基于X-LiNbO3/SiO2/Si低温漂、大机电耦合SH-SAW谐振器的设计

铌酸锂(LN)单晶薄膜具有较高的机电耦合系数(k² eff＞30%),其水平剪切(SH)声学模式常被应用于开发具有大机电耦合系数的薄膜声学谐振器和超宽带滤波器。但LN 的频率温度系数较大(TCF ＞ -50×10^-6/℃),这不仅会降低滤波器的可用有效带宽,同时也会限制器件的功率处理能力。采用3D周期有限元模型对基于X 切LN/SiO₂/Si结构SH 声表面波(SH-SAW)谐振器进行了优化研究。研究结果表明,当SH-SAW 传播角ψ=-10°~-20°、LN和SiO₂ 膜厚分别为hLN=0.1λ 和h_SiO2 =0.2λ(λ 为叉指换能器周期)、铝电极金属化率η=0.4、电极相对厚度h_Al/λ=5%~10%时,SH-SAW 谐振器的 k² eff 约为30%,且其TCF＜-20×10^-6/℃,有望用于开发新一代的低温漂、超宽带5G SAW 滤波器。     

高Q值横向激发体声波谐振器的设计与制备

随着5G移动通信时代的发展,射频前端(RF front-ends)的滤波和信号处理迫切需要高频大带宽的声学谐振器。横向激发体声波谐振器(XBAR)具有超高的工作频率和超大的机电耦合系数(k²),但其品质因数(Q)值不高,阻碍了其在射频前端中的应用。该文提出了一种基于ZY切铌酸锂(LiNbO₃)的XBAR谐振器,通过有限元(FEM)仿真对谐振器进行了优化设计,并在微机电系统(MEMS)工艺下对谐振器进行加工。该文所制备的横向激发体声波谐振器A₁模式的谐振频率为4.72 GHz,k²=26.9%,Q_{3 dB}为384,温度频率漂移系数为-60.5×10^-6/℃。A₃模式的谐振频率为13.5 GHz,k²=4.4%。     

Influence of tellurium impurity on the Properties of Ga1?XInXAsYSb1?Y (X>0.22) solid solutions

The influence of tellurium impurity on the electrical properties of Ga_1−X In_XAs_YSb_1−Y (X=0.22 and X=0.24) solid solutions grown by liquid-phase epitaxy from lead-containing solution-melts was studied. Defect healing was shown to take place at low tellurium doping levels (X _Te ^L <2×10⁻⁵ at. %) in inhomogeneous highly compensated p-type solid solutions. Thus, it is possible to produce slightly compensated p-type materials with a low density of impurities and structural defects. High doping levels allow production of n-type materials with the electron density n=10¹⁷–10¹⁹ cm⁻³. Electroluminescence spectra of n-GaInAsSb/p-GaSb heterostructures are promising for the development of light-emitting diodes with a wavelength λ=2.0–2.5 μm. __________ Translated from Fizika i Tekhnika Poluprovodnikov, Vol. 36, No. 8, 2002, pp. 917–924. Original Russian Text Copyright ? 2002 by Voronina, Lagunova, Kunitsyna, Parkhomenko, Sipovskaya, Yakovlev.     

Pb(Zn1/3Nb2/3)0.2(Hf1-xTix)0.8O3陶瓷压电能量收集特性研究

采用铌铁矿前驱体两步法制备了Pb(Zn_1/3Nb_2/3)_0.2(Hf_1-xTi_x)_0.8O₃(PZNH_1-xT_x)钙钛矿压电陶瓷,研究了铪钛比对陶瓷相结构、电学性能和能量收集特性的影响。结果表明,当x=0.52时,陶瓷样品位于准同型相界,具有最优综合压电性能：居里温度T_C=287 ℃,品质因数FOM≈14 753×10^-15 m²/N,压电电荷常数d₃₃=492 pC/N。由该组成材料构建的悬臂梁型压电能量收集器输出功率密度高达4.16 μW/mm³,所转化的电能可成功点亮138盏并联的LED灯。结果表明,PZNHT陶瓷在压电能量收集领域具有良好的应用潜力。     

具有低噪声及高线性度的高性能MOCVD-SiNx/AlN/GaN 毫米波MIS-HEMTs

文章在超薄势垒AlN/GaN异质结构上采用金属有机化学气相沉积（MOCVD）原位生长SiN_x栅介质,成功制备了高性能的SiN_x/AlN/GaN金属-绝缘体-半导体高电子迁移率晶体管（MIS-HEMTs）。深能级瞬态谱（DLTS）技术测试SiN_x/AlN的界面信息,显示其缺陷能级深度为0.236 eV,俘获截面为3.06×10^-19 cm^-2,提取的界面态密度为10¹⁰~10¹² cm^-2eV^-1,表明MOCVD原位生长的SiN_x可以有效降低界面态。同时器件表现出优越的直流、小信号和噪声性能。栅长为0.15 μm的器件在2 V的栅极电压（V_gs）下具有2.2 A/mm的最大饱和输出电流,峰值跨导为506 mS/mm,最大电流截止频率（f_T）和最大功率截止频率（f_MAX）分别达到了65 GHz和123 GHz,40 GHz下的最小噪声系数（NF_min）为1.07 dB,增益为 9.93 dB。V_ds = 6 V时对器件进行双音测试,器件的三阶交调输出功率（OIP3）为32.6 dBm,OIP3/P_dc达到11.2 dB。得益于高质量的SiN_x/AlN界面,SiN_x/AlN/GaN MIS-HEMT显示出了卓越的低噪声及高线性度,在毫米波领域具有一定的应用潜力。     

基于闭式谐振腔的一体化介电常数测量系统

为替代矢量网络分析仪,形成一套专用于闭式谐振腔的测量系统,本文采用频谱分析仪模块和跟踪发生器模块,基于C++和VISA库函数进行系统控制,使两模块可以同步收发射频信号,实现闭式谐振腔谐振频率和Q值的测量功能,最终实现微波介质材料的介电常数的测量,形成一套一体化闭式谐振腔介电常数测量系统。该系统与矢量网络分析仪对比测量微波介质陶瓷材料K65,介电常数的相对误差为5.5×10^-3,tanδ的相对误差为-3.74×10^-2;对比测量材料K35,介电常数的相对误差为-1.69×10^-3,tanδ的相对误差为1.08×10^-1。测量结果相对误差较小,介电常数的相对误差小于0.01,tanδ的相对误差小于0.5,说明一体化介电常数测量系统的测量结果准确,可用于闭式谐振腔方法下的介电常数测量,也可推广用于其他介电常数测量系统。     

1/f noise in very-long-wavelength infrared Hg1−xCdx Te detectors

This paper investigates 1/f noise performance of very-long-wavelength infrared (VLWIR) Hg_1−xCd_xTe (cutoff wavelengths λ_c=15 μm and λ_c=16 μm) photodiodes at 78 K, where detector current is varied by changing detector area, detector bias, and illumination conditions. Holding detector bias and temperature constant, the 1/f noise current is proportional to the detector current. Significant nonuniformity is observed in the noise data for each detector area because of the varying detector quality. Defects are presumed resident in the detectors to produce greater nonuniformity in 1/f noise as compared to dark current at 100-mV reverse bias. For λ_c=16 μm, 4-μ-radius, diffusion-limited diodes at 78 K and 100-mV reverse bias, the average dark current is I_d=9.76±1.59×10⁻⁸ A, while the average noise current measured at 1 Hz is i_n=1.01±0.63×10⁻¹² A/Hz^1/2. For all detector areas measured, the average ratio in 1-Hz bandwidth is α _D =i_n/I_d=1.39±1.09×10⁻⁵. The 1/f noise was also measured on one diode as a function of detector-dark current as the applied bias is varied. In the diffusion-limited portion of this detector’s current-voltage (I-V) curve, to about 130 mV, the 1/f noise was independent of bias. For this diode, the ratio α_D=i_n/I_d=1.51±0.12×10⁻⁵. The 1/f noise associated with tunneling currents is a factor of 3 greater than the 1/f noise associated with diffusion currents, α_T=i_n/I_T=5.21±0.83×10⁻⁵. In addition, 1/f noise was measured on detectors held at −100 mV and 78K under dark and illuminated conditions. The measured ratios α_P ∼α_D ∼1.5×10⁻⁵ were about the same for the dark and photon-induced diffusion currents. Therefore, the diffusion current appears to have a unique value of α as compared to the tunneling current. This may be indicative of unique noise-generation mechanisms associated with each current.     

热氧化GaN制备的β-Ga2O3基日盲紫外探测器

利用热氧化法将电化学腐蚀制备的多孔GaN薄膜氧化成三维孔隙状β-Ga₂O₃薄膜,分析了多孔GaN薄膜与传统GaN薄膜在氧化机理上的区别,并通过材料表征证明了多孔GaN薄膜能够实现更快的氧化速率。随后将氧化生成的β-Ga₂O₃薄膜制备成MSM型β-Ga₂O₃基日盲紫外探测器,在260nm光照及10V偏压下,器件的响应度为16.9A/W,外量子效率为8×10³%,探测率D*达到了2.03×10¹⁴Jones,能够满足弱光信号的探测需求。此外,器件的瞬态响应具有非常好的稳定性,相应的上升时间为0.75s/4.56s,下降时间为0.37s/3.48s。     

0.75PZT-xPZN-(0.25-x)PNN压电陶瓷的相结构和电性能

采用传统固相法制备了0.75Pb(Zr_1/2Ti_1/2)O₃-xPb(Zn_1/3Nb_2/3)O₃-(0.25-x)Pb(Ni_1/3Nb_2/3)O₃(0.75PZTxPZN(_0.25-x)PNN,摩尔分数x=0.05,0.10,0.15,0.20)压电陶瓷,研究了x值对陶瓷晶体结构、烧结特性、微观组织和介电、铁电、压电性能的影响规律。结果表明,陶瓷中三方相和四方相共存,当x=0.10~0.20时,陶瓷组分位于准同型相界(MPB)附近。随着PZN含量的增加,三方相含量减少,四方相含量增加,陶瓷的介电常数(ε_T)、压电常数(d₃₃)、机电耦合系数(k_p)和能量转化因子(d₃₃×g₃₃)均随之先增大后减小,当x=0.15时,0.75PZT-0.15PZN-0.10PNN陶瓷具有最佳电学性能,即ε_T=1 850,公电损耗tan δ=0.029,居里温度T_C=280 ℃,d₃₃=370 pC/N,k_p=0.67。     

Simulation of double junction In0.46Ga0.54N/Si tandem solar cell

A comprehensive study of high efficiency In_0.46Ga_0.54N/Si tandem solar cell is presented. A tunnel junction (TJ) was needed to interconnect the top and bottom sub-cells. Two TJ designs, integrated within this tandem: GaAs(n⁺)/GaAs(p⁺) and In_0.5Ga_0.5N(n⁺)/Si(p⁺) were considered. Simulations of GaAs(n⁺)/GaAs(p⁺) and In_0.5Ga_0.5N (n⁺)/Si(p⁺) TJ I-V characteristics were studied for integration into the proposed tandem solar cell. A comparison of the simulated solar cell I-V characteristics under 1 sun AM1.5 spectrum was discussed in terms of short circuit current density (J_sc), open circuit voltage (V_OC), fill factor (FF) and efficiency (η) for both tunnel junction designs. Using GaAs(n⁺)/GaAs(p⁺) tunnel junction, the obtained values of J_sc = 21.74 mA/cm², V_OC= 1.81 V, FF = 0.87 and η = 34.28%, whereas the solar cell with the In_0.5Ga_0.5N/Si tunnel junction reported values of J_sc = 21.92 mA/cm², V_OC = 1.81 V, FF = 0.88 and η = 35.01%. The results found that required thicknesses for GaAs(n⁺)/GaAs(p⁺) and In_0.5Ga_0.5N (n⁺)/Si(p⁺) tunnel junctions are around 20 nm, the total thickness of the top InGaN can be very small due to its high optical absorption coefficient and the use of a relatively thick bottom cell is necessary to increase the conversion efficiency.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.