MOVPE-grown GaInNAs VCSELs at 1.3 /spl mu/m with conventional mirror design approach

1.3 /spl mu/m oxide confined GaInNAs VCSELs designed using the same design philosophy used for standard 850 nm VCSELs is presented. The VCSELs have doped mirrors, with graded and highly doped interfaces, and are fabricated using production-friendly procedures. Multimode VCSELs (11 /spl mu/m oxide aperture) with an emission wavelength of 1287 nm have a threshold current of 3 mA and produce 1 mW of output power at 20/spl deg/C. The maximum operating temperature is 95/spl deg/C. Emission at 1303 nm with 1 mW of output power and a threshold current of 7 mA has been observed from VCSELs with a larger detuning between the gain peak and the cavity resonance.     

Development of bottom-emitting 1300-nm vertical-cavity surface-emitting lasers

We present experimental results on the development of bottom-emitting GaInNAs vertical-cavity surface-emitting lasers (VCSELs) operating at wavelengths near 1300 nm. This development effort is based on the modification of oxide-apertured top-emitting structures to allow emission through the GaAs substrate. Similar device performance was seen in both the top- and bottom-emitting structures. Single-mode output powers (adjusted for substrate absorption) of /spl sim/0.75 mW, with threshold currents of 1.3 mA, were achieved with /spl sim/3.5-/spl mu/m aperture diameters. Larger multimode devices exhibited a maximum adjusted output power of 2.2 mW. To the best of our knowledge, these are the first bottom-emitting flip-chip compatible 1300-nm VCSELs fabricated with GaInNAs-GaAs active regions.     

1.3-/spl mu/m Vertical-cavity surface-emitting lasers with double-bonded GaAs-AlAs Bragg mirrors

We demonstrate, for the first time, double-bonded AlGaInAs strain-compensated quantum-well 1.3-/spl mu/m vertical-cavity surface-emitting lasers (VCSELs). GaAs-AlAs Bragg mirrors were wafer-bonded on both sides of a cavity containing the AlGaInAs strain-compensated multiple-quantum-well active layers sandwiched by two InP layers. The lasers have operated under pulsed conditions at room temperature. A record low pulsed threshold current density of 4.2 kA/cm/sup 2/ and a highest maximum light output power greater than 4.6 mW have been achieved. The maximum threshold current characteristic temperature T/sub 0/ of 132 K is the best for any long wavelength VCSELs. The laser operated in a single-longitudinal mode, with a side-mode suppression ratio of more than 40 dB, which is the best results for 1.3-/spl mu/m VCSELs.     

AlGaAs vertical-cavity surface-emitting laser responses to 4.5-MeV proton irradiation

We have irradiated single- and multimode AlGaAs vertical-cavity surface-emitting laser (VCSEL) arrays operating at a nominal wavelength of 780 nm with 4.5-MeV protons and doses ranging from 10 to 30 Mrad in the active region. We observed a peak power reduction of about 2% per Mrad in the 14-/spl mu/m aperture, multimode VCSELs. Single-mode VCSELs having an aperture of 6 /spl mu/m exhibited a smaller peak power reduction of 0.4%-1% per Mrad. A slight shift in the current threshold was observed only for the multimode VCSELs at dose levels above 10 Mrad. First results indicate a reduced VCSEL peak laser power output that is dominated by a temperature shift caused by the radiation induced increase in resistive heating. In contrast, the power reduction in edge-emitting lasers is dominated by the enhanced radiation induced nonradiative recombination rate. The VCSEL irradiation was performed with a focused ion micro beam that was rastered over the device surface, ensuring a very uniform exposure of a single device in the array.     

Flip-chip bonded 0.85-/spl mu/m bottom-emitting vertical-cavity laser array on an AlGaAs substrate

We report high-performance 0.85-/spl mu/m bottom-emitting vertical-cavity surface-emitting lasers (VCSELs) on an AlGaAs substrate with 2.1 mA threshold current density 4.2 mW maximum output power, 11.7% power conversion efficiency and a maximum operating temperature of 130/spl deg/C. We also demonstrate a flip-chip bonded 0.85-/spl mu/m bottom-emitting VCSEL array, and confirm all pixels across the 8/spl times/8 VCSEL array operate at a f/sub 3/ dB bandwidth of 2.6 GHz at only 4.2 mA.     

Low threshold current 1.3-/spl mu/m GaInNAs VCSELs grown by MOVPE

The structure of the conventional contact 1.3-/spl mu/m GaInNAs-GaAs vertical-cavity surface-emitting lasers (VCSELs) was optimized and low threshold current 1.3-/spl mu/m GaInNAs VCSELs grown by metal-organic vapor-phase epitaxy were reported. The idea is to optimize the active region, the doping profiles, and the pairs of p-distributed Bragg reflectors, and the detuning between the emission wavelength and the photoluminescence gain peak wavelength. The continuous-wave 1.0-mA threshold current was achieved for the single-mode VCSEL. For the multiple-mode VCSELs, the below 2-mA threshold currents at 5/spl deg/C-85/spl deg/C , the 1.13-mA threshold current at 55/spl deg/C, and 1.52-mA threshold current at 85/spl deg/C are the best results for 1.3-/spl mu/m GaInNAs VCSELs.     

650-nm vertical-cavity surface-emitting lasers: laser properties and reliability investigations

650-nm AlGaInP-AlGaAs-based oxide-confined VCSELs are investigated in dependence on the current aperture size. VCSELs with small aperture (a=5 /spl mu/m) have a maximum continuous-wave (CW) output power of about 1 mW at room temperature. They reach higher operating temperatures (T/sub max/=55/spl deg/C), have narrower beam profiles, less transverse modes, and a higher side mode suppression compared to large aperture VCSELs (a>13 /spl mu/m). The latter devices emit a CW-output power P=3 mW at 20/spl deg/C. Reliability tests of 655-nm devices show at 20/spl deg/C an output power of P/spl ap/0.4 mW over more than 1000 h and at 40/spl deg/C P/spl ap/0.1 mW over 500 h.     

Integrated semiconductor vertical-cavity surface-emitting lasers and PIN photodetectors for biomedical fluorescence sensing

Vertical-cavity surface-emitting lasers (VCSELs), optical emission filters, and PIN photodetectors were fabricated as part of a monolithically integrated near-infrared fluorescence detection system. The integration of these micro-fabricated components with micro-arrays, flow channel arrays, and biochips can drastically reduce cost and enable parallel sensing architectures. An optoelectronic design is presented that integrates VCSELs, optical filters, and photodetectors through a modification to a typical VCSEL structure. System designs were simulated and compared, leading to several innovative approaches for integrated sensors. The laser and detector modules were characterized independently and subsequently integrated to form a complete sensor. VCSELs with oxidation apertures measuring 4, 7, 14, and 20 /spl mu/m showed a lasing wavelength of /spl lambda/=773 nm, threshold current densities from 6400 to 1300 A/spl middot/cm/sup -2/, and maximum output powers of 0.6-4 mW, with transverse single-mode and multimode operation. PIN photodetectors were fabricated with integrated emission filters. Quantum efficiencies above 85% were observed with a dark current of 500 fA/(mm detector diameter). Complete sensor units were tested and near-infrared fluorescent molecules (IR-800) were detected. A theoretical detection limit of 10/sup 5/ fluorophores//spl mu/m/sup 2/ was determined. The compact parallel architecture, high-power laser, and low-noise photodetector make this sensor a good candidate for biomedical fluorescence-based sensing applications.     

Electrically-pumped vertical-cavity lasers with Al/sub x/O/sub y/-GaAs reflectors

We have fabricated the first electrically-pumped vertical-cavity surface-emitting lasers (VCSELs) which use oxide-based distributed Bragg reflectors (DBRs) on both sides of the gain region. They require a third the epitaxial growth time of VCSELs with semiconductor DBRs. We obtain threshold currents as low as 160 /spl mu/A in VCSELs with an active area of 8 /spl mu/m/spl times/8 /spl mu/m using a two quantum well InGaAs-GaAs active region. By etching away mirror pairs from the top reflector, quantum efficiencies as high as 61% are attained, while still maintaining a low threshold current of 290 /spl mu/A.     

Performance, uniformity, and yield of 850-nm VCSELs deposited by MOVPE

Vertical-cavity surface-emitting lasers (VCSELs) emitting near 850 nm and fabricated with the metal-organic vapor phase epitaxy (MOVPE) epitaxial growth technique and a planar proton implant process have been demonstrated with excellent performance, uniformity, and yield across a 3-in wafer. Four thousand lasers were tested on a three-inch-diameter wafer, with a yield of 99.8%. This translates into a yield of 94% for fully functional 34/spl times/1 arrays. The average threshold current, threshold voltage, and dynamic resistance at 10 mA operating current were 3.07 mA, 1.59 V, and 34 ohms, respectively. Uniformity of better than /spl plusmn/9% in threshold current, /spl plusmn/1% in threshold voltage, and /spl plusmn/1.5% in maximum optical output power across a 34-element array was demonstrated.     

"Anti" up the aperture [antiguided VCSEL structures]

Coupled vertical cavity surface-emitting laser (VCSEL) arrays are an attractive means to increase the coherent output power of VCSELs. Single-mode VCSELs, with output powers greater than 10 mW, would be useful as telecommunication transmitters /spl lambda/=1.3-1.55 /spl mu/m) or sources for optical interconnects. Commercially available single-mode VCSELs, even at shorter wavelengths /spl lambda/=0.85 /spl mu/m), are generally limited to a few milliwatts of output power. The conventional VCSEL structure incorporates a built-in positive-index waveguide, designed to support a single fundamental mode. Promising results in the 3-5 mW range (/spl lambda/=0.85 /spl mu/m) have been obtained from wet-oxidized, positive-index-guided VCSELs with small emission apertures (less than 3.5 /spl mu/m-dia). The small aperture size leads to a high electrical resistance and high current density, which can impact device reliability. By contrast, antiguided VCSEL structures have shown promise for achieving larger aperture single-mode operation. To obtain high single-mode powers with a larger emitting aperture, the use of a negative-index guide (antiguide) is beneficial. This paper discusses antiguided structures and some of their advantages when incorporated in 2-D VCSEL array structures.     

Continuous-wave operation of all-epitaxial InP-based 1.3 /spl mu/m VCSELs with 57% differential quantum efficiency

All-epitaxial InP-based 1.3 /spl mu/m VCSELs with a record-high continuous-wave differential quantum efficiency (57%) for single active region long-wavelength devices are demonstrated. Low-loss optical mode confinement is achieved through a selectively etched undercut tunnel-junction aperture. Singlemode continuous-wave lasing was observed up to 87/spl deg/C and the room-temperature output power was 1.1 mW at a current of 4.1 mA and a wavelength of 1.305 /spl mu/m.     

Electrically pumped room temperature CW VCSELs with 2.3 /spl mu/m emission wavelength

Continuous wave (CW) operation at room temperature of electrically pumped InGaAlAs/InP vertical-cavity surface-emitting lasers (VCSELs) at emission wavelengths as high as 2.3 /spl mu/m is demonstrated for the first time. Devices with 15 /spl mu/m active region diameter show a maximum output power of 0.75 mW at 20/spl deg/C and a maximum CW operating temperature of 45/spl deg/C.     

Long-wavelength InAlGaAs VCSELs with Al/sub 2/O/sub 3/ embedded current-confinement apertures

Long-wavelength InAlGaAs VCSELs with Al/sub 2/O/sub 3/ embedded current-confinement structures are reported. Using atomic layer deposition, the current confinement structures are fabricated by depositing Al/sub 2/O/sub 3/ on airgap surfaces of undercut apertures, which are formed by laterally etching the active region. 1.57 /spl mu/m VCSELs showing an output power of over 1 mW and direct modulation characteristics at 4 Gbit/s are reported using these current-confinement apertures.     

High-speed Modulation of InGaAs: Sb-GaAs-GaAsP quantum-well vertical-cavity surface-emitting lasers with 1.27-/spl mu/m emission wavelength

1.27-/spl mu/m InGaAs: Sb-GaAs-GaAsP vertical-cavity surface-emitting lasers (VCSELs) were grown by metal-organic chemical vapor deposition and exhibited excellent performance and temperature stability. The threshold current changes from 1.8 to 1.1 mA and the slope efficiency falls less than /spl sim/35% as the temperature raised from room temperature to 70/spl deg/C. With a bias current of only 5 mA, the 3-dB modulation frequency response was measured to be 8.36 GHz, which is appropriate for 10-Gb/s operation. The maximal bandwidth is measured to be 10.7 GHz with modulation current efficiency factor (MCEF) of /spl sim/5.25 GHz/(mA)/sup 1/2/. These VCSELs also demonstrate high-speed modulation up to 10 Gb/s from 25/spl deg/C to 70/spl deg/C.     

Room-temperature continuous-wave 1.55 /spl mu/m GaInNAsSb laser on GaAs

The first low-threshold 1.55 /spl mu/m lasers grown on GaAs are reported. Lasing at 1.55 /spl mu/m was observed from a 20/spl times/2400 /spl mu/m as-cleaved device with a room-temperature continuous-wave threshold current density of 579 A/cm/sup 2/, external efficiency of 41%, and 130 mW peak output power. The pulsed threshold current density was 550 A/cm/sup 2/ with >600 mW peak output power.     

High efficiency long wavelength VCSEL on InP grown by MOCVD

High efficiency continuous-wave operation of 1.53 /spl mu/m vertical cavity surface emitting lasers (VCSELs) with buried tunnel junction grown by metal organic chemical vapour deposition (MOCVD) has been demonstrated. Devices show a high differential quantum efficiency of 46% and a singlemode power of 1 mW. Minimum threshold current and voltage are 0.45 mA and 1.3 V at room temperature, respectively for devices of 5 /spl mu/m diameter.     

Vertical-cavity surface-emitting lasers based on submonolayer InGaAs quantum dots

Molecular beam epitaxy-grown 0.98-/spl mu/m vertical-cavity surface-emitting lasers (VCSELs) with a three-stack submonolayer (SML) InGaAs quantum-dot (QD) active region and fully doped Al/sub x/Ga/sub 1-x/As-GaAs DBRs was studied. Large-aperture VCSELs demonstrated internal optical losses less than 0.1% per one pass. Single-mode operation throughout the whole current range was observed for SML QD VCSELs with the tapered oxide apertures diameter less than 2 /spl mu/m. Devices with 3-/spl mu/m tapered-aperture showed high single-mode output power of 4 mW and external quantum efficiency of 68% at room temperature.     

Low-threshold high-T/sub 0/ 1.3-/spl mu/m InAs quantum-dot lasers due to p-type modulation doping of the active region

P-type doping is used to demonstrate high-To, low-threshold 1-3 /spl mu/m InAs quantum-dot lasers. A 5-/spl mu/m-wide oxide confined stripe laser with a 700-/spl mu/m-long cavity exhibits a pulsed T/sub 0/ = 213 K (196 K CW) from 0/spl deg/C to 80/spl deg/C. At room temperature, the devices have a CW threshold current of /spl sim/4.4 mA with an output power over 15 mW. The threshold at 100/spl deg/C is 8.4 mA with an output power over 8 mW.     

High-performance 1.5 /spl mu/m GaInNAsSb lasers grown on GaAs

Substantially reduced threshold current density and improved efficiency in long-wavelength (>1.4 /spl mu/m) GaAs-based lasers are reported. A 20/spl times/1220 /spl mu/m as-cleaved device showed a room temperature continuous-wave threshold current density of 580 A/cm/sup 2/, external efficiency of 53%, and 200 mW peak output power at 1.5 /spl mu/m. The pulsed threshold current density was 450 A/cm/sup 2/ with 1145 mW peak output power.