Influence of moisture on BCN (low-K) film for interconnection reliability

The integration of low dielectric constant (low-K) interlayers and Cu wiring is necessary to produce next-generation LSI devices. Low-K films of porous type have been investigated to reduce a dielectric constant (K value). However, most porous low-K materials have faced a serious problem of water incorporation during the wet processes used in making the interconnections. Thus, the influence of moisture on boron carbon nitride (BCN) films is important to investigate. To study water-treated BCN films, we measured the current-versus-voltage (I–V) and capacitance-versus-voltage (C–V) characteristics of BCN films, using an MIS (mercury electrode/BCN/Si substrate) structure. We found that both the leakage current and dielectric constant of BCN films decrease as the film's carbon-composition ratio increases. D₂O detection using thermal desorption spectroscopy (TDS) reveals that BCN films with carbon-composition ratios greater than 30% can suppress the incorporation of water into the film. Desorption of hygroscopic water from the BCN film occurred at temperatures as low as 390 °C, which is a normal LSI-production process temperature. The use of BCN film appears to resolve the serious problem of water incorporation into the porous low-K materials. In addition, we have investigated a conduction mechanism resulting from the water protons, based on the frequency dependence of the BCN film impedance before and after water treatment.     

Metallization of polyimide film by wet process

The interfacial adhesion strength of metallized polyimide (BPDA/ODA/PDA) has been studied with respect to polyimide surface molecular structure, reactions during electroless nickel deposition, baking, copper electroplating, and thickness of polyimide film. Each factor is discussed in terms of its influence on the peel strength. For practical application, operation at optimized conditions for each step of the metallization process is essential for sustaining the mechanical integrity of the copper/polyimide laminate. © 1994 John Wiley & Sons, Inc.     

Synthesis of methyl boron nitride film as low-k insulating film for LSI interconnection

Low dielectric constant (k) materials for the ULSI interconnect insulator are required to meet the fast development of high-speed devices. We have investigated low-k material of boron nitride containing methyl (methyl boron nitride) by using tris-di-methyl-amino-boron (TMAB) gas. The dielectric constant (k) of the film decreases with decreasing RF plasma power and the k value of the methyl BN film can be achieved as low as 1.8 at 10 W RF plasma power.Absorption band of the film was observed at 2960 cm^? 1 due to unsymmetrical stretching mode of C–H in CH₃. It is thought that increasing C–H bond with low polarizability and reducing CN bond with high polarizability can realize a lower k value. The film has also high resistivity of more than 1 × 10⁹ Ω cm and sufficient Young modulus of more than 26 GPa for the interlayer of LSI interconnection. There is a possibility that the dielectric constant can be decreased keeping the BN structure with high strength. The methyl BN film is an extremely attractive material as low-k material of next generation devices.     

干法与湿法乙炔发生工艺的对比

电石法乙炔发生装置是电石法聚氯乙烯生产的关键设备,对同时运行的湿法和干法各一套乙炔发生装置的运行状况进行了对比。     

湿法磷酸的净化技术

阐述湿法磷酸净化的基本原理和主要方法,介绍了国外已实现产业化的几种湿法磷酸净化工艺流程和云南三环化工有限公司进行湿法磷酸净化技术研究的基本情况。并提出了今后开展湿法磷酸净化技术产业化的建议。     

Interaction analysis and geometric interconnection decoupling for networks of process systems

The effects of interactions between nonlinear subprocesses on the stabilizability of plantwide systems via the concept of dissipative systems are studied. Conditions for which controlled variables of each interconnected subprocess can be driven to and maintained at their desired values are established through the application of interconnection decoupling techniques. The resulting decoupling feedback law encodes the interaction effects between subprocesses and determines the required information structure for achieving desired control performance using distributed control laws. The proposed constructive approach leads to new criteria for the selection of manipulated and controlled variables that guarantee plantwide stability. © 2013 American Institute of Chemical Engineers AIChE J, 59: 2795–2809, 2013     

Mass transfer and reaction process of the wet desulfurization reactor with falling film by cross-flow scrubbing

In the present study, a series of wet flue gas desulfurization experiments have been carried out in comparison with different slurry feeding ways, i.e., by series connection and by parallel connection, by means of cross-flow scrubbing with falling film. The experiment results show that there is optimal desulfurization performance for the slurry feeding way by series connection. A liquid side mass transfer-reaction model and desulfurization mass transfer by cross-flow scrubbing model have been developed. The pH values of the outlet slurry inside the reactor and the ion concentration distributions of H₂SO₃, HSO₃⁻ and SO₃²⁻ along the axial direction of the tubes were obtained by analyzing and calculating the models. The calculation values agree well with the experimental values. It shows that the models can predict well the ion concentration distributions along the axial direction of the tubes. This work was presented at the 6 ^th Korea-China Workshop on Clean Energy Technology held at Busan, Korea, July 4–7, 2006.     

湿法乙炔发生装置改造

从备料系统、发生系统、水系统、气系统4方面对湿法乙炔发生装置进行了改造,使单台发生器的产气量由2 000 m3/h提高到2 500 m3/h,并减轻了操作人员和检修人员的劳动强度。     

湿式氨法脱硫工艺及应用

随着二氧化硫对环境的污染越来越严重,国家环保总局对烟气二氧化硫排放控制严格,烟气脱硫显得日益重要。简单介绍了湿式氨法烟气脱硫技术的工艺流程及实际应用情况。湿式氨法脱硫工艺具有原料易得、脱硫塔不易结垢、不产生废水、副产品硫酸铵可作为农用肥料,减少了对环境的二次污染等特点,是较适合我国国情的烟气脱硫技术。     

壳聚糖纺丝原液制备及湿法纺丝工艺初探

研究了壳聚糖纺丝原液在真空脱泡和静置脱泡条件下的表观牯度和特性粘数的变化规律,讨论了尿素、醋酸钠等添加剂对纺丝原液性能的影响,在模拟纺丝设备上进行了纺丝,对纤维力学性能进行了初步分析.结果表明:真空脱泡条件下,壳聚糖纺丝原液粘度随脱泡时间的增加呈先下降后上升的趋势;在静置脱泡条件下,原液粘度呈下降趋势,随着时间的增加,其粘度下降趋缓;在壳聚糖纺丝原液中加入醋酸钠可提高原液的粘度,加速冻胶的形成;加入尿素,纺丝原液粘度下降,纺丝原液中的醋酸钠与壳聚糖摩尔比为0.2～0.4时,纤维力学性能较好.     

草甘膦母液湿式催化氧化处理技术

介绍了草甘膦母液的主要化学成分,分析了湿式催化氧化母液处理技术的难点(催化剂的研发,设备及管道堵塞,设备腐蚀,氯化钠的出路),提出了解决方案。     

Characterization of wet microalgal cells pretreated with steam for lipid extraction

Steam pretreatment was employed to disrupt microalgal cells for lipids extraction.Effects of steam pre-treatment on microstructure of microalgal cells were investigated through scanning electron microscopy(SEM) and transmission electron microscopy (TEM).Effect of treatment on lipid extraction was also stud-ied.Microalgal cell walls were distorted after steam pretreatment due to the hydrolysis of organic macro-molecules contained in cell wall.Maximum curvature was increased from 1.88 × 10-6 m-1 to 1.43 × 10-7 m-1 after treatment with the steam at 130 ℃.The fractal dimension of microalgal cells increased from 1.25 to 1.30 after pretreatment for 15 min,and further increased to 1.47 when the pre-treatment time was increased to 60 min.Increased steam pretreatment temperature and time enhanced the hydrolysis of organic macromolecules,and finally destroyed microalgal cell walls at pretreatment temperature of 130 ℃ and pretreatment time of 60 min.Lipid extracted from wet microalgal was signif-icantly increased (2.1-fold) after pretreatment.     

The integration of spectroscopic and process data for enhanced process performance monitoring

Batch process performance monitoring has been achieved primarily using process measurements with the extracted information being associated with the physical parameters of the process. With increasing attention now being paid to the application of on‐line real‐time process analytics through spectrometry, together with the FDA Process Analytical Technologies (PAT) initiative, the use of spectroscopic information for enhanced monitoring of reactions is gaining impetus. The harmonious integration of process data and spectroscopic data then becomes a major challenge. By integrating the process and spectroscopic measurements for multivariate statistical data modelling and analysis, it is conjectured that improved process understanding and fault diagnosis can be achieved. An investigation into combining process and spectral data using multiblock and multiresolution analysis is proposed and the results from the analysis of experimental data from two industrial application studies are presented to demonstrate the improvements achievable in terms of process performance monitoring and fault diagnosis.     

Dry etching properties of methyl-BCN film with C4F8 gas for Cu/low-k interconnection

Methyl-BCN is an attractive low-k material for the fabrication of next generation LSI device system. This paper describes dry etching of methyl-BCN film in order to develop interconnections for future devices. The methyl-BCN films were deposited by plasma-assisted chemical-vapor deposition (PACVD) using tris(dimethylamino)boron (TMAB) gas at 350 °C. We have investigated dry etching properties and mechanism of the methyl-BCN film using C₄F₈ gas with induced coupling plasma (ICP) etching equipment. In this study we used C₄F₈ gas whose atmospheric lifetime is less than one-sixteenth of the conventional CF₄ gas for suppression greenhouse gases. It was found that methyl bonds in the methyl-BCN film can be kept after dry etching, because the peak of C–H (2962 cm^?1) in Fourier transform infrared absorption (FTIR) spectra didn't significantly change after dry etching. X-ray photoelectron spectroscopy (XPS) analysis shows the presence of C–F₂ and C–F₃ bonds just on the methyl-BCN surface after dry etching and no traces of these bonds inside the film. It is observed that intensities of B–N and B–C bonds decrease after dry etching. This suggests that the etching of methyl-BCN films by C₄F₈ gas mainly involves boron desorption.     

三层共挤土工膜生产设备及工艺

土工膜作为一种防渗材料越来越受到人们的关注，我国大多引进国外设备生产土工膜。本文简述了对原有国产棚膜生产机组的改造，介绍了开发出的三层复合土工膜机组的生产设备特征、生产工艺及产品性能。     

湿法乙炔工艺剖析及优化

介绍了传统湿法乙炔工艺的现状,并与干法乙炔工艺进行对比,认为从电石破碎、输送、加料,反应控制及气体精制等方面进行技术创新和改进,可大幅降低湿法乙炔工艺的电石消耗,解决乙炔发生工艺环境污染严重的问题,实现湿法乙炔工艺的可持续发展。     

水泥熟料生产线节能降耗技术改造

我厂1968年建成投产的~#3窑是使用卧式料浆蒸发机喂料的φ3.6m×65m湿法短窑,设计台产20.5t/h。因其窑尾喂料工艺设备落后,满足不了生产要求,使窑产量长期低于我厂带喷枪喂料的~#5湿     

一种应用于水泥厂湿法脱硫的烟气脱白工艺

简述了国内常规的烟气脱白技术,介绍了一种应用于水泥厂湿法脱硫的烟气脱白工艺的流程及具体操作,探讨了其所能带来的经济及社会效益。