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This paper describes the high resolution properties of the negative electron beam resist AZ PN114 showing that it is capable of resolving linewidths of 30 nm and gratings of 100 nm period. Edge noise was measured for critical dimensions (CDs) varying from 50 nm to 200 nm and it was found that using a 100 kV beam voltage 100 nm equal lines and spaces could be written with a 3σ linewidth variation of 7 nm. This increased as the beam voltage was reduced suggesting that edge roughness is shot noise limited. 相似文献
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Tin sulphide(SnS) thin films have been recognized as a potential candidate for solar cells. Many fabrication techniques have been used to grow SnS thin films. The band-gap, Eg of SnS films as reported in literature, were found to vary from 1.2-2.5 eV depending on the film fabrication technique. The present work reports the structural, compositional, morphological and optical characterization of SnS thin films fabricated by thermal evaporation at room temperature. Results show that for the given fabrication technique/condition, the band-gap functionally depends on the lattice parameter and grain size. The well-defined variation allows for tailoring SnS film as per requirements. 相似文献
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用脉冲激光沉积(PLD)方法在Si(111)和蓝宝石衬底上制备的氧化锌薄膜,在不同的退火温度和不同的退火氛围中进行了退火处理.退火温度及退火氛围对ZnO薄膜的结构和发光特性的影响用X射线衍射(XRD)谱和光致发光谱进行了表征.实验结果表明,随着退火温度的提高,ZnO薄膜的压应力减小,并向张应力转化.在不同的退火温度退火... 相似文献
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利用溶胶-凝胶法(sol-gel)在玻璃和硅衬底上生长了B掺杂量分别为0 at%、0.5at%、1.0 at%、2.0 at%、3.0 at%、4.0 at%的ZnO薄膜.采用X射线衍射仪(X-ray diffraction,XRD)、扫描电子显微镜(scanning electron microscope,SEM)、紫外-可见(ultraviolet-visible,UV-Vis)分光光度计等测试手段对薄膜的结构、形貌和光学性能进行了表征.结果 表明:所制备的样品在2θ=34.4°左右出现了ZnO晶体的(002)衍射峰,说明制得的样品具有六方纤锌矿结构.并且(002)衍射峰的半高宽先变小后变大,这说明衍射峰的强度是先加强后减弱,证明其晶粒尺寸是先增大后减小.当B掺杂量为3.0 at%时,样品沿(002)方向择优取向生长最为明显,薄膜上的晶粒生长均匀、致密.B掺氧化锌(BZO)薄膜在可见光区的透过率随B3+的掺杂量的增加先增加后减小,并出现轻微蓝移的现象.当掺入B3+的量为3.0 at%时,薄膜结晶质量最好,表面最为均匀、致密,透过率达到90%. 相似文献
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Effect of cobalt substitution on the band gap and absorption coefficient of the BiFeO3 thin films formed on quartz substrate by low cost spin coating method have been investigated. BiFe1−xCoxO3 (x=0, 0.03, 0.06 and 0.10) thin films are polycrystalline and it retains the rhombohedral distorted perovskite structure up to 10 mole % of Co substitution. Smooth and compact surface morphology with uniform size particles are observed in SEM micrographs. Narrowing and broadening of band gap is observed as a function of Co content. Two strong emission peaks at ~2.51 eV and ~2.38 eV are recorded for all films with noticeable change in intensity. Results obtained from the optical absorption and photoluminescence spectroscopy experiments have shown that there exists an inverse correlation between the variation in the band gap and the concentration of oxygen vacancies. Band gap decreased by ~100 meV and absorption coefficient increased by 28% at the wavelength of 375 nm in 6 mole % Co substituted thin film and these observations are necessary requirements to improve the efficiency of photovoltaic devices. 相似文献
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利用溶胶-凝胶(sol-gel)法在玻璃和硅衬底上制备了不同Sn掺杂量的Sn-Al共掺的ZnO薄膜。采用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、紫外可见分光光度计(UV-Vis)、光致发光谱(PL)等测试手段,对薄膜的结构、形貌和光学性能进行了表征。结果表明:所制备的样品晶粒均沿(002)方向择优生长,且随着Sn元素掺杂量的增加,择优取向性先增强后减弱,同时薄膜的半高宽先减小后增大,半高宽最小时,薄膜的结晶质量最好。与只掺Al元素的ZnO薄膜相比,共掺后的薄膜近紫外发光峰的强度明显降低,出现了轻微的蓝移,且在600 nm处的缺陷发光强度明显增强;随着Sn掺杂量的增加薄膜的透过率先增加后减小。与AZO薄膜相比,当Sn的掺杂量为0.020时,薄膜的结晶质量更好,缺陷发光更强,光透过率更高。 相似文献
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Zinc oxide (ZnO) thin films were prepared onto glass substrates at moderately low growth temperature by two-stage spray pyrolysis technique. The effects of growth temperature on structural, optical and acetone detection properties were investigated with X-ray diffractometry, a UV-visible spectrophotometer, photoluminescence (PL) spectroscopy and a homemade gas sensor testing unit, respectively. All the films are polycrystalline with a hexagonal wurtzite phase and exhibit a preferential orientation along [002] direction. The film crystallinity is gradually enhanced with an increase in growth temperature. The optical measurements show that all the films are physically highly transparent with a transmittance greater than 82% in the visible range. The band gap of the film is observed to exhibit a slight red shift with an increasing growth temperature. The PL studies on the films show UV/violet PL band at ~ 395 nm. Among all the films investigated, the film deposited at 250 ℃ demonstrates a maximum sensitivity of 13% towards 20 ppm of acetone vapors at 300 ℃ operating temperature. 相似文献
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采用脉冲磁控溅射法制备了B掺杂ZnO(ZnO:B)纳米薄膜,并用X射线衍射(XRD)、扫描电子显微镜(SEM)和紫外-可见-近红外分光光度计分别研究了薄膜的结构和光学特性。结果表明:ZnO:B为多晶纳米薄膜,具有六方钎锌矿结构,且薄膜沿着c轴取向择优生长;在可见光和近红外光谱区的透光性能良好,其中在可见光区的平均透光率大于84%,而在近红外区的透光率随着波长增加而逐渐降低至45%。运用逐点无约束最优化法分析计算了薄膜的光学常数,在可见光区,ZnO:B纳米薄膜的光学常数随波长的变化很小且数值基本恒定,折射率约为2.0,而在紫外区,光学常数随波长的变化显著。 相似文献
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采用蒸镀与氧化二步法,以高纯混合金属Zn:Ag作蒸发源,在石英衬底上沉积Zn:Ag金属薄膜,经不同热氧化处理生长Ag掺杂ZnO薄膜。结果显示,以Ag含量为质量分数3%的蒸发源沉积的Zn:Ag薄膜经500℃氧化后,生成的ZnO:Ag薄膜在380 nm附近出现很强的近带边紫外发光峰,在438~470 nm附近出现较弱的深能级缺陷发光峰,该薄膜在360 nm有接近垂直的吸收边,其载流子浓度为1.810×1021cm–3,表现出p型导电特性和较好的光学质量。 相似文献
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Cr-doped ZnO thin films are prepared on glass substrates by the magnetron sputtering technique. An X-ray diffraction (XRD) is used to analyze the structural properties of the thin films. It indicates that all the thin films have a preferential c-axis orientation. The peak position of the (002) plane shifts to the higher 2θ value, and the peak intensity decreases with the increase of Cr doping. The results of the scanning electron microscopy (SEM) show that the surface morphology becomes loose with the incre... 相似文献
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The optical transmittance and absorption of thin films of monoclinic lead phthalocyanine have been studied as a function of exposure to chlorine and air. The effect of chlorine on the refractive index and dielectric constant of freshly prepared films was estimated from reflectivity data in the photon energy range 2.1–2.6 eV. Responsivity and recovery from gaseous exposure were studied with regard to the applicability of lead phthalocyanine to the fabrication of an optical chlorine sensor. 相似文献
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采用直流反应磁控溅射法,在玻璃衬底上沉积了ZnO薄膜,然后在H2S气氛和500℃温度下退火制备了六方ZnS薄膜。利用X射线衍射仪(XRD)、UV-VIS分光光度计、扫描电子显微镜(SEM)对样品进行了表征。结果表明:ZnO经0.5 h硫化就能全部生成ZnS,适当提高硫化时间可改善ZnS的结晶性,但硫化时间超过2 h后,结晶性会有所降低;所有制得ZnS薄膜都沿c轴择优生长,其晶粒明显比ZnO更大。此外,这些ZnS薄膜在500~1 100nm波长范围内的光透过率均高达约75%,带隙为3.65~3.70 eV。 相似文献
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采用超声喷雾热解法,以石英玻璃为衬底,以乙酸 锌(Zn(CH3COO)2·2H2O)、硝酸镁(Mg(NO3)2·6H2O) 和醋酸钠(CH3COONa·3H2O)为前驱体溶液,在不同衬底温 度(480~560℃)下制备Na-Mg共掺杂ZnO薄膜。通过X-射线衍射(X RD)、扫描电子显微镜(SEM)、 光致发光(PL)谱和紫外-可见(UV-Vis)分光光度计等表征手段对样品的晶格结构 、表面形貌、PL性能 和透过率进行了研究。结果表明,衬底温度对薄膜结构和光学特性影响显著,当衬底温度为 500 ℃时制备的 Na-Mg共掺杂ZnO薄膜的c轴择优最明显,表面形貌更加致密,结 晶质量最好,PL性能最佳。 相似文献
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The propagation of optical beams in optical thin films grown by pulsed laser deposition is studied numerically in order to predict the influence of the film curvature on the performance of planar waveguide lasers. Several waveguiding structures are considered. The confinement of both the pump and the signal fields as well the overlap between the beams during propagation are examined. 相似文献