Yield analysis and process modeling of low cost, high throughputflip chip assembly based on no-flow underfill materials

As a concept to achieve low-cost, high-throughput flip chip on board (FCOB) assembly, a new process has been developed implementing next generation flip chip processing based no-flow fluxing underfill materials. The low-cost, high throughput flip chip process implements large area underfill printing, integrated chip placement and underfill flow and simultaneous solder interconnect reflow and underfill cure. The goals of this study are to demonstrate feasibility of no flow underfill materials and the high throughput flip chip process over a range of flip chip configurations, identify the critical process variables affecting yield, analyze the yield of the high throughput flip chip process, and determine the impact of no-flow underfill materials on key process elements. Reported in this work is the assembly of a series of test vehicles to assess process yield and process defects. The test vehicles are assembled by depositing a controlled mass of underfill material on the chip site, aligning chip to the substrate pads, and placing the chip inducing a compression type underfill flow. The assemblies are reflowed in a commercial reflow furnace in an air atmosphere to simultaneously form the solder interconnects and cure the underfill. A series of designed experiments identify the critical process variables including underfill mass, reflow profile, placement velocity, placement force, and underfill material system. Of particular interest is the fact that the no-flow underfill materials studied exhibit an affinity for unique reflow profiles to minimize process defects     

Application assessment of high throughput flip chip assembly for ahigh lead-eutectic solder cap interconnect system using no-flowunderfill materials

Flip chip on board (FCOB) is one of the most quickly growing segments in advanced electronic packaging. In many cases, assembly processes are not capable of providing the high throughputs needed for integrated surface mount technology (SMT) processing (Tummala et al, 1997). A new high throughput process using no-flow underfill materials has been developed that has the potential to significantly increase flip chip assembly throughput. Previous research has demonstrated the feasibility and reliability of the high throughput process required for FCOB assemblies. The goal of this research was to integrate the high throughput flip chip process on commercial flip chip packages that consisted of high lead solder balls on a polyimide passivated silicon die bonded with eutectic solder bumped pads on the laminate substrate interface (Qi, 1999). This involved extensive parametric experimentation that focused on the following elements: no-flow process evaluation and implementation on the commercial packages, reflow profile parameter effects on eutectic solder wetting of high lead solder bumps, interactions between the no-flow underfill materials and the package solder interconnect and tented via features, void capture and void formation during processing, and material set compatibility and the effects on long term reliability performance     

Void Formation Study of Flip Chip in Package Using No-Flow Underfill

The advanced flip chip in package (FCIP) process using no-flow underfill material for high I/O density and fine-pitch interconnect applications presents challenges for an assembly process that must achieve high electrical interconnect yield and high reliability performance. With respect to high reliability, the voids formed in the underfill between solder bumps or inside the solder bumps during the no-flow underfill assembly process of FCIP devices have been typically considered one of the critical concerns affecting assembly yield and reliability performance. In this paper, the plausible causes of underfill void formation in FCIP using no-flow underfill were investigated through systematic experimentation with different types of test vehicles. For instance, the effects of process conditions, material properties, and chemical reaction between the solder bumps and no-flow underfill materials on the void formation behaviors were investigated in advanced FCIP assemblies. In this investigation, the chemical reaction between solder and underfill during the solder wetting and underfill cure process has been found to be one of the most significant factors for void formation in high I/O and fine-pitch FCIP assembly using no-flow underfill materials.     

Characteristics and reliability of fast-flow, snap-cure, and reworkable underfills for solder bumped flip chip on low-cost substrates

In this study, the fast-flow, fast-cure, and reworkable underfill materials from two different vendors are considered. Emphasis is placed on the determination of the curing conditions such as temperature and time, and the material properties such as the thermal coefficient of expansion (TCE), storage modulus, loss modulus, glass transition temperature (T/sub g/), and moisture uptake of these underfill materials. Also, the key elements and steps of the solder-bumped flip-chips on low-cost substrates with these underfill materials such as the chip, printed circuit board (PCB), flip chip assembly, and underfill application are presented. Furthermore, the key elements and steps of the rework of the solder-bumped flip-chip assemblies with these underfill materials such as chip removal, chip reballing, substrate cleaning, and new chip placement are discussed. Finally, shear test results of the assemblies with one-time rework and no-rework are presented.     

Die stress characterization in flip chip on laminate assemblies

Minimizing device side die stresses is especially important when multiple copper/low-k interconnect redistribution layers are present. Mechanical stress distributions in packaged silicon die resulting during assembly or environmental testing can be accurately characterized using test chips incorporating integral piezoresistive sensors. In this paper, measurements of thermally induced stresses in flip chip on laminate assemblies are presented. Transient die stress measurements have been made during underfill cure, and the room temperature die stresses in final cured assemblies have been compared for several different underfill encapsulants. In addition, stress variations have been monitored in the assembled flip chip die as the test boards were subjected to slow temperature changes from -40 to +150/spl deg/C. Using these measurements and ongoing numerical simulations, valuable insight has been gained on the effects of assembly variables and underfill material properties on the reliability of flip chip packages.     

In process stress analysis of flip-chip assemblies during underfill cure

Low cost flip chip on board assemblies are analyzed during the underfill cure process to determine residual stress generation. In situ stress measurements are performed over the active face of the die during processing and relative in-plane stresses are measured. Experimental measurements are made using flip-chip test vehicles, based on the Sandia National Laboratories’ ATC04 assembly test chip. Four different commercial underfill materials have been evaluated and a relative comparison is presented with respect to the residual stresses produced by each underfill on the flip-chip assemblies. Significant stress variations are observed between the four underfills studied. Correlation between the glass transition temperature (T_g) and storage modulus (G^′) are made relative to residual stresses produced during underfill cure. Stress relaxation characteristics are also evaluated for the low cost flip-chip assemblies.     

No-flow underfill flip chip assembly––an experimental and modeling analysis

In the flip-chip assembly process, no-flow underfill materials have a particular advantage over traditional underfill: the application and curing of the former can be undertaken before and during the reflow process. This advantage can be exploited to increase the flip-chip manufacturing throughput. However, adopting a no-flow underfill process may introduce reliability issues such as underfill entrapment, delamination at interfaces between underfill and other materials, and lower solder joint fatigue life. This paper presents an analysis on the assembly and the reliability of flip-chips with no-flow underfill. The methodology adopted in the work is a combination of experimental and computer-modeling methods. Two types of no-flow underfill materials have been used for the flip chips. The samples have been inspected with X-ray and scanning acoustic microscope inspection systems to find voids and other defects. Eleven samples for each type of underfill material have been subjected to thermal shock test and the number of cycles to failure for these flip chips have been found. In the computer modeling part of the work, a comprehensive parametric study has provided details on the relationship between the material properties and reliability, and on how underfill entrapment may affect the thermal–mechanical fatigue life of flip chips with no-flow underfill.     

Correlation of flip chip underfill process parameters and materialproperties with in-process stress generation

Electronic packaging designs are moving toward fewer levels of packaging to enable miniaturization and to increase performance of electronic products. One such package design is flip chip on board (FCOB). In this method, the chip is attached face down directly to a printed wiring board (PWB). Since the package is comprised of dissimilar materials, the mechanical integrity of the flip chip during assembly and operation becomes an issue due to the coefficient of thermal expansion (CTE) mismatch between the chip, PWB, and interconnect materials. To overcome this problem, a rigid encapsulant (underfill) is introduced between the chip and the substrate. This reduces the effective CTE mismatch and reduces the effective stresses experienced by the solder interconnects. The presence of the underfill significantly improves long term reliability. The underfill material, however, does introduce a high level of mechanical stress in the silicon die. The stress in the assembly is a function of the assembly process, the underfill material, and the underfill cure process. Therefore, selection and processing of underfill material is critical to achieving the desired performance and reliability. The effect of underfill material on the mechanical stress induced in a flip chip assembly during cure was presented in previous publications. This paper studies the effect of the cure parameters on a selected commercial underfill and correlates these properties with the stress induced in flip chip assemblies during processing     

Effects of substrate design on underfill voiding using the low cost, high throughput flip chip assembly process and no-flow underfill materials

The formation of underfill voids is an area of concern in the low cost, high throughput, or "no-flow" flip chip assembly process. This assembly process involves placement of a flip chip device directly onto the substrate pad site covered with pre-dispensed no-flow underfill. The forced motion of chip placement causes a convex flow front to pass over pad and solder mask-opening features promoting void capture. This paper determines the effects of substrate design on the phenomena of underfill voiding using the no-flow process. A full-factorial design experiment analyzes several empirically determined factors that can affect void capture in no-flow processing. The substrate design parameters included pad height, solder mask opening height, pad/solder mask opening separation, and pad pitch. The process parameters include chip placement velocity and underfill viscosity. The process robustness is measured in terms of the number of voids created during chip placement, and is further analyzed for the location and any visible modes of void formation. The goal of the work is to determine improved substrate designs to minimize voiding in flip chip processing using no flow underfills.     

面向窄节距倒装互连的预成型底部填充技术

近年来随着电子产品的小型化发展,窄节距倒装芯片互连已经成为研究热点。传统的倒装芯片组装后底部填充技术(例如底部毛细填充)在用于窄节距互连时易产生孔洞,导致可靠性降低,因此产业界开发了面向窄节距倒装芯片互连的预成型底部填充技术,主要包括非流动底部填充和圆片级底部填充。介绍了这类新型底部填充技术的具体工艺及材料需求,并提出了目前其在大规模量产以及未来更窄节距应用中存在的问题及挑战,总结了目前产业界在提高量产生产效率、提升电互连的可靠性以及开发纳米级高热导率填料等方面提出的解决方案,分析了该技术未来的发展方向。     

Novel reworkable fluxing underfill for board-level assembly

Underfills are traditionally applied for flip-chip applications. Recently, there has been increasing use of underfill for board-level assembly including ball grid arrays (BGAs) and chip scale packages (CSPs) to enhance reliability in harsh environments and impact resistance to mechanical shocks. The no-flow underfill process eliminates the need for capillary flow and combines fluxing and underfilling into one process step, which simplifies the assembly of underfilled BGAs and CSPs for SMT applications. However, the lack of reworkability decreases the final yield of assembled systems. In this paper, no-flow underfill formulations are developed to provide fluxing capability, reworkability, high impact resistance, and good reliability for the board-level components. The designed underfill materials are characterized with the differential scanning calorimeter (DSC), the thermal mechanical analyzer (TMA), and the dynamic mechanical analyzer (DMA). The potential reworkability of the underfills is evaluated using the die shear test at elevated temperatures. The 3-point bending test and the DMA frequency sweep indicate that the developed materials have high fracture toughness and good damping properties. CSP components are assembled on the board using developed underfill. High interconnect yield is achieved. Reworkability of the underfills is demonstrated. The reliability of the components is evaluated in air-to-air thermal shock (AATS). The developed formulations have potentially high reliability for board-level components.     

Influence of underfill materials on the reliability of coreless flip chip package

A flip chip package was assembled by using 6-layer laminated polyimide coreless substrate, eutectic Sn37Pb solder bump, two kinds of underfill materials and Sn_3.0Ag_0.5Cu solder balls. Regarding to the yield, the peripheral solder joints were often found not to connect with the substrate due to the warpage at high temperature, modification of reflow profile was benefit to improve this issue. All the samples passed the moisture sensitive level test with a peak temperature of 260 °C and no delamination at the interface of underfill and substrate was found. In order to know the reliability of coreless flip chip package, five test items including temperature cycle test (TCT), thermal shock test (TST), highly accelerated stress test (HAST), high temperature storage test (HTST) and thermal humidity storage test (THST) were done. Both of the two underfill materials could make the samples pass the HTST and THST, however, in the case of TCT, TST and HAST, the reliability of coreless flip chip package was dominated by underfill material. A higher Young’s modules of underfill, the more die crack failures were found. Choosing a correct underfill material was the key factor for volume production of coreless flip chip package.     

A study on thermal cycling (T/C) reliability of anisotropic conductive film (ACF) flip chip assembly for thin chip-on-board (COB) packages

In this work, thermal cycling (T/C) reliability of anisotropic conductive film (ACF) flip chip assemblies having various chip and substrate thicknesses for thin chip-on-board (COB) packages were investigated. In order to analyze T/C reliability, shear strains of six flip chip assemblies were calculated using Suhir’s model. In addition, correlation of shear strain with die warpage was attempted.The thicknesses of the chips used were 180 μm and 480 μm. The thicknesses of the substrates were 120, 550, and 980 μm. Thus, six combinations of flip chip assemblies were prepared for the T/C reliability test. During the T/C reliability test, the 180 μm thick chip assemblies showed more stable contact resistance changes than the 480 μm thick chip assemblies did for all three substrates. The 550 μm thick substrate assemblies, which had the lowest CTE among three substrates, showed the best T/C reliability performance for a given chip thickness.In order to investigate what the T/C reliability performance results from, die warpages of six assemblies were measured using Twyman–Green interferometry. In addition, shear strains of the flip chip assemblies were calculated using measured material properties of ACF and substrates through Suhir’s 2-D model. T/C reliability of the flip chip assemblies was independent of die warpages; it was, however, in proportion to calculated shear strain. The result was closely related with material properties of the substrates. The T/C reliability of the ACF flip chip assemblies was concluded to be dominatingly dependent on the induced shear strains of ACF layers.     

Effects of underfill material properties on the reliability ofsolder bumped flip chip on board with imperfect underfill encapsulants

Three different types of underfill imperfections were considered; i.e., (1) interfacial delamination between the underfill encapsulant and the solder mask on the PCB (crack initiated at the tip of underfill fillet), (2) interfacial delamination between the chip and the underfill encapsulant (crack initiated at the chip corner), and (3) the same as (2) but without the underfill fillet. Five different combinations of coefficient of thermal expansion (CTE) and Young's modulus with the aforementioned delaminations were investigated. A fracture mechanics approach was employed for computational analysis. The strain energy release rate at the crack tip and the maximum accumulated equivalent plastic strain in the solder bumps of all cases were evaluated as indices of reliability. Besides, mechanical shear tests were performed to characterize the shear strength at the underfill-solder mask interface and the underfill-chip passivation interface. The main objective of the present study is to achieve a better understanding in the thermo-mechanical behavior of flip chip on board (FCOB) assemblies with imperfect underfill encapsulants     

Recent advances in the development of no-flow underfillencapsulants-a practical approach towards the actual manufacturingapplication

No-flow underfill technology has been proven to have potential advantages over the conventional underfill technology, and a no-flow underfill material (called G25) has been developed and reported in our prior papers. In this paper, two modified no-flow underfill materials are studied. Compared to the G25 no-flow underfill material, these two materials can be fully post-cured at the temperature below 170°C. These two materials also exhibit lower coefficient of thermal expansion (CTE), lower moisture absorption, better adhesion, and more fluxing stability. In this study, a differential scanning calorimetry (DSC) is used to study the curing kinetics and glass transition temperature (DSC Tg) of the two materials. Thermo-mechanical analyzer (TMA) is used to investigate the heat distortion temperature (TMA Tg) and the coefficient of thermal expansion (CTE). Dynamic-mechanical analyzer (DMA) is used to measure the storage modulus (E') and loss modulus (E") within the temperature range from 25°C to 250°C and then estimate the cross-linking density (p) of the cured material system. Rheometer is used to investigate the material viscosity. Die shear testing is conducted to investigate the adhesive strength between the cured underfill material and polyimide passivation layer. Surface mount technology (SMT) reflow oven, quartz chips and copper laminated FR4 substrates are used to in-situ test the processability of the two materials. Scanning electron microscopy (SEM) is used to observe the integrity of the reflowed solder interconnects. A potential approach toward the production application of no-flow underfill material is then proposed     

Near Void-Free Assembly Development of Flip Chip Using No-Flow Underfill

The advanced flip-chip-in-package (FCIP) process technology, using no-flow underfill material for high I/O density (over 3000 I/O) and fine-pitch (down to 150 mum) interconnect applications, presents challenges for flip chip processing because underfill void formation during reflow drives interconnect yield down and degrades reliability. In spite of such challenges, a high yield, reliable assembly process (>99.99%) has been achieved using commercial no-flow underfill material with a high I/O, fine-pitch FCIP. This has been obtained using design of experiments with physical interpretation techniques. Statistical analysis determined what assembly conditions should be used in order to achieve robust interconnects without disrupting the FCIP interconnect structure. However, the resulting high yield process had the side effect of causing a large number of voids in the FCIP assemblies. Parametric studies were conducted to develop assembly process conditions that would minimize the number of voids in the FCIP induced by thermal effects. This work has resulted in a significant reduction in the number of underfill voids. This paper presents systematic studies into yield characterization, void formation characterization, and void reduction through the use of structured experimentation which was designed to improve assembly yield and to minimize the number of voids, respectively, in FCIP assemblies.     

Adhesion issues in flip-chip on organic modules

Flip chip attach on organic carriers is a novel electronic packaging assembly method which provides advantages of high input/output (I/O) counts, electrical performance and thermal dissipation. In this structure, the flip chip device is attached to organic laminate with predeposited eutectic solder. Mechanical coupling of the chip and the laminate is done via underfill encapsulant materials. As the chip size increases, the thermal mismatch between silicon and its organic carrier becomes greater. Adhesion becomes an important factor since the C4 joints fail quickly if delamination of the underfill from either chip or the solder mask interface occurs. Newly developed underfills have been studied to examine their properties, including interfacial adhesion strength, flow characteristics, void formation and cure kinetics. This paper will describe basic investigations into the properties of these underfills and also how these properties related to the overall development process. In addition, experiments were performed to determine the effects on adhesion degradation of flip chip assembly processes and materials such as IR reflow profile, flux quantity and residues. Surface treatment of both the chip and the laminate prior to encapsulation were studied to enhance underfill adhesion. Accelerated thermal cycling and highly accelerated stress testing (HAST) were conducted to compare various underfill properties and reliability responses     

Reliability of a Silicon Stacked Module for 3-D SiP Microsystem

Solder joint reliability of 3-D silicon carrier module were investigated with temperature cycle and drop impact test. Mechanical simulation was carried out to investigate the solder joint stress using finite element method (FEM), whose 3-D model was generated and solder fatigue model was used. According to the simulation results, the stress involved between flip chip and Si substrate was negligible but stress is more concentrated between Si carriers to printed circuit board (PCB) solder joint area. Test vehicles were fabricated using silicon fabrication processes such as DRIE, Cu via plating, SiO deposition, metal deposition, lithography, and dry or wet etching. After flip chip die and silicon substrate fabrication, they were assembled by flip chip bonding equipment and 3-D silicon stacked modules with three silicon substrate and flip chip dies were fabricated. Daisy chains were formed between flip chip dies and silicon substrate and resistance measurement was carried out with temperature cycle test (C, 2 cycles/h). The tested flip chip test vehicles passed T/C 5000 cycles and showed robust solder joint reliability without any underfill material. Drop test was also carried out by JEDEC standard method. More details on test vehicle fabrication and reliability test results would be presented in the paper.     

Dependence of Flip Chip Solder Reliability on Filler Settling

Thermomechanical reliability of solder joints in flip-chip packages is usually analyzed by assuming a homogeneous underfill ignoring the settling of filler particles. However, filler settling does impact flip chip reliability. This paper reports a numerical study of the influence of filler settling on the fatigue estimation of flip-chip solder joints. In total, nine underfill materials ( 35 vol% silica filler in three epoxies with three filler settling profiles for each epoxy) are individually introduced in a 2-D finite element (FE) model to compare the thermal response of flip chip solder joints that are surrounded by the underfill. The results show that the fatigue indicators for the solder joints (inelastic shear strain increments and inelastic shear strain energy density) corresponding to a gradual, nonuniform filler profile studied in this paper can be smaller than those associated with the uniform filler profile, suggesting that certain gradual filler settling profiles in conjunction with certain resin grades may favor a longer solder fatigue lifetime. The origin of this intriguing observation is in the fact that the solder fatigue indicators are a function of the thermal mismatch among the die, substrate, solder, and underfill materials. The thermal mechanics interplayed among these materials along with a gradual filler profile may allow for minimizing thermal mismatch; and thus lead to lower fatigue indicators.      

Development of environmentally friendly nonanhydride no-flowunderfills

Most no-flow underfill materials are based on epoxy/anhydride chemistry. Due to the sensitizing nature, the use of anhydride is limited and there is a need for a no-flow underfill using nonanhydride curing system. This paper presents the development of novel no-flow underfill materials-based on epoxy/phenolic resin system. Epoxy and phenolic resins of different structures are evaluated in terms of their curing behavior, thermo-mechanical properties, viscosity, adhesion toward passivation, moisture absorption and the reliability in flip-chip underfill package. The influence of chemical structure and the crosslinking density of the resin on the material properties is investigated. The assembly with nonanhydride underfill shows high reliability from the thermal shock test. Solder wetting test has confirmed the sufficient fluxing capability of phenolic resins. Results show that epoxy/phenolic system has great potential for an environmentally friendly and highly reliable no-flow underfill