气囊抛光过程的运动精度控制

针对用于球面、非球面光学元件超精密光学加工的气囊抛光技术,提出了一套控制抛光过程中气囊运动精度的方法。该方法通过控制加工单元的温度,保证抛光过程中设备运动精度达到50μm;使用坐标传递法,使检测数据二维方向对准不确定度达到0.30~0.70mm。另外,基于磨头去除量估计与反馈修正法,提高精抛过程面形误差收敛效率。最后,通过磨头探测校准法,将磨头与加工工件法向位置精度提高至10μm。实际抛光实验显示:使用运动精度控制法在280mm口径的平面精密抛光中获得的面形加工精度为0.8nm(RMS),在160mm口径的凹球面精密抛光中获得的面形加工结果为1.1nm(RMS),实现了超高精度面形修正的目的,为超高精度球面、非球面光学元件加工提供了一套行之有效的方法。该方法同样适用于其他接触式小磨头数控抛光方法。     

数控非接触式超光滑光学元件加工机床的设计

基于数控技术,提出了一种非接触式光学元件表面超光滑液体抛光方法.通过磨头中心孔为抛光表面提供抛光液,抛光液在磨头自转的带动下与光学元件表面相互作用,实现光学元件表面材料的微量去除,利用计算机控制抛光磨头的运动轨迹完成对光学元件表面的抛光.根据上述原理,设计和研制了数控非接触表面超光滑光学元件加工机床样机,样机直线运动轴最低进给速度为0.000 1 m/s,定位精度为0.008 mm;摆动轴最低转速为0.002 8 r/min,定位精度为15″.抛光实验结果表明,经过20 min的超光滑加工,熔石英材质光学元件上两点的表面粗糙度Ra值分别由加工前的1.03 nm和0.92 nm提高到加工后的0.48 nm和0.44 nm,显著提高了加工精度.     

机器人恒压球形公自转磨头抛光技术研究

采用工业机器人进行大口径光学元件的研抛过程中,机器人自身定位误差会导致研抛压力产生波动,进而影响去除函数稳定性,为此提出了一种机器人恒压球形公自转磨头抛光方法,并对其结构、工作原理、机器人定位特性以及研抛压力输出特性开展了研究。首先,基于Preston理论构建了材料去除模型,对去除函数形状进行了分析,对所设计抛光磨头的机械结构与工作原理进行了介绍。然后,对机器人定位误差以及磨头输出力响应性与稳定性进行了测量,验证了所提方法能够较好地适应机器人研抛压力波动而做出的力响应控制。最后,进行了定点抛光以及粗、精磨抛加工实验。实验结果表明：利用所提方法去除函数的稳定性强,通过10个周期的粗、精抛加工,面形收敛率分别为9095%、7261%,可获得较高的加工精度与面形质量。     

回转对称非球面气囊抛光控制算法研究

介绍一种新型的非球面光学零件抛光方法———气囊抛光,这种方法可以得到高质量的光学表面。针对气囊抛光加工回转对称非球面的特点,进行抛光路径规划,对去除函数进行降维处理,提出抛光驻留时间的计算方法。最后,给出抛光算法的实现框图,并按照实现框图指导实际的玻璃非球面加工,取得满意结果,验证了算法的有效性。     

模具气囊抛光工艺规划方法

针对目前模具抛光工艺规划方法研究的不足,提出一种模具气囊抛光总体工艺规划方法.基于抛光实验,研究了不同磨粒粒度水平下工件表面粗糙度的变化规律及可达的最小粗糙度值,提出一种基于不同抛光阶段中磨粒粒度选取的模具气囊抛光工序规划方法,该方法有助于实现抛光工序的智能规划.最后基于此方法进行了抛光实验,抛光效果较好.     

气囊抛光去除函数的数值仿真与试验研究

为提高光学元件的面形精度,提高加工效率,对超精密气囊抛光方法的去除函数进行了理论和试验研究.通过分析气囊抛光的原理,以Preston方程为基础,应用运动学原理推导了气囊抛光"进动"运动的材料去除函数,利用计算机仿真的方法,得到近似高斯分布的去除函数,通过仿真分析几个主要参数对"进动"抛光运动去除特性的影响,总结得到三点气囊抛光工艺过程中重要的结论.通过在一台超精密气囊式智能抛光机上的试验对比,两者吻合很好,并得到面形精度 RMS=0.012 6 μm的超精密的光滑表面,为开展气囊抛光的工艺研究提供了理论依据.     

自由曲面光学元件气囊抛光进动运动控制技术

针对自由曲面光学元件的加工特点,研究气囊抛光自由曲面光学元件进动运动控制技术,用于求出气囊工具进动过程中两虚拟轴的转角,实现对气囊自转轴空间位置的控制.以气囊自转轴为研究对象,由于自由曲面光学元件上每个点的法线三维坐标都不相同且气囊进动抛光过程中气囊自转轴与工件加工点局部法线夹角不变,提出建立基坐标系和抛光点对应三维空间坐标系的方法,得到抛光过程中气囊自转轴的空间位置变化情况,而后利用旋转坐标变换得到气囊抛光进动运动控制模型;在所建立的自由曲面光学元件气囊抛光进动运动控制模型中加入控制算法,求出抛光自由曲面光学元件各点时气囊工具两个虚拟旋转轴的转角.利用Matlab对自由曲面光学元件不同方向截面进行仿真抛光试验,得到自由曲面各方向上气囊抛光进动运动曲线以及仿真进动角曲线,结果证明了自由曲面光学元件气囊抛光进动运动控制模型及控制算法的正确性.     

光学非球面零件机器人抛光工具的研究

以高硼玻璃零件为研究对象,自主研制设计了一种光学抛光加工的工具,可抛光非球面凹面光学零件;分析了机器人抛光工具的构成以及进动运动方式和抛光加工的原理。根据实际生产情况,抛光工具结合机器人对非球面零件凹面进行抛光加工,得到了较好的实验结果。表明这套抛光工具是一种实用的、经济的,可以用于光学非球面的高精度抛光,为应用机器人做光学非球面零件柔性抛光提供了一种有效的途径。     

机器人光学自由曲面气囊抛光工具的位姿研究

为了更好实现光学自由曲面的有效加工,根据计算机控制光学表面成型技术原理,将工业机器人与气囊抛光技术相结合,提出一种光学自由曲面加工的新方法。本文首先建立了机器人抛光系统,分析了气囊抛光工具与工件表面的抛光位姿关系,然后根据气囊抛光工具与工件表面的数学关系,提出一种气囊抛光工具的位姿求取算法。在此基础上,以六轴工业机器人为实验平台,对确定的自由曲面进行计算验证,规划出抛光路径,推导了气囊抛光工具姿态控制算法。结果表明,该位姿求取算法满足机器人气囊抛光技术的要求,能够实现理想的抛光工具姿态控制。     

用于模具自由曲面的新型气囊抛光中磨粒场的分析

为提高模具自由曲面抛光的效率和品质,提出一种基于柔性抛光理念的新型气囊抛光技术。研究了气囊抛光接触区内磨粒的运动轨迹、压力分布和抛光力的分布情况,建立了气囊抛光接触区内磨粒的运动模型、压力模型,揭示了气囊抛光接触区内磨粒直径对抛光力和被加工工件内部剪切应力的影响规律,研究了抛光过程中工件内部的剪切应力分布,明确了材料疲劳去除机理。为气囊抛光的应用奠定了理论基础。     

大口径光学元件超精密加工技术与应用

大口径光学元件超精密加工技术是多种学科新技术成果的综合应用,促进了民用和国防等尖端技术领域的发展,在国家大光学工程的推动下,我国的超精密加工技术取得显著的成果。围绕大口径光学元件“高精度磨削＋确定性抛光”超精密加工体系,介绍该领域研究进展及厦门大学微纳米加工与检测联合实验室取得的相关研究成果,主要针对光学元件磨削和抛光两个加工流程,详细分析磨削装备技术、磨削工艺技术、精密检测技术、可控气囊抛光技术、加工环境监控技术和中频误差评价技术等关键技术的研究应用情况。这些技术研究从超精密加工的需求出发,借鉴国内外的研究经验和成果,通过对装备、工艺、检测等各方面整合,形成具有自主知识产权的大口径光学元件磨抛超精密加工体系,从而实现大口径光学元件高精度、低缺陷加工。     

环缝磨的研磨动力学分析

用粘性流体动力学的知识分析了环缝磨研磨区内介质球的运动规律；根据运动方程对环缝磨的研磨机理进行了研究，求出了研磨介质球的速度公式；对研磨过程中介质球和物料颗粒之间的能量传递进行了计算；根据计算结果对环缝磨的改造和研究提出了建设性的意见。     

EFFECTS OF POLISHING PARAMETERS ON MATERIAL REMOVAL FOR CURVED OPTICAL GLASSES IN BONNET POLISHING

The paper firstly analyzes the influence factor on material removal rate of curved optical work-pieces in the bonnet polishing. Then the experiments are conducted to reveal the effects of several polishing parameters on the material removal rate when the spherical optical glasses are polished with different curvature radius, such as the decrement of the bonnet, the rotational speed of the bonnet and the curvature radius of the work-piece＇s surface using a bonnet trial-manufacturing machine developed by our assignment groups. In the end, the curvilinear relationships between these parameters and the material removal rate are acquired and the laws of the effects on material removal rate in bonnet polishing by several parameters are given. When the spherical-pieces are polished with smaller curvature radius, it is not proportional to either bonnet decrement or bonnet rotational speed as described by the Preston equation although the removal rate increases as the relative velocity or the applied pressure increases. Therefore, for the purpose of calculating more accurately the material removal of the spherical work-pieces, the Preston equation should be modified and studied further.     

Material removal model considering influence of curvature radius in bonnet polishing convex surface

The bonnet tool polishing is a novel, advanced and ultra-precise polishing process, by which the freeform surface can be polished. However, during the past few years, not only the key technology of calculating the dwell time and controlling the surface form in the bonnet polishing has been little reported so far, but also little attention has been paid to research the material removal function of the convex surface based on the geometry model considering the influence of the curvature radius. Firstly in this paper, for realizing the control of the freeform surface automatically by the bonnet polishing, on the basis of the simplified geometric model of convex surface, the calculation expression of the polishing contact spot on the convex surface considering the influence of the curvature radius is deduced, and the calculation model of the pressure distribution considering the influence of the curvature radius on the convex surface is derived by the coordinate transformation. Then the velocity distribution model is built in the bonnet polishing the convex surface. On the basis of the above research and the semi-experimental modified Preston equation obtained from the combination method of experimental and theoretical derivation, the material removal model of the convex surface considering the influence of the curvature radius in the bonnet polishing is established. Finally, the validity of the model through the simulation method has been validated. This research presents an effective prediction model and the calculation method of material removal for convex surface in bonnet polishing and prepares for the bonnet polishing the free surface numerically and automatically.     

抛光机磨头磨削方式对磨削效果影响的试验研究

为了研究不同磨头的磨削效果,建立了垂直轴磨头磨削过程模型,并通过试验验证了其正确性。综合理论分析和试验研究结果可知：垂直轴磨头磨削瓷砖时,磨削后的瓷砖表面不平整。提出了倾斜轴磨头磨削瓷砖的加工方式,通过一系列试验得出倾斜轴磨头定深磨削可以有效提高瓷砖的平整度的结论。     

气囊式抛光机数控系统的研究与开发

气囊式抛光是一种新颖的非球面抛光工艺,是一种富于竞争性的制造技术。通过对气囊抛光进动原理和抛光试验机床结构的分析,并根据气囊抛光的工作机理和控制参数,提出采用以PC嵌入CNC控制卡方式的气囊抛光数控体系结构。其硬件系统以PC与PMAC控制器为核心,能够控制6个运动轴,数控系统的软件系统建立在Windows通用操作系统平台上,具有很强的开放性、可操作性以及功能扩展性。数控系统已应用在气囊抛光试验样机上。     

Experimental investigation and analytical modelling of the effects of process parameters on material removal rate for bonnet polishing of cobalt chrome alloy

Cobalt chrome alloys are the most extensively used material in the field of total hip and total knee implants, both of which need highly accurate form and low surface roughness for longevity in vivo. In order to achieve the desired form, it is extremely important to understand how process parameters of the final finishing process affect the material removal rate. This paper reports a modified Preston equation model combining process parameters to allow prediction of the material removal rate during bonnet polishing of a medical grade cobalt chrome alloy. The model created is based on experiments which were carried out on a bonnet polishing machine to investigate the effects of process parameters, including precess angle, head speed, tool offset and tool pressure, on material removal rate. The characteristic of material removal is termed influence function and assessed in terms of width, maximal depth and material removal rate. Experimental results show that the width of the influence function increases significantly with the increase of the precess angle and the tool offset; the depth of the influence function increases with the increase of the head speed, increases first and then decrease with the increase of the tool offset; the material removal rate increases with the increase of the precess angle non-linearly, with the increase of the head speed linearly, and increases first then decreases with the increase of the tool offset because of the bonnet distortion; the tool pressure has a slight effect on the influence function. The proposed model has been verified experimentally by using different Preston coefficients from literature. The close values of the experimental data and predicted data indicate that the model is viable when applied to the prediction of the material removal rate in bonnet polishing.