基于辐射压力控制的微型元件的加工与检测

We have been developing new fabrication tools based on optical radiation pressur e and related phenomena to develop aflexible and accurate microfabrication tec hnology. In this paper, the laser trapping probe for the nano-CMM for assessment, in addition to micromachining technique using a small particle controlled by optical radiation pressure and laser aggregation technique are discussed. As the positional detection probe for the nano-CMM, an optically trapped silica particle with 8 mm diameter in forced oscillation state is used. A probe sphere retains a stable position when applied with trapping force by Nd:YAG laser light formed an nu lar and is forced to oscillate by the driving force changed by modulating the in tensity of LD emission. Experintal results show that this vibrational microprobe h as the possibility to achieve positional sensing accuracy of less than 25 nm. As a new micromachining technique, nano-removal process using an optically trapped micro-grain is proposed. The laser trapping force enables not only to stably trap the diamond grain with asymmetrical shape but also to freely control the positi on with spinning. Using this micro machining tool, the machining experiments of h ydrocarbon film are performed. AFM observation confirmed that the fine groove wi th depths of about 3～4 nm can be fabricated. As an additive process based on ra diation pressure, a laser microstructure fabrication using laser agglomeration p h enomena of colloidal particles aided by radiation pressure is investigated. By c ontrolling laser beam scanning in slurry containing KOH solution and SiO₂ par ticles with a diameter of 140 nm, colloidal particles are aggregated and adhered firmly to a silicon wafer substrate. Using this laser agglomerating process, two-dimensional grid microstructures at the pitch of 5 mm can be fabricated.     

Measurement of probe displacement to the thermal resolution limit in photonic force microscopy using a miniature quadrant photodetector

A photonic force microscope comprises of an optically trapped micro-probe and a position detection system to track the motion of the probe. Signal collection for motion detection is often carried out using the backscattered light off the probe-however, this mode has problems of low S/N due to the small backscattering cross sections of the micro-probes typically used. The position sensors often used in these cases are quadrant photodetectors. To ensure maximum sensitivity of such detectors, it would help if the detector size matched with the detection beam radius after the condenser lens (which for backscattered detection would be the trapping objective itself). To suit this condition, we have used a miniature displacement sensor whose dimensions makes it ideal to work with 1:1 images of micrometer-sized trapped probes in the backscattering detection mode. The detector is based on the quadrant photo-integrated chip in the optical pick-up head of a compact disc player. Using this detector, we measured absolute displacements of an optically trapped 1.1 μm probe with a resolution of ～10 nm for a bandwidth of 10 Hz at 95% significance without any sample or laser stabilization. We characterized our optical trap for different sized probes by measuring the power spectrum for each probe to 1% accuracy, and found that for 1.1 μm diameter probes, the noise in our position measurement matched the thermal resolution limit for averaging times up to 10 ms. We also achieved a linear response range of around 385 nm with cross talk between axes ?4% for 1.1 μm diameter probes. The detector has extremely high bandwidth (few MHz) and low optical power threshold-other factors that can lead to its widespread use in photonic force microscopy.     

Multidepth, multiparticle tracking for active microrheology using a smart camera

The quantitative measurement of particle motion in optical tweezers is an important tool in the study of microrheology and can be used in a variety of scientific and industrial applications. Active microheology, in which the response of optically trapped particles to external driving forces is measured, is particularly useful in probing nonlinear viscoelastic behavior in complex fluids. Currently such experiments typically require independent measurements of the driving force and the trapped particle's response to be carefully synchronized, and therefore the experiments normally require analog equipment. In this paper we describe both a specialized camera and an imaging technique which make high-speed video microscopy a suitable tool for performing such measurements, without the need for separate measurement systems and synchronization. The use of a high-speed tracking camera based on a field programmable gate array to simultaneously track multiple particles is reported. By using this camera to simultaneously track one microsphere fixed to the wall of a driven sample chamber and another held in an optical trap, we demonstrate simultaneous optical measurement of the driving motion and the trapped probe particle response using a single instrument. Our technique is verified experimentally by active viscosity measurements on water-ethylene glycol mixtures using a phase-shift technique.     

光纤触发式测头及其性能测试研究

为解决三坐标测量机等精密仪器在被测工件表面数据点的采样问题,将光电技术和数字信号处理(DSP)技术应用到光纤触发式测头的研制中。分析了光纤触发式测头的工作原理;当光束照射到球的表面,随意入射角的变化,耦合入分布在发射光纤周围接收光纤的光强也会发生变化,基于这一现象,在接收光纤末端利用硅PIN光电二极管将光强的变化转化为电信号,在信号预处理之后,进行了多路信号模数转换;然后,利用DSP对采集到的多路信号进行运算处理,当运算结果达到设定阈值时发出触发脉冲信号;最后,通过实验对测头的预行程变动量和单向重复性精度进行了测试,实验测定该测头的预行程变动量为0.97μm,单向重复性精度为0.42μm。研究结果表明,该光纤触发式测头具有一定的实用性。     

采用玻尔兹曼统计法分析光阱刚度的测量精度

考虑高精度的光阱刚度测量是光阱力测量的关键,本文提出了采用玻尔兹曼统计法来分析光阱刚度的测量精度。首先,描述了实验室搭建的近红外光镊系统,并将其搭建在暗室中的气垫平台上,以便隔离光干扰和振动干扰。然后,用四象限光电探测器探测被光镊捕获的微球向后散射的光,并选用与溶液黏度无关的玻尔兹曼统计法计算样品池底面附近的光阱刚度。最后,分析和讨论了溶液温度的变化、四象限光电探测器的灵敏度、采样频率以及采样时间对光阱刚度测量精度的影响。理论分析及实验计算显示:溶液温度的变化对光阱刚度的测量影响很小,但四象限光电探测器的灵敏度对光阱刚度测量精度影响较大。考虑采样的完整性和数据处理速度,采样频率通常取为被捕获颗粒拐角频率的5~10倍。对于本文搭建的近红外光镊测量系统,采样时间取为1~7s时,可以保证高精度地测量光阱刚度。     

基于双环形旋涡相位调制的多焦点产生

为提高光学显微成像及微粒控制的效率,提出一种通过双环形旋涡相位板对入射光为拉盖尔高斯柱矢量光束进行波前相位调制的多焦点产生方法。通过Debye矢量衍射理论分析了该相位板对焦点区域光强分布的影响。分析表明,经调节内外环旋涡相位拓扑数及内环的半径,可以对焦点区域光强分布进行整形,在焦平面上产生多焦点,而且通过改变入射柱矢量光束的偏振态,可以进一步得到光场由轴向分量为主的多焦点及由横向分量组成的多焦点。通过改变旋涡相位板的拓扑数及光束的参数,可以达到对光斑的数量的控制。这对于捕捉折射率高于周围环境折射率的微粒具有重要的应用价值。     

Micromanipulation of chloroplasts using optical tweezers

This paper describes experiments using optical tweezers to probe chloroplast arrangement, shape and consistency in cells of living leaf tissue and in suspension. Dual optical tweezers provided two-point contact on a single chloroplast or two-point contact on two adhered chloroplasts for manipulation in suspension. Alternatively, a microstirrer consisting of a birefringent particle trapped in an elliptically polarized laser trap was used to induce motion and tumbling of a selected chloroplast suspended in a solution. We demonstrate that displacement of chloroplasts inside the cell is extremely difficult, presumably due to chloroplast adhesion to the cytoskeleton and connections between organelles.  The study also confirms that the chloroplasts are very thin and extremely cup-shaped with a concave inner surface and a convex outer surface.     

Tunable optical tweezers for wavelength-dependent measurements

Optical trapping forces depend on the difference between the trap wavelength and the extinction resonances of trapped particles. This leads to a wavelength-dependent trapping force, which should allow for the optimization of optical tweezers systems, simply by choosing the best trapping wavelength for a given application. Here we present an optical tweezer system with wavelength tunability, for the study of resonance effects. With this system, the optical trap stiffness is measured for single trapped particles that exhibit either single or multiple extinction resonances. We include discussions of wavelength-dependent effects, such as changes in temperature, and how to measure them.     

Broadband optical absorbance spectroscopy using a whispering gallery mode microsphere resonator

We demonstrate the ability to excite and monitor many whispering gallery modes (WGMs) of a microsphere resonator simultaneously in order to make broadband optical absorbance measurements. The 340 microm diameter microsphere is placed in a microfluidic channel. A hemispherical prism is used for coupling the WGMs into and out of the microsphere. The flat surface of the prism seals the microfluidic channel. The slight nonsphericity in the microsphere results in coupling to precessed modes whose emission is spatially separated from the reflected excitation light. The evanescent fields of the light trapped in WGMs interact with the surrounding environment. The change in transmission observed in the precessed modes is used to determine the absorbance of the surrounding environment. In contrast to our broadband optical absorbance measurements, previous WGM sensors have used only a single narrow mode to measure properties such as refractive index. With the microfluidic cell, we have measured the absorbance of solutions of dyes (lissamine green B, sunset yellow, orange G, and methylene blue), aromatic molecules (benzylamine and benzoic acid), and biological molecules (tryptophan, phenylalanine, tyrosine, and o-phospho-L-tyrosine) at visible and ultraviolet wavelengths. The microsphere surface was reacted with organosilane molecules to attach octadecyl groups, amino groups, and fluorogroups to the surface. Both electrostatic and hydrophobic interactions were observed between the analytes and the microsphere surface, as indicated by changes in the measured effective pathlength with different organosilanes. For a given analyte and coated microsphere, the pathlength measurement was repeatable within a few percent. Methylene blue dye had a very strong interaction with the surface and pathlengths of several centimeters were measured. Choosing an appropriate surface coating to interact with a specific analyte should result in the highest sensitivity detection.     

面向超分辨光学成像的浸没微球透镜控制

微球透镜配合传统光学显微镜可以采集到衍射极限以下的超分辨光学图像,为了精确控制微球透镜在样品表面的位置,同时扩大超分辨成像范围,提出了一种控制微球透镜的方法,结合多轴微动平台实现微球透镜的精确定位与成像扫描操作。通过光学仿真分析了微球透镜超分辨成像效果,并对精密微动平台进行了运动学分析。为了提高超分辨成像效果,将微球透镜浸没于液体介质中,并对在液体中运动的微球透镜进行力学分析。通过实验,清晰分辨出130nm(~λ/4)的蓝光光碟条纹间隙,证明了微球透镜具有超分辨成像能力,结果表明,微球透镜可以在传统光学显微镜的基础上进一步提高约3.52倍的放大倍数。通过控制微球透镜以5×10~(-6) m/s的速度在液体中按"S"型轨迹移动,实现了对一个视场内样品的超分辨成像,此控制方法可以精确控制微球透镜的运动,通过扫描的方式可以扩大微球透镜的观测范围,提高观测速度。     

Optical counting of guided particles in a vortex beam as an optical tube by laser-two-focus method

In this study, microscopic particles such as aerosols were counted by Laser-Two-Focus method, L2F, after being trapped and guided by an optical tube. This prevents particles diffusivity as they pass through the Gaussian beam in the L2F method by optical forces such as radiation pressure and photophoretic forces. In optical tube, particles can guid to the center of the beam where the intensity gets zero. A single-charged Bessel Gaussian beam, BG₀₁, is used as the particle guidance beam in this method, which is generated by passing the first-order Laguerre-Gaussian beam, LG₀₁, from an axicon lens. LG₀₁ beam are also produced by using holographic interference grid mask. The results of the theory and simulations showed that by optical guiding of particles in the L2F-method measurement, their transverse turbulence can be reduced by about 60% and then the probability of measuring all particles to be increased by about 30%. Measurements of in-laboratory aerosols less than 3.5 μm with this method showed a 20% increase in their condensation of them compared to the conventional L2F method.     

Vibration sensitivity of the scanning near-field optical microscope with a tapered optical fiber probe

In this paper the Rayleigh-Ritz method was used to study the scanning near-field optical microscope (SNOM) with a tapered optical fiber probe's flexural and axial sensitivity to vibration. Not only the contact stiffness but also the geometric parameters of the probe can influence the flexural and axial sensitivity to vibration. According to the analysis, the lateral and axial contact stiffness had a significant effect on the sensitivity of vibration of the SNOM's probe, each mode had a different level of sensitivity and in the first mode the tapered optical fiber probe was the most acceptive to higher levels of flexural and axial vibration. Generally, when the contact stiffness was lower, the tapered probe was more sensitive to higher levels of both axial and flexural vibration than the uniform probe. However, the situation was reversed when the contact stiffness was larger. Furthermore, the effect that the probe's length and its tapered angle had on the SNOM's probe axial and flexural vibration were significant and these two conditions should be incorporated into the design of new SNOM probes.     

Observations of Contact Measurements Using a Resonance-Based Touch Sensor

A study of the contact mechanisms between a resonator probe sensor and a broad range of engineering surfaces is presented. The resonator-based touch sensor used in these studies consists of a prismatic beam clamped at one end with a spherical probe attached at the other. Pairs of piezoelectric (PZT) elements cemented at either side of the beam along its axis are employed; one to actuate and the other to pick up the strain signals. Over a band of frequencies near to a resonance, the sensor behaves like second-order system. When oscillated near to its resonant frequency, interactions between the probe tip and specimen are detected by monitoring phase or frequency shifts using phase-locking techniques. As the probe approaches and contacts a surface, a range of phenomena are observed. Approximate theoretical models have been developed to predict the effects characteristic of added mass, stiffness, and damping (i.e., kinetic, potential and dissipative energy transfer) for contacts between clean solids and when contaminant films are present. These models predict that phase and frequency shifts can either increase or decrease depending upon the dominant phenomena in the contact region. For example, when a solid surface is contacted by a clean probe, the resonant frequency can either increase or decrease depending upon the ratio of elastic modulus to density, and this is demonstrated with contact measurements made on metals and rubbers. A systematic method for the identification of the dominant effect (if there is one) based on observations of frequency or phase shifts using either constant phase or constant frequency monitoring is presented.     

Super‐resolution optical microscopy based on scannable cantilever‐combined microsphere

We report an ingenious method of super‐resolution optical microscopy utilizing scannable cantilever‐combined microsphere. By scanning the microsphere over the sample surface in a cantilever‐combined microsphere‐sample contact state, super‐resolution images can be acquired at arbitrary sample regions through near‐field information collection by the microsphere. In addition, such a state can effectively reduce the possibility of breaking the cantilever and damaging the microsphere or sample surface. This work has developed a new method and technique of sub‐diffraction‐limit optical microscopy, and can be practically applied in various fields of micro/nanoscopy. Microsc. Res. Tech. 78:1128–1132, 2015. © 2015 Wiley Periodicals, Inc.     

一种反射式光纤传感器的研究

为了解决传统的单端输出Y型分支结构的反射式光纤传感器易受入射光强变化、被测表面形貌不同等因素影响的问题,作者研制了一种具有两个输出端的新结构光纤传感器,并对该光纤传感器在精加工表面上的光反射特性进行了理论分析和实验研究。研究结果表明,光纤测头两输出信号之比与测量距离的变化有较好的线性关系,并能显著减少光源发光强度波动及被测表面粗糙度对位移测量结果的影响,从而有利于提高抗干扰能力和测量精度。因此,这是一种性能比较优越的非接触式微位移传感器。     

镀膜光纤探针近场捕获的模拟与实验

为提高近场捕获的能力与灵活性,研究了一种利用镀膜光纤探针对纳米微粒进行近场捕获的方法.采用麦克斯韦应力张量和三维时域有限差分方法建立了近场中纳米微粒的作用力模型,通过光阱力与其他作用力的比较讨论了近场捕获的稳定性,并根据各轴向光阱力的分布情况分析了纳米微粒的捕获尺寸与捕获位置.结果表明,只有当微粒尺寸小于探针孔径时才存...     

约束抽样Hough变换的光纤端面精确定位

为提高经光纤传输后光束方向的稳定性,提出了一种新的光纤端面精确定位方法。该方法针对光纤端面光能量中强模间噪声干扰的特点建立了约束抽样Hough变换,可实现对噪声的去除和对轮廓的准确提取,并根据轮廓的特征把特征点分为基元类和噪声类,对两类点分别进行约束抽样Hough变换,可显著减少存储所需要的内存空间,有效抑制噪声对轮廓的干扰,准确得到属于轮廓的特征点。根据各特征点对轮廓的贡献,采用弦长加权拟合法对轮廓点进行处理,从而得到轮廓的中心位置。实验结果表明,该方法对光纤端面的定位不确定度优于0.2 pixel,成像物镜放大倍数为10时,定位不确定度优于0.4 μm。     

Light emission induced by tunneling electrons from surface nanostructures observed by novel conductive and transparent probes

We have developed an ultrahigh-vacuum low-temperature scanning tunneling microscope (STM) equipped with a near-field optical detection system using novel conductive and optically transparent probes. Tunneling-electron induced photons generated in a nanometer-scale area just under the STM probe can be collected directly into the core of the optical fiber probe within the optical near-field region. Firstly, optical fiber probes coated with indium-tin-oxide thin film are applied to quantitative analysis of p-type GaAs(110) surface, where a decrease of light emission in photon mapping clearly extracts the existence of Zn accepter atoms located at the sub-surface layers. Secondly, in order to enhance the efficiency for inelastic tunneling excitation of a tip-induced plasmon mode, a STM probe coated with an Ag/ITO dual-layer film has been developed and applied to an Ag(111) surface, where photon mapping with a step resolution has been achieved by near-field detection.     

BioPhotonics workstation: a versatile setup for simultaneous optical manipulation, heat stress, and intracellular pH measurements of a live yeast cell

In this study we have modified the BioPhotonics workstation (BWS), which allows for using long working distance objective for optical trapping, to include traditional epi-fluorescence microscopy, using the trapping objectives. We have also added temperature regulation of sample stage, allowing for fast temperature variations while trapping. Using this modified BWS setup, we investigated the internal pH (pH(i)) response and membrane integrity of an optically trapped Saccharomyces cerevisiae cell at 5 mW subject to increasing temperatures. The pH(i) of the cell is obtained from the emission of 5-(and-6)-carboxyfluorescein diacetate, succinimidyl ester, at 435 and 485 nm wavelengths, while the permeability is indicated by the fluorescence of propidium iodide. We present images mapping the pH(i) and permeability of the cell at different temperatures and with enough spatial resolution to localize these attributes within the cell. The combined capability of optical trapping, fluorescence microscopy and temperature regulation offers a versatile tool for biological research.     

Microarrays of near-field optical probes with adjustable dimensions

We present the fabrication and the characterization of high-density microarrays comprising thousands of near-field optical probes. Two types of microarrays have been prepared by adapting the SNOM methodology: arrays of uncoated fiber nanotips (i.e. apertureless probes) and arrays of apertures with adjustable subwavelength dimensions. Such arrays were fabricated by retaining the coherent structure of monomode optical fiber bundles and therefore keeping their imaging properties. The size of the apertures in a microarray was tuned at the nanometer scale by modifying the fabrication parameters. Far-field characterization of these near-field probe arrays shows completely different behavior depending both on their architecture and on their characteristic size. The angular distribution of the far-field intensity transmitted through the aperture arrays is used to determine the optical size of such diffracting apertures. Aperture radii ranging from 95 to 250 nm were found in good agreement with SEM data. Furthermore, each nanoaperture of the array is optically independent in the far-field regime. Eventually, this study demonstrates potential applications of these imaging arrays as parallel near-field optical probes in both configurations (apertureless and with apertures).