Advances in hybrid laser joining

This paper presents vibration reduction control of a voice coil motor (VCM)-driven actuator for SPM applications. We had developed a VCM nanoscanner. The scanner has flexure hinges structure. However, the VCM nanoscanner has some problems of thermal drift and small damping compared to the PZT driven nanoscanner. Especially, the small damping coefficient of the VCM nanoscanner causes mechanical vibration when the control input signal is near to the resonance frequencies of the scanner. Additionally, disturbance to the VCM scanner and electronic noise in the sensor also causes the mechanical vibration when they are near to the resonant frequencies. The mechanical vibration reduces the servo bandwidth as well as the accuracy, which deteriorates the AFM image of the samples. We design input shaping prefilter to reduce the signal applied to the VCM nanoscanner and electronic noise in the sensor whose frequency is close to the resonant frequency of the VCM nanoscanner. We measure the time and frequency response of the VCM scanner without using the prefilter and with using the prefilter. Finally, the topology images of a bare wafer are measured and compared using the AFM.     

小波分析在光激光拾硅微谐振传感器微弱信号检测中的应用

光激光拾硅微谐振传感器在实际测量中光拾信号非常微弱，往往淹没在噪声中，无法识别其谐振频率。根据光拾信号与噪声的频率特性，采用小波多分辨分析方法将噪声与信号分离，并采用双频法识别系统，研究了采样频率与系统谐振频率的关系，在两个最佳采样频率下达到准确识别谐振频率、固有频率与阻尼比。     

Frequency shifts and analytical solutions of an AFM curved beam

The squeeze damping coefficient between the cantilever of a straight AFM probe and the surface of a biological sample in liquids is inversely proportional to their distance to the third power. Due to the small cantilever-sample distance, the quality factor of AFM in liquid is too small and results in a low signal–noise ratio. In this study, an AFM curved beam is proposed to solve this problem. Results show that the squeeze damping is significantly decreased and thus the quality factor of an AFM curved beam is greatly increased. An effective mass-spring-damper model is presented and its analytical solution is derived. Moreover, the formulas of the resonant quality factor and frequency shift are discovered. In addition to the requirement of the low squeeze damping, high frequency shifts or sensitivities is necessary for accurate measurement. Results indicate that the effects of the arc angle and several parameters on the quality factor and the frequency shifts are significant. The optimum parameters for high quality and frequency shift are also investigated.     

Design of mechanical components for vibration reduction in an atomic force microscope

Vibration is a key factor to be considered when designing the mechanical components of a high precision and high speed atomic force microscope (AFM). It is required to design the mechanical components so that they have resonant frequencies higher than the external and internal vibration frequencies. In this work, the mechanical vibration in a conventional AFM system is analyzed by considering its mechanical components, and a vibration reduction is then achieved by reconfiguring the mechanical components. To analyze the mechanical vibration, a schematic of the lumped model of the AFM system is derived and the vibrational influences of the AFM components are experimentally examined. Based on this vibration analysis, a reconfigured AFM system is proposed and its effects are compared to a conventional system through a series of simulations and experiments.     

Control of voice coil motor nanoscanners for an atomic force microscopy system using a loop shaping technique

The voice coil motor nanoscanner has the advantages of large working range, easy control, and low cost compared to the conventional lead zirconate titanate driven nanoscanner. However, it has a small damping problem which causes mechanical vibration. The mechanical vibration reduces the accuracy as well as servobandwidth, which deteoriates the atomic force microscopy (AFM) image of the samples. In order to solve the vibration problem, the loop shaping technique [for vertical (z)] and input prefilter [for lateral (xy)] are applied. Experimental results of the proposed techniques are presented for vertical (z) and lateral (xy) scanner. Finally, the AFM images are provided to investigate its effect.     

Damping and local control of mirror suspensions for laser interferometric gravitational wave detectors

The mirrors of laser interferometric gravitational wave detectors hang from multi-stage suspensions. These support the optics against gravity while isolating them from external vibration. Thermal noise must be kept small so mechanical loss must be minimized and the resulting structure has high-Q resonances rigid-body modes, typically in the frequency range between about 0.3 Hz and 20 Hz. Operation of the interferometer requires these resonances to be damped. Active damping provides the design flexibility required to achieve rapid settling with low noise. In practice there is a compromise between sensor performance, and hence cost and complexity, and sophistication of the control algorithm. We introduce a novel approach which combines the new technique of modal damping with methods developed from those applied in GEO 600. This approach is predicted to meet the goals for damping and for noise performance set by the Advanced LIGO project.     

机床减振垫铁结构及其特性研究

垫铁是机床的重要附件之一,其减振性和隔振性对机床的安全高效运行有着重要作用.文章分析了机床垫铁的几种典型结构,并着重分析了弹性减振垫铁的结构特点.利用实验手段,研究了弹性减振垫铁的承载特性和垂向固有频率特性,据此提出了减振垫铁在应用中应该注意的几个问题.     

基于局域共振的舰船浮筏低频减振方法

为控制动力机械激励下的舰船浮筏低频振动和噪声线谱,由变分原理建立了动力机械-平板-局域共振单元的耦合振动方程,采用模态叠加法导出了耦合振动方程的解,并给出了平板辐射声功率级的计算公式;设计了小尺寸轻质低频局域振子,分析了局域共振单元对动力机械激励下平板结构低频振动与辐射声功率线谱的控制效果。研究表明：在附加质量小于平板质量3%的要求下,局域共振单元可将低频振动线谱激励下平板结构表面平均振速级和辐射声功率级降低10%以上;当局域共振单元中包含多个固有频率不同的局域振子时,可以控制平板结构的多个低频振动与噪声线谱。     

基于小波变换方法的材料小阻尼识别

基于连续小波变换实现了对振动系统的小阻尼识别。该方法基本原理为通过对系统自由衰减响应的小波系数取极大获取小波脊,借助小波脊理论确定系统的各阶模态频率与指数衰减系数iζωni,采取求中值的方法获取衰减稳定段的参数,进而识别出各阶模态阻尼比。与HT法相比,该方法具有较高的稳定性和识别精度,仿真结果表明,无噪声时识别误差为0.023%,30%噪声时识别的最大误差为3.49%,而且研究中发现阻尼识别的误差与信号采样频率相关。进行了LY12材料的阻尼测试试验,根据试验测试数据对阻尼识别的结果,证明了本文方法的有效性。     

Study of the sensitivity of the first four flexural modes of an AFM cantilever with a sidewall probe

The resonant frequency and sensitivity of flexural vibration for an atomic force microscope (AFM) cantilever with a sidewall probe have been analyzed. A closed-form expression for the sensitivity of vibration modes has been obtained using the relationship between the resonant frequency and contact stiffness of cantilever and sample. The results show that a sidewall scanning AFM is more sensitive when the contact stiffness is lower and that the first mode is the most sensitive. However, the high-order modes become more sensitive than the low-order modes as the contact stiffness increases. The resonance frequency of an AFM cantilever is low when contact stiffness is small. However, the frequency rapidly increases as contact stiffness increases. In addition, it can be found that the effects of the vertical extension on the sensitivity and the resonant frequency of an AFM cantilever are significant. Decreasing the length of vertical extension can increase the resonance frequency and sensitivity of mode 1 when the contact stiffness is small. However, the situation is reverse when the contact stiffness becomes large.     

电涡流传感器的脉冲激励与双参数检测

采用矩形脉冲作为激励信号,对电涡流传感器在位移检测过程中谐振频率及谐振阻尼的变化情况进行了研究分析.建立了以现场可编程门阵列(FPGA)为核心芯片的检测系统,用于产生所需要的矩形脉冲激励信号以及对传感器响应信号的欠采样.利用8 mm直径的电涡流线圈,对0～10 mm范围内碳钢目标靶的位移响应特性进行了测量,借助短时傅里叶变换分析了响应信号中频率成分的分布情况,同时获得了谐振频率及谐振阻尼的测量值.验证了通过脉冲激励同时获取电涡流传感器双参数检测的可行性.为研制基于电涡流效应的位移传感器及无损探伤传感器提供了一种新思路.     

Coupled lateral bending-torsional vibration sensitivity of atomic force microscope cantilever

We study the influence of the contact stiffness and the ration between cantilever and tip lengths on the resonance frequencies and sensitivities of lateral cantilever modes. We derive expressions to determine both the effective resonance frequency and the mode sensitivity of an atomic force microscope (AFM) rectangular cantilever. Once the contact stiffness is given, the resonance frequency and the sensitivity of the vibration modes can be obtained from the expression. The results show that each mode has a different resonant frequency to variations in contact stiffness and each frequency increased until it eventually reached a constant value at very high contact stiffness. The low-order vibration modes are more sensitive to vibration than the high-order mode when the contact stiffness is low. However, the situation is reversed when the lateral contact stiffness became higher. Furthermore, increasing the ratio of tip length to cantilever length increases the vibration frequency and the sensitivity of AFM cantilever.     

基于Cosserat理论的微梁振动特性的尺度效应

不少微观实验已经证实,微尺度领域材料的力学性能存在尺度效应.采用偶应力理论(又称Cosserat理论)研究微梁振动特性(主要是固有频率)的尺度效应.文中首先对偶应力理论进行简介,然后采用Hamilton变分原理推导基于Cosserat理论的微梁无阻尼自由振动的微分方程,分析微梁固有频率对微尺度的依赖性.结果表明,当微梁的厚度减小到可以和材料的本征长度相比时,微梁的固有频率将显著增大.     

Note: anti-strong-disturbance signal processing method of vortex flowmeter with two sensors

Some digital signal processing methods have been used to deal with the output signal of vortex flowmeter for extracting the flow rate frequency from the noisy output of vortex flow rate sensor and achieving the measurement of small flow rate. In applications, however, the power of noise is larger than that of flow rate sometimes. These strong disturbances are caused by pipe vibration mostly. Under this condition the previous digital signal processing methods will be unavailable. Therefore, an anti-strong-disturbance solution is studied for the vortex flowmeter with two sensors in this Note. In this solution, two piezoelectric sensors are installed in the vortex probe. One is called the flow rate sensor for measuring both the flow rate and vibration noise, and the other is called the vibration sensor for detecting the vibration noise and sensing the flow rate signal weakly at the same time. An anti-strong-disturbance signal processing method combining the frequency-domain substation algorithm with the frequency-variance calculation algorithm is proposed to identify the flow rate frequency. When the peak number of amplitude spectrum of the flow rate sensor is different from that of the vibration sensor, the frequency-domain subtraction algorithm will be adopted; when the peak number of amplitude spectrum of the flow rate sensor is the same as that of the vibration sensor, the frequency-variance calculation algorithm will be employed. The whole algorithm is implemented in real time by an ultralow power micro control unit (MCU) to meet requirements of process instrumentation. The experimental results show that this method can obtain the flow rate frequency correctly even if the power of the pipe vibration noise is larger than that of the vortex flow rate signal.     

High Throughput Wear Debris Detection in Lubricants Using a Resonance Frequency Division Multiplexed Sensor

With a long time goal of detecting signs of potential machine failure, we demonstrate a proof-of-principle multiplexed, multichannel, inductive pulse sensor based on resonant frequency division multiplexing for high throughput detection of micro-scale metallic debris in lubricants. In the four-channel sensor, each sensing coil is connected to a specific external capacitance to form a parallel LC circuit that has a unique resonant frequency. Only one combined sinusoidal excitation signal consisting of four frequencies components that are close to the 4 sensing channels’ resonant frequencies was applied to the sensor, and only one combined voltage response was measured. Because each sensing channel exhibited a peak amplitude at its resonant frequency, the signals for each individual channel were recovered from the combined response by taking the spectrum components at each resonant frequency with an improved signal-to-noise ratio. Inductance change for each channel was then calculated from signals of individual channels. Testing results show that the use of resonant frequency division multiplexing allows simultaneous detection of debris in lubricants using only one set of detection electronics; for the four-channel sensor, there is a 300 % increase in throughput. The resonant frequency division multiplexing concept can be potentially applied to a multichannel oil debris sensor with a large number of sensing channels to achieve a very high throughput, which is necessary for online health monitoring of rotating and reciprocal mechanical components.     

Energy dissipation and dynamic response of an amplitude-modulation atomic-force microscopy subjected to a tip-sample viscous force

In a common environment of atomic force microscopy (AFM), a damping force occurs between a tip and a sample. The influence of damping on the dynamic response of a cantilever must be significant. Moreover, accurate theory is very helpful for the interpretation of a sample's topography and properties. In this study, the effects of damping and nonlinear interatomic tip-sample forces on the dynamic response of an amplitude-formulation AFM are investigated. The damping force is simulated by using the conventional Kelvin-Voigt damping model. The interatomic tip-sample force is the attractive van der Waals force. For consistance with real measurement of a cantilever, the mathematical equations of the beam theory of an AM-AFM are built and its analytical solution is derived. Moreover, an AFM system is also simplified into a mass-spring-damper model. Its exact solution is simple and intuitive. Several relations among the damping ratio, the response ratio, the frequency shift, the energy dissipation and the Q-factor are revealed. It is found that the resonant frequencies and the phase angles determined by the two models are almost same. Significant differences in the resonant quality factors and the response ratios determined by using the two models are also found. Finally, the influences of the variations of several parameters on the error of measuring a sample's topography are investigated.     

Frequency Loss and Recovery in Rolling Bearing Fault Detection

Rolling element bearings are key components of mechanical equipment. The bearing fault characteristics are a ected by the interaction in the vibration signals. The low harmonics of the bearing characteristic frequencies cannot be usually observed in the Fourier spectrum. The frequency loss in the bearing vibration signal is presented through two independent experiments in this paper. The existence of frequency loss phenomenon in the low frequencies, side band frequencies and resonant frequencies and revealed. It is demonstrated that the lost frequencies are actually suppressed by the internal action in the bearing fault signal rather than the external interference. The amplitude and distribution of the spectrum are changed due to the interaction of the bearing fault signal. The interaction mechanism of bearing fault signal is revealed through theoretical and practical analysis. Based on mathematical morphology, a new method is provided to recover the lost frequencies. The multi-resonant response signal of the defective bearing are decomposed into low frequency and high frequency response, and the lost frequencies are recovered by the combination morphological filter(CMF). The e ectiveness of the proposed method is validated on simulated and experimental data.     

Components for high speed atomic force microscopy

Many applications in materials science, life science and process control would benefit from atomic force microscopes (AFM) with higher scan speeds. To achieve this, the performance of many of the AFM components has to be increased. In this work, we focus on the cantilever sensor, the scanning unit and the data acquisition. We manufactured 10 microm wide cantilevers which combine high resonance frequencies with low spring constants (160-360 kHz with spring constants of 1-5 pN/nm). For the scanning unit, we developed a new scanner principle, based on stack piezos, which allows the construction of a scanner with 15 microm scan range while retaining high resonance frequencies (>10 kHz). To drive the AFM at high scan speeds and record the height and error signal, we implemented a fast Data Acquisition (DAQ) system based on a commercial DAQ card and a LabView user interface capable of recording 30 frames per second at 150 x 150 pixels.     

配气台管路系统气固耦合振动特性分析

针对配气台管路振动问题,采用传递矩阵法和有限元模态分析法,建立管道系统振动频率的计算模型.运用MATLAB,ANSYS和AMESim软件分析计算,得到气柱固有频率、结构固有频率及扰动频率三者之间的关系,确定配气台管路振动的原因,并提出有效的解决措施.研究表明:由于扰动频率与管路内气柱低阶固有频率相近,激发配气台管路剧烈...     

微机械陀螺非线性特性的自由衰减振荡测量方法

针对微机械陀螺非线性特性的测量问题,研究了一种频率步进式正弦脉冲激励的自由衰减振荡测量方法。在谐振频率附近,采用步进式正弦脉冲序列作为激励信号,得到一组包含系统不同程度非线性动力学特征的自由振动响应信号。通过Hilbert变换提取自由振动信号的瞬时幅值和瞬时频率,计算得到骨架曲线簇,即可实现非线性动力学特性的实验测量。以Duffing系统为例,对不同信噪比自由振动响应信号进行了数值仿真,结果表明这种方法比FREEVIB方法具有更好的抗噪声性能。对一种环型振动微陀螺进行了实验测试,所得到的骨架曲线与传统扫频方式的测量结果一致。作为一种测试手段,这种方法同样可用于其他类型微机械谐振器动力学特性的实验测试。