedical applications with antibacterial property for coating of the commercial items.