Development of high-precision micro-roundness measuring machine using a high-sensitivity and compact multi-beam angle sensor

With recent development in advanced manufacturing, demand for nanometric accuracy in dimensional metrology has increased dramatically. To satisfy these requirements, we propose a high-accuracy micro-roundness measuring machine (micro-RMM) using a multi-beam angle sensor (MBAS). The micro-RMM includes three main parts: the MBAS, a rotary unit, and a bearing system. The MBAS has been designed and established in order to improve motion accuracy of the micro-RMM. The dimensions of the MBAS are 125(L) mm × 130(W) mm × 90(H) mm. Compared with other methods, an MBAS is less susceptible to spindle error (stage-independence) when detecting angles, can maintain high sensitivity with miniaturized size, and can be used conveniently at the factory level. The optical probe, reported in this paper, is based on the principle of an autocollimator, and the stability is improved when using the MBAS. Unlike multi-probe methods, the micro-RMM is constructed to realize roundness measurement by using only one probe, which is less susceptible to instrumental errors. Experimental results confirming the feasibility of the multi-beam angle sensor for roundness measurement are also presented.     

Experimental study of crystal anisotropy based on ultra-precision cylindrical turning of single-crystal calcium fluoride

To realize ultimately efficient signal processing, it is necessary to replace electrical signal processing circuits with optical ones. The optical micro-resonator, which localizes light at a certain spot, is an essential component in optical signal processing. Single-crystal calcium fluoride (CaF₂) is the most suitable material for a highly efficient optical micro-resonator. The CaF₂ resonator can only be manufactured by ultra-precision machining processes, because its crystal anisotropy does not allow the application of chemical etching. However, the optical micro-resonator's performance depends definitely on the surface integrity.This study investigated the relationship between surface quality after ultra-precision machining and crystal anisotropy. Firstly, crack initiation was investigated on the (1 0 0), (1 1 0), and (1 1 1) planes using the micro-Vickers hardness test. Secondly, brittle-ductile transition was investigated by orthogonal cutting tests. Finally, cutting performance of cylindrical turning was evaluated, which could be a suitable method for manufacturing the CaF₂ resonator. The most difficult point in cylindrical turning of CaF₂ is that the crystalline plane and cutting direction vary continuously. In order to manufacture the CaF₂ optical micro-resonator more efficiently, analysis was conducted on crack initiation and surface quality of all crystallographic orientations from the perspective of slip system and cleavage.     

Measurement of the neutral plane of an internal fire whirl using the background-oriented Schlieren technique for a vertical shaft model of a high-rise building

Since the height of the neutral plane is related to the direction of the high-temperature smoke and airflow diffusion of fires in high-rise buildings, the identification of the neutral plane is important for both the evacuation of residents and the safety of fire fighters. As yet, there are no effective methods for directly measuring the constantly changing neutral plane position. There are complex internal fire whirl phenomena in the inner space in particular cases. In this study, the background-oriented Schlieren (BOS) technique was used to visualize the neutral plane when a fire whirl occurs in a vertical shaft with a single corner gap. With n-propanol used as the fuel, the scale modeling experiments of fuel trays 5.8 cm and 7 cm in diameter were tested in a 34 cm (W) × 35 cm (L) × 145 cm (H) model for open and covered roof types. It is observed in the experimental process that the height of the neutral plane changes dynamically as the fire whirl is formed. The thermocouples were used to measure the temperature variation at different heights of openings to validate the measurement accuracy of the BOS technique. It is found that once a fire whirl occurs in the inner space of a high-rise building, the height of the neutral plane increases instantly. The experimental results demonstrate that the BOS technique can measure the neutral plane position of a large-scale model of a high-rise building fire scene directly, immediately and accurately.     

High-accuracy displacement metrology and control using a dual Fabry-Perot cavity with an optical frequency comb generator

A displacement metrology and control system using an optical frequency comb generator and a dual Fabry-Perot cavity is developed with sub-nm accuracy. The optical frequency comb generator has expanded the displacement measurement range and the dual cavity system has suppressed the environmental fluctuation. We evaluated the absolute uncertainty of the developed displacement measurement system to be approximately 190 pm for the displacement of 14 μm and the accurate displacement control using a phase-locked loop was demonstrated with a resolution of approximately 24 pm.     

Non-contact measurement technique for dimensional metrology using optical comb

This paper proposes a non-contact pulsed interferometer for dimensional metrology using the repetition frequency of an optical frequency comb. A compact absolute-length measuring system is established for practical non-contact measurement based on a single-mode fiber interferometer. The stability and accuracy of the measurements are compared with those from a commercial incremental laser interferometer. The drifts of both systems have the same tendency and a maximum difference is approximately 0.1 μm. Subsequently, preliminary absolute-length measurements up to 1.5 m were measured. The signal-to-noise ratios of the small signals are improved by a frequency-selective amplifier. It is apparent that the noise is rejected, and the intensity of the interference fringes is amplified, achieving a maximum standard deviation of measurement approximately 1 μm. The proposed technique can provide sufficient accuracy for non-contact measurement in applications such as a simple laser-pulse tracking system.     

Nano force sensing using symmetric double stage micro resonator

A new approach is proposed to improve a graphical approach with considering intensity coupling loss coefficients in the analytical derivation of the optical transfer functions for a symmetric double stage vertically coupled microring resonator. An optimum transmission coupling condition is determined with considering terms of couplers intensity loss which leads to low insertion loss of 1.2 dB, finesse of 1525, the out of band rejection ratio of 61.8 dB. The resonating system is used as an optical force sensing system to make the benefit of the accuracy of measurements in micro and nano scales. The sensitivity of proposed force sensor in terms of wavelength-shift is 33 nm/nN and the limit of detection is 1.6 × 10⁻² nN. The proposed sensing system has the advantages of self-calibration and the low power consumption due to the low intensity.     

Compact and inexpensive iodine-stabilized diode laser system with an output at 531 nm for gauge block interferometers

A compact and inexpensive iodine-stabilized diode laser system with an output at 531 nm has been applied to long gauge block measurements. Although the optical frequency of the output beam was widely modulated (modulation width of ∼22 MHz), the coherence length and interference phase stability are sufficiently long and high, respectively, for the interferometric measurement of long gauge blocks of up to 1000 mm in length. The effective uncertainty of laser frequency in the interferometric measurement was theoretically and experimentally confirmed to be less than 10⁻⁹.     

Performance evaluation of a cheap,open source,digital environmental monitor based on the Raspberry Pi

We report on the design, construction and evaluation of a low-cost digital environmental monitoring system based on a popular micro-computer board and mass market digital sensors. The system is based around the use of open source software and readily available digital sensors, providing key parameters required for environmentally-controlled calibration laboratories: air temperature, pressure and humidity. Each system logs data at set intervals with front-panel display, web page graphical display and email alerting when exceeding set tolerances. The sensors have been calibrated at the National Physical Laboratory using standards traceable to the SI. Long term stability of the system is estimated and in addition to monitoring of laboratory environments for regulatory purposes, the systems can also be used to provide on-demand values for local refractive index with an expanded (k = 2) uncertainty of 1.1 × 10⁻⁷ as required for many optical-based measuring systems.     

Verification of the positioning accuracy of industrial coordinate measuring machine using optical-comb pulsed interferometer with a rough metal ball target

An optical-comb pulsed interferometer was developed for the positioning measurements of the industrial coordinate measuring machine (CMM); a rough metal ball was used as the target of the single-mode optical fiber interferometer. The measurement system is connected through a single-mode fiber more than 100 m long. It is used to connect a laser source from the 10th floor of a building to the proposed measuring system inside a CMM room in the basement of the building. The repetition frequency of a general optical comb is transferred to 1 GHz by an optical fiber-type Fabry–Pérot etalon. Then, a compact absolute position-measuring system is realized for practical non-contact use with a high accuracy of measurement. The measurement uncertainty is approximately 0.6 μm with a confidence level of 95%.     

A motorized 5 m tape comparator for traceable measurements of tapes and rules

A motorized 5 m tape comparator was constructed in TUBITAK UME for calibration of tapes and rules up to 5 m length in one set-up and further lengths in multiple set-ups. The system is a practical development and provides a cost effective solution for calibration of tapes in which the highest grade’s accuracy requirement in OIML R35-1 e.g. is 600 μm for 5 m length and 1100 μm for 10 m length. It is mainly composed of 6 m rail system, mechanical parts, optical units and an integrated 6 m incremental linear encoder as a reference measurement axis for traceable measurements. The rails are kinematically located on a heavy marble construction and a motorized carriage, which employs a camera for probing of the scales on the tapes, is moved along the rails during the measurement. The image of the scale taken by the camera is viewed on the monitor screen together with the running software. The operator can perform the probing process by simply moving the carriage over the measured scales (tapes or rules) using a joystick. The carriage movement is measured by the incremental linear encoder previously calibrated by a laser interferometer and the software automatically takes the measurement results from the incremental linear encoder, applies correction values previously defined and determines the length of the tapes and rules as well as deviations from nominal lengths. The estimated expanded uncertainty of the steel tape measurement is U = 54 μm in one set-up (for 5 m length) and U = 77 μm in two set-ups (for 10 m length) at the confidence level of approximately 95%. Uncertainty budget for calibration of the device itself and for calibration of the test tapes are explained in detail. The results of extensive experimental work and analysis are provided by demonstrating application of science and technology of measurement and instrumentation. Investigations for long term stability of the system are given with the reported test results for the years of 2003-2011 and participated intercomparison results to validate the device scientifically are illustrated.     

A long-stroke 3D contact scanning probe for micro/nano coordinate measuring machine

This paper presents a long-stroke contact scanning probe with high precision and low stiffness for micro/nano coordinate measuring machines (micro/nano CMMs). The displacements of the probe tip in 3D are detected by two plane mirrors supported by an elastic mechanism, which is comprised of a tungsten stylus, a floating plate and two orthogonal Z-shaped leaf springs fixed to the outer case. A Michelson interferometer is used to detect the vertical displacement of the mirror mounted on the center of the floating plate. An autocollimator based two dimensional angle sensor is used to detect the tilt of the other plane mirror located at the end of the arm of the floating plate. The stiffness and the dynamic properties are investigated by simulation. The optimal structural parameters of the probe are obtained based on the force-motion model and the constrained conditions of stiffness, measurement range and horizontal size. The results of the performance tests show that the probe has a contact force gradient within 0.5 mN/μm, a measuring range of (±20 μm), (±20 μm), and 20 μm, respectively, in X, Y and Z directions, and a measurement standard deviation of 30 nm. The feasibility of the probe has preliminarily been verified by testing the curved surface of a convex lens.     

Statistical approach for optimization of influencing parameters in laser assisted machining (LAM) of Inconel alloy

Laser assisted machining (LAM) is one of the innovative methods to machine difficult to cut materials to obtain maximum benefits of machinability. In this method, the influence of both the laser and cutting parameters affects the quality of machining. Hence it is required to identify the optimal levels of the parameters in order to maximize benefits. The present study focused on optimization of laser beam approach angle, laser power and cutting parameters during LAM of Inconel 718 alloy using chemical vapour deposition (CVD) coated carbide tool. The experimental trials are planned in accordance with central composite design (CCD) in response surface methodology. The ranges for selected parameters are as follows as: cutting speed (50 < Vc < 100 m/min), feed rate (0.05 < f < 0.1 mm/rev), laser power (1.25 < P_L < 1.75 kW), and approach angle (60° < θ < 90°). Cutting force and workpiece temperature, the two responses which are measured using Kistler force dynamometer and infra-red pyrometer respectively. The effects of each parameter were analysed using 3D surface plot and analysis of variance (ANOVA). A second order regression equation has been developed and model shows good agreement with experimental and predicted results. Desirability function analysis (DFA) is used to determine the optimal operating conditions. Finally, the results were validated using confirmation experiments.     

Study on pump optimizing for Bi/Er co-doped optical fiber

Bi/Er co-doped optical fiber is one of the solutions for wave band extending technology which is very important for fiber amplifiers, lasers and communication system. Pump option can alter emission band of the Bi/Er co-doped fiber. In this paper, optimization of pump wavelength is proposed. A high Bi concentration co-doped Bi/Er optical fiber is tested as a sample to demonstrate pump wavelength influence to the emission spectrum band. An optical fiber measurement system is provided to measure out characteristics of active optical fibers. And some useful results and parameters of pump optimizing for Bi/Er co-doped optical fiber are discussed in detail. From this research, optimized pump wavelength is suggested around 1350 nm to get a wider continue spectrum covers from 1300 nm to 1600 nm.     

A Pitot tube system for obtaining water velocity profiles with millimeter resolution in devices with limited optical access

An automated, miniature, S-type Pitot tube system was created to obtain fluid velocity profiles at low flows in equipment having limited optical access, which prevents the use of standard imaging techniques. Calibration of this non-standard Pitot tube at small differential pressures with a custom, low-pressure system is also described. Application of this system to a vertical, high-pressure, water tunnel facility (HWTF) is presented. The HWTF uses static flow conditioning elements to stabilize individual gaseous, liquid, or solid particles with water for optical viewing. Stabilization of these particles in the viewing section of the HWTF requires a specific flow field, created by a combination of a radially expanding test section and a special flow conditioner located upstream of the test section. Analysis of the conditioned flow field in the viewing section of the HWTF required measurements across its diameter at three locations at 1 mm spatial resolution. The custom S-type Pitot tube system resolved pressure differences of <100 Pa created by water flowing at 5–30 cm/s while providing a relatively low response time of ~300 s despite the small diameter (<1 mm) and long length (340 mm) of the Pitot tube needed to fit the HWTF geometry. Particle imaging velocimetry measurements in the central, viewable part of the HWTF confirmed the Pitot tube measurements in this region.     

Design and experimental validation of an ultra-precision Abbe-compliant linear encoder-based position measurement system

The design and development of an Abbe-compliant linear encoder-based measurement system for position measurement with a targeted 20 nm uncertainty (k = 2) in machine tools and CMMs is presented. It consists of a linear scale and a capacitive sensor, mounted in line on an interface which is guided in the scale's measurement direction and driven by a linear motor based on the output signal of the capacitive sensor. The capacitive sensor measures the displacement of a target surface on the workpiece table. The functional point, which is the center of a tool or touch probe, is always aligned with the scale and capacitive sensor such that this configuration is compliant with the Abbe principle. Thermal stability is achieved by the application of a thermal center between the scale and capacitive sensor at the tip of the latter, which prevents both components to drift apart. Based on this concept, a prototype of a one-DOF measurement system was developed for a measurement range of 120 mm, together with an experimental setup aimed at verifying the reproducibility of the system for changing ambient conditions of ±0.5 °C and ±5%rh and the repeatability during tracking of a target surface over a short period of time. These experiments have shown that the measurement uncertainty of the one-DOF system is below 29 nm with a 95% confidence level.     

Application of blue laser direct-writing equipment for manufacturing of periodic and aperiodic nanostructure patterns

This study presents the novel development of low cost, highly efficient blue laser direct-writing equipment for using mask-less laser lithography to manufacture periodic and aperiodic nanostructure patterns. The system includes a long-stroke linear motor precision stage (X, Y), a piezoelectric nano-precision stage (Y, θz), a 3-DOF (degrees of freedom) laser interferometer measurement system, and a blue laser direct-writing optical system. The 3-DOF laser interferometer measurement system gives the control system feedback for displacement (X, Y, θz) of the equipment. The laser processing equipment consists of a blue laser direct-writing optical head, a field-programmable gate array (FPGA) alignment interface, and an optical head servo controller. The optical head operates at a wavelength of 405 nm. Processing the nanostructures on thermo-reaction inorganic resists with precise control of the laser intensity, taking advantage of the threshold effect to exceed the limitations of optical diffraction, and reduces the nanostructure hole size. The equipment can be used to fabricate various periodic nanostructure patterns, aperiodic nanostructure patterns, and two-dimensional patterns. The equipment positioning accuracy is within 50 nm at a speed of 50 mm/s, and the minimum critical dimension can be achieved about 100 nm or so.     

International comparison of volume measurement for a 1 kg silicon sphere between KRISS and NMIJ

1 kg single-crystal silicon spheres are presently used as primary density standards in many countries. The absolute density of the spheres is determined from the measurements of their mass and volume in conformity with the definitions of the SI base units. Since the mass of the spheres is almost 1 kg, a mass comparison with the prototype of the kilogram can be performed with very low uncertainty. Absolute volume measurements for the spheres therefore have a crucial role in realizing a reliable density traceability system. To confirm the reliability of the volume measurement, the volume of a silicon sphere was measured independently using optical interferometers at the Korea Research Institute of Standards and Science (KRISS, Korea) and the National Metrology Institute of Japan (NMIJ, Japan). An optical interferometer with an etalon scanning system was used at KRISS. On the other hand, an optical interferometer with an optical frequency scanning system was used at NMIJ. The volume was measured at 20 °C and 0 Pa, and the results are in agreement with each other within their uncertainties. Details of the two interferometers and the comparison results are described.     

Uncertainty analysis for a phase-detector based phase noise measurement system

Phase noise is an important parameter to characterise the frequency stability of oscillators and synthesised signal generators. Accurate measurement of phase noise is required for various applications in radar, communication and navigation systems. A single-channel phase-detector based phase noise measurement system is described. The system’s measurement errors and uncertainties have been analysed in details. The expanded uncertainty is about 2.7 dB for calibrating phase noise of a signal generator at 0.001–1.6 GHz for frequency offsets from 1 Hz to 100 kHz. The uncertainty budget for measuring a signal generator’s phase noise at 640 MHz is also presented.     

Subpixel edge location method proposed to improve the performance of optical fiber spherical coupling probe during dimensional measurement of micro-cavities with high aspect ratio

A subpixel edge location method based on orthogonal Jacobi–Fourier moments is proposed in this paper to improve the performance of optical fiber spherical coupling probe during dimensional measurement of micro-cavities with high aspect ratio. The effectiveness of the proposed method is proved through the performance test of a micro-hole measuring machine with optical spherical coupling probe. Test results indicate that a blind micro-hole of 400 μm in diameter can be experimentally measured at the depth of 2000 μm with a repeatability of 40 nm and an extremity resolution of 42 nm.     

Optical fiber distributed temperature sensor using short term Fourier transform based simplified signal processing of Raman signals

A simplified technique using short term Fourier transform to reduce the errors in distributed temperature measurement with a Raman scattering based optical fiber sensor system is presented. The two main sources of errors are differential attenuation to anti-Stokes and Stokes signal by fiber and local change in Stokes due to change in temperature. The proposed technique compensates these errors and extracts correct temperature profile in spite of practical difficulties encountered in applying the theoretical concept. Moreover proposed technique is less complex, self-reliant, can tolerate variation in laser power, requires less dead zone and suits automation using embedded solution. Results of measurement carried out, using the system developed at RRCAT, Indore, for two hot zones having spatial width of 1.9 m (kept at 56 °C) and 1.5 m (kept at 78 °C), located at 47 m and 85 m respectively, show that these parameters can be recovered with significantly small errors.